US6967122B2
Expired / Lapsed
US
⏱️ 0.0 years remaining
Group III nitride compound semiconductor and method for manufacturing the same
Assignee: Toyoda Gosei Co Ltd
•
Filing: 2001-02-23
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Granted: 2005-11-22
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Expires: 2021-02-23
Abstract
Abstract A sapphire substrate 1 is etched so that each trench has a width of 10 μm and a depth of 10 μm were formed at 10 μm of intervals in a stripe pattern. Next, an AlN buffer layer 2 having a thickness of approximately 40 nm is formed mainly on the upper surface and the bottom surface of the trenches of the substrate 1 . Then a GaN layer 3 is formed through vertical and lateral epitaxial growth. At this time, lateral epitaxial growth of the buffer layer 21 , which was mainly formed on the upper surface of the trenches, filled the trenches and thus establishing a flat top surface. The portions of the GaN layer 3 formed above the top surfaces of the mesas having a depth of 10 μm exhibited significant suppression of threading dislocation in contrast to the portions formed above the bottoms of the trenches.
Inventors
- 👤 Yuta Tezen
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-26 20:17
CPC Classifications
H; H10; H10H; H10H20/00; H10H20/01; H10H20/011; H10H20/013; H10H20/0133; H10H20/01335; H10P; H10P14/00; H10P14/20; H10P14/24; H10P14/27; H10P14/271; H10P14/276; H10P14/278; H10P14/29; H10P14/2901; H10P14/2921; H10P14/32; H10P14/3202; H10P14/3214; H10P14/3216; H10P14/34; H10P14/3402; H10P14/3414; H10P14/3416; H01; H01S; H01S2304/00; H01S2304/12; H01S5/00; H01S5/02; H01S5/0206; H01S5/0213; H01S5/30; H01S5/32; H01S5/323; H01S5/32308; H01S5/32341; H10H20/80; H10H20/81; H10H20/8215
Claims Analysis
Total Claims: 36
Claim 1
Independent Claim
118 words
A method for fabricating a Group III nitride compound semiconductor on a substrate, comprising: removing at least a portion of the surface of said substrate, so as to provide a trench/post on the surface of said substrate; and epitaxially growing, vertically and laterally, a desired Group III nitride compound semiconductor, so as to cover the upper portion of the trench of said trench/post of said substrate, with a top surface of said substrate which is not removed serving as a seed for crystal growth, wherein the remaining surface of said substrate being formed by removing the surface of said substrate so as to form an island-like structure including any of such as a dot-like, stripe-shaped, or grid-like structure.
Claim 2
Independent Claim
118 words
A method for fabricating a Group III nitride compound semiconductor on a substrate, comprising: removing at least a portion of the surface of said substrate, so as to provide a trench/post on the surface of said substrate; and epitaxially growing, vertically and laterally, a desired Group III nitride compound semiconductor, so as to cover the upper portion of the trench of said trench/post of said substrate, with a top surface of said substrate which is not removed serving as a seed for crystal growth, wherein the remaining surface of said substrate being formed by removing the surface of said substrate so as to form an island-like structure including any of such as a dot-like, stripe-shaped, or grid-like structure.
Claim 3
Dependent Claim
55 words
A method for fabricating a Group III nitride compound semiconductor substrate including a method for fabricating a Group III nitride compound semiconductor according to claim 1 and removing substantially entire portions except for an upper layer formed on a portion provided through lateral epitaxial growth, to thereby obtain a Group III nitride compound semiconductor substrate.
Claim 4
Independent Claim
126 words
A method for fabricating a Group III nitride compound semiconductor in which a Group III nitride compound semiconductor is formed on a buffer layer formed on a substrate, comprising: removing at least a portion of the surface of said substrate, so as to provide a trench/post on the surface of said substrate; forming said buffer layer on said substrate; and epitaxially growing, vertically and laterally, a desired Group III nitride compound semiconductor, so as to cover the upper portion of the trench of said trench/post of said substrate, with said buffer layer formed on the remaining surface of said substrate serving as a seed for crystal growth, wherein said buffer layer being formed in an island-like structure including any of a dot-like, stripe-shaped, or grid-like structure.
