US6605527B2
Expired / Lapsed
US
⏱️ 0.0 years remaining
Reduced area intersection between electrode and programming element
Assignee: Micron Technology Inc
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Filing: 2001-06-30
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Granted: 2003-08-12
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Expires: 2021-06-30
Abstract
Abstract A method comprising forming a first dielectric layer over an electrode formed to a first contact point on a substrate, the electrode having a contact area; patterning the first dielectric layer into a body, a thickness of the first dielectric layer defining a side wall; forming at least one spacer along the side wall of the first dielectric body, the at least one spacer overlying a portion of the contact area; forming a second dielectric layer on the contact area; removing the at least one spacer; and forming a material comprising a second contact point to the contact area. An apparatus comprising a volume of programmable material; a conductor; and an electrode disposed between the volume of programmable material and the conductor, the electrode having a contact area coupled to the volume of programmable material.
Inventors
- 👤 Charles H. Dennison
- 👤 Alice T. Wang
- 👤 Patel Kanaiyalal Chaturbhai
- 👤 Jenn C. Chow
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 10:27
CPC Classifications
H; H10; H10B; H10B63/00; H10B63/10; H10B63/20; H10W; H10W10/00; H10W10/01; H10W10/031; H10W10/30
Claims Analysis
Total Claims: 15
Claim 1
Independent Claim
99 words
A method comprising: forming a first dielectric layer over an electrode formed to a first contact point on a substrate, the electrode having a contact area; patterning the first dielectric layer into a body, a thickness of the first dielectric layer defining a side wall; forming at least one spacer along the side wall of the first dielectric body, the at least one spacer overlying a portion of the contact area; forming a second dielectric layer on the contact area; removing the at least one spacer; and forming a material comprising a second contact point to the contact area.
Claim 2
Independent Claim
99 words
A method comprising: forming a first dielectric layer over an electrode formed to a first contact point on a substrate, the electrode having a contact area; patterning the first dielectric layer into a body, a thickness of the first dielectric layer defining a side wall; forming at least one spacer along the side wall of the first dielectric body, the at least one spacer overlying a portion of the contact area; forming a second dielectric layer on the contact area; removing the at least one spacer; and forming a material comprising a second contact point to the contact area.
Claim 3
Dependent Claim
23 words
The method of claim 1 , wherein after forming a second dielectric layer on the contact area, exposing the at least one spacer.
Claim 4
Dependent Claim
69 words
The method of claim 1 , wherein prior to forming the first dielectric layer, the method comprises forming a base dielectric layer over the contact area of the electrode, wherein removing the at least one spacer comprises exposing a portion of the base dielectric layer, and wherein prior to forming a material comprising a second contact point, the method comprises removing the exposed portion of the base dielectric layer.
Claim 5
Dependent Claim
25 words
The method of claim 1 , wherein a material for the first dielectric layer and a material for the spacer comprise a different etch characteristic.
Claim 6
Dependent Claim
24 words
The method of claim 1 , wherein forming a material comprising a second contact point comprises forming a programmable material on the contact area.
Claim 7
Dependent Claim
33 words
The method of claim 1 , wherein forming the at least one spacer comprises conformally forming a layer of spacer material over the first dielectric layer and then exposing the first dielectric layer.
Claim 8
Dependent Claim
20 words
The method of claim 6 , wherein exposing the first dielectric layer comprises anisotropically etching the layer of spacer material.
Claim 9
Dependent Claim
34 words
The method of claim 1 , wherein forming the second dielectric layer comprises conformally forming the second dielectric layer on the contact area and the at least one spacer and then exposing the spacer.
Claim 10
Independent Claim
115 words
A method comprising: forming a first dielectric layer over less than the entire portion of a contact area on a substrate, the first dielectric layer having a thickness defining an edge over the contact area; forming a spacer layer over the contact area, the spacer layer conforming to the shape of the first dielectric layer such that the spacer layer comprises an edge portion over the contact area adjacent the first dielectric layer edge; while retaining the edge portion of the spacer layer over the contact area, forming a second dielectric layer over the contact area; removing the edge portion; and forming a programmable material to the contact area formerly occupied by the edge portion.
Claim 11
Independent Claim
115 words
A method comprising: forming a first dielectric layer over less than the entire portion of a contact area on a substrate, the first dielectric layer having a thickness defining an edge over the contact area; forming a spacer layer over the contact area, the spacer layer conforming to the shape of the first dielectric layer such that the spacer layer comprises an edge portion over the contact area adjacent the first dielectric layer edge; while retaining the edge portion of the spacer layer over the contact area, forming a second dielectric layer over the contact area; removing the edge portion; and forming a programmable material to the contact area formerly occupied by the edge portion.
Claim 12
Dependent Claim
38 words
The method of claim 9 , wherein the contact area is a portion of an electrode formed to a first contact point on the substrate, the method further comprising: forming a second contact point to the programmable material.
Claim 13
Dependent Claim
35 words
The method of claim 9 , wherein the second dielectric layer and the spacer layer comprise materials having different etch characteristics such that the spacer layer can be removed exclusive of the second dielectric layer.
Claim 14
Dependent Claim
29 words
The method of claim 9 , wherein forming the spacer layer comprises depositing the spacer layer over the first dielectric layer and, after depositing, exposing the first dielectric layer.
Claim 15
Dependent Claim
18 words
The method of claim 12 , wherein exposing the first dielectric layer comprises anisotropically etching the spacer layer.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2006-08-11 | 2007-02-10 | 2007-08-12 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2010-08-11 | 2011-02-10 | 2011-08-12 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2014-08-11 | 2015-02-10 | 2015-08-12 | $7700.00 | Window Closed / Lapsed |