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US5013675A
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Method of forming and removing polysilicon lightly doped drain spacers
Assignee: Cypress Semiconductor Corp
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Filing: 1989-05-23
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Granted: 1991-05-07
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Expires: 2009-05-23
Abstract
Abstract A method of forming and removing spacers used to mask lightly doped drain (LDD) regions in the formation of a field effect transistor (FET) involves depositing a thin oxide layer over the active region of a substrate and a gate structure formed on the active region. A polysilicon film is provided over the oxide and then doped using a POCl 3 dopant. The polysilicon layer is then etched to form spacers at the ends of the gate and the spacers are used to mask lightly doped drain regions in the substrate during the implantation of source and drain regions. After the implant to form the source and drain regions, the device is subjected to a rapid thermal annealing for approximately 20-60 seconds at approximately 900° C. in an inert atmosphere to cure any damage to the oxide layer which occurs during the source/drain implant. Curing the oxide layer reduces the etch rate of the oxide layer for an etchant which is designed to selectively etch the polysilicon spacers faster than it etches the oxide layer. The POCl 3 doping of the polysilicon layer increases the etch rate of the polysilicon, thus enhancing the selectivity of the etching of the polysilicon versus the oxide layer.
Inventors
- 👤 Lewis Shen
- 👤 Zahra Hadjizadeh-Amini
- 👤 Hsingya A. Wang
- 👤 James J. Hsu
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 18:48
CPC Classifications
H; H10; H10D; H10D30/00; H10D30/01; H10D30/021; H10D30/0223; H10D30/0227; H10D30/60; H10D30/601
Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
163 words
A method of fabricating a semiconductor device having lightly doped drain regions by providing a gate on a portion of a substrate having an N-type background doping, implanting lightly doped regions using the gate as a mask, providing an oxide layer overlying the gate and the substrate, providing a polysilicon layer overlying the oxide layer, etching the polysilicon layer to form spacers at the ends of the gate, implanting P-type dopant ions through the oxide layer using the spacers to mask portions of the lightly doped regions to form source and drain regions, removing the spacers by etching, and activating the source and drain implant, characterized in that the method includes the steps of: (a) doping the polysilicon layer with an N-type dopant prior to etching the polysilicon layer to form the spacers; and (b) treating the device by rapid thermal annealing to cure defects in the oxide layer after the source and drain regions are implanted, and before the spacers are removed.
Claim 2
Independent Claim
163 words
A method of fabricating a semiconductor device having lightly doped drain regions by providing a gate on a portion of a substrate having an N-type background doping, implanting lightly doped regions using the gate as a mask, providing an oxide layer overlying the gate and the substrate, providing a polysilicon layer overlying the oxide layer, etching the polysilicon layer to form spacers at the ends of the gate, implanting P-type dopant ions through the oxide layer using the spacers to mask portions of the lightly doped regions to form source and drain regions, removing the spacers by etching, and activating the source and drain implant, characterized in that the method includes the steps of: (a) doping the polysilicon layer with an N-type dopant prior to etching the polysilicon layer to form the spacers; and (b) treating the device by rapid thermal annealing to cure defects in the oxide layer after the source and drain regions are implanted, and before the spacers are removed.
Claim 3
Dependent Claim
21 words
A method according to claim 1, further characterized in that step (a) comprises doping the polysilicon layer using POCl 3 gas.
Claim 4
Dependent Claim
29 words
A method according to claim 1, further characterized in that step (b) comprises annealing for approximately 10-100 seconds at a temperature of approximately 600-1200° C. in an inert atmosphere.
Claim 5
Independent Claim
159 words
A method of forming a semiconductor device having lightly doped drain regions, comprising the steps of: (a) providing a substrate having an N-type background doping and an active region; (b) providing a gate on a portion of the active region; (c) providing a layer of silicon oxide over the active region and the gate; (d) providing a polysilicon layer having an N-type doping over the silicon oxide layer; (e) etching the polysilicon layer to form spacers utilizing an etchant which etches polysilicon faster than silicon oxide, after said step (d); (f) introducing P-type dopant ions into the substrate through the oxide layer to form source and drain regions; (g) rapid thermally annealing the device after said step (f) to cure defects in the oxide layer; (h) removing the spacers with an etchant which etches polysilicon faster than silicon oxide, after said step (g); and (i) annealing the device to activate the P-type dopant ions implanted in said step (f).
Claim 6
Independent Claim
159 words
A method of forming a semiconductor device having lightly doped drain regions, comprising the steps of: (a) providing a substrate having an N-type background doping and an active region; (b) providing a gate on a portion of the active region; (c) providing a layer of silicon oxide over the active region and the gate; (d) providing a polysilicon layer having an N-type doping over the silicon oxide layer; (e) etching the polysilicon layer to form spacers utilizing an etchant which etches polysilicon faster than silicon oxide, after said step (d); (f) introducing P-type dopant ions into the substrate through the oxide layer to form source and drain regions; (g) rapid thermally annealing the device after said step (f) to cure defects in the oxide layer; (h) removing the spacers with an etchant which etches polysilicon faster than silicon oxide, after said step (g); and (i) annealing the device to activate the P-type dopant ions implanted in said step (f).
