US6263299B1
Expired / Lapsed
US
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Geometric aerial image simulation
Assignee: Bell Semiconductor LLC
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Filing: 1999-01-19
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Granted: 2001-07-17
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Expires: 2019-01-19
Abstract
Abstract An aerial image produced by a mask having transmissive portions is simulated by dividing the transmissive portions of the mask into primitive elements, obtaining a response for each of the primitive elements, and then simulating the aerial image by combining the responses over all of the primitive elements.
Inventors
- 👤 Stanislav V. Aleshin
- 👤 Evgenij Egorov
- 👤 Genadij V. Belokopitov
- 👤 Dusan Petranovic
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 11:04
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/70483; G03F7/70491; G03F7/705; G03F7/70425; G03F7/70433; G03F7/70441
Claims Analysis
Total Claims: 38
Claim 1
Independent Claim
84 words
A method of simulating an aerial image produced by a mask having transmissive portions when said mask is exposed to a light source, said method comprising: (a) dividing the transmissive portions of the mask into primitive elements; (b) obtaining a response function for each of the primitive elements; (c) summing the response functions for all of the primitive elements to obtain a mask response function; and (d) simulating the aerial image by evaluating the mask response function over all points in the light source.
Claim 2
Independent Claim
84 words
A method of simulating an aerial image produced by a mask having transmissive portions when said mask is exposed to a light source, said method comprising: (a) dividing the transmissive portions of the mask into primitive elements; (b) obtaining a response function for each of the primitive elements; (c) summing the response functions for all of the primitive elements to obtain a mask response function; and (d) simulating the aerial image by evaluating the mask response function over all points in the light source.
Claim 3
Dependent Claim
28 words
A method according to claim 1 , wherein each response function is a function of a variable relating to a position of a point in the light source.
Claim 4
Dependent Claim
37 words
A method according to claim 1 , wherein the response function for each primitive element corresponds to an image that would be produced by said each primitive element if illuminated by a point in the light source.
Claim 5
Dependent Claim
18 words
A method according to claim 1 , wherein at least two of the primitive elements have different shapes.
Claim 6
Dependent Claim
21 words
A method according to claim 1 , wherein the primitive elements include at least one rectangle and at least one triangle.
Claim 7
Dependent Claim
48 words
A method according to claim 1 , wherein the primitive elements include polygons that can be represented by a sum of rectangles, and wherein difficulty in determining a response function for each of the polygons is based on a number of vertices in said each of the polygons.
Claim 8
Dependent Claim
32 words
A method according to claim 1 , wherein a response function for a triangular primitive element is obtained by decomposing the triangular primitive element into a set of rectangles and smaller triangles.
Claim 9
Dependent Claim
16 words
A method according to claim 1 , wherein response functions for standard primitive elements are pre-stored.
Claim 10
Dependent Claim
21 words
A method according to claim 1 , wherein the response function obtained in step (b) is specified in a spatial domain.
Claim 11
Dependent Claim
42 words
A method according to claim 1 , wherein the aerial image can be simulated for an arbitrarily selected portion of an image plane, and wherein difficulty of simulation is dependent upon a size of the arbitrarily selected portion of the image plane.
Claim 12
Independent Claim
88 words
A method of simulating an aerial image produced by a mask having transmissive portions when said mask is exposed to a light source, said method comprising: (a) dividing the transmissive portions of the mask into primitive elements; (b) obtaining a response for each of the primitive elements when said each of the primitive elements is exposed to a single point in the light source; and (c) simulating the aerial image by combining the responses over all of the primitive elements and over all points in the light source.
Claim 13
Independent Claim
88 words
A method of simulating an aerial image produced by a mask having transmissive portions when said mask is exposed to a light source, said method comprising: (a) dividing the transmissive portions of the mask into primitive elements; (b) obtaining a response for each of the primitive elements when said each of the primitive elements is exposed to a single point in the light source; and (c) simulating the aerial image by combining the responses over all of the primitive elements and over all points in the light source.
Claim 14
Dependent Claim
18 words
A method according to claim 11 , wherein at least two of the primitive elements have different shapes.
Claim 15
Dependent Claim
21 words
A method according to claim 11 , wherein the primitive elements include at least one rectangle and at least one triangle.
