US5008213A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Hybrid wafer scale microcircuit integration
Assignee: United States Department of the Air Force
•
Filing: 1990-04-13
•
Granted: 1991-04-16
•
Expires: 2010-04-13
Abstract
Abstract A wafer scale integration arrangement wherein integrated circuit die of varying size, fabrication processes, and function are commonly mounted in the same host wafer using a filled epoxy material of special characteristics. The mounting epoxy material also serves as a substrate for the die interconnecting conductors in regions adjacent the mounted die. The described assembly also includes a newly available photosensitive polyimide material as a planarization and passivation covering for the die and hose wafer and as a mounting surface for an interconnecting metal conductor array. Multiple levels of interconnection metal. Fabrication processes for the die to host wafer attachment and the passivation covering of the assembly are disclosed.
Inventors
- 👤 Edward S. Kolesar, Jr.
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 10:03
CPC Classifications
H; H10; H10W; H10W72/00; H10W72/30; H10W70/00; H10W70/01; H10W70/05; H10W70/08; H10W70/09; H10W70/60; H10W70/67; H10W70/68; H10W70/69; H10W70/698; H10W74/00; H10W74/40; H10W74/47; H10W70/099; H10W70/681; H10W70/682; H10W72/071; H10W72/073; H10W72/07331; H10W72/07337; H10W72/351; H10W72/353; H10W72/354; H10W72/851; H10W72/874; H10W90/00; H10W90/10
Claims Analysis
Total Claims: 23
Claim 1
Independent Claim
210 words
The method of fabricating a wafer scale integration multiple die integrated circuit comprising the steps of: etching die receptacle wells into the planar top surface of a polished oxide coated semiconductor wafer, said receptacle wells each having a bottom area, sloping sidewall surfaces and rim portions; depositing uncured liquid adhesive material in the bottom area of each said receptacle well; inserting integrated circuit die having top, sidewall, and backside surfaces into said receptacle wells and said uncured adhesive resident therein to form a wafer and die assembly: rotating said wafer and inserted die assembly into an inverted, top surface down, position wherein said liquid adhesive material is resident around said sidewall and backside surfaces of each said die; aligning the inverted top surfaces of said die and wafer into a planar condition wherein the inverted die top surface and wafer top surface rest against a flat planar tooling member; and applying adhesive flow promoting and cure promoting elevated temperature to the inverted wafer and die assembly to encourage adhesive flow downward into the space between die sidewall and receptacle well sidewall surfaces, and the curing of said adhesive into a solidified mass conforming with the die and receptacle well surfaces and with the surface of said flat planar tooling member.
Claim 2
Independent Claim
210 words
The method of fabricating a wafer scale integration multiple die integrated circuit comprising the steps of: etching die receptacle wells into the planar top surface of a polished oxide coated semiconductor wafer, said receptacle wells each having a bottom area, sloping sidewall surfaces and rim portions; depositing uncured liquid adhesive material in the bottom area of each said receptacle well; inserting integrated circuit die having top, sidewall, and backside surfaces into said receptacle wells and said uncured adhesive resident therein to form a wafer and die assembly: rotating said wafer and inserted die assembly into an inverted, top surface down, position wherein said liquid adhesive material is resident around said sidewall and backside surfaces of each said die; aligning the inverted top surfaces of said die and wafer into a planar condition wherein the inverted die top surface and wafer top surface rest against a flat planar tooling member; and applying adhesive flow promoting and cure promoting elevated temperature to the inverted wafer and die assembly to encourage adhesive flow downward into the space between die sidewall and receptacle well sidewall surfaces, and the curing of said adhesive into a solidified mass conforming with the die and receptacle well surfaces and with the surface of said flat planar tooling member.
Claim 3
Dependent Claim
95 words
The method of claim 1 further including the steps of: covering the planar surface of the wafer and die assembly with conformal dielectric photosensitive polyimide thin film coating; forming a plurality of via apertures through predetermined die electrical bonding pad location areas of said polyimide thin film coating; depositing a film of conductive metal over the via apertured surface of said thin film coating, said conductive metal passing through said via apertures to the die electrical bonding pads therebelow; etching said conductive metal film into an array of predetermined connected and isolated electrical network conductors.
Claim 4
Dependent Claim
44 words
The method of claim 1 wherein said integrated circuit die comprise die of varying physical thickness and surface area and wherein the quantity of said uncured liquid adhesive material and the size of said receptacle wells are selected in response to said die variations.
Claim 5
Dependent Claim
22 words
The method of claim 1 wherein said wafer and said integrated circuit die are comprised of silicon as a major constituent element.
Claim 6
Dependent Claim
22 words
The method of claim 1 wherein said receptacle wells include a canal connecting the well bottom area with the wafer bottom surface.
Claim 7
Dependent Claim
32 words
The method of claim 1 wherein said liquid adhesive is an epoxy resin adhesive which includes a dielectric filler and said filled adhesive has thermal expansion properties substantially the same as silicon.
Claim 8
Dependent Claim
14 words
The method of claim 6 wherein said liquid adhesive dielectric filler is lithium beta-eucryptite.
Claim 9
Dependent Claim
17 words
The method of claim 2 wherein said dielectric photosensitive polyimide thin film coating includes negative photoresist characteristics.
Claim 10
Dependent Claim
25 words
The method of claim 2 further including the step of coating said die planar surface with an adhesion promoting agent prior to said covering step.
Claim 11
Dependent Claim
25 words
The method of claim 1 wherein said aligning step includes leveling the die of said die and wafer assembly against an adhesion resistant tooling surface.
