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US6402925B2
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US
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Method and apparatus for electrochemical mechanical deposition
Assignee: Novellus Systems Inc
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Filing: 2000-12-14
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Granted: 2002-06-11
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Expires: 2020-12-14
Abstract
Abstract The present invention deposits a conductive material from an electrolyte solution to a predetermined area of a wafer and thereafter electropolishes the wafer. The steps that are used when making this application include applying the conductive material to the predetermined area of the wafer using an electrolyte solution disposed on a surface of the wafer, when the wafer is disposed between a cathode and an anode, and preventing accumulation of the conductive material to areas other than the predetermined area by mechanically polishing the other areas while conductive material is being applied. Thereafter, electropolishing of the previously applied conductive material takes place by applying a second potential difference having a polarity opposite the first potential difference that was used when applying the conductive material. While applying the second potential difference, polishing of the conductive layer with the previously accumulated conductive material disposed thereover is performed.
Inventors
- 👤 Homayoun Talieh
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 13:36
CPC Classifications
H; H10; H10P; H10P52/00; B; B24; B24B; B24B37/00; B24B37/11; B24B37/20; B24B37/26; B23; B23H; B23H5/00; B23H5/06; B23H5/08; C; C25; C25D; C25D5/00; C25D5/02; C25D5/04; C25D5/06; C25D5/22; C25D5/60; C25D5/605; C25D5/611; C25D5/615; C25D5/617; C25D5/627; H10P14/00; H10P14/40; H10P14/46; H10P14/47; H10P52/40; H10P52/403
Claims Analysis
Total Claims: 36
Claim 1
Independent Claim
222 words
A method of depositing a conductive material from an electrolyte solution on a workpiece having a top surface and a cavity portion disposed on the top surface and having a conductive layer disposed on the top surface and the cavity portion of the work piece and subsequently removing some of the deposited conductive material comprising the steps of applying a first potential difference between the workpiece and an electrode; and starving electrolytic solution from the conductive top surface of the conductive layer of the workpiece but not from the conductive cavity portion of the conductive layer of the workpiece while applying the first potential difference so that accumulation of conductive material on the conductive cavity portion of the conductive layer occurs at a greater rate than accumulation of the conductive material on the conductive top surface of the conductive layer; after the accumulation of conductive material in the cavity portion of the workpiece, providing a second potential difference having a polarity that is opposite the first potential difference between the workpiece and the electrode such that removal of some of the previously accumulated conductive material from the conductive layer of the workpiece takes place; and polishing the conductive layer with the previously accumulated conductive material disposed thereover at the same time that the step of providing the second potential difference is occurring.
Claim 2
Independent Claim
222 words
A method of depositing a conductive material from an electrolyte solution on a workpiece having a top surface and a cavity portion disposed on the top surface and having a conductive layer disposed on the top surface and the cavity portion of the work piece and subsequently removing some of the deposited conductive material comprising the steps of applying a first potential difference between the workpiece and an electrode; and starving electrolytic solution from the conductive top surface of the conductive layer of the workpiece but not from the conductive cavity portion of the conductive layer of the workpiece while applying the first potential difference so that accumulation of conductive material on the conductive cavity portion of the conductive layer occurs at a greater rate than accumulation of the conductive material on the conductive top surface of the conductive layer; after the accumulation of conductive material in the cavity portion of the workpiece, providing a second potential difference having a polarity that is opposite the first potential difference between the workpiece and the electrode such that removal of some of the previously accumulated conductive material from the conductive layer of the workpiece takes place; and polishing the conductive layer with the previously accumulated conductive material disposed thereover at the same time that the step of providing the second potential difference is occurring.
Claim 3
Dependent Claim
30 words
A method according to claim 1 wherein the step of starving electrolytic solution uses a moving pad that polishes the conductive top surface of the conductive layer of the workpiece.
Claim 4
Dependent Claim
37 words
A method according to claim 2 wherein moving the pad that polishes the conductive surface also causes removal of at least some of the conductive material from the top surface of the conductive layer of the workpiece.
Claim 5
Dependent Claim
22 words
A method according to claim 2 wherein the step of polishing includes the step of introducing a slurry onto the conductive surface.
Claim 6
Dependent Claim
23 words
A method according to claim 2 further including, after the steps of providing and polishing are completed, the step of cleaning the workpiece.