Claim 16
Dependent Claim
50 words
A method according to claim 11 , wherein the primitive elements include polygons that can be represented by a sum of rectangles, and wherein difficulty in determining a response for each of the polygons in step (b) is based on a number of vertices in said each of the polygons.
Claim 17
Dependent Claim
31 words
A method according to claim 11 , wherein a response for a triangular primitive element is obtained by decomposing the triangular primitive element into a set of rectangles and smaller triangles.
Claim 18
Dependent Claim
15 words
A method according to claim 11 , wherein responses for standard primitive elements are pre-stored.
Claim 19
Dependent Claim
42 words
A method according to claim 11 , wherein the aerial image can be simulated for an arbitrarily selected portion of an image plane, and wherein difficulty of simulation is dependent upon a size of the arbitrarily selected portion of the image plane.
Claim 20
Dependent Claim
20 words
A method according to claim 11 , wherein the response obtained in step (b) is specified in a spatial domain.
Claim 21
Independent Claim
63 words
A method of simulating an aerial image produced by a mask having transmissive portions, said method comprising: (a) dividing the transmissive portions of the mask into primitive elements; (b) obtaining a response for each of the primitive elements; and (c) simulating the aerial image for an arbitrarily selected portion of an image plane by combining the responses over all of the primitive elements.
Claim 22
Independent Claim
63 words
A method of simulating an aerial image produced by a mask having transmissive portions, said method comprising: (a) dividing the transmissive portions of the mask into primitive elements; (b) obtaining a response for each of the primitive elements; and (c) simulating the aerial image for an arbitrarily selected portion of an image plane by combining the responses over all of the primitive elements.
Claim 23
Dependent Claim
18 words
A method according to claim 19 , wherein at least two of the primitive elements have different shapes.
Claim 24
Dependent Claim
22 words
A method according to claim 19 , A method according to claim 19 , wherein responses for standard primitive elements are pre-stored.
Claim 25
Dependent Claim
25 words
A method according to claim 19 , wherein difficulty of simulation is dependent upon a size of the arbitrarily selected portion of the image plane.
Claim 26
Dependent Claim
20 words
A method according to claim 19 , wherein the response obtained in step (b) is specified in a spatial domain.
Claim 27
Dependent Claim
97 words
Computer-executable process steps stored on a computer readable medium, said process steps for simulating an aerial image produced by a mask having transmissive portions when said mask is exposed to a light source, said process steps comprising steps to: (a) divide the transmissive portions of the mask into primitive elements; (b) obtain a response function for each of the primitive elements; (c) sum the response functions for all of the primitive elements to obtain a mask response function; and (d) simulate the aerial image by evaluating the mask response function over all points in the light source.
Claim 28
Dependent Claim
97 words
Computer-executable process steps stored on a computer readable medium, said process steps for simulating an aerial image produced by a mask having transmissive portions when said mask is exposed to a light source, said process steps comprising steps to: (a) divide the transmissive portions of the mask into primitive elements; (b) obtain a response function for each of the primitive elements; (c) sum the response functions for all of the primitive elements to obtain a mask response function; and (d) simulate the aerial image by evaluating the mask response function over all points in the light source.
Claim 29
Dependent Claim
101 words
Computer-executable process steps stored on a computer readable medium, said process steps for simulating an aerial image produced by a mask having transmissive portions when said mask is exposed to a light source, said process steps comprising steps to: (a) divide the transmissive portions of the mask into primitive elements; (b) obtain a response for each of the primitive elements when said each of the primitive elements is exposed to a single point in the light source; and (c) simulate the aerial image by combining the responses over all of the primitive elements and over all points in the light source.
Claim 30
Dependent Claim
101 words
Computer-executable process steps stored on a computer readable medium, said process steps for simulating an aerial image produced by a mask having transmissive portions when said mask is exposed to a light source, said process steps comprising steps to: (a) divide the transmissive portions of the mask into primitive elements; (b) obtain a response for each of the primitive elements when said each of the primitive elements is exposed to a single point in the light source; and (c) simulate the aerial image by combining the responses over all of the primitive elements and over all points in the light source.
Claim 31
Dependent Claim
76 words
Computer-executable process steps stored on a computer readable medium, said process steps for simulating an aerial image produced by a mask having transmissive portions, said process steps comprising steps to: (a) divide the transmissive portions of the mask into primitive elements; (b) obtain a response for each of the primitive elements; and (c) simulate the aerial image for an arbitrarily selected portion of an image plane by combining the responses over all of the primitive elements.
