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US6448580B1 Expired / Lapsed US ⏱️ 0.0 years remaining

Self-light-emitting apparatus and semiconductor device used in the apparatus

Assignee: Semiconductor Energy Laboratory Co Ltd
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Filing: 2000-09-15
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Granted: 2002-09-10
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Expires: 2020-09-15
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Abstract

Abstract The present invention relates to a semiconductor device formed in a self-light-emitting apparatus having a substrate and a plurality of self-light-emitting elements formed on the substrate, the semiconductor device being used to drive one of the self-light-emitting elements. The semiconductor device includes an active layer of semiconductor material, in which a source region and a drain region are formed, a source electrode having a multi-layered structure including an upper side layer of titanium nitride and a lower side layer of a high melting point metal having low resistance, the source electrode electrically being coupled to the source region, a drain electrode having a multi-layered structure including an upper side layer of titan nitride and a lower side layer of a high melting point metal having low resistance, the source electrode electrically being coupled to said drain region, an insulation layer formed on the active layer, and a gate electrode formed on the insulation layer.

Inventors

  • 👤 Michio Arai
  • 👤 Yukio Yamauchi

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-02 10:38
CPC Classifications
H; H10; H10D; H10D86/00; H10D86/40; H10D86/441; H10D86/60; H10H; H10H29/00; H10H29/10; H10H29/14; H10H29/142; H10K; H10K59/00; H10K59/10; H10K59/12; H10K59/123; H10K59/131; H10K59/1315

