US5354713A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Contact manufacturing method of a multi-layered metal line structure
Assignee: SK Hynix Inc
•
Filing: 1992-12-01
•
Granted: 1994-10-11
•
Expires: 2012-12-01
Abstract
Abstract The present invention relates to a manufacturing method of a contact of a multi-layered metal line of a highly integrated semiconductor device. The insulating layer between the metal lines is flattened and step coverage is improved by using a SOG layer or polyimide.
Inventors
- 👤 Jae kap Kim
- 👤 Gon Son
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 20:32
CPC Classifications
H; H10; H10D; H10D64/00; H10D64/01; H10D64/011; H10W; H10W20/00; H10W20/01; H10W20/071; H10W20/081; Y; Y10; Y10S; Y10S148/00; Y10S148/05
Claims Analysis
Total Claims: 6
Claim 1
Independent Claim
195 words
A method for manufacturing a contact of a multi-layered metal line of a semiconductor device comprising the steps of: forming a first conductive layer pattern on a silicon substrate; forming an insulating layer on top of said first conductive layer pattern; forming a second conductive layer pattern on top of said insulating layer; forming a first interlayer insulation over the top of said second conductive layer pattern and then coating a layer smoothly over that part, said coating layer selected from an SOG layer and a polyimide layer; forming a photoresist pattern over the top of said SOG or polyimide layer and then isotropically etching the SOG or polyimide layer to expose the first interlayer insulation located on top of said second conductive layer pattern; removing said photoresist pattern; forming a second interlayer insulation uniformly over the top of the entire structure; and dry etching said second interlayer insulation and first interlayer insulation located on the contact area to expose the second conductive layer pattern so as to form a first contact hole and a second contact hole which do not have topology difference and then to form a third conductive layer over its top.
Claim 2
Independent Claim
195 words
A method for manufacturing a contact of a multi-layered metal line of a semiconductor device comprising the steps of: forming a first conductive layer pattern on a silicon substrate; forming an insulating layer on top of said first conductive layer pattern; forming a second conductive layer pattern on top of said insulating layer; forming a first interlayer insulation over the top of said second conductive layer pattern and then coating a layer smoothly over that part, said coating layer selected from an SOG layer and a polyimide layer; forming a photoresist pattern over the top of said SOG or polyimide layer and then isotropically etching the SOG or polyimide layer to expose the first interlayer insulation located on top of said second conductive layer pattern; removing said photoresist pattern; forming a second interlayer insulation uniformly over the top of the entire structure; and dry etching said second interlayer insulation and first interlayer insulation located on the contact area to expose the second conductive layer pattern so as to form a first contact hole and a second contact hole which do not have topology difference and then to form a third conductive layer over its top.
Claim 3
Dependent Claim
24 words
The method according to claim 1, wherein a polyimide instead of the SOG layer is formed over the top of said first interlayer insulation.
Claim 4
Dependent Claim
31 words
The method according to claim 1, wherein the thickness of said SOG layer is 500 Å for part with a high topology and 4000 Å for part with a low topology.
Claim 5
Dependent Claim
22 words
The method according to claim 1, wherein an etching selectivity ratio of said SOG layer and the first insulating layer is 10:1.
Claim 6
Dependent Claim
19 words
The method according to claim 1, wherein said SOG layer is removed using a wet etching process with HF.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-10-10 | 1998-04-11 | 1998-10-11 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-10-10 | 2002-04-11 | 2002-10-11 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-10-10 | 2006-04-11 | 2006-10-11 | $7700.00 | Window Closed / Lapsed |