Heater for substrate and chemical evaporation using said heater

Abstract

Abstract PURPOSE:To obtain a chemically evaporated film having no dispersion by a method wherein concave portions with shapes slightly larger than the substrate to be heated are formed at the opposing locations of both main surfaces of a susceptor, and the susceptor is placed on the heater. CONSTITUTION:The concave portions 2A, 2B with the shapes slightly larger than the substrate 1 to be heated are formed at the opposing locations of surfaces A, B both main surfaces of the surface and the reverse. Only a plane portion 4B is directly subject to heat transmission from the heater 3, and the bottom surfaces of the concave portions 2B are heated by the radiant heat of the heater and heat transmission in the susceptor. Thus, the mean temperature difference of the both main surfaces is small, a warp of the susceptor decreases, the susceptor positively contacts with the heater, and the temperatures of the substrates 1 are equalized. Further, the both surfaces can be used in inverted shapes, and the warp can further be corrected. The temperatures of the periphery of the concave portions 2A are kept at temperatures higher than the center 6, and the dispersion of temperature distribution in the substrates 1 is very small. According to this constitution, the characteristics of the chemically evaporated film are uniformalized, and the life of the susceptor is lengthened.

Inventors

• 👤 Itaru Yamanaka

Bibliographic Details