US5616519A
Expired / Lapsed
US
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Non-etch back SOG process for hot aluminum metallizations
Assignee: GlobalFoundries Singapore Pte Ltd
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Filing: 1995-11-02
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Granted: 1997-04-01
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Expires: 2015-11-02
Abstract
Abstract A process has been developed in which planar, multilevel metallizations, are used to fabricate semiconductor devices. The process features initially forming tall, narrow photoresist plugs, and filling the spaces between photoresist plugs with a planarizing layer of a composite dielectric, which includes a spin on glass layer. Removal of the photoresist plug results in the creation of a narrow via hole. The composite dielectric was deposited by initially using a non-porous, silicon oxide layer, followed by the planarizing spin on glass layer. Therefore metal via fills will interface the non-porous, silicon oxide layer.
Inventors
- 👤 Teong S. Ping
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 22:48
CPC Classifications
H; H10; H10W; H10W20/00; H10W20/01; H10W20/071; H10W20/081; H10W20/074; H10W20/076; H10W20/092
Claims Analysis
Total Claims: 27
Claim 1
Independent Claim
422 words
A method for fabricating a MOSFET device on a semiconductor substrate, using a spin on glass insulator, with metal filled via holes and metal interconnects, comprising the steps of: providing the elements of said MOSFET device; depositing a first insulator layer on said semiconductor substrate, including on said elements of said MOSFET device; opening a first via hole in said first insulator layer, to expose a top surface of one of said elements of said MOSFET device; depositing a first metallization layer, in said first via hole, including depositing on the exposed top surface, of said element of said MOSFET device, and on a surface of said first insulator layer; patterning said first metallization layer to form a first level metal structure, and providing a contact to said element of said MOSFET device; applying a photoresist layer covering said first level metal structure; patterning a said photoresist layer to form photoresist plugs on a top surface of said first level metal structures; heat treating said photoresist plugs; depositing of a first interlevel dielectric layer on exposed surfaces of the photoresist plugs, as well as on exposed surfaces of said first level metal structure, and on said first insulator layer; applying a spin on glass layer on said first interlevel dielectric layer, partially filling spaces between said photoresist plugs; heat treating said spin on glass layer; curing said spin on glass layer; depositing of a second interlevel dielectric layer on said spin on glass layer, completely filling said spaces between said photoresist plugs; chemical mechanical polishing to expose the top surface of said photoresist plugs, and smoothing a surface of exposed said first interlevel dielectric layer, a surface of exposed said spin on glass layer, and a surface of exposed said second interlevel dielectric layer, in spaces between said photoresist plugs; removing said photoresist plugs, resulting in formation of a second via hole, in said first interlevel dielectric layer, exposing the top surface of said first level metal structure; depositing a contact and barrier metallization in said second via hole, including on the exposed top surface of said first level metal structure, and on the exposed surface of said first interlevel dielectric layer, on the exposed surface of said spin on glass layer, and on the exposed surface of said second interlevel dielectric layer; depositing a second metallization layer on said contact and barrier metallization; depositing an anti-reflective coating on said second metallization layer; and patterning said second metallization layer, and said contact and barrier layer, to form a second level metal structure.
Claim 2
Independent Claim
422 words
A method for fabricating a MOSFET device on a semiconductor substrate, using a spin on glass insulator, with metal filled via holes and metal interconnects, comprising the steps of: providing the elements of said MOSFET device; depositing a first insulator layer on said semiconductor substrate, including on said elements of said MOSFET device; opening a first via hole in said first insulator layer, to expose a top surface of one of said elements of said MOSFET device; depositing a first metallization layer, in said first via hole, including depositing on the exposed top surface, of said element of said MOSFET device, and on a surface of said first insulator layer; patterning said first metallization layer to form a first level metal structure, and providing a contact to said element of said MOSFET device; applying a photoresist layer covering said first level metal structure; patterning a said photoresist layer to form photoresist plugs on a top surface of said first level metal structures; heat treating said photoresist plugs; depositing of a first interlevel dielectric layer on exposed surfaces of the photoresist plugs, as well as on exposed surfaces of said first level metal structure, and on said first insulator layer; applying a spin on glass layer on said first interlevel dielectric layer, partially filling spaces between said photoresist plugs; heat treating said spin on glass layer; curing said spin on glass layer; depositing of a second interlevel dielectric layer on said spin on glass layer, completely filling said spaces between said photoresist plugs; chemical mechanical polishing to expose the top surface of said photoresist plugs, and smoothing a surface of exposed said first interlevel dielectric layer, a surface of exposed said spin on glass layer, and a surface of exposed said second interlevel dielectric layer, in spaces between said photoresist plugs; removing said photoresist plugs, resulting in formation of a second via hole, in said first interlevel dielectric layer, exposing the top surface of said first level metal structure; depositing a contact and barrier metallization in said second via hole, including on the exposed top surface of said first level metal structure, and on the exposed surface of said first interlevel dielectric layer, on the exposed surface of said spin on glass layer, and on the exposed surface of said second interlevel dielectric layer; depositing a second metallization layer on said contact and barrier metallization; depositing an anti-reflective coating on said second metallization layer; and patterning said second metallization layer, and said contact and barrier layer, to form a second level metal structure.
