US6449428B2
Expired / Lapsed
US
⏱️ 0.0 years remaining
Gas driven rotating susceptor for rapid thermal processing (RTP) system
Assignee: Beijing E Town Semiconductor Technology Co Ltd
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Filing: 1998-12-11
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Granted: 2002-09-10
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Expires: 2018-12-11
Abstract
Abstract Air bearings support a rotating wafer carrying base in an RTP system. The base in proximity to the air bearing is protected from warping due to absorption of radiation from the hot wafer being treated. The most preferred embodiment splits the base into an inner disk carrying the wafer and an outer ring, where the inner ring which absorbs the most energy contacts and is supported at three points by the outer disk which is supported by the air bearing.
Inventors
- 👤 Helmut Aschner
- 👤 Andreas Hauke
- 👤 Karsten Weber
- 👤 Dieter Zernickel
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 01:14
CPC Classifications
H; H10; H10P; H10P95/00; H10P95/90; H10P72/00; H10P72/04; H10P72/0431; H10P72/0436; C; C30; C30B; C30B25/00; C30B25/02; C30B25/12; C30B31/00; C30B31/06; C30B31/14
Claims Analysis
Total Claims: 14
Claim 1
Independent Claim
112 words
An apparatus, comprising; a rotatable base, the base for supporting an object being processed in a Rapid Thermal Processing (RTP) System equipped with air bearings for supporting the rotating base, the base comprising; an outer part, forming bearing surfaces for bearing on the air bearings; and an inner part, the inner part supported by the outer part, the inner part mechanically decoupled from the outer part to prevent warping of the base due to non-uniform heating of the base by radiation from the object being processed, so that the bearing surfaces of the outer part remain very parallel to the surfaces of the air bearings during rapid thermal processing of the object.
Claim 2
Independent Claim
112 words
An apparatus, comprising; a rotatable base, the base for supporting an object being processed in a Rapid Thermal Processing (RTP) System equipped with air bearings for supporting the rotating base, the base comprising; an outer part, forming bearing surfaces for bearing on the air bearings; and an inner part, the inner part supported by the outer part, the inner part mechanically decoupled from the outer part to prevent warping of the base due to non-uniform heating of the base by radiation from the object being processed, so that the bearing surfaces of the outer part remain very parallel to the surfaces of the air bearings during rapid thermal processing of the object.
Claim 3
Dependent Claim
19 words
The apparatus of claim 1 , wherein the base is rotated by impinging a flowing fluid on the base.
Claim 4
Dependent Claim
24 words
The apparatus of claim 1 , wherein the inner part is mechanically decoupled from the outer part by a slot cut in the base.
Claim 5
Dependent Claim
33 words
The apparatus of claim 1 , wherein inner part comprises a plate separate from outer part, the plate supported by the outer part at a plurality of points, the plate supporting the object.
Claim 6
Dependent Claim
35 words
The apparatus of claim 4 , wherein the plate is engaged with the outer part so that orientation of the plate with respect the base outer part is constant as the base outer part rotates.
Claim 7
Dependent Claim
35 words
The apparatus of claim 1 , wherein inner part comprises a plate joined to the outer part at a plurality of points by joining means which allow relative expansion between the base and the plate.
Claim 8
Dependent Claim
18 words
The apparatus of claim 1 , wherein the angular position of the base is determined by optical means.
Claim 9
Dependent Claim
18 words
The apparatus of claim 1 , wherein the angular position of the base is determined by magnetic means.
Claim 10
Independent Claim
119 words
A method of rapid thermal processing (RTP) of an object, comprising: supporting the object on a rotatable base, the rotatable base supported by air bearings; processing the object with radiation from radiation sources of an RTP system while rotating the object on the rotatable base, wherein the rotatable base comprises an outer part forming bearing surfaces for bearing on the air bearings, and an inner part; wherein the bearing surfaces of the outer part are kept very parallel to the surfaces of the air bearings by a first means which mechanically decouples the inner part from the outer part to prevent warping of the base due to non-uniform heating of the base by radiation from the object being processed.
Claim 11
Independent Claim
119 words
A method of rapid thermal processing (RTP) of an object, comprising: supporting the object on a rotatable base, the rotatable base supported by air bearings; processing the object with radiation from radiation sources of an RTP system while rotating the object on the rotatable base, wherein the rotatable base comprises an outer part forming bearing surfaces for bearing on the air bearings, and an inner part; wherein the bearing surfaces of the outer part are kept very parallel to the surfaces of the air bearings by a first means which mechanically decouples the inner part from the outer part to prevent warping of the base due to non-uniform heating of the base by radiation from the object being processed.
Claim 12
Dependent Claim
19 words
The method of claim 9 , wherein the base is rotated by impinging a flowing fluid on the base.
Claim 13
Independent Claim
123 words
A system comprising; a rapid thermal processing system; air bearings for supporting a rotatable base in the processing chamber of the RTP system, a rotatable base, the base for supporting an object being processed in the Rapid Thermal Processing (RTP) System, the base comprising; an outer part, forming bearing surfaces for bearing on the air bearings; and an inner part, the inner part supported by the outer part, the inner part mechanically decoupled from the outer part to prevent warping of the base due to non-uniform heating of the base by radiation from the object being processed, so that the bearing surfaces of the outer part remain very parallel to the surfaces of the air bearings during rapid thermal processing of the object.
Claim 14
Independent Claim
123 words
A system comprising; a rapid thermal processing system; air bearings for supporting a rotatable base in the processing chamber of the RTP system, a rotatable base, the base for supporting an object being processed in the Rapid Thermal Processing (RTP) System, the base comprising; an outer part, forming bearing surfaces for bearing on the air bearings; and an inner part, the inner part supported by the outer part, the inner part mechanically decoupled from the outer part to prevent warping of the base due to non-uniform heating of the base by radiation from the object being processed, so that the bearing surfaces of the outer part remain very parallel to the surfaces of the air bearings during rapid thermal processing of the object.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2005-09-09 | 2006-03-11 | 2006-09-10 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2009-09-09 | 2010-03-11 | 2010-09-10 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2013-09-09 | 2014-03-11 | 2014-09-10 | $7700.00 | Window Closed / Lapsed |