Claim 7
Dependent Claim
20 words
A method according to claim 2 further including, after the step of cleaning, the step of spin drying the workpiece.
Claim 8
Dependent Claim
18 words
A method according to claim 2 wherein the step of polishing occurs without the introduction of a slurry.
Claim 9
Dependent Claim
22 words
A method according to claim 1 wherein the step of polishing includes the step of introducing a slurry onto the conductive surface.
Claim 10
Dependent Claim
23 words
A method according to claim 1 further including, after the steps of providing and polishing are completed, the step of cleaning the workpiece.
Claim 11
Dependent Claim
20 words
A method according to claim 9 further including, after the step of cleaning, the step of spin drying the workpiece.
Claim 12
Dependent Claim
18 words
A method according to claim 1 wherein the step of polishing occurs without the introduction of a slurry.
Claim 13
Independent Claim
156 words
An apparatus for electroplating and electropolishing a workpiece having a top surface and a cavity portion disposed on the top surface and having a conductive layer disposed on the top surface and the cavity portion of the workpiece comprising: an electrode that allows a first potential difference to be applied between the electrode and the workpiece and a second potential difference having a polarity opposite the first potential difference to be applied between the electrode and the workpiece; means for starving electrolytic solution from the conductive top surface of the conductive layer of the workpiece but not from the conductive cavity portion of the conductive layer of the workpiece while applying the first potential difference; and means for polishing the conductive top surface of the workpiece at the same time that the step of providing the second potential difference takes place such that removal of conductive material from the conductive surface of the workpiece takes place.
Claim 14
Independent Claim
156 words
An apparatus for electroplating and electropolishing a workpiece having a top surface and a cavity portion disposed on the top surface and having a conductive layer disposed on the top surface and the cavity portion of the workpiece comprising: an electrode that allows a first potential difference to be applied between the electrode and the workpiece and a second potential difference having a polarity opposite the first potential difference to be applied between the electrode and the workpiece; means for starving electrolytic solution from the conductive top surface of the conductive layer of the workpiece but not from the conductive cavity portion of the conductive layer of the workpiece while applying the first potential difference; and means for polishing the conductive top surface of the workpiece at the same time that the step of providing the second potential difference takes place such that removal of conductive material from the conductive surface of the workpiece takes place.
Claim 15
Dependent Claim
23 words
An apparatus according to claim 12 wherein the means for starving includes a movable polishing pad that contacts the surface of the workpiece.
Claim 16
Dependent Claim
23 words
An apparatus according to claim 13 wherein the means for polishing uses the same movable polishing pad used by the means for starving.
Claim 17
Dependent Claim
15 words
An apparatus according to claim 14 wherein the electrode is connected to the polishing pad.
Claim 18
Independent Claim
168 words
An apparatus for electroplating and electropolishing a workpiece having a top surface and a cavity portion disposed on the top surface and having a conductive layer disposed on the top surface and the cavity portion of the workpiece comprising: an electrode adapted to a first potential difference to be applied between the electrode and the workpiece and a second potential difference having a polarity opposite the first potential difference to be applied between the electrode and the workpiece; and a pad disposed between the workpiece and the electrode, said pad adapted to move relative to the workpiece while applying the first potential difference and to cause starving of the electrolytic solution from the conductive top surface of the conductive layer of the workpiece but not from the conductive cavity portion of the conductive layer of the workpiece; and said pad further adapted to move relative to the workpiece while applying the second potential difference and to cause removal of conductive material from the conductive surface of the workpiece.
Claim 19
Independent Claim
168 words
An apparatus for electroplating and electropolishing a workpiece having a top surface and a cavity portion disposed on the top surface and having a conductive layer disposed on the top surface and the cavity portion of the workpiece comprising: an electrode adapted to a first potential difference to be applied between the electrode and the workpiece and a second potential difference having a polarity opposite the first potential difference to be applied between the electrode and the workpiece; and a pad disposed between the workpiece and the electrode, said pad adapted to move relative to the workpiece while applying the first potential difference and to cause starving of the electrolytic solution from the conductive top surface of the conductive layer of the workpiece but not from the conductive cavity portion of the conductive layer of the workpiece; and said pad further adapted to move relative to the workpiece while applying the second potential difference and to cause removal of conductive material from the conductive surface of the workpiece.
Claim 20
Dependent Claim
15 words
An apparatus according to claim 16 wherein the electrode is connected to the polishing pad.
