Enclosed buried channel transistor

Claim 1

A method for forming a buried channel transistor, comprising: providing a semiconductor substrate of a first conductivity type; introducing dopants, to form a buried channel region of a second conductivity type opposite to said first conductivity type in the surface of the semiconductor substrate; forming a layer of oxide over the buried channel region; forming a gate electrode on the surface of the layer of oxide and covering the buried channel region; forming an isolating region of the first conductivity type in the surface of the substrate adjacent to one side of the buried channel region; introducing dopants, to form a drain region of the second conductivity type adjacent to the isolating region and at least a portion thereof separated from the buried channel region by the isolating region; and introducing dopants, to form a source region of the second conductivity type on the opposite side of the buried channel region from the drain region and proximate to the buried channel region; wherein said steps of forming the isolating region and the drain region comprise: introducing impurities of the first conductivity type into the surface of substrate utilizing the vertical edge of the gate electrode as an alignment mask; forming a spacer insulating material to a predetermined thickness extending from the vertical edge of the gate electrode on the drain side of the transistor; and introducing impurities of the second conductivity type into the surface of the substrate on the surface of the transistor utilizing the outermost edge of the spacer as an alignment mask such that impurities are inhibited from being introduced into the substrate underneath the spacer, the step of introducing impurities of the second conductivity type into the substrate to form the drain utilizing a higher dose of impurities than the level of impurities utilized to form the isolating region.

Claim 2

A method for forming a buried channel transistor, comprising: providing a semiconductor substrate of a first conductivity type; introducing dopants, to form a buried channel region of a second conductivity type opposite to said first conductivity type in the surface of the semiconductor substrate; forming a layer of oxide over the buried channel region; forming a gate electrode on the surface of the layer of oxide and covering the buried channel region; forming an isolating region of the first conductivity type in the surface of the substrate adjacent to one side of the buried channel region; introducing dopants, to form a drain region of the second conductivity type adjacent to the isolating region and at least a portion thereof separated from the buried channel region by the isolating region; and introducing dopants, to form a source region of the second conductivity type on the opposite side of the buried channel region from the drain region and proximate to the buried channel region; wherein said steps of forming the isolating region and the drain region comprise: introducing impurities of the first conductivity type into the surface of substrate utilizing the vertical edge of the gate electrode as an alignment mask; forming a spacer insulating material to a predetermined thickness extending from the vertical edge of the gate electrode on the drain side of the transistor; and introducing impurities of the second conductivity type into the surface of the substrate on the surface of the transistor utilizing the outermost edge of the spacer as an alignment mask such that impurities are inhibited from being introduced into the substrate underneath the spacer, the step of introducing impurities of the second conductivity type into the substrate to form the drain utilizing a higher dose of impurities than the level of impurities utilized to form the isolating region.

Claim 8

A method for forming a buried channel transistor, comprising: providing a substrate of a first conductivity type; defining an active region on the surface of the substrate and bounded by a layer of isolating oxide; introducing impurities of a second conductivity type opposite to the first conductivity type into the surface of the substrate in the active region to define a first region; forming a layer of gate oxide over the active region to a predetermined thickness; forming a gate electrode over the active region and having a predetermined dimension to define a buried channel region in the active region under the gate electrode; introducing impurities of the first conductivity type into the active region utilizing the gate electrode as a mask to form second and third regions on opposite sides of the gate electrode, the concentration of the impurities of the first conductivity type being greater than the concentration of the impurities of the second conductivity type in the first region; forming spacers of insulating material on the vertical edges of the gate electrode and extending therefrom in the horizontal direction by a predetermined distance; and introducing impurities of the second conductivity type into the second and third regions utilizing the edge of the spacers as a mask to form source/drain regions, the level of the second conductivity type impurities in the source/drain regions greater than the first conductivity type impurities in the second and third regions; wherein an isolating region of first conductivity type material separates at least a portion of the source/drain regions from the buried channel region.

Claim 9

A method for forming a buried channel transistor, comprising: providing a substrate of a first conductivity type; defining an active region on the surface of the substrate and bounded by a layer of isolating oxide; introducing impurities of a second conductivity type opposite to the first conductivity type into the surface of the substrate in the active region to define a first region; forming a layer of gate oxide over the active region to a predetermined thickness; forming a gate electrode over the active region and having a predetermined dimension to define a buried channel region in the active region under the gate electrode; introducing impurities of the first conductivity type into the active region utilizing the gate electrode as a mask to form second and third regions on opposite sides of the gate electrode, the concentration of the impurities of the first conductivity type being greater than the concentration of the impurities of the second conductivity type in the first region; forming spacers of insulating material on the vertical edges of the gate electrode and extending therefrom in the horizontal direction by a predetermined distance; and introducing impurities of the second conductivity type into the second and third regions utilizing the edge of the spacers as a mask to form source/drain regions, the level of the second conductivity type impurities in the source/drain regions greater than the first conductivity type impurities in the second and third regions; wherein an isolating region of first conductivity type material separates at least a portion of the source/drain regions from the buried channel region.