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US4949150A Expired / Lapsed US ⏱️ 0.0 years remaining

Programmable bonding pad with sandwiched silicon oxide and silicon nitride layers

Assignee: Exar Corp
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Filing: 1988-02-12
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Granted: 1990-08-14
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Expires: 2008-02-12
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Abstract

Abstract The present invention is a bonding pad structure and method for making the same which can be connected at the metalization step to form passive or active devices in addition to forming a bonding pad. A P-doped region is formed in an epitaxial layer in the area of the bonding pad at the perimeter of a chip. This P-doped region allows the formation of a junction capacitance between it and the epitaxial layer. In addition, by adding an oxide layer over the P-doped region an oxide capacitor can be formed between the metal bonding pad and the P-doped region with the oxide as the dielectric. The oxide layer is a special sandwich of two layers, silicon dioxide and silicon nitride. The sandwiched layers protects the components beneath the bonding pad. The P-doped region can also be used as a resistance by providing metal connections to both ends. Finally, a vertical PNP transistor can be formed between the P-doped region, the epitaxial layer and a P-doped substrate.

Inventors

  • 👤 Piccolo G. Giannella

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-09 14:29
CPC Classifications
H; H10; H10W; H10W72/00; H10W72/90; H10B; H10B69/00; H10W20/00; H10W20/01; H10W20/031; H10W20/069; H10W20/40; H10W20/49; H10W72/01; H10W72/012; H10W72/019; H10W72/20; H10W72/251; H10W72/29; H10W72/921; H10W72/923; H10W72/931; H10W72/932; H10W72/951; H10W72/952

Claims Analysis

Total Claims: 4
Claim 1
Independent Claim 217 words
A semiconductor chip having a plurality of bonding pad cells arranged around the perimeter of said chip, each bonding pad cell comprising: a P-doped substrate; an N-doped epitaxial region on top of said substrate, said epitaxial region having a rectangular-shaped surface large enough to receive a metal layer to form a bonding pad; a lightly P-doped rectangular region extending from said surface into said epitaxial region; a heavily P-doped region within said lightly P-doped region; a plurality of N-doped regions within said lightly P-doped region along a first edge of said lightly P-doped region; an N+ buried layer extending into said P-doped substrate proximate said first edge of said lightly P-doped region; a plurality of N+ regions outside said lightly P-doped region proximate said first edge and extending into said N+ buried layer; a layer of silicon dioxide extending over at least a portion of said P-doped region; a layer of silicon nitride extending over at least a portion of said silicon dioxide layer; at least one of said bonding pad cells having a metal bonding pad deposited over a substantial portion of said silicon nitride layer; and said lightly P-doped region and at least one of said bonding pad cells having a metal contact other than a bonding pad coupled to one of said P-doped regions.
Claim 2
Dependent Claim 217 words
A semiconductor chip having a plurality of bonding pad cells arranged around the perimeter of said chip, each bonding pad cell comprising: a P-doped substrate; an N-doped epitaxial region on top of said substrate, said epitaxial region having a rectangular-shaped surface large enough to receive a metal layer to form a bonding pad; a lightly P-doped rectangular region extending from said surface into said epitaxial region; a heavily P-doped region within said lightly P-doped region; a plurality of N-doped regions within said lightly P-doped region along a first edge of said lightly P-doped region; an N+ buried layer extending into said P-doped substrate proximate said first edge of said lightly P-doped region; a plurality of N+ regions outside said lightly P-doped region proximate said first edge and extending into said N+ buried layer; a layer of silicon dioxide extending over at least a portion of said P-doped region; a layer of silicon nitride extending over at least a portion of said silicon dioxide layer; at least one of said bonding pad cells having a metal bonding pad deposited over a substantial portion of said silicon nitride layer; and said lightly P-doped region and at least one of said bonding pad cells having a metal contact other than a bonding pad coupled to one of said P-doped regions.
Claim 3
Dependent Claim 186 words
A semiconductor chip having a plurality of bonding pad cells arranged around the perimeter of said chip, each bonding pad cell comprising: a P-doped substrate; an N-doped epitaxial region on top of said substrate, said epitaxial region having a rectangular-shaped surface large enough to receive a metal layer to form a bonding pad; a lightly P-doped rectangular region extending from said surface into said epitaxial region; a heavily P-doped region within said lightly P-doped region; a plurality of N-doped regions within said lightly P-doped region along a first edge of said lightly P-doped region; an N+ buried layer extending into said P-doped substrate proximate said first edge of said lightly P-doped region; a plurality of N+ regions outside said lightly P-doped region proximate said first edge and extending into said N+ buried layer; at least one of said bonding pad cells having a metal bonding pad deposited over a substantial portion of said N-doped epitaxial region; and said lightly P-doped region and at least one of said bonding pad cells having a metal contact other than a bonding pad coupled to one of said P-doped regions.
Claim 4
Dependent Claim 186 words
A semiconductor chip having a plurality of bonding pad cells arranged around the perimeter of said chip, each bonding pad cell comprising: a P-doped substrate; an N-doped epitaxial region on top of said substrate, said epitaxial region having a rectangular-shaped surface large enough to receive a metal layer to form a bonding pad; a lightly P-doped rectangular region extending from said surface into said epitaxial region; a heavily P-doped region within said lightly P-doped region; a plurality of N-doped regions within said lightly P-doped region along a first edge of said lightly P-doped region; an N+ buried layer extending into said P-doped substrate proximate said first edge of said lightly P-doped region; a plurality of N+ regions outside said lightly P-doped region proximate said first edge and extending into said N+ buried layer; at least one of said bonding pad cells having a metal bonding pad deposited over a substantial portion of said N-doped epitaxial region; and said lightly P-doped region and at least one of said bonding pad cells having a metal contact other than a bonding pad coupled to one of said P-doped regions.

References Cited (Backward Citations)

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USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1993-08-13 1994-02-12 1994-08-14 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1997-08-13 1998-02-12 1998-08-14 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2001-08-13 2002-02-12 2002-08-14 $7700.00 Window Closed / Lapsed

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