Claim 5
Independent Claim
126 words
A method for fabricating a Group III nitride compound semiconductor in which a Group III nitride compound semiconductor is formed on a buffer layer formed on a substrate, comprising: removing at least a portion of the surface of said substrate, so as to provide a trench/post on the surface of said substrate; forming said buffer layer on said substrate; and epitaxially growing, vertically and laterally, a desired Group III nitride compound semiconductor, so as to cover the upper portion of the trench of said trench/post of said substrate, with said buffer layer formed on the remaining surface of said substrate serving as a seed for crystal growth, wherein said buffer layer being formed in an island-like structure including any of a dot-like, stripe-shaped, or grid-like structure.
Claim 6
Dependent Claim
45 words
A Group III nitride compound semiconductor device, which is formed as an upper layer provided on a lateral-epitaxially grown portion of a Group III nitride compound semiconductor layer produced through a method for fabricating a Group III nitride compound semiconductor according to claim 3 .
Claim 7
Dependent Claim
55 words
A Group III nitride compound semiconductor light-emitting device, which is produced by stacking, as an upper layer, a different Group III nitride compound semiconductor layer on a lateral-epitaxially grown portion of a Group III nitride compound semiconductor layer produced through a method for fabricating a Group III nitride compound semiconductor according to claim 3 .
Claim 8
Dependent Claim
55 words
A method for fabricating a Group III nitride compound semiconductor substrate including a method for fabricating a Group III nitride compound semiconductor according to claim 3 and removing substantially entire portions except for an upper layer formed on a portion provided through lateral epitaxial growth, to thereby obtain a Group III nitride compound semiconductor substrate.
Claim 9
Independent Claim
157 words
A method for fabricating a Group III nitride compound semiconductor in which a Group III nitride compound semiconductor is formed on a buffer layer formed on a substrate, comprising: removing at least a portion of the surface of said substrate, so as to provide a trench/post on the surface of said substrate; forming a buffer layer on said substrate; epitaxially growing, vertically, a Group III nitride compound semiconductor on said buffer layer so as to form a monocrystalline layer; and epitaxially growing, vertically and laterally, a desired Group III nitride compound semiconductor, so as to cover the upper portion of the trench of said trench/post of said substrate, with said monocrystalline layer of said Group III nitride compound semiconductor formed on said buffer layer on the remaining surface of said substrate serving as a seed for crystal growth, wherein said monocrystalline layer is formed in an island-like structure including any of a dot-like, stripe-shaped, or grid-like structure.
Claim 10
Independent Claim
157 words
A method for fabricating a Group III nitride compound semiconductor in which a Group III nitride compound semiconductor is formed on a buffer layer formed on a substrate, comprising: removing at least a portion of the surface of said substrate, so as to provide a trench/post on the surface of said substrate; forming a buffer layer on said substrate; epitaxially growing, vertically, a Group III nitride compound semiconductor on said buffer layer so as to form a monocrystalline layer; and epitaxially growing, vertically and laterally, a desired Group III nitride compound semiconductor, so as to cover the upper portion of the trench of said trench/post of said substrate, with said monocrystalline layer of said Group III nitride compound semiconductor formed on said buffer layer on the remaining surface of said substrate serving as a seed for crystal growth, wherein said monocrystalline layer is formed in an island-like structure including any of a dot-like, stripe-shaped, or grid-like structure.
Claim 11
Dependent Claim
45 words
A Group III nitride compound semiconductor device, which is formed as an upper layer provided on a lateral-epitaxially grown portion of a Group III nitride compound semiconductor layer produced through a method for fabricating a Group III nitride compound semiconductor according to claim 7 .
Claim 12
Dependent Claim
55 words
A Group III nitride compound semiconductor light-emitting device, which is produced by stacking, as an upper layer, a different Group III nitride compound semiconductor layer on a lateral-epitaxially grown portion of a Group III nitride compound semiconductor layer produced through a method for fabricating a Group III nitride compound semiconductor according to claim 7 .
Claim 13
Dependent Claim
55 words
A method for fabricating a Group III nitride compound semiconductor substrate including a method for fabricating a Group III nitride compound semiconductor according to claim 7 and removing substantially entire portions except for an upper layer formed on a portion provided through lateral epitaxial growth, to thereby obtain a Group III nitride compound semiconductor substrate.