Claim 32
Dependent Claim
76 words
Computer-executable process steps stored on a computer readable medium, said process steps for simulating an aerial image produced by a mask having transmissive portions, said process steps comprising steps to: (a) divide the transmissive portions of the mask into primitive elements; (b) obtain a response for each of the primitive elements; and (c) simulate the aerial image for an arbitrarily selected portion of an image plane by combining the responses over all of the primitive elements.
Claim 33
Independent Claim
113 words
An apparatus for simulating an aerial image produced by a mask having transmissive portions when said mask is exposed to a light source, said apparatus comprising: a processor for executing stored program instruction steps; and a memory connected to the processor for storing the program instruction steps, wherein the program instruction steps include steps to: (a) divide the transmissive portions of the mask into primitive elements; (b) obtain a response function for each of the primitive elements; (c) sum the response functions for all of the primitive elements to obtain a mask response function; and (d) simulate the aerial image by evaluating the mask response function over all points in the light source.
Claim 34
Independent Claim
113 words
An apparatus for simulating an aerial image produced by a mask having transmissive portions when said mask is exposed to a light source, said apparatus comprising: a processor for executing stored program instruction steps; and a memory connected to the processor for storing the program instruction steps, wherein the program instruction steps include steps to: (a) divide the transmissive portions of the mask into primitive elements; (b) obtain a response function for each of the primitive elements; (c) sum the response functions for all of the primitive elements to obtain a mask response function; and (d) simulate the aerial image by evaluating the mask response function over all points in the light source.
Claim 35
Independent Claim
117 words
An apparatus for simulating an aerial image produced by a mask having transmissive portions when said mask is exposed to a light source, said apparatus comprising: a processor for executing stored program instruction steps; and a memory connected to the processor for storing the program instruction steps, wherein the program instruction steps include steps to: (a) divide the transmissive portions of the mask into primitive elements; (b) obtain a response for each of the primitive elements when said each of the primitive elements is exposed to a single point in the light source; and (c) simulate the aerial image by combining the responses over all of the primitive elements and over all points in the light source.
Claim 36
Independent Claim
117 words
An apparatus for simulating an aerial image produced by a mask having transmissive portions when said mask is exposed to a light source, said apparatus comprising: a processor for executing stored program instruction steps; and a memory connected to the processor for storing the program instruction steps, wherein the program instruction steps include steps to: (a) divide the transmissive portions of the mask into primitive elements; (b) obtain a response for each of the primitive elements when said each of the primitive elements is exposed to a single point in the light source; and (c) simulate the aerial image by combining the responses over all of the primitive elements and over all points in the light source.
Claim 37
Independent Claim
92 words
An apparatus for simulating an aerial image produced by a mask having transmissive portions, said apparatus comprising: a processor for executing stored program instruction steps; and a memory connected to the processor for storing the program instruction steps, wherein the program instruction steps include steps to: (a) divide the transmissive portions of the mask into primitive elements; (b) obtain a response for each of the primitive elements; and (c) simulate the aerial image for an arbitrarily selected portion of an image plane by combining the responses over all of the primitive elements.
Claim 38
Independent Claim
92 words
An apparatus for simulating an aerial image produced by a mask having transmissive portions, said apparatus comprising: a processor for executing stored program instruction steps; and a memory connected to the processor for storing the program instruction steps, wherein the program instruction steps include steps to: (a) divide the transmissive portions of the mask into primitive elements; (b) obtain a response for each of the primitive elements; and (c) simulate the aerial image for an arbitrarily selected portion of an image plane by combining the responses over all of the primitive elements.
References Cited (Backward Citations)
US4652134A
Cited
US5595861A
Cited
US5444265A
Cited
US5502654A
Cited
US5679598A
Cited
US5682323A
Cited
US5663076A
Cited
US5705301A
Cited
US5723233A
Cited
US5900338A
Cited
US5877045A
Cited
US5998070A
Cited
US5955227A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2004-07-16 | 2005-01-15 | 2005-07-17 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2008-07-16 | 2009-01-15 | 2009-07-17 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2012-07-16 | 2013-01-15 | 2013-07-17 | $7700.00 | Window Closed / Lapsed |