Patent US5106771A successfully refreshed from Google Patents.
US5106771A
Expired / Lapsed
US
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GaAs MESFETs with enhanced Schottky barrier
Assignee: Nokia Bell Labs
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Filing: 1991-06-05
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Granted: 1992-04-21
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Expires: 2011-06-05
Abstract
Abstract This invention is concerned with the production of Schottky barrier gate contacts in MESFET devices. The contact is produced by wet-chemical removal of native oxide in a sealed inert gas ambient and blow-drying the wet-etched surface with the inert gas prior to deposition of gate electrode metal on GaAs by electron beam evaporation in an inert gas ambient. Use of Pt, due to its higher metal work function, as the gate contact metal results in a Schottky barrier height of 0.98 eV for Pt on n-type GaAs. This is considerably higher than the barrier height of conventionally processed TiPtAu contacts (0.78 eV). To lower the sheet resistivity of the gate contact, Pt is preferably used as a milti-layer contact in combination with metal having lower sheet resistivity, with Pt being in direct contact with the n-type GaAs surface, MESFETs fabricated using PtAu bilayer contacts show reverse currents an order of magnitude lower than TiPtAu-contacted companion devices, higher reverse breakdown voltages and much lower gate leakage. The use of this technology of native oxide removal and the PtAu bilayer contact provides a much simpler method of enhancing the barrier height on n-type GaAs than other techniques such as counter-doping the near-surface or inserting an interfacial layer.
Inventors
- 👤 Adrian B. Emerson
- 👤 Fan Ren
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 07:01
CPC Classifications
H; H10; H10P; H10P70/00; H10P70/10; H10P70/15; H10D; H10D30/00; H10D30/01; H10D30/061; H10D30/0612; H10D64/00; H10D64/01; H10D64/012; H10D64/0124; Y; Y10; Y10S; Y10S438/00; Y10S438/906; Y10S438/909
Claims Analysis
Total Claims: 16
Claim 1
Independent Claim
170 words
The method of fabricating a GaAs MESFET device comprising a semiconductor substrate, a n-type GaAs channel layer, an n + -type GaAs contact layer, a drain and a source ohmic contacts on a surface of the n + GaAs layer, and a gate contact on a surface of the n-type GaAs channel layer forming a Schottky barrier contact with the n-type GaAs layer, which comprises forming said gate contact by evaporation of a metal multilayer structure comprising a Pt layer on a gate region of the n-type GaAs layer in an inert gas-sealed ambient in which said inert gas is chosen from the group consisting of argon, helium, nitrogen and carbon dioxide, wherein said Pt layer is in direct contact with the surface of the n-type GaAs, and wherein prior to the evaporation of the gate contact, a partially fabricated device is placed into the inert gas-sealed ambient, the n-type GaAs surface of the gate region is wet etched, and the wet etched surface is blow-dried with the inert gas.
Claim 2
Independent Claim
170 words
The method of fabricating a GaAs MESFET device comprising a semiconductor substrate, a n-type GaAs channel layer, an n + -type GaAs contact layer, a drain and a source ohmic contacts on a surface of the n + GaAs layer, and a gate contact on a surface of the n-type GaAs channel layer forming a Schottky barrier contact with the n-type GaAs layer, which comprises forming said gate contact by evaporation of a metal multilayer structure comprising a Pt layer on a gate region of the n-type GaAs layer in an inert gas-sealed ambient in which said inert gas is chosen from the group consisting of argon, helium, nitrogen and carbon dioxide, wherein said Pt layer is in direct contact with the surface of the n-type GaAs, and wherein prior to the evaporation of the gate contact, a partially fabricated device is placed into the inert gas-sealed ambient, the n-type GaAs surface of the gate region is wet etched, and the wet etched surface is blow-dried with the inert gas.
Claim 3
Dependent Claim
12 words
The method of claim 1 in which said inert gas is nitrogen.
Claim 4
Dependent Claim
34 words
The method of claim 1, in which said multilayer structure includes at least one further layer of another metal overlaying the Pt layer, said another metal having lower sheet resistivity than the Pt layer.
Claim 5
Dependent Claim
21 words
The method of claim 3, in which sand another metal is selected from the group consisting of gold, aluminum and titanium.
Claim 6
Dependent Claim
28 words
The method of claim 4, in which Pt layer is from 200 to 2000 Å thick and said another layer is from 1000 to 5000 Å in thickness.
Claim 7
Dependent Claim
15 words
The method of claim 3, in which said multilayer structure is a bilevel PtAu contact.
Claim 8
Dependent Claim
21 words
The method of claim 6, in which the Pt layer is 800 Å thick and Au layer is 3000 Å thick.
Claim 9
Independent Claim
131 words
The method of fabricating a Schottky barrier contact on a surface of an n-type GaAs layer, which comprises forming said contact by evaporation of a metal multilayer structure comprising a Pt layer on a surface of a region of the n-type GaAs layer in an inert gas sealed environment in which said inert gas is chosen from the group consisting of argon, helium, nitrogen and carbon dioxide, wherein said Pt layer is deposited in direct contact with the surface of the n-type GaAs layer, and wherein, prior to the evaporation of the multilayer structure on the said surface, the n-type GaAs layer is placed into the inert gas-sealed ambient, the n-type GaAs surface of the gate region is wet etched, and the wet etched surface is blow-dried with the inert gas.
Claim 10
Independent Claim
131 words
The method of fabricating a Schottky barrier contact on a surface of an n-type GaAs layer, which comprises forming said contact by evaporation of a metal multilayer structure comprising a Pt layer on a surface of a region of the n-type GaAs layer in an inert gas sealed environment in which said inert gas is chosen from the group consisting of argon, helium, nitrogen and carbon dioxide, wherein said Pt layer is deposited in direct contact with the surface of the n-type GaAs layer, and wherein, prior to the evaporation of the multilayer structure on the said surface, the n-type GaAs layer is placed into the inert gas-sealed ambient, the n-type GaAs surface of the gate region is wet etched, and the wet etched surface is blow-dried with the inert gas.
Claim 11
Dependent Claim
11 words
The method of claim 8 which said inert gas is nitrogen.
Claim 12
Dependent Claim
34 words
The method of claim 8, in which said multilayer structure includes at least one further layer of another metal overlying the Pt layer, said another metal having lower sheet resistivity than the Pt layer.
Claim 13
Dependent Claim
21 words
The method of claim 10, in which said another metal is selected from the group consisting of gold, aluminum and titanium.
Claim 14
Dependent Claim
29 words
The method of claim 11, in which Pt layer is from 200 to 20000 Å thick and said another metal layer is from 1000 to 5000 Å in thickness.
Claim 15
Dependent Claim
15 words
The method of claim 10, in which said multilayer structure is a bilevel PtAu contact.
Claim 16
Dependent Claim
20 words
The method of claim 13, in which Pt layer is 800 Å thick and Au layer is 3000 Å thick.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1995-04-21 | 1995-10-21 | 1996-04-21 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1999-04-21 | 1999-10-21 | 2000-04-21 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2003-04-21 | 2003-10-21 | 2004-04-21 | $7700.00 | Window Closed / Lapsed |