Claim 14
Independent Claim
151 words
A method for fabricating a Group III nitride compound semiconductor in which a Group III nitride compound semiconductor is formed on a buffer layer formed on a substrate, comprising: forming said buffer layer on said substrate; removing at least a portion of said buffer layer and the surface of said substrate so as to provide a trench/post having a post on which said buffer layer is formed on the surface of said substrate and a trench on which said buffer layer is not formed; and epitaxially growing, vertically and laterally, a desired Group III nitride compound semiconductor, so as to cover the upper portion of the trench of said trench/post of said substrate, with said buffer layer formed on the remaining surface of said substrate serving as a seed for crystal growth, wherein said buffer layer being formed in an island-like structure including any of a dot-like, stripe-shaped, or grid-like structure.
Claim 15
Independent Claim
151 words
A method for fabricating a Group III nitride compound semiconductor in which a Group III nitride compound semiconductor is formed on a buffer layer formed on a substrate, comprising: forming said buffer layer on said substrate; removing at least a portion of said buffer layer and the surface of said substrate so as to provide a trench/post having a post on which said buffer layer is formed on the surface of said substrate and a trench on which said buffer layer is not formed; and epitaxially growing, vertically and laterally, a desired Group III nitride compound semiconductor, so as to cover the upper portion of the trench of said trench/post of said substrate, with said buffer layer formed on the remaining surface of said substrate serving as a seed for crystal growth, wherein said buffer layer being formed in an island-like structure including any of a dot-like, stripe-shaped, or grid-like structure.
Claim 16
Dependent Claim
45 words
A Group III nitride compound semiconductor device, which is formed as an upper layer provided on a lateral-epitaxially grown portion of a Group III nitride compound semiconductor layer produced through a method for fabricating a Group III nitride compound semiconductor according to claim 11 .
Claim 17
Independent Claim
213 words
A method for fabricating a Group III nitride compound semiconductor in which a Group III nitride compound semiconductor is formed on a buffer layer formed on a substrate, comprising: forming said buffer layer on said substrate; epitaxially growing, vertically, a Group III nitride compound semiconductor on said buffer layer so as to form a monocrystalline layer; removing at least a portion of said monocrystalline layer of said Group III nitride compound semiconductor, said buffer layer, and the surface of said substrate so as to provide a trench/post having a post on which said monocrystalline layer of said Group III nitride compound semiconductor and said buffer layer is formed on said surface of said substrate and a trench on which said monocrystalline layer of said Group III nitride compound semiconductor and said buffer layer are not formed; and epitaxially growing, vertically and laterally, a desired Group III nitride compound semiconductor, so as to cover the upper portion of the trench of said trench/post of said substrate, with said monocrystalline layer of Group III nitride compound semiconductor formed on said buffer layer on the remaining surface of said substrate serving as a seed for crystal growth, wherein said monocrystalline layer being formed in an island-like Structure including any of a dot-like, stripe-shaped, or grid-like structure.
Claim 18
Independent Claim
213 words
A method for fabricating a Group III nitride compound semiconductor in which a Group III nitride compound semiconductor is formed on a buffer layer formed on a substrate, comprising: forming said buffer layer on said substrate; epitaxially growing, vertically, a Group III nitride compound semiconductor on said buffer layer so as to form a monocrystalline layer; removing at least a portion of said monocrystalline layer of said Group III nitride compound semiconductor, said buffer layer, and the surface of said substrate so as to provide a trench/post having a post on which said monocrystalline layer of said Group III nitride compound semiconductor and said buffer layer is formed on said surface of said substrate and a trench on which said monocrystalline layer of said Group III nitride compound semiconductor and said buffer layer are not formed; and epitaxially growing, vertically and laterally, a desired Group III nitride compound semiconductor, so as to cover the upper portion of the trench of said trench/post of said substrate, with said monocrystalline layer of Group III nitride compound semiconductor formed on said buffer layer on the remaining surface of said substrate serving as a seed for crystal growth, wherein said monocrystalline layer being formed in an island-like Structure including any of a dot-like, stripe-shaped, or grid-like structure.