Claims Analysis

Total Claims: 16
Claim 1
Independent Claim 125 words
An electroluminescent display device comprising: a substrate having an insulating surface; a thin film transistor formed over said substrate, said thin film transistor comprising a semiconductor island including source, drain and channel regions, and a gate electrode adjacent to said channel region with a gate insulating film interposed therebetween; a first interlayer insulating film formed over said thin film transistor and said substrate; an opening formed in said first interlayer insulating film to define a pixel region of said electroluminescent display device; a pixel electrode electrically connected to the drain of said thin film transistor and formed in at least said opening of the first interlayer insulating film, an electroluminescence layer formed on said pixel electrode; and a counter electrode formed on said electroluminescence layer.
Claim 2
Dependent Claim 125 words
An electroluminescent display device comprising: a substrate having an insulating surface; a thin film transistor formed over said substrate, said thin film transistor comprising a semiconductor island including source, drain and channel regions, and a gate electrode adjacent to said channel region with a gate insulating film interposed therebetween; a first interlayer insulating film formed over said thin film transistor and said substrate; an opening formed in said first interlayer insulating film to define a pixel region of said electroluminescent display device; a pixel electrode electrically connected to the drain of said thin film transistor and formed in at least said opening of the first interlayer insulating film, an electroluminescence layer formed on said pixel electrode; and a counter electrode formed on said electroluminescence layer.
Claim 3
Dependent Claim 22 words
The electroluminescent display device according to claim 1 further comprising a second interlayer insulating film formed on said first interlayer insulating film.
Claim 4
Dependent Claim 17 words
The electroluminescent display device according to claim 1 wherein said electroluminescence layer comprises an organic electroluminescence layer.
Claim 5
Dependent Claim 17 words
The electroluminescent display device according to claim 1 wherein said electroluminescence layer comprises an inorganic electroluminescence layer.
Claim 6
Dependent Claim 129 words
An electroluminescent display device comprising: a substrate having an insulating surface; a thin film transistor formed over said substrate, said thin film transistor comprising a semiconductor island including source, drain and channel regions, and a gate electrode adjacent to said channel region with a gate insulating film interposed therebetween; a first interlayer insulating film formed over said thin film transistor and said substrate; an opening formed in said first interlayer insulating film wherein said opening does not overlap said semiconductor island of the thin film transistor; a pixel electrode electrically connected to the drain of said thin film transistor and formed in at least said opening of the first interlayer insulating film, an electroluminescence layer formed on said pixel electrode; and a counter electrode formed on said electroluminescence layer.
Claim 7
Dependent Claim 129 words
An electroluminescent display device comprising: a substrate having an insulating surface; a thin film transistor formed over said substrate, said thin film transistor comprising a semiconductor island including source, drain and channel regions, and a gate electrode adjacent to said channel region with a gate insulating film interposed therebetween; a first interlayer insulating film formed over said thin film transistor and said substrate; an opening formed in said first interlayer insulating film wherein said opening does not overlap said semiconductor island of the thin film transistor; a pixel electrode electrically connected to the drain of said thin film transistor and formed in at least said opening of the first interlayer insulating film, an electroluminescence layer formed on said pixel electrode; and a counter electrode formed on said electroluminescence layer.
Claim 8
Dependent Claim 22 words
The electroluminescent display device according to claim 5 further comprising a second interlayer insulating film formed on said first interlayer insulating film.
Claim 9
Dependent Claim 17 words
The electroluminescent display device according to claim 5 wherein said electroluminescence layer comprises an organic electroluminescence layer.
Claim 10
Dependent Claim 17 words
The electroluminescent display device according to claim 5 wherein said electroluminescence layer comprises an inorganic electroluminescence layer.
Claim 11
Dependent Claim 158 words
An electroluminescent display device comprising: a substrate having an insulating surface: a thin film transistor formed over said substrate, said thin film transistor comprising a semiconductor island including source, drain and channel regions, and a gate electrode adjacent to said channel region with a gate insulating film interposed therebetween; a drain electrode in contact with said drain region; a first interlayer insulating film formed over said thin film transistor, said drain electrode and said substrate; a wiring formed on said first interlayer insulating film and electrically connected to the source region of said thin film transistor through a contact hole of said first interlayer insulating film; and an opening formed in said first interlayer insulating film to expose a portion of said drain electrode; a pixel electrode formed in said opening and connected to said exposed portion of the drain electrode; an electroluminescence layer formed on said pixel electrode; and a counter electrode formed on said electroluminescence layer.
Claim 12
Dependent Claim 158 words
An electroluminescent display device comprising: a substrate having an insulating surface: a thin film transistor formed over said substrate, said thin film transistor comprising a semiconductor island including source, drain and channel regions, and a gate electrode adjacent to said channel region with a gate insulating film interposed therebetween; a drain electrode in contact with said drain region; a first interlayer insulating film formed over said thin film transistor, said drain electrode and said substrate; a wiring formed on said first interlayer insulating film and electrically connected to the source region of said thin film transistor through a contact hole of said first interlayer insulating film; and an opening formed in said first interlayer insulating film to expose a portion of said drain electrode; a pixel electrode formed in said opening and connected to said exposed portion of the drain electrode; an electroluminescence layer formed on said pixel electrode; and a counter electrode formed on said electroluminescence layer.
Claim 13
Dependent Claim 52 words
The electroluminescent display device according to claim 9 wherein said drain electrode comprises a first layer comprising a metal which directly contacts said drain region and a second layer comprising titanium nitride which directly contacts said pixel electrode, said metal selected from the group consisting of tungsten, molybdenum, tantalum, titanium and nickel.
Claim 14
Dependent Claim 22 words
The electroluminescent display device according to claim 9 further comprising a second interlayer insulating film formed on said first interlayer insulating film.
Claim 15
Dependent Claim 17 words
The electroluminescent display device according to claim 9 wherein said electroluminescence layer comprises an organic electroluminescence layer.
Claim 16
Dependent Claim 17 words
The electroluminescent display device according to claim 9 wherein said electroluminescence layer comprises an inorganic electroluminescence layer.

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 2005-09-09 2006-03-11 2006-09-10 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 2009-09-09 2010-03-11 2010-09-10 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2013-09-09 2014-03-11 2014-09-10 $7700.00 Window Closed / Lapsed

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