US4035276A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Making coplanar layers of thin films
Assignee: International Business Machines Corp
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Filing: 1976-04-29
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Granted: 1977-07-12
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Expires: 1996-04-29
Abstract
Abstract A method for forming coplanar thin films, particularly conductor-insulator patterns, on a substrate. A pattern which includes a first thin film and an expendable material deposited thereon is formed on the substrate. The expendable material is selected so that it can be selectively removed by an etchant which does not attack the first thin film or an insulator which is to be deposited. The second thin film is deposited by RF sputtering at a bias which is sufficiently high to cause substantial reemission of the second film. This results in the covering of the exposed substrate surfaces and the upper surface of the material with the second film but leaving the side surfaces of the material exposed. The expendable material is then chemically etched so as to lift-off both the material and the second film deposited thereon, thereby leaving a coplanar pattern of first and second thin films. In the preferred embodiment, the first thin film is a conductor and the RF sputtered second thin film is an insulator such as glass. Alternatively, the first thin film could be the insulator with the RF sputtered second film being the conductor, or both thin films could be dissimilar metals or insulators. Via hole studs, or feedthroughs, which are metallic interconnections between a first level conductive pattern (metallization) and a second level conductive pattern, may be formed by repeating substantially the same steps atop the first conductive pattern at desired locations. As many substantially coplanar levels as desired may be formed without the need for etching the second thin film.
Inventors
- 👤 Janos Havas
- 👤 John S. Lechaton
- 👤 Joseph Skinner Logan
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-24 20:44
CPC Classifications
H; H10; H10W; H10W20/00; H10W20/01; H10D; H10D86/00; H10D86/01; H10P; H10P76/00; H10P76/20; H10P76/202; H10W20/031; H10W20/056; H10W20/058; H10W20/063; H10W20/40; H05; H05K; H05K3/00; H05K3/10; H05K3/14; H05K3/143; H10P14/00; H10P14/60; H10P14/63; H10P14/6326; H10P14/6328; H10P14/6329; H10P14/68; Y; Y10; Y10S; Y10S438/00; Y10S438/942; Y10S438/948; Y10S438/951; Y10T; Y10T428/00; Y10T428/24; Y10T428/24777
Claims Analysis
Total Claims: 23
Claim 1
Independent Claim
141 words
A method for fabricating substantially coplanar thin films comprising: forming a pattern on a substrate, said pattern including a first thin film and an expendable material disposed on said first thin film; depositing a second thin film atop said substrate and said pattern by RF Sputtering at a bias which is sufficiently high to cause substantial reemission of said second thin film, thereby covering the exposed substrate surfaces and the expendable material, but leaving the side surfaces of said expendable material exposed; those portions of said second thin film which are deposited atop said substrate being substantially coplanar with said first thin film; said expendable material being etchable by an etchant which does not attack either thin film; and etching said expendable material with said etchant, thereby removing said expendable material and that portion of the second thin film disposed thereon.
Claim 2
Independent Claim
141 words
A method for fabricating substantially coplanar thin films comprising: forming a pattern on a substrate, said pattern including a first thin film and an expendable material disposed on said first thin film; depositing a second thin film atop said substrate and said pattern by RF Sputtering at a bias which is sufficiently high to cause substantial reemission of said second thin film, thereby covering the exposed substrate surfaces and the expendable material, but leaving the side surfaces of said expendable material exposed; those portions of said second thin film which are deposited atop said substrate being substantially coplanar with said first thin film; said expendable material being etchable by an etchant which does not attack either thin film; and etching said expendable material with said etchant, thereby removing said expendable material and that portion of the second thin film disposed thereon.
Claim 3
Dependent Claim
22 words
A method as in claim 1 wherein said first thin film is a conductor and said second thin film is an insulator.
Claim 4
Dependent Claim
23 words
A method as in claim 2 wherein said conductive film is selected from the group consisting of aluminum, aluminum-copper alloys and aluminum-copper-silicon alloys.
Claim 5
Dependent Claim
27 words
A method as in claim 3 wherein said expendable material is selected from the group consisting of copper and chrome-copper-chrome composite; and said etchant is nitric acid.
Claim 6
Dependent Claim
22 words
A method as in claim 2 wherein said conductive film is selected from the group consisting of chrome-silver-chrome composite and tantalum-gold-tantalum composite.
Claim 7
Dependent Claim
19 words
A method as in claim 5 wherein said expendable material is aluminum; and said etchant is potassium hydroxide solution.
Claim 8
Dependent Claim
22 words
A method as in claim 1 wherein said first thin film is an insulator and said second thin film is a conductor.
Claim 9
Independent Claim
339 words
A method for fabricating multi-level thin films comprising: forming a first level pattern on a substrate, said first level pattern including a first thin film and a first expendable material disposed on said first thin film; depositing a second thin film atop said substrate and said first level pattern by RF sputtering at a bias which is sufficiently high to cause substantial reemission of said second thin film, thereby covering the exposed substrate surfaces and the first expendable material, but leaving the side surfaces of said first expendable material exposed; those portions of said second thin film which are deposited atop said substrate being substantially coplanar with said first thin film; said first expendable material being etchable by a first etchant which does not attack either the first or second film; and etching said first expendable material with said first etchant, thereby removing said first expendable material and that portion of said second thin film disposed thereon and leaving a substantially coplanar first-level pattern of said first and second thin films; forming a second pattern on said coplanar first-level pattern, said second pattern including a third thin film and a second expendable material disposed on said third thin film; depositing a fourth thin film atop said coplanar first level pattern and said second pattern by RF sputtering at a bias which is sufficiently high to cause substantial reemission of said fourth film, thereby covering the exposed first level pattern and the second expendable material, but leaving the side surfaces of said second expendable material exposed; those portions of said fourth thin film which are deposited atop said coplanar first level pattern being substantially coplanar with said third thin film; said second expendable material being etchable by a second etchant which does not attack either said third or fourth film; and etching said second expendable material with said second etchant, thereby removing said second expendable material and that portion of said fourth thin film disposed thereon and leaving a substantially coplanar second-level pattern of said third and fourth thin films.