Claim 21
Dependent Claim
17 words
An apparatus according to claim 16 further including means for introducing a slurry onto the conductive surface.
Claim 22
Dependent Claim
18 words
An apparatus according to claim 16 wherein the pad makes contact with the conductive surface of the workpiece.
Claim 23
Dependent Claim
15 words
An apparatus according to claim 19 wherein the electrode is connected to the polishing pad.
Claim 24
Independent Claim
222 words
A method of depositing a conductive material from an electrolyte solution on a workpiece having a top surface and a cavity portion disposed on the top surface and having a conductive layer disposed on the top surface and the cavity portion of the workpiece and removing certain deposited conductive material comprising the steps of: applying a first potential difference between the workpiece and an electrode, with the workpiece being positioned in proximity to the electrode, thereby causing the application~of the conductive material to at least the conductive layer disposed on the cavity portion of the workpiece; and minimizing accumulation of the conductive material to the conductive layer disposed on the top surface of the workpiece by polishing the conductive layer disposed on the top surface of the workpiece with a pad while the application of the conductive material is occurring; after the application of conductive material in the cavity portion of the workpiece, providing a second potential difference having a polarity that is opposite the first potential difference between the workpiece and the electrode such that removal of some of the previously applied conductive material from the conductive layer of the workpiece takes place; and polishing the conductive layer with the previously accumulated conductive material disposed thereover at the same time that the step of providing the second potential difference is occurring.
Claim 25
Independent Claim
222 words
A method of depositing a conductive material from an electrolyte solution on a workpiece having a top surface and a cavity portion disposed on the top surface and having a conductive layer disposed on the top surface and the cavity portion of the workpiece and removing certain deposited conductive material comprising the steps of: applying a first potential difference between the workpiece and an electrode, with the workpiece being positioned in proximity to the electrode, thereby causing the application~of the conductive material to at least the conductive layer disposed on the cavity portion of the workpiece; and minimizing accumulation of the conductive material to the conductive layer disposed on the top surface of the workpiece by polishing the conductive layer disposed on the top surface of the workpiece with a pad while the application of the conductive material is occurring; after the application of conductive material in the cavity portion of the workpiece, providing a second potential difference having a polarity that is opposite the first potential difference between the workpiece and the electrode such that removal of some of the previously applied conductive material from the conductive layer of the workpiece takes place; and polishing the conductive layer with the previously accumulated conductive material disposed thereover at the same time that the step of providing the second potential difference is occurring.
Claim 26
Dependent Claim
30 words
A method according to claim 21 wherein the step of starving electrolytic solution uses a moving pad that polishes the conductive top surface of the conductive layer of the workpiece.
Claim 27
Dependent Claim
37 words
A method according to claim 22 wherein moving the pad that polishes the conductive surface also causes removal of at least some of the conductive material from the top surface of the conductive layer of the workpiece.
Claim 28
Dependent Claim
22 words
A method according to claim 22 wherein the step of polishing includes the step of introducing a slurry onto the conductive surface.
Claim 29
Dependent Claim
23 words
A method according to claim 22 further including, after the steps of providing and polishing are completed, the step of cleaning the workpiece.
Claim 30
Dependent Claim
20 words
A method according to claim 25 further including, after the step of cleaning, the step of spin drying the workpiece.
Claim 31
Dependent Claim
18 words
A method according to claim 22 wherein the step of polishing occurs without the introduction of a slurry.
Claim 32
Dependent Claim
22 words
A method according to claim 22 wherein the step of polishing includes the step of introducing a slurry onto the conductive surface.
Claim 33
Dependent Claim
23 words
A method according to claim 22 further including, after the steps of providing and polishing are completed, the step of cleaning the workpiece.
Claim 34
Dependent Claim
19 words
A method according to claim 29 further including, after the step of cleaning, the step of polishing the workpiece.
Claim 35
Dependent Claim
20 words
A method according to claim 29 further including, after the step of cleaning, the step of spin drying the workpiece.
Claim 36
Dependent Claim
18 words
A method according to claim 21 wherein the step of polishing occurs without the introduction of a slurry.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2005-06-10 | 2005-12-10 | 2006-06-11 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2009-06-10 | 2009-12-10 | 2010-06-11 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2013-06-10 | 2013-12-10 | 2014-06-11 | $7700.00 | Window Closed / Lapsed |