US6738600B1
Expired / Lapsed
US
⏱️ 0.0 years remaining
Ceramic microelectromechanical structure
Assignee: Harris Corp
•
Filing: 2000-08-04
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Granted: 2004-05-18
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Expires: 2020-08-04
Abstract
Abstract A microelectromechanical structure and method is disclosed. A ceramic substrate preferably is formed from low temperature co-fired ceramic sheets. A low loss photodefinable dielectric planarizing layer is formed over one surface of the ceramic substrate. This layer can be a sacrificial layer or a subsequent sacrificial layer added. A photodefined conductor is printed over the low loss dielectric planarizing layer and formed with the sacrificial layer into a structural circuit component. In one aspect of the invention, a switch is formed with a biasing actuator and deflectable member formed over the biasing actuator and moveable into open and closed circuit positions.
Inventors
- 👤 Charles M. Newton
- 👤 Raymond C. Rumpf
- 👤 Carol Gamlen
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 15:53
CPC Classifications
B; B81; B81C; B81C1/00; B81C1/00015; B81C1/00134; B81C1/0015; H; H01; H01H; H01H59/00; H01H59/0009; H01P; H01P1/00; H01P1/10; H01P1/12; H01P1/127; B81B; B81B2201/00; B81B2201/02; B81B2201/0271; B81C2201/00; B81C2201/01; B81C2201/0101; B81C2201/0102; B81C2201/0105; B81C2201/0109; H05; H05K; H05K1/00; H05K1/02; H05K1/09; H05K1/092; H05K3/00; H05K3/02; Y; Y10; Y10T; Y10T29/00; Y10T29/49; Y10T29/49002; Y10T29/49117; Y10T428/00; Y10T428/24; Y10T428/24802; Y10T428/24926; Y10T428/24942; Y10T428/2495
Claims Analysis
Total Claims: 26
Claim 1
Independent Claim
61 words
A microelectromechanical structure used for radio frequency applications comprising: a multilayer ceramic substrate having embedded microstrip and interconnect structures among different layers; a low loss photodefinable dielectric planarizing layer formed substantially over the ceramic substrate; and a photodefined conductor printed in a position over the low loss dielectric planarizing layer and formed into a microelectromechanical (MEMS) switch used at radio frequencies.
Claim 2
Dependent Claim
61 words
A microelectromechanical structure used for radio frequency applications comprising: a multilayer ceramic substrate having embedded microstrip and interconnect structures among different layers; a low loss photodefinable dielectric planarizing layer formed substantially over the ceramic substrate; and a photodefined conductor printed in a position over the low loss dielectric planarizing layer and formed into a microelectromechanical (MEMS) switch used at radio frequencies.
Claim 3
Dependent Claim
33 words
A microelectromechanical structure according to claim 1 , and further comprising a sacrificial layer over said low loss photodefinable dielectric planarizing layer and formed with the photodefined conductor into a structural circuit component.
Claim 4
Dependent Claim
22 words
A microelectromechanical structure according to claim 1 , wherein said low loss photodefinable dielectric planarizing layer is formed as a sacrificial layer.
Claim 5
Dependent Claim
25 words
A microelectromechanical structure according to claim 1 , wherein said switch further comprises a deflectable member that is movable into open and closed circuit positions.
Claim 6
Dependent Claim
18 words
A microelectromechanical structure according to claim 4 , wherein said deflectable member is formed as a cantilever beam.
Claim 7
Dependent Claim
18 words
A microelectromechanical structure according to claim 4 , wherein said deflectable member is formed as a suspended beam.
Claim 8
Dependent Claim
25 words
A microelectromechanical structure according to claim 1 , wherein said photodefined conductor further comprises an input signal line and output signal line that transfer current.
Claim 9
Dependent Claim
17 words
A microelectromechanical structure according to claim 1 , wherein said photodefined conductor comprises a thick film conductor.
Claim 10
Dependent Claim
26 words
A microelectromechanical structure according to claim 1 , wherein said low loss photodefinable dielectric planarizing layer is formed from a borosilicate based thick film dielectric material.
Claim 11
Dependent Claim
24 words
A microelectromechanical structure according to claim 1 , wherein said photodefinable dielectric planarizing layer has a dielectric constant of about 3.8 to about 4.2.
Claim 12
Dependent Claim
21 words
A microelectromechanical structure according to claim 1 , wherein said photodefinable dielectric planarizing layer has a loss factor of about 0.01%.
Claim 13
Dependent Claim
22 words
A microelectromechanical according to claim 1 , wherein said ceramic substrate is formed from ceramic sheets that are stacked and co-fired together.
Claim 14
Independent Claim
59 words
A method of forming a microelectromechanical structure used for radio frequency applications comprising the steps of: forming a multilayer ceramic substrate having embedded microstrip and interconnect structures among different layers; forming a low loss photodefinable dielectric planarizing layer substantially over the ceramic substrate; and forming a microelectromechanical (MEM) switch from at least the photodefined conductor used at radio frequencies.
Claim 15
Independent Claim
59 words
A method of forming a microelectromechanical structure used for radio frequency applications comprising the steps of: forming a multilayer ceramic substrate having embedded microstrip and interconnect structures among different layers; forming a low loss photodefinable dielectric planarizing layer substantially over the ceramic substrate; and forming a microelectromechanical (MEM) switch from at least the photodefined conductor used at radio frequencies.
Claim 16
Dependent Claim
33 words
A method according to claim 13 , and further comprising the step of forming the planarizing layer as a sacrificial layer and removing part of the planarizing layer to form the structural component.
Claim 17
Dependent Claim
32 words
A method according to claim 13 , and further comprising the step of forming a sacrificial layer over the planarizing layer that is at least partially removed to form the structural component.
Claim 18
Dependent Claim
26 words
A method according to claim 13 , and further comprising the step of forming the ceramic substrate from ceramic sheets that are stacked and co-fired together.
Claim 19
Dependent Claim
28 words
A method according to claim 13 , and further comprising the step of forming the switch with a deflectable member and movable into open and closed circuit positions.
Claim 20
Dependent Claim
21 words
A method according to claim 17 , and further comprising the step of forming the deflectable member as a cantilever beam.
Claim 21
Dependent Claim
21 words
A method according to claim 17 , and further comprising the step of forming the deflectable member as a suspended beam.
Claim 22
Dependent Claim
33 words
A method according to claim 17 , and further comprising the step of forming an input signal line and output signal line that transfer current when said switch is in the closed position.
Claim 23
Dependent Claim
23 words
A method according to claim 13 , and further comprising the step of forming the photodefined conductor member as a thick film conductor.
Claim 24
Dependent Claim
29 words
A method according to claim 13 , and further comprising the step of forming the low loss photodefinable dielectric planarizing layer as a borosilicate based thick film dielectric material.
Claim 25
Dependent Claim
23 words
A method according to claim 13 , wherein the photodefinable dielectric planarizing layer has a dielectric constant of about 3.8 to about 4.2.
Claim 26
Dependent Claim
20 words
A method according to claim 13 , wherein said photodefinable dielectric planarizing layer has a loss factor of about 0.01%.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2007-05-18 | 2007-11-17 | 2008-05-18 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2011-05-18 | 2011-11-17 | 2012-05-18 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2015-05-18 | 2015-11-17 | 2016-05-18 | $7700.00 | Window Closed / Lapsed |