Claim 19
Independent Claim
202 words
A method for fabricating a Group III nitride compound semiconductor in which a Group III nitride compound semiconductor is grown on a substrate, comprising: a surface treatment process of decreasing smoothness of at least a portion of the surface of said substrate and forming a portion on which a Group III nitride compound semiconductor is not sufficiently to be formed on the surface of said substrate; a process of growing said Group III nitride compound semiconductor on said treated substrate and forming a portion where a monocrystalline layer of said Group III nitride compound semiconductor is sufficiently formed and a portion where a monocrystalline layer of said Group III nitride compound semiconductor is not sufficiently formed; and a process of epitaxially growing, vertically and laterally, a Group III nitride compound semiconductor, so as to cover the portion where said monocrystalline layer of said Group III nitride compound semiconductor is not sufficiently formed, with said monocrystalline layer of said Group III nitride compound semiconductor formed on the portion of said substrate whose surface smoothness is not decreased serving as a seed for crystal growth, wherein said monocrystalline layer being formed in an island-like structure including any of a dot-like, stripe-shaped, or grid-like structure.
Claim 20
Independent Claim
202 words
A method for fabricating a Group III nitride compound semiconductor in which a Group III nitride compound semiconductor is grown on a substrate, comprising: a surface treatment process of decreasing smoothness of at least a portion of the surface of said substrate and forming a portion on which a Group III nitride compound semiconductor is not sufficiently to be formed on the surface of said substrate; a process of growing said Group III nitride compound semiconductor on said treated substrate and forming a portion where a monocrystalline layer of said Group III nitride compound semiconductor is sufficiently formed and a portion where a monocrystalline layer of said Group III nitride compound semiconductor is not sufficiently formed; and a process of epitaxially growing, vertically and laterally, a Group III nitride compound semiconductor, so as to cover the portion where said monocrystalline layer of said Group III nitride compound semiconductor is not sufficiently formed, with said monocrystalline layer of said Group III nitride compound semiconductor formed on the portion of said substrate whose surface smoothness is not decreased serving as a seed for crystal growth, wherein said monocrystalline layer being formed in an island-like structure including any of a dot-like, stripe-shaped, or grid-like structure.
Claim 21
Independent Claim
173 words
A method for fabricating a Group III nitride compound semiconductor in which a Group III nitride compound semiconductor is grown on a buffer layer formed on a substrate, comprising: a surface treatment process of decreasing smoothness of at least a portion of the surface of said substrate and forming a portion on which said buffer layer is sufficiently to be formed on the surface of said substrate; a process of growing said buffer layer on said treated substrate and forming a portion where said buffer layer is sufficiently formed and a portion where said buffer layer is not sufficiently formed; and a process of epitaxially growing, vertically and laterally, a desired Group III nitride compound semiconductor, so as to cover the portion where said buffer layer is not sufficiently formed, with said buffer layer formed on the portion of said substrate whose surface smoothness is not decreased serving as a seed for crystal growth, wherein said buffer layer being formed in an island-like structure including any of a dot-like, stripe-shaped, or grid-like structure.
Claim 22
Independent Claim
173 words
A method for fabricating a Group III nitride compound semiconductor in which a Group III nitride compound semiconductor is grown on a buffer layer formed on a substrate, comprising: a surface treatment process of decreasing smoothness of at least a portion of the surface of said substrate and forming a portion on which said buffer layer is sufficiently to be formed on the surface of said substrate; a process of growing said buffer layer on said treated substrate and forming a portion where said buffer layer is sufficiently formed and a portion where said buffer layer is not sufficiently formed; and a process of epitaxially growing, vertically and laterally, a desired Group III nitride compound semiconductor, so as to cover the portion where said buffer layer is not sufficiently formed, with said buffer layer formed on the portion of said substrate whose surface smoothness is not decreased serving as a seed for crystal growth, wherein said buffer layer being formed in an island-like structure including any of a dot-like, stripe-shaped, or grid-like structure.
Claim 23
Dependent Claim
55 words
A method for fabricating a Group III nitride compound semiconductor substrate including a method for fabricating a Group III nitride compound semiconductor according to claim 15 and removing substantially entire portions except for an upper layer formed on a portion provided through lateral epitaxial growth, to thereby obtain a Group III nitride compound semiconductor substrate.