Claim 12
Dependent Claim
15 words
The method of claim 10 wherein said adhesion resistant tooling surface is comprised of Polyletrafluoroethylene.
Claim 13
Dependent Claim
59 words
The method of claim 2 wherein said applying elevated temperature step includes a two hour linear ramp from room to seventy degrees centigrade, a two-hour increase from seventy to two hundred fifty degrees centigrade, a six hour cure at two hundred fifty degrees centigrade, and a three hour linear ramp from two hundred fifty degrees centigrade to room temperature.
Claim 14
Dependent Claim
27 words
The method of claim 1 wherein said etching step includes etching with an anisotropic chemical etchant having a preferred Miller index direction of etching in said wafer.
Claim 15
Dependent Claim
17 words
The method of claim 13 wherein said etchant has a preference for the (100) planar Miller index.
Claim 16
Dependent Claim
39 words
The method of claim 2 wherein said covering step includes applying said polyimide material in liquid form to a spinning wafer and die assembly until a subsequently hardened thin film of between five and eighty microns thickness is obtained.
Claim 17
Independent Claim
181 words
The method of disposing a receptacle well in a planar silicon single crystal semiconductor wafer of predetermined Miller index orientation comprising the steps of: growing on the polished top surface of said wafer a thick silicon dioxide masking layer of at least two micron thickness: disposing a layer of receptacle well location patterned etch resistant and etch susceptible resist material on the top surface of said wafer using film spinning, photolithographic and baking steps; etching through said silicon dioxide masking layer in said resist material etch susceptible receptacle well pattern locations, said etching exposing receptacle well location portions of said wafer top surface; removing by anisotropic etching the top surface and predetermined top surface underlying portions of said exposed receptacle well location wafer material, the receptacle well cavity located boundary between removed and unremoved wafer material including side wall regions of predetermined angular disposition with respect to said wafer top surface; eroding, by isotropic etching from the bottom surface of said wafer, vertically extending canals connecting said wafer bottom surface with the bottom region of each of said receptacle well cavities.
Claim 18
Independent Claim
181 words
The method of disposing a receptacle well in a planar silicon single crystal semiconductor wafer of predetermined Miller index orientation comprising the steps of: growing on the polished top surface of said wafer a thick silicon dioxide masking layer of at least two micron thickness: disposing a layer of receptacle well location patterned etch resistant and etch susceptible resist material on the top surface of said wafer using film spinning, photolithographic and baking steps; etching through said silicon dioxide masking layer in said resist material etch susceptible receptacle well pattern locations, said etching exposing receptacle well location portions of said wafer top surface; removing by anisotropic etching the top surface and predetermined top surface underlying portions of said exposed receptacle well location wafer material, the receptacle well cavity located boundary between removed and unremoved wafer material including side wall regions of predetermined angular disposition with respect to said wafer top surface; eroding, by isotropic etching from the bottom surface of said wafer, vertically extending canals connecting said wafer bottom surface with the bottom region of each of said receptacle well cavities.
Claim 19
Dependent Claim
26 words
The method of claim 1 wherein said applying elevated temperature step includes a plurality of different temperatures between room temperature and two hundred fifty degrees Celsius.
Claim 20
Independent Claim
114 words
The method for fabricating a wafer scale integration electrical circuit assembly comprising the steps of: depositing uncured liquid epoxy resin adhesive into the lowermost region of a host semiconductor wafer received and upward facing receptacle well and contiguously disposed receptacle well to wafer backside connecting canal; floating an electrically functional integrated circuit die on the surface of said uncured liquid epoxy resin adhesive; leveling the top surface of said circuit die with the top surface of said host wafer by displacing liquid adhesive around the periphery of said die and into the space between die peripheral surfaces and receptacle well walls; and curing said liquid adhesive while maintaining the leveled and displaced condition thereof.
Claim 21
Independent Claim
114 words
The method for fabricating a wafer scale integration electrical circuit assembly comprising the steps of: depositing uncured liquid epoxy resin adhesive into the lowermost region of a host semiconductor wafer received and upward facing receptacle well and contiguously disposed receptacle well to wafer backside connecting canal; floating an electrically functional integrated circuit die on the surface of said uncured liquid epoxy resin adhesive; leveling the top surface of said circuit die with the top surface of said host wafer by displacing liquid adhesive around the periphery of said die and into the space between die peripheral surfaces and receptacle well walls; and curing said liquid adhesive while maintaining the leveled and displaced condition thereof.
Claim 22
Dependent Claim
22 words
The method of claim 18 wherein said epoxy resin adhesive includes a thermal coefficient of expansion controlling solid particle material dispersed therein.
Claim 23
Dependent Claim
55 words
The method of claim 18 wherein said leveling step includes inverting said die and host wafer assembly into a receptacle well to wafer backside connecting canal uppermost position wherein said liquid adhesive additionally flows downward around the peripheral surfaces of said die and conforms to the top surface level of said die and host wafer.
References Cited (Backward Citations)
US3864810A
Cited
US3868724A
Cited
US4074342A
Cited
US4689657A
Cited
US4604642A
Cited
US4756929A
Cited
WO1985003806A1
Cited
US4670770A
Cited
US4685030A
Cited
US4703339A
Cited
JPS6281745A
Cited
US4866501A
Cited
US4716049A
Cited
US4695870A
Cited
US4788583A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1994-04-15 | 1994-10-15 | 1995-04-16 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1998-04-15 | 1998-10-15 | 1999-04-16 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2002-04-15 | 2002-10-15 | 2003-04-16 | $7700.00 | Window Closed / Lapsed |