US5933753A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Open-bottomed via liner structure and method for fabricating same
Assignee: GlobalFoundries Inc
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Filing: 1996-12-16
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Granted: 1999-08-03
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Expires: 2016-12-16
Abstract
Abstract This invention relates to a method of forming a bottomless liner structure. The method involves the steps of first obtaining a material having a via. Next, a first layer is deposited on the material, the first layer covering the sidewalls and bottom of the via. Finally, a second layer is sputter deposited on the first material, the material Rf biased during at least a portion of the time that the second layer is sputter deposited, such that the first layer deposited on the bottom of the via is substantially removed and substantially all of the first layer deposited on the sidewalls of the via is unaffected.
Inventors
- 👤 Andrew H. Simon
- 👤 Cyprian E. Uzoh
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 21:45
CPC Classifications
H; H10; H10W; H10W20/00; H10W20/01; H10W20/031; H10W20/032; H10W20/033; H10W20/034; H10W20/042; H10W20/043; H10W20/054
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
97 words
A method of forming a bottomless liner structure, comprising: a) obtaining a material having a via; b) depositing a first layer on the material having the via, the first layer covering the sidewalls and bottom of the via; c) sputter depositing a second layer on the first layer, the material being Rf biased during a portion of the time that the second layer is sputter deposited, such that the first layer deposited on the bottom of the via is substantially removed and substantially all of the first layer deposited on the sidewalls of the via is unaffected.
Claim 2
Independent Claim
97 words
A method of forming a bottomless liner structure, comprising: a) obtaining a material having a via; b) depositing a first layer on the material having the via, the first layer covering the sidewalls and bottom of the via; c) sputter depositing a second layer on the first layer, the material being Rf biased during a portion of the time that the second layer is sputter deposited, such that the first layer deposited on the bottom of the via is substantially removed and substantially all of the first layer deposited on the sidewalls of the via is unaffected.
Claim 3
Dependent Claim
12 words
The method according to claim 1 wherein the material is a substrate.
Claim 4
Dependent Claim
17 words
The method according to claim 1, wherein the first layer covering the via comprises an insulating material.
Claim 5
Dependent Claim
17 words
The method according to claim 1, wherein the first layer covering the via comprises a semiconducting material.
Claim 6
Dependent Claim
17 words
The method according to claim 1, wherein the first layer covering the via comprises a conducting material.
Claim 7
Dependent Claim
34 words
The method according to claim 5 wherein the first layer covering the via is selected from the group consisting of titanium, titanium nitride, tungsten, titanium tungsten, tungsten nitride, tantalum, TaN, TaN/Ta, Ta/TaN, and Ta/TaN/Ta.
Claim 8
Dependent Claim
12 words
The method according to claim 6 wherein the first layer is TaN/Ta.
Claim 9
Dependent Claim
13 words
The method according to claim 1 wherein the second layer is a metal.
Claim 10
Dependent Claim
12 words
The method according to claim 8 wherein the second layer is copper.
Claim 11
Dependent Claim
32 words
The method according to claim 1 wherein the sputter deposition Rf biasing is active for a minimum of about 25% and a maximum of about 50% of the total sputter deposition time.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2002-08-02 | 2003-02-01 | 2003-08-03 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2006-08-02 | 2007-02-01 | 2007-08-03 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2010-08-02 | 2011-02-01 | 2011-08-03 | $7700.00 | Window Closed / Lapsed |