Claim 24
Independent Claim
214 words
A method for fabricating a Group III nitride compound semiconductor in which a Group III nitride compound semiconductor is grown on a buffer layer formed on a substrate, comprising: a surface treatment process of decreasing smoothness of at least a portion of the surface of said substrate and forming a portion on which said buffer layer is sufficiently to be formed on the surface of said substrate; a process of growing said buffer layer on said treated substrate and forming a portion where said buffer layer is sufficiently formed and a portion where said buffer layer is not sufficiently formed; a process of forming a monocrystalline layer of Group III nitride compound semiconductor on the portion where said buffer layer is sufficiently formed; and a process of epitaxially growing, vertically and laterally, a desired Group III nitride compound semiconductor, so as to cover the portion where said buffer layer is not sufficiently formed, with said monocrystalline layer of said Group III nitride compound semiconductor on said buffer layer formed on the portion of said substrate whose surface smoothness is not decreased serving as a seed for crystal growth, wherein said monocrystalline layer of said Group III nitride compound semiconductor being formed in an island-like structure including any of a dot-like, stripe-shaped, or grid-like structure.
Claim 25
Independent Claim
214 words
A method for fabricating a Group III nitride compound semiconductor in which a Group III nitride compound semiconductor is grown on a buffer layer formed on a substrate, comprising: a surface treatment process of decreasing smoothness of at least a portion of the surface of said substrate and forming a portion on which said buffer layer is sufficiently to be formed on the surface of said substrate; a process of growing said buffer layer on said treated substrate and forming a portion where said buffer layer is sufficiently formed and a portion where said buffer layer is not sufficiently formed; a process of forming a monocrystalline layer of Group III nitride compound semiconductor on the portion where said buffer layer is sufficiently formed; and a process of epitaxially growing, vertically and laterally, a desired Group III nitride compound semiconductor, so as to cover the portion where said buffer layer is not sufficiently formed, with said monocrystalline layer of said Group III nitride compound semiconductor on said buffer layer formed on the portion of said substrate whose surface smoothness is not decreased serving as a seed for crystal growth, wherein said monocrystalline layer of said Group III nitride compound semiconductor being formed in an island-like structure including any of a dot-like, stripe-shaped, or grid-like structure.
Claim 26
Dependent Claim
55 words
A method for fabricating a Group III nitride compound semiconductor substrate including a method for fabricating a Group III nitride compound semiconductor according to claim 17 and removing substantially entire portions except for an upper layer formed on a portion provided through lateral epitaxial growth, to thereby obtain a Group III nitride compound semiconductor substrate.
Claim 27
Independent Claim
150 words
A method for fabricating a Group III nitride compound semiconductor in which a Group III nitride compound semiconductor is grown on a buffer layer formed on a substrate, comprising: a process of forming a buffer layer on a substrate; a surface treatment process of decreasing smoothness of at least a portion of the surface of said buffer layer and forming a portion on which a monocrystalline layer of a Group III nitride compound semiconductor is not sufficiently to be formed; a process of epitaxially growing, vertically and laterally, a desired Group III nitride compound semiconductor, so as to cover the portion where smoothness of said buffer layer is decreased, with the portion of said buffer layer whose surface smoothness is not decreased serving as a seed for crystal growth, wherein the portion of said buffer layer being formed in island-like structure including any of a dot-like, stripe-shaped, or grid-like structure.
Claim 28
Independent Claim
150 words
A method for fabricating a Group III nitride compound semiconductor in which a Group III nitride compound semiconductor is grown on a buffer layer formed on a substrate, comprising: a process of forming a buffer layer on a substrate; a surface treatment process of decreasing smoothness of at least a portion of the surface of said buffer layer and forming a portion on which a monocrystalline layer of a Group III nitride compound semiconductor is not sufficiently to be formed; a process of epitaxially growing, vertically and laterally, a desired Group III nitride compound semiconductor, so as to cover the portion where smoothness of said buffer layer is decreased, with the portion of said buffer layer whose surface smoothness is not decreased serving as a seed for crystal growth, wherein the portion of said buffer layer being formed in island-like structure including any of a dot-like, stripe-shaped, or grid-like structure.
Claim 29
Dependent Claim
55 words
A method for fabricating a Group III nitride compound semiconductor substrate including a method for fabricating a Group III nitride compound semiconductor according to claim 19 and removing substantially entire portions except for an upper layer formed on a portion provided through lateral epitaxial growth, to thereby obtain a Group III nitride compound semiconductor substrate.