Claim 7
Independent Claim
186 words
A method of forming a semiconductor device having lightly doped drain regions, comprising the steps of: (a) providing a substrate having an N-type background doping and an active region; (b) providing a gate on a portion of the active region; (c) providing a layer of silicon oxide over the active region and the gate; (d) providing a polysilicon layer over the silicon oxide layer; (e) doping the polysilicon layer with N-type dopant ions to increase the etch rate of the polysilicon layer for an etchant which etches polysilicon faster than silicon oxide; (f) etching the polysilicon layer to form spacers utilizing an etchant which etches polysilicon faster than silicon oxide; (g) implanting P-type dopant ions through the oxide layer to form source and drain regions; (h) rapid thermally annealing the device after said step (g) to cure defects in the oxide layer without activating the P-type dopants implanted in said step (g); (i) removing the spacers with an etchant which etches polysilicon faster than silicon oxide, after said step (h); and (j) annealing the device to activate the P-type dopant ions implanted in said step (g).
Claim 8
Independent Claim
186 words
A method of forming a semiconductor device having lightly doped drain regions, comprising the steps of: (a) providing a substrate having an N-type background doping and an active region; (b) providing a gate on a portion of the active region; (c) providing a layer of silicon oxide over the active region and the gate; (d) providing a polysilicon layer over the silicon oxide layer; (e) doping the polysilicon layer with N-type dopant ions to increase the etch rate of the polysilicon layer for an etchant which etches polysilicon faster than silicon oxide; (f) etching the polysilicon layer to form spacers utilizing an etchant which etches polysilicon faster than silicon oxide; (g) implanting P-type dopant ions through the oxide layer to form source and drain regions; (h) rapid thermally annealing the device after said step (g) to cure defects in the oxide layer without activating the P-type dopants implanted in said step (g); (i) removing the spacers with an etchant which etches polysilicon faster than silicon oxide, after said step (h); and (j) annealing the device to activate the P-type dopant ions implanted in said step (g).
Claim 9
Dependent Claim
19 words
A method according to claim 5, wherein said step (e) comprises doping the polysilicon layer using POCl 3 gas.
Claim 10
Dependent Claim
27 words
A method according to claim 5, wherein said step (h) comprises annealing for approximately 10-100 seconds at a temperature of approximately 600-1200° C. in an inert atmosphere.
Claim 11
Independent Claim
211 words
A method of fabricating a field effect transistor (FET) having lightly doped drain regions, comprising the sequential steps of: (a) providing a substrate having an N-type background doping and an active region defined by field oxide regions; (b) providing a gate on a first portion of the active region; (c) implanting P-type lightly doped regions in the active region using the gate as a mask; (d) providing a silicon oxide layer overlying the active region and the gate; (e) providing a polysilicon layer over the oxide layer; (f) doping the polysilicon layer using POCl 3 gas to increase the etch rate of the polysilicon for an etchant which etches the polysilicon faster than silicon oxide; (g) etching the polysilicon layer to form spacers at the edges of the gate using an etchant which etches polysilicon faster than silicon oxide; (h) implanting P-type dopants in respective ones of the lightly doped drain regions through the oxide layer using the spacers as masks to form source and drain regions, thereby forming a Boron skin on the polysilicon spacers; (i) rapid thermally annealing the FET is a non-oxidizing atmosphere to reduce the etch rate of the oxide layer; and (j) removing the spacers using an etchant comprising nitric acid, hydrofluoric acid, acetic and iodines.
Claim 12
Independent Claim
211 words
A method of fabricating a field effect transistor (FET) having lightly doped drain regions, comprising the sequential steps of: (a) providing a substrate having an N-type background doping and an active region defined by field oxide regions; (b) providing a gate on a first portion of the active region; (c) implanting P-type lightly doped regions in the active region using the gate as a mask; (d) providing a silicon oxide layer overlying the active region and the gate; (e) providing a polysilicon layer over the oxide layer; (f) doping the polysilicon layer using POCl 3 gas to increase the etch rate of the polysilicon for an etchant which etches the polysilicon faster than silicon oxide; (g) etching the polysilicon layer to form spacers at the edges of the gate using an etchant which etches polysilicon faster than silicon oxide; (h) implanting P-type dopants in respective ones of the lightly doped drain regions through the oxide layer using the spacers as masks to form source and drain regions, thereby forming a Boron skin on the polysilicon spacers; (i) rapid thermally annealing the FET is a non-oxidizing atmosphere to reduce the etch rate of the oxide layer; and (j) removing the spacers using an etchant comprising nitric acid, hydrofluoric acid, acetic and iodines.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1994-05-06 | 1994-11-05 | 1995-05-07 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1998-05-06 | 1998-11-05 | 1999-05-07 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2002-05-06 | 2002-11-05 | 2003-05-07 | $7700.00 | Window Closed / Lapsed |