US4978052A
Expired / Lapsed
US
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Semiconductor die attach system
Assignee: Advanced Technology Interconnect Inc
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Filing: 1989-08-28
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Granted: 1990-12-18
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Expires: 2009-08-28
Abstract
Abstract A semiconductor die attach system adapted for attaching a semiconductor die to a substrate is provided. A metallic buffer component is disposed between the substrate and the semiconductor die to withstand stresses created from thermal cycling of the substrate and the die. The metallic buffer component is sealed to the substrate with a layer of solder. The layer of solder is provided to dissipate stresses created by thermal cycling of the substrate and the die. The die is sealed to the buffer with a silver-glass adhesive.
Inventors
- 👤 Julius C. Fister
- 👤 Satyam C. Cherukuri
- 👤 Deepak Mahulikar
- 👤 Brian E. O'Donnelly
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-04 04:15
CPC Classifications
H; H10; H10W; H10W70/00; H10W70/60; H10W70/62; H10W70/66; H10W70/67; H10W70/68; H10W70/682; H10W70/685; H10W72/00; H10W72/071; H10W72/072; H10W72/07231; H10W72/07236; H10W72/073; H10W72/07331; H10W72/07337; H10W72/20; H10W72/251; H10W72/252; H10W72/30; H10W72/321; H10W72/322; H10W72/325; H10W72/351; H10W72/352; H10W72/353; H10W72/381; H10W72/851; H10W72/874; H10W72/884; H10W90/00; H10W90/701; H10W90/731; H10W90/734; H10W90/751; H10W90/756; Y; Y10; Y10T; Y10T29/00; Y10T29/49; Y10T29/49002; Y10T29/49117; Y10T29/49124; Y10T29/4913
Claims Analysis
Total Claims: 21
Claim 1
Independent Claim
152 words
A process adapted to attach a semiconductor die to a substrate, comprising the steps of: providing a substrate; providing a semiconductor die; providing a buffer component; disposing said buffer component between said substrate and said semiconductor die for withstanding thermal stress generated from thermal cycling of said substrate and said die; disposing a layer of solder between the substrate and the buffer component, said layer of solder for dissipating thermal stress generated from thermal cycling of said substrate and die, said solder being selected from the group consisting of gold-silicon, gold-tin, silver-tin, silver-antimony-tin, lead-indium-tin, copper-indium, lead-indium-silver, lead-indium-silver-tin and mixtures thereof; heating the buffer component and the substrate to bond the buffer component to the substrate; disposing a silver-glass adhesive between the die and said buffer component bonded to the substrate component; and heating the adhesive, die and buffer component to melt the silver-glass adhesive and bond the buffer component to the die.
Claim 2
Dependent Claim
152 words
A process adapted to attach a semiconductor die to a substrate, comprising the steps of: providing a substrate; providing a semiconductor die; providing a buffer component; disposing said buffer component between said substrate and said semiconductor die for withstanding thermal stress generated from thermal cycling of said substrate and said die; disposing a layer of solder between the substrate and the buffer component, said layer of solder for dissipating thermal stress generated from thermal cycling of said substrate and die, said solder being selected from the group consisting of gold-silicon, gold-tin, silver-tin, silver-antimony-tin, lead-indium-tin, copper-indium, lead-indium-silver, lead-indium-silver-tin and mixtures thereof; heating the buffer component and the substrate to bond the buffer component to the substrate; disposing a silver-glass adhesive between the die and said buffer component bonded to the substrate component; and heating the adhesive, die and buffer component to melt the silver-glass adhesive and bond the buffer component to the die.
Claim 3
Dependent Claim
41 words
The process of claim 1 further including the step of selecting said lead-indium-silver solder, said lead-indium-silver solder comprising from about 15 to about 95 wt. percent lead, from about 1 to about 80 wt. percent indium and the remainder essentially silver.
Claim 4
Dependent Claim
37 words
The process of claim 2 further including the steps of selecting said lead-indium-silver solder from about 85 to about 94 wt. percent lead, from about 1 to about 5 wt. percent indium and the remainder essentially silver.
Claim 5
Dependent Claim
44 words
The process of claim 2 including the steps of: arranging first and second oxidation resistant layers on opposite surfaces of said buffer component, and selecting said first and second oxidation resistant layers from the group consisting of gold, silver, palladium, platinum and alloys thereof.
Claim 6
Dependent Claim
47 words
The process of claim 4 further including the steps of: disposing first and second barrier layers between said first and second oxidation resistant layers, respectively, and said buffer component; and selecting said first and second barrier layers from the group consisting of nickel, cobalt and alloys thereof.
Claim 7
Dependent Claim
38 words
The process of claim 5 further including the step of: disposing first and second intermediate layers to resist oxidation of said first and second barrier layers, said first and second intermediate barrier layers being formed of gold flashing.
Claim 8
Dependent Claim
51 words
The process of claim 6 further including the step of: disposing a third oxidation resistant layer on the surface of said substrate adapted to have the lead-indium-silver solder bonded thereto, said third oxidation resistant layer being of a material selected from the group consisting gold, silver, palladium, platinum and alloys thereof.
