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US4840867A Expired / Lapsed US ⏱️ 0.0 years remaining

Positive-working radiation-sensitive recording material with radiation-sensitive 1,2-quinone diazide underlayer and thicker positive-working radiation-sensitive overlayer

Assignee: Hoechst AG
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Filing: 1987-06-17
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Granted: 1989-06-20
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Expires: 2007-06-17
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Abstract

Abstract A radiation-sensitive recording material comprising a support and first and second radiation-sensitive layers is disclosed. The first radiation-sensitive layer comprises a 1,2-quinone diazide as the radiation-sensitive compound and the second radiation-sensitive layer comprises (a) a compound which forms a strong acid under the action of actinic radiation, (b) a compound which has at least one acid-cleavable C-O-C bond and (c) a polymeric binder. The recording material has an improved storage stability as compared with materials which comprise only radiation-sensitive layers based on acid-cleavable compounds.

Inventors

  • 👤 Andreas Elsaesser
  • 👤 Klaus Rode

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-31 01:11
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/004; G03F7/022; G03F7/09; G03F7/095

Claims Analysis

Total Claims: 13
Claim 1
Independent Claim 170 words
A positive-working radiation-sensitive recording material comprising: (a) a support; (b) a first radiation-sensitive layer consisting essentially of an admixture of a radiationsensitive 1,2-quinone diazide in an amount to provide stabilizer action on a second radiationsensitive layer, and a polymeric water-insoluble binder in an amount to provide film forming property to the first radiation-sensitive layer overlying said support; and (c) a second radiation-sensitive layer, thicker than said first layer and overlying said first layer, consisting essentially of in admixture: a compound which forms a strong acid under the action of actinic radiation selected from the group consisting of a diazonium, phosphonium, sulfonium and iodonium salts, halogen compounds and organometal-organohalogen combinations, a compound which has at least one acid-cleavable C--O--C bond, said acid-forming and acid-cleavable compound present in amounts sufficient to increase the solubility of portions of said second layer exposed to actinic radiation so that an image can be developed, and a polymeric binder in an amount sufficient to form a uniform layer said recording material having an improved storage stability.
Claim 2
Dependent Claim 170 words
A positive-working radiation-sensitive recording material comprising: (a) a support; (b) a first radiation-sensitive layer consisting essentially of an admixture of a radiationsensitive 1,2-quinone diazide in an amount to provide stabilizer action on a second radiationsensitive layer, and a polymeric water-insoluble binder in an amount to provide film forming property to the first radiation-sensitive layer overlying said support; and (c) a second radiation-sensitive layer, thicker than said first layer and overlying said first layer, consisting essentially of in admixture: a compound which forms a strong acid under the action of actinic radiation selected from the group consisting of a diazonium, phosphonium, sulfonium and iodonium salts, halogen compounds and organometal-organohalogen combinations, a compound which has at least one acid-cleavable C--O--C bond, said acid-forming and acid-cleavable compound present in amounts sufficient to increase the solubility of portions of said second layer exposed to actinic radiation so that an image can be developed, and a polymeric binder in an amount sufficient to form a uniform layer said recording material having an improved storage stability.
Claim 3
Dependent Claim 21 words
A recording material as claimed in claim 1, wherein the quinone diazide layer has a thickness of 10 to 5,000 nm.
Claim 4
Dependent Claim 16 words
A recording material as claimed in claim 1, wherein the binder is soluble in aqueous-alkaline solutions.
Claim 5
Dependent Claim 17 words
A recording material as claimed in claim 1, wherein the 1,2-quinone diazide comprises a 1,2-naphthoquinone-2-diazide-sulfonic acid ester.
Claim 6
Dependent Claim 35 words
A recording material as claimed in claim 3, wherein the quinone diazide layer contains from 30 to 90 percent by weight of the binder and from 3 to 50 percent by weight of 1,2-quinone diazide.
Claim 7
Dependent Claim 21 words
A recording material as claimed in claim 1, wherein the polymeric binder is insoluble in water and soluble in aqueous-alkaline solutions.
Claim 8
Dependent Claim 25 words
A recording material as claimed in claim 1, wherein said acid-cleavable compound comprises at least one orthocarboxylic acid ester or carboxylic acid amide acetal grouping.
Claim 9
Dependent Claim 25 words
A recording material as claimed in claim 1, wherein the outer radiation-sensitive layer has a thickness in the range from 500 nm to 0.08 mm.
Claim 10
Dependent Claim 54 words
A recording material as claimed in claim 1, wherein the outer radiation-sensitive layer comprises from 30 to 90 percent by weight of polymeric binder, from 5 to 70 percent by weight of acid-cleavable compound and from 0.1 to 10 percent by weight of the compound which forms an acid under the action of radiation.
Claim 11
Dependent Claim 27 words
A recording material as claimed in claim 1, wherein said acid-cleavable compound comprises oligomer or polymer compounds having recurrent acetal or ketal groupings in the main chain.
Claim 12
Dependent Claim 23 words
A recording material as claimed in claim 1, wherein said acid-cleavable compound comprises compounds having at least one enolic ether or acyl-iminocarbonate grouping.
Claim 13
Dependent Claim 17 words
A positive-working radiation-sensitive recording material as claimed in claim 1, consisting essentially of (a), (b) and (c).

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1992-06-19 1992-12-19 1993-06-20 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1996-06-19 1996-12-19 1997-06-20 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2000-06-19 2000-12-19 2001-06-20 $7700.00 Window Closed / Lapsed

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