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US4840867A
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Positive-working radiation-sensitive recording material with radiation-sensitive 1,2-quinone diazide underlayer and thicker positive-working radiation-sensitive overlayer
Assignee: Hoechst AG
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Filing: 1987-06-17
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Granted: 1989-06-20
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Expires: 2007-06-17
Abstract
Abstract A radiation-sensitive recording material comprising a support and first and second radiation-sensitive layers is disclosed. The first radiation-sensitive layer comprises a 1,2-quinone diazide as the radiation-sensitive compound and the second radiation-sensitive layer comprises (a) a compound which forms a strong acid under the action of actinic radiation, (b) a compound which has at least one acid-cleavable C-O-C bond and (c) a polymeric binder. The recording material has an improved storage stability as compared with materials which comprise only radiation-sensitive layers based on acid-cleavable compounds.
Inventors
- 👤 Andreas Elsaesser
- 👤 Klaus Rode
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 09:15
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/004; G03F7/022; G03F7/09; G03F7/095
Claims Analysis
Total Claims: 13
Claim 1
Independent Claim
170 words
A positive-working radiation-sensitive recording material comprising: (a) a support; (b) a first radiation-sensitive layer consisting essentially of an admixture of a radiationsensitive 1,2-quinone diazide in an amount to provide stabilizer action on a second radiationsensitive layer, and a polymeric water-insoluble binder in an amount to provide film forming property to the first radiation-sensitive layer overlying said support; and (c) a second radiation-sensitive layer, thicker than said first layer and overlying said first layer, consisting essentially of in admixture: a compound which forms a strong acid under the action of actinic radiation selected from the group consisting of a diazonium, phosphonium, sulfonium and iodonium salts, halogen compounds and organometal-organohalogen combinations, a compound which has at least one acid-cleavable C--O--C bond, said acid-forming and acid-cleavable compound present in amounts sufficient to increase the solubility of portions of said second layer exposed to actinic radiation so that an image can be developed, and a polymeric binder in an amount sufficient to form a uniform layer said recording material having an improved storage stability.
Claim 2
Dependent Claim
170 words
A positive-working radiation-sensitive recording material comprising: (a) a support; (b) a first radiation-sensitive layer consisting essentially of an admixture of a radiationsensitive 1,2-quinone diazide in an amount to provide stabilizer action on a second radiationsensitive layer, and a polymeric water-insoluble binder in an amount to provide film forming property to the first radiation-sensitive layer overlying said support; and (c) a second radiation-sensitive layer, thicker than said first layer and overlying said first layer, consisting essentially of in admixture: a compound which forms a strong acid under the action of actinic radiation selected from the group consisting of a diazonium, phosphonium, sulfonium and iodonium salts, halogen compounds and organometal-organohalogen combinations, a compound which has at least one acid-cleavable C--O--C bond, said acid-forming and acid-cleavable compound present in amounts sufficient to increase the solubility of portions of said second layer exposed to actinic radiation so that an image can be developed, and a polymeric binder in an amount sufficient to form a uniform layer said recording material having an improved storage stability.
Claim 3
Dependent Claim
21 words
A recording material as claimed in claim 1, wherein the quinone diazide layer has a thickness of 10 to 5,000 nm.
Claim 4
Dependent Claim
16 words
A recording material as claimed in claim 1, wherein the binder is soluble in aqueous-alkaline solutions.
Claim 5
Dependent Claim
17 words
A recording material as claimed in claim 1, wherein the 1,2-quinone diazide comprises a 1,2-naphthoquinone-2-diazide-sulfonic acid ester.
Claim 6
Dependent Claim
35 words
A recording material as claimed in claim 3, wherein the quinone diazide layer contains from 30 to 90 percent by weight of the binder and from 3 to 50 percent by weight of 1,2-quinone diazide.
Claim 7
Dependent Claim
21 words
A recording material as claimed in claim 1, wherein the polymeric binder is insoluble in water and soluble in aqueous-alkaline solutions.
Claim 8
Dependent Claim
25 words
A recording material as claimed in claim 1, wherein said acid-cleavable compound comprises at least one orthocarboxylic acid ester or carboxylic acid amide acetal grouping.
Claim 9
Dependent Claim
25 words
A recording material as claimed in claim 1, wherein the outer radiation-sensitive layer has a thickness in the range from 500 nm to 0.08 mm.
Claim 10
Dependent Claim
54 words
A recording material as claimed in claim 1, wherein the outer radiation-sensitive layer comprises from 30 to 90 percent by weight of polymeric binder, from 5 to 70 percent by weight of acid-cleavable compound and from 0.1 to 10 percent by weight of the compound which forms an acid under the action of radiation.
Claim 11
Dependent Claim
27 words
A recording material as claimed in claim 1, wherein said acid-cleavable compound comprises oligomer or polymer compounds having recurrent acetal or ketal groupings in the main chain.
Claim 12
Dependent Claim
23 words
A recording material as claimed in claim 1, wherein said acid-cleavable compound comprises compounds having at least one enolic ether or acyl-iminocarbonate grouping.
Claim 13
Dependent Claim
17 words
A positive-working radiation-sensitive recording material as claimed in claim 1, consisting essentially of (a), (b) and (c).
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1992-06-19 | 1992-12-19 | 1993-06-20 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-06-19 | 1996-12-19 | 1997-06-20 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-06-19 | 2000-12-19 | 2001-06-20 | $7700.00 | Window Closed / Lapsed |