Claim 9
Dependent Claim
40 words
The process of claim 7 further including the step of providing a third barrier layer between said substrate and said third oxidation resistant layer, said third barrier layer being selected from the group consisting of nickel, cobalt and alloys thereof.
Claim 10
Dependent Claim
49 words
The process of claim 8 further including the step of: disposing a third intermediate layer disposed between said third barrier layer and said third oxidation resistant layer, said third intermediate layer to resist oxidation of said third barrier layer, said third intermediate layer being formed of a gold flashing.
Claim 11
Dependent Claim
49 words
The process of claim 9 including the steps of: selecting said buffer component having a coefficient of thermal expansion of from about 35×10 -7 to about 100×10 -7 in/in/°C., and selecting said buffer component from the group consisting of tungsten, rhenium, molybdenum, alloys thereof, nickel-iron alloys, cermets and ceramics.
Claim 12
Dependent Claim
39 words
The process of claim 10 including the steps of: selecting said substrate having a coefficient of thermal expansion of more than about 140×10 -7 in/in/°C., and selecting said substrate from the group consisting of metals, alloys, ceramics and cermets.
Claim 13
Dependent Claim
139 words
A process adapted to attach a semiconductor die to a substrate, comprising the steps of: providing a substrate; providing a semiconductor die; providing a buffer component having a solder coating, said solder being selected from the group consisting of gold-silicon, gold-tin, silver-tin, silver-antimony-tin, lead-indium-tin, copper-indium, lead-indium-silver, lead-indium-silver-tin and mixtures thereof; disposing said buffer component on said substrate; heating said buffer and substrate assembly to at least the melting point of said solder; cooling said buffer and substrate assembly to bond the buffer to the substrate; disposing a silver-glass adhesive on the solder coated buffer; disposing said die on said glass adhesive; heating the assembly comprising the substrate, buffer, silver-glass adhesive and die to drive off volatiles from the glass adhesive; heating the assembly to melt the silver-glass adhesive; and cooling the assembly to bond the buffer to the die.
Claim 14
Dependent Claim
139 words
A process adapted to attach a semiconductor die to a substrate, comprising the steps of: providing a substrate; providing a semiconductor die; providing a buffer component having a solder coating, said solder being selected from the group consisting of gold-silicon, gold-tin, silver-tin, silver-antimony-tin, lead-indium-tin, copper-indium, lead-indium-silver, lead-indium-silver-tin and mixtures thereof; disposing said buffer component on said substrate; heating said buffer and substrate assembly to at least the melting point of said solder; cooling said buffer and substrate assembly to bond the buffer to the substrate; disposing a silver-glass adhesive on the solder coated buffer; disposing said die on said glass adhesive; heating the assembly comprising the substrate, buffer, silver-glass adhesive and die to drive off volatiles from the glass adhesive; heating the assembly to melt the silver-glass adhesive; and cooling the assembly to bond the buffer to the die.
Claim 15
Dependent Claim
43 words
The process of claim 12 further including the step of selecting said solder of lead-indium-silver solder, said lead-indium-silver solder being from about 15 to about 95 wt. percent lead, from about 1 to about 80 wt. percent indium and the remainder essentially silver.
Claim 16
Dependent Claim
37 words
The process of claim 13 further including the steps of selecting said lead-indium-silver solder from about 10 to about 90 wt. percent lead, from about 10 to about 20 wt. percent indium and the remainder essentially silver.
Claim 17
Dependent Claim
51 words
The process of claim 13 further including the step of providing a third oxidation resistant layer on the surface of said substrate adapted to have the lead-indium-silver solder attached thereto, said third oxidation resistant layer being of a material selected from the group consisting gold, silver, palladium, platinum and alloys thereof.
Claim 18
Dependent Claim
43 words
The process of claim 15 further including the step of providing a third barrier layer between said third oxidation resistant layer and said substrate, said third barrier layer being of a material selected from the group consisting of nickel, cobalt and alloys thereof.
Claim 19
Dependent Claim
49 words
The process of claim 16 further including the step of providing a third intermediate layer disposed between said third barrier layer and said third oxidation resistant layer, said third intermediate layer to resist oxidation of said third barrier layer, said third intermediate layer being formed of a gold flashing.
Claim 20
Dependent Claim
49 words
The process of claim 16 including the steps of: selecting said buffer component having a coefficient of thermal expansion of from about 35×10 -7 to about 100×10 -7 in/in/°C., and selecting said buffer component from the group consisting of tungsten, rhenium, molybdenum, alloys thereof, nickel-iron alloys, cermets and ceramics.
Claim 21
Dependent Claim
39 words
The process of claim 18, including the steps of: selecting said substrate having a coefficient of thermal expansion of more than about 140×10 -7 in/in/°C., and selecting said substrate from the group consisting of metals, alloys, ceramics and cermets.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1993-12-17 | 1994-06-18 | 1994-12-18 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1997-12-17 | 1998-06-18 | 1998-12-18 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2001-12-17 | 2002-06-18 | 2002-12-18 | $7700.00 | Window Closed / Lapsed |