Claim 3
Dependent Claim
17 words
The method of claim 1, wherein said element, of said MOSFET device is a polysilicon gate structure.
Claim 4
Dependent Claim
39 words
The method of claim 1, wherein said first insulator layer is silicon oxide, deposited using either PECVD, LPCVD, or APCVD processing, at a temperature between about 400° to 700° C., to a thickness between about 5000 to 10000 Angstroms.
Claim 5
Dependent Claim
39 words
The method of claim 1, wherein said first metallization layer is aluminum with between about 0.5 to 4% copper, and between about 0.5 to 1% silicon, deposited using r.f. sputtering, to a thickness between about 6000 to 10000 Angstroms.
Claim 6
Dependent Claim
20 words
The method of claim 1, wherein said photoresist layer is applied to a thickness between about 6000 to 12000 Angstroms.
Claim 7
Dependent Claim
36 words
The method of claim 1, wherein said first interlevel dielectric layer is silicon oxide, deposited using PECVD processing, at a temperature between about 200° to 450° C., to a thickness between about 500 to 3000 Angstroms.
Claim 8
Dependent Claim
31 words
The method of claim 1, wherein said spin on glass layer is applied at a temperature between about 20° to 25° C., to a thickness between about 3000 to 7000 Angstroms.
Claim 9
Dependent Claim
48 words
The method of claim 1, wherein said spin on glass is heat treated at a temperature between about 100° to 200° C., for a time between about 10 to 50 min., using hot plates, and cured using conventional ovens, at a temperature between about 250° to 450° C.
Claim 10
Dependent Claim
36 words
The method of claim 1, wherein said second interlevel dielectric layer is silicon oxide, deposited using PECVD processing, at a temperature between about 200° to 450° C., to a thickness between about 6000 to 12000 Angstroms.
Claim 11
Dependent Claim
15 words
The method of claim 1, wherein said chemical mechanical polishing is performed using conventional methods.
Claim 12
Dependent Claim
19 words
The method of claim 1, wherein said photoresist plugs are removed using plasma oxygen ashing or wet chemical processes.
Claim 13
Dependent Claim
42 words
The method of claim 1, wherein said contact and barrier metallization is titanium, deposited using r.f. sputtering, to a thickness between about 300 to 1000 Angstroms, and titanium nitride, deposited using r.f. sputtering, to a thickness between about 200 to 1000 Angstroms.
Claim 14
Dependent Claim
32 words
The method of claim 1, wherein said second metallization layer is aluminum, with between about 0.5 to 4% copper, deposited using r.f. sputtering, at a temperature between about 22° to 550° C.
Claim 15
Independent Claim
473 words
A method for fabricating a MOSFET device, on a semiconductor substrate, with a planarized surface, by using a spin on glass to fill spaces between metal filled via holes and metal interconnects, comprising the steps of: providing a polysilicon gate structure, of a said MOSFET device; depositing a first insulator layer of silicon oxide on said semiconductor substrate, including on said polysilicon gate structure; opening a first via hole in said first insulator layer of silicon oxide to expose a top surface of said polysilicon gate structure, and source a and drain region; depositing a first aluminum based metallization layer in said first via hole, including on the exposed top surface of said polysilicon gate structure, on the surface of said source and drain region, and on a surface of said first insulator layer of silicon oxide; patterning said first aluminum based metallization layer to form a first level aluminum based metal structure; applying photoresist layer, covering said first level aluminum based metal structure; patterning said photoresist layer to form photoresist plugs on a top surface of said first level aluminum based metal structure; baking said photoresist plugs; depositing a first silicon oxide interlevel layer on exposed surfaces of said photoresist plugs, as well as on exposed surfaces of said first level aluminum based metal structure, and on said first insulator layer of silicon oxide; applying a spin on glass layer on said first silicon oxide interlevel layer, partially filling spaces between said photoresist plugs; heat treating said spin on glass layer; curing said spin on glass layer; depositing a second silicon oxide interlevel layer on said spin on glass layer, completely filling the spaces between said photoresist plugs; chemical mechanical polishing to expose a top surface of said photoresist plugs, while planarizing a surface of exposed said first silicon oxide interlevel layer, a surface of exposed said spin on glass layer, and a surface of exposed said second silicon oxide layer, in spaces between said photoresist plugs; said photoresist plugs, resulting in formation of a second via hole, in said first silicon oxide interlevel layer, exposing a top surface of said first aluminum based metal structure; a titanium--titanium nitride layer in said second via hole, including on the exposed top surface of said first aluminum based metal structure, and on the exposed surface of said first silicon oxide interlevel layer, on the exposed surface of said spin on glass layer, and on the exposed surface of said second silicon oxide interlevel layer said titanium--titanium nitride layer forming a titanium contact metallization and a titanium nitride barrier metallization; depositing a second aluminum based metallization layer on said titanium--titanium nitride layer; depositing an anti-reflective coating on said second aluminum based metallization layer; and patterning said second aluminum based metallization layer, and said titanium--titanium nitride layer, to form a second level aluminum based metal structure.