Claim 10
Independent Claim
339 words
A method for fabricating multi-level thin films comprising: forming a first level pattern on a substrate, said first level pattern including a first thin film and a first expendable material disposed on said first thin film; depositing a second thin film atop said substrate and said first level pattern by RF sputtering at a bias which is sufficiently high to cause substantial reemission of said second thin film, thereby covering the exposed substrate surfaces and the first expendable material, but leaving the side surfaces of said first expendable material exposed; those portions of said second thin film which are deposited atop said substrate being substantially coplanar with said first thin film; said first expendable material being etchable by a first etchant which does not attack either the first or second film; and etching said first expendable material with said first etchant, thereby removing said first expendable material and that portion of said second thin film disposed thereon and leaving a substantially coplanar first-level pattern of said first and second thin films; forming a second pattern on said coplanar first-level pattern, said second pattern including a third thin film and a second expendable material disposed on said third thin film; depositing a fourth thin film atop said coplanar first level pattern and said second pattern by RF sputtering at a bias which is sufficiently high to cause substantial reemission of said fourth film, thereby covering the exposed first level pattern and the second expendable material, but leaving the side surfaces of said second expendable material exposed; those portions of said fourth thin film which are deposited atop said coplanar first level pattern being substantially coplanar with said third thin film; said second expendable material being etchable by a second etchant which does not attack either said third or fourth film; and etching said second expendable material with said second etchant, thereby removing said second expendable material and that portion of said fourth thin film disposed thereon and leaving a substantially coplanar second-level pattern of said third and fourth thin films.
Claim 11
Dependent Claim
24 words
A method as in claim 8 wherein said first and third thin films are conductive and said second and fourth thin films are insulators.
Claim 12
Dependent Claim
29 words
A method as in claim 9 wherein said second pattern is a feedthrough pattern for connecting said first thin conductive film to one or more succeeding thin film levels.
Claim 13
Dependent Claim
27 words
A method as in claim 10 wherein at least one of said conductive films is selected from the group consisting of aluminum, aluminum-copper alloys and aluminum-copper-silicon alloys.
Claim 14
Dependent Claim
35 words
A method as in claim 11 wherein at least one of said expendable materials is selected from the group consisting of copper and chrome-copper-chrome composite; and at least one of said etchants is nitric acid.
Claim 15
Dependent Claim
26 words
A method as in claim 10 wherein at least one of said conductive films is selected from the group consisting of chrome-silver-chrome composite and tantalum-gold-tantalum composite.
Claim 16
Dependent Claim
27 words
A method as in claim 13 wherein at least one of said expendable materials is aluminum; and at least one of said etchants is potassium hydroxide solution.
Claim 17
Dependent Claim
191 words
A method as in claim 10 further comprising the steps of: forming a third pattern on said coplanar second-level pattern, said third pattern including another conductive thin film and a third expendable material disposed on said other film; at least a portion of said third pattern being connected to said feedthrough pattern; depositing another insulating film atop said coplanar second level pattern and said third pattern by RF sputtering at a bias which is sufficiently high to cause substantial reemission of said other insulative film, thereby covering the exposed second level pattern and the third expendable material, but leaving the side surfaces of said third expendable material exposed; those portions of said another insulating film which are deposited atop said second level coplanar pattern being substantially coplanar with said another conductive film; said third expendable material being etchable by a third etchant which does not attack either of said other films; and etching said third expendable material with said third etchant, thereby removing said third expendable material and that portion of said another insulator deposited thereon and leaving a substantially coplanar third level pattern of said other conductive and insulative films.
Claim 18
Dependent Claim
27 words
A method as in claim 15 wherein at least one of said conductive films is selected from the group consisting of aluminum, aluminum-copper alloys and aluminum-copper-silicon alloys.
Claim 19
Dependent Claim
35 words
A method as in claim 16 wherein at least one of said expendable materials is selected from the group consisting of copper and chrome-copper-chrome composite; and at least one of said etchants is nitric acid.
Claim 20
Dependent Claim
26 words
A method as in claim 15 wherein at least one of said conductive films is selected from the group consisting of chrome-silver-chrome composite and tantalum-gold-tantalum composite.
Claim 21
Dependent Claim
25 words
A method as in claim 18 wherein at least one of said expendable materials is aluminum; and at least one of said etchants is KOH.
Claim 22
Dependent Claim
24 words
A method as in claim 8 wherein said first and third thin films are insulators and said second and fourth thin films are conductive.
Claim 23
Dependent Claim
19 words
A method as in claim 8 wherein said substrate includes one or more substantially coplanar patterns of thin films.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1980-07-11 | 1981-01-10 | 1981-07-12 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1984-07-11 | 1985-01-10 | 1985-07-12 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1988-07-11 | 1989-01-10 | 1989-07-12 | $7700.00 | Window Closed / Lapsed |