Claim 30
Independent Claim
181 words
A method for fabricating a Group III nitride compound semiconductor in which a Group III nitride compound semiconductor is grown on a buffer layer formed on a substrate, comprising: a process of forming a buffer layer on a substrate; a process of forming a first Group III nitride compound semiconductor on said buffer layer; a surface treatment process of decreasing smoothness of at least a portion of said first Group III nitride compound semiconductor and forming a portion on which a monocrystalline layer of a second Group III nitride compound semiconductor is not sufficiently to be formed; and a process of epitaxially growing, vertically and laterally, said second Group III nitride compound semiconductor, so as to cover the portion where smoothness of said first Group III nitride compound semiconductor is decreased, with the portion of said first Group III nitride compound semiconductor whose surface smoothness is not decreased serving as a seed for crystal growth, wherein the portion of said first Group III nitride compound semiconductor being formed in an island-like structure including any of a dot-like, stripe-shaped, or grid-like structure.
Claim 31
Independent Claim
181 words
A method for fabricating a Group III nitride compound semiconductor in which a Group III nitride compound semiconductor is grown on a buffer layer formed on a substrate, comprising: a process of forming a buffer layer on a substrate; a process of forming a first Group III nitride compound semiconductor on said buffer layer; a surface treatment process of decreasing smoothness of at least a portion of said first Group III nitride compound semiconductor and forming a portion on which a monocrystalline layer of a second Group III nitride compound semiconductor is not sufficiently to be formed; and a process of epitaxially growing, vertically and laterally, said second Group III nitride compound semiconductor, so as to cover the portion where smoothness of said first Group III nitride compound semiconductor is decreased, with the portion of said first Group III nitride compound semiconductor whose surface smoothness is not decreased serving as a seed for crystal growth, wherein the portion of said first Group III nitride compound semiconductor being formed in an island-like structure including any of a dot-like, stripe-shaped, or grid-like structure.
Claim 32
Dependent Claim
55 words
A method for fabricating a Group III nitride compound semiconductor substrate including a method for fabricating a Group III nitride compound semiconductor according to claim 21 and removing substantially entire portions except for an upper layer formed on a portion provided through lateral epitaxial growth, to thereby obtain a Group III nitride compound semiconductor substrate.
Claim 33
Dependent Claim
87 words
A Group III nitride compound semiconductor device, comprising: a substrate, including a post and a trench, which includes at least one structure of a dot-like structure, a stripe-shaped structure, and a grid-like structure at its surface; a buffer layer formed on said post and said trench of said substrate; and a Group III nitride compound semiconductor which is formed by growing a Group III nitride compound semiconductor layer using said buffer layer formed on said post as a seed to cover the upper portion of said trench.
Claim 34
Dependent Claim
87 words
A Group III nitride compound semiconductor device, comprising: a substrate, including a post and a trench, which includes at least one structure of a dot-like structure, a stripe-shaped structure, and a grid-like structure at its surface; a buffer layer formed on said post and said trench of said substrate; and a Group III nitride compound semiconductor which is formed by growing a Group III nitride compound semiconductor layer using said buffer layer formed on said post as a seed to cover the upper portion of said trench.
Claim 35
Dependent Claim
102 words
A Group III nitride compound semiconductor light-emitting device, comprising: a substrate, including a post and a trench, which includes at least one structure of a dot-like structure, a stripe-shaped structure, and a grid-like structure at its surface; a buffer layer formed on said post and said trench of said substrate; and a first Group III nitride compound semiconductor formed on said buffer layer; and a second Group III nitride compound semiconductor which is formed by growing a Group III nitride compound semiconductor layer using said first Group III nitride compound semiconductor as a seed to cover the upper portion of said trench.
Claim 36
Dependent Claim
102 words
A Group III nitride compound semiconductor light-emitting device, comprising: a substrate, including a post and a trench, which includes at least one structure of a dot-like structure, a stripe-shaped structure, and a grid-like structure at its surface; a buffer layer formed on said post and said trench of said substrate; and a first Group III nitride compound semiconductor formed on said buffer layer; and a second Group III nitride compound semiconductor which is formed by growing a Group III nitride compound semiconductor layer using said first Group III nitride compound semiconductor as a seed to cover the upper portion of said trench.
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| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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