Claim 16
Independent Claim
473 words
A method for fabricating a MOSFET device, on a semiconductor substrate, with a planarized surface, by using a spin on glass to fill spaces between metal filled via holes and metal interconnects, comprising the steps of: providing a polysilicon gate structure, of a said MOSFET device; depositing a first insulator layer of silicon oxide on said semiconductor substrate, including on said polysilicon gate structure; opening a first via hole in said first insulator layer of silicon oxide to expose a top surface of said polysilicon gate structure, and source a and drain region; depositing a first aluminum based metallization layer in said first via hole, including on the exposed top surface of said polysilicon gate structure, on the surface of said source and drain region, and on a surface of said first insulator layer of silicon oxide; patterning said first aluminum based metallization layer to form a first level aluminum based metal structure; applying photoresist layer, covering said first level aluminum based metal structure; patterning said photoresist layer to form photoresist plugs on a top surface of said first level aluminum based metal structure; baking said photoresist plugs; depositing a first silicon oxide interlevel layer on exposed surfaces of said photoresist plugs, as well as on exposed surfaces of said first level aluminum based metal structure, and on said first insulator layer of silicon oxide; applying a spin on glass layer on said first silicon oxide interlevel layer, partially filling spaces between said photoresist plugs; heat treating said spin on glass layer; curing said spin on glass layer; depositing a second silicon oxide interlevel layer on said spin on glass layer, completely filling the spaces between said photoresist plugs; chemical mechanical polishing to expose a top surface of said photoresist plugs, while planarizing a surface of exposed said first silicon oxide interlevel layer, a surface of exposed said spin on glass layer, and a surface of exposed said second silicon oxide layer, in spaces between said photoresist plugs; said photoresist plugs, resulting in formation of a second via hole, in said first silicon oxide interlevel layer, exposing a top surface of said first aluminum based metal structure; a titanium--titanium nitride layer in said second via hole, including on the exposed top surface of said first aluminum based metal structure, and on the exposed surface of said first silicon oxide interlevel layer, on the exposed surface of said spin on glass layer, and on the exposed surface of said second silicon oxide interlevel layer said titanium--titanium nitride layer forming a titanium contact metallization and a titanium nitride barrier metallization; depositing a second aluminum based metallization layer on said titanium--titanium nitride layer; depositing an anti-reflective coating on said second aluminum based metallization layer; and patterning said second aluminum based metallization layer, and said titanium--titanium nitride layer, to form a second level aluminum based metal structure.
Claim 17
Dependent Claim
40 words
The method of claim 14, wherein said first insulator layer of silicon oxide is deposited using either PECVD, LPCVD, or APCVD processing, at a temperature between about 400° to 700° C., to a thickness between about 5000 to 10000 Angstroms.
Claim 18
Dependent Claim
40 words
The method of claim 14, wherein said first aluminum based metallization layer is deposited using r.f. sputtering, to a thickness between about 6000 to 10000 Angstroms, containing between about 0.5 to 4% copper, and between about 0.5 to 1% silicon.
Claim 19
Dependent Claim
20 words
The method of claim 14, wherein said photoresist layer is applied to a thickness between about 6000 to 12000 Angstroms.
Claim 20
Dependent Claim
35 words
The method of claim 14, wherein said first silicon oxide interlevel layer is deposited using PECVD processing, at a temperature between about 200° to 450° C., to a thickness between about 500 to 3000 Angstroms.
Claim 21
Dependent Claim
30 words
The method of claim 14, wherein said spin on glass layer is applied at a temperature between about 20° to 25° C., to a thickness between 3000 to 7000 Angstroms.
Claim 22
Dependent Claim
49 words
The method of claim 14, wherein said spin on glass layer is heat treated at a temperature between 100° to 200° C., for a time between about 10 to 50 mins., using hot plates, and cured using conventional oven processing, at a temperature between about 250° to 450° C.
Claim 23
Dependent Claim
35 words
The method of claim 14, wherein said second silicon oxide interlevel layer is deposited using PECVD processing, at a temperature between about 200° to 450° C., to a thickness between about 6000 to 12000 Angstroms.
Claim 24
Dependent Claim
15 words
The method of claim 14, wherein said chemical mechanical polishing is performed using conventional methods.
Claim 25
Dependent Claim
19 words
The method of claim 14, wherein said photoresist plugs are removed using plasma oxygen ashing or wet chemical processes.
Claim 26
Dependent Claim
44 words
The method of claim 14, wherein said titanium contact metallization is deposited using r.f. sputtering, to a thickness between about 300 to 1000 Angstroms, while said titanium nitride barrier metallization is deposited using r.f. sputtering, to a thickness between about 200 to 1000 Angstroms.
Claim 27
Dependent Claim
32 words
The method of claim 14, wherein said second aluminum based metallization is deposited using r.f. sputtering, to a thickness between about 5000 to 10000 Angstroms, containing between about 0.5 to 4% copper.
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