US4226896A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Plasma method for forming a metal containing polymer
Assignee: International Business Machines Corp
•
Filing: 1977-12-23
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Granted: 1980-10-07
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Expires: 1997-12-23
Abstract
Abstract A plasma process for forming a polymer film containing metal therein includes the steps of providing an electrode of a metal that can be etched by a halogen, providing a substrate for the polymer film to be deposited thereon, and passing a halocarbon monomer through a plasma system so that the metal etched from the electrode forms a volatile halide and is incorporated in the polymer film that is deposited on the substrate.
Inventors
- 👤 John W. Coburn
- 👤 Eric Kay
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-26 17:52
CPC Classifications
B; B05; B05D; B05D1/00; B05D1/62; Y; Y10; Y10T; Y10T428/00; Y10T428/31504; Y10T428/3154; Y10T428/31544
Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
150 words
A plasma process for forming a polymer film containing metal therein comprising the steps of: providing a closed vacuum system having gas input means and gas exhaust means; providing a first electrode in said system of a metal adapted to be plasma etched by a halogen to form a volatile halide; providing a substrate in said system in spaced relation to said first electrode and adapted to have a polymer film deposited thereon; passing a halocarbon monomer through said system, said monomer plasma etching said first electrode to form a volatile halide and forming at the same time a stable polymer on said substrate when a glow discharge is established by the application of a suitable voltage to said first electrode; and applying a suitable voltage to said first electrode whereby metal plasma etched from said first electrode is incorporated into the polymer film that is deposited on said substrate.
Claim 2
Dependent Claim
150 words
A plasma process for forming a polymer film containing metal therein comprising the steps of: providing a closed vacuum system having gas input means and gas exhaust means; providing a first electrode in said system of a metal adapted to be plasma etched by a halogen to form a volatile halide; providing a substrate in said system in spaced relation to said first electrode and adapted to have a polymer film deposited thereon; passing a halocarbon monomer through said system, said monomer plasma etching said first electrode to form a volatile halide and forming at the same time a stable polymer on said substrate when a glow discharge is established by the application of a suitable voltage to said first electrode; and applying a suitable voltage to said first electrode whereby metal plasma etched from said first electrode is incorporated into the polymer film that is deposited on said substrate.
Claim 3
Dependent Claim
14 words
A method as described in claim 1 whereby the electrode is made of molybdenum.
Claim 4
Dependent Claim
12 words
A method as described in claim 1 whereby the halocarbon contains fluorine.
Claim 5
Dependent Claim
16 words
A method as described in claim 3 whereby the halocarbon is C 3 F 8 .
Claim 6
Dependent Claim
16 words
A method as described in claim 3 whereby the F/C ratio in the halocarbon is >2.
Claim 7
Dependent Claim
15 words
A method as described in claim 5 whereby the F/C ratio is 2.1 to 2.9.
Claim 8
Dependent Claim
33 words
A method as described in claim 5 whereby when the F/C ratio ≧3 the fluorocarbon monomer flow rate is slowed to a level sufficient to result in polymerization occurring in addition to etching.
Claim 9
Dependent Claim
17 words
A method as described in claim 1 whereby a second electrode of a suitable voltage is used.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1983-10-07 | 1984-04-07 | 1984-10-07 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1987-10-07 | 1988-04-07 | 1988-10-07 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1991-10-07 | 1992-04-07 | 1992-10-07 | $7700.00 | Window Closed / Lapsed |