US4506003A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Positive-working radiation-sensitive mixture
Assignee: Hoechst AG
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Filing: 1983-11-14
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Granted: 1985-03-19
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Expires: 2003-11-14
Abstract
Abstract A positive-working radiation-sensitive mixture is described which is composed of a compound having at least one C--O--C bond which can be split by acid, a compound which forms a strong acid when irradiated, a binder which is insoluble in water and soluble in aqueous-alkaline solutions, and a resin having solubility properties which differ from those of the binder and which is selected from (1) a polyurethane resin obtained from an organic isocyanate and a polymer which contains hydroxyl groups, (2) a polyvinyl alkyl ether, (3) an alkyl acrylate polymer, or (4) a hydrogenated or partially hydrogenated derivative of colophony. As a result of the resin additives, photoresist layers are obtained which have good adhesion to the support, good flexibility, good latitude in developing and good resolution.
Inventors
- 👤 Hans Ruckert
- 👤 Gerhard Buhr
- 👤 Hartmut Steppan
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-26 16:09
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/004; G03F7/039; G03F7/0045; Y; Y10; Y10S; Y10S430/00; Y10S430/1053; Y10S430/1055; Y10S430/106; Y10S430/111; Y10S522/00; Y10S522/904
Claims Analysis
Total Claims: 15
Claim 1
Independent Claim
118 words
A positive-working radiation-sensitive mixture, comprising: a compound having at least one C--O--C bond which can be split by acid, said compound being selected from an orthocarboxylic acid derivative and a polyacetal; a compound which forms a strong acid when radiated; from 20 to 90% by weight, relative to the non-volatile constituents of the mixture, of a binder which is insoluble in water and soluble in an aqueous-alkaline solution; and from 1 to 50% by weight, relative to the non-volatile constituents of the mixture, of at least two resinous materials having solubility properties which differ from those of said binder, said resinous materials comprising a polyvinyl alkyl ether and an alkyl acrylate or methacrylate polymer, or a copolymer thereof.
Claim 2
Dependent Claim
118 words
A positive-working radiation-sensitive mixture, comprising: a compound having at least one C--O--C bond which can be split by acid, said compound being selected from an orthocarboxylic acid derivative and a polyacetal; a compound which forms a strong acid when radiated; from 20 to 90% by weight, relative to the non-volatile constituents of the mixture, of a binder which is insoluble in water and soluble in an aqueous-alkaline solution; and from 1 to 50% by weight, relative to the non-volatile constituents of the mixture, of at least two resinous materials having solubility properties which differ from those of said binder, said resinous materials comprising a polyvinyl alkyl ether and an alkyl acrylate or methacrylate polymer, or a copolymer thereof.
Claim 3
Dependent Claim
29 words
A positive-working radiation-sensitive mixture as claimed in claim 1, wherein said polyacetal comprises a polyacetal wherein each alpha-carbon atom of the alcoholic constituent of the acetal groupings is aliphatic.
Claim 4
Dependent Claim
14 words
A radiation-sensitive mixture was claimed in claim 1, wherein said binder comprises a novolak.
Claim 5
Dependent Claim
32 words
A radiation-sensitive mixture as claimed in claim 1, wherein said resinous material comprises a polyvinyl lower alkyl ether present in an amount of from about 2-40% by weight of said radiation-sensitive mixture.
Claim 6
Dependent Claim
25 words
A radiation-sensitive mixture as claimed in claim 4, wherein said polyvinyl lower alkyl ether comprises polyvinyl methyl ether, polyvinyl ethyl ester or polyvinyl butyl ether.
Claim 7
Dependent Claim
38 words
A radiation-sensitive mixture as claimed in claim 1, wherein said resinous material comprises a lower alkyl acrylate or methacrylate polymer or a copolymer thereof present in an amount of from about 1-20% by weight of said radiation-sensitive mixture.
Claim 8
Dependent Claim
24 words
A radiation-sensitive mixture as claimed in claim 6, wherein said resinous material comprises a polyethyl acrylate or methacrylate or a polybutyl acrylate or methacrylate.
Claim 9
Dependent Claim
132 words
A positive-working radiation-sensitive mixture comprising: a compound having at least one C--O--C bond which can be split by acid, said compound being selected from an orthocarboxylic acid derivative and a polyacetal, wherein each alpha-carbon atom of the alcoholic constituent of the acetal groupings is aliphatic; a compound which forms a strong acid when radiated; from 20 to 90% by weight, relative to the non-volatile constituents of the mixture, of a binder which is insoluble in water and soluble in an aqueous-alkaline solution; and from 1 to 50% by weight, relative to the non-volatile constituents of the mixture, of at least one resinous material having solubility properties which differ from those of said binder, said resinous materials comprising a polyvinyl alkyl ether, or an alkyl acrylate or methacrylate polymer or a copolymer thereof.
Claim 10
Dependent Claim
132 words
A positive-working radiation-sensitive mixture comprising: a compound having at least one C--O--C bond which can be split by acid, said compound being selected from an orthocarboxylic acid derivative and a polyacetal, wherein each alpha-carbon atom of the alcoholic constituent of the acetal groupings is aliphatic; a compound which forms a strong acid when radiated; from 20 to 90% by weight, relative to the non-volatile constituents of the mixture, of a binder which is insoluble in water and soluble in an aqueous-alkaline solution; and from 1 to 50% by weight, relative to the non-volatile constituents of the mixture, of at least one resinous material having solubility properties which differ from those of said binder, said resinous materials comprising a polyvinyl alkyl ether, or an alkyl acrylate or methacrylate polymer or a copolymer thereof.
Claim 11
Dependent Claim
15 words
A positive-working radiation-sensitive mixture as defined in claim 8, wherein said binder comprises a novolak.
Claim 12
Dependent Claim
33 words
A positive-working radiation-sensitive mixture as defined in claim 8, wherein said resinous material comprises a polyvinyl lower alkyl ether present in an amount of from about 2-40% by weight of said radiation-senstive mixture.
Claim 13
Dependent Claim
26 words
A positive-working radiation-sensitive mixture as defined in claim 10, wherein said polyvinyl lower alkyl ether comprises polyvinyl methyl ether, polyvinyl ethyl ether or polyvinyl butyl ether.
Claim 14
Dependent Claim
39 words
A positive-working radiation-sensitive mixture as defined in claim 8, wherein said resinous material comprises a lower alkyl acrylate or methacrylate polymer or a copolymer thereof present in an amount of from about 1-20% by weight of said radiation-sensitive mixture.
Claim 15
Dependent Claim
25 words
A positive-working radiation-sensitive mixture as defined in claim 12, wherein said resinous material comprises a polyethyl acrylate or methacrylate or a polybutyl acrylate or methacrylate.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1988-03-18 | 1988-09-17 | 1989-03-19 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1992-03-18 | 1992-09-17 | 1993-03-19 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1996-03-18 | 1996-09-17 | 1997-03-19 | $7700.00 | Window Closed / Lapsed |