US5663076A
Expired / Lapsed
US
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Automating photolithography in the fabrication of integrated circuits
Assignee: Bell Semiconductor LLC
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Filing: 1995-08-08
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Granted: 1997-09-02
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Expires: 2015-08-08
Abstract
Abstract Automated photolithography of integrated circuit wafers is enabled with a processor connected to a Rayleigh derator, a form factor generator, a logic synthesizer, a layout generator, a lithography module and a wafer process. The Rayleigh derator receives manufacturing information resulting from yield data in the wafer process, and this manufacturing data is then used to derate the theoretical minimum feature size available for etching wafer masks given a known light source and object lens numerical aperture. This minimum feature size is then used by a form factor generator in sizing transistors in a net list to their smallest manufacturable size. A logic synthesizer then converts the net list into a physical design using a layout generator combined with user defined constraints. This physical design is then used by the mask lithography module to generate wafer masks for use in the semiconductor manufacturing. Manufacturing data including process and yield parameters is then transferred back to the Rayleigh processor for use in the designing of subsequent circuits. In this way, a direct coupling exists between the measurement of wafer process parameters and the automated sizing of semiconductor devices, enabling the production of circuits having the smallest manufacturable device sizes available for the given lithography and wafer process.
Inventors
- 👤 Michael D. Rostoker
- 👤 Nicholas F. Pasch
- 👤 Ashok K. Kapoor
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 20:33
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/70483; G03F7/70491; G03F7/705; G03F7/20; G03F7/70425; G03F7/70433
Claims Analysis
Total Claims: 21
Claim 1
Independent Claim
188 words
A method for automating the manufacture of an integrated circuit by means of a computer having a processor, a display, input means, output means, and a memory storing information, said method comprising the steps of: measuring at least one process parameter