Abstract Pinhole-free thin films deposited by glow discharge or plasma polymerization of organosilanes, organosilazones and organosiloxanes for use as reactive ion etch oxygen barriers in multilayer resist structures, of lift-off masks, for fabrication of semiconductor devices, such as integrated circuits. The process includes deposition of thin plasma polymerized organosilicon barrier film over a radiation insensitive polymeric base layer previously coated on a substrate, followed by thermal annealing of the plasma polymerized barrier layer, over which is then coated a radiation sensitive resist layer. After definition of the desired resist pattern by imagewise exposure and development, the image is etch transferred into the barrier layer by reactive sputter etching in a fluorine containing ambient, and subsequently transferred into the base layer, down to the substrate, in an oxygen plasma, during which time the plasma deposited film functions as an oxygen barrier. Final metal patterns are formed by metallization and lift-off steps.
A method of depositing a layer on a monocrystalline silicon substrate comprising: A. forming on a portion of said substrate a film by plasma polymerizing said film from an ambient containing monomers selected from the group consisting of organosilicons, including organosilanes, organosilazanes, organosiloxanes, and mixtures thereof; B. heat treating said film at a temperature between about 85° C. and about 400° C.; and C. treating said film in an oxygen plasma.
Claim 2
Independent Claim
71 words
A method of depositing a layer on a monocrystalline silicon substrate comprising: A. forming on a portion of said substrate a film by plasma polymerizing said film from an ambient containing monomers selected from the group consisting of organosilicons, including organosilanes, organosilazanes, organosiloxanes, and mixtures thereof; B. heat treating said film at a temperature between about 85° C. and about 400° C.; and C. treating said film in an oxygen plasma.
Claim 3
Dependent Claim
37 words
The method of claim 1 wherein said plasma polymerizing ambient includes organoboron monomers whereby said formed film comprises an organoborosilicone polymer barrier film, and said oxygen plasma treatment forms a borosilicate surface layer on said barrier film.
Claim 4
Dependent Claim
12 words
The method of claim 2 wherein said organoboron monomers comprise trimethoxy boroxine.
Claim 5
Dependent Claim
18 words
The method of claim 1 wherein said substrate is heated to between about 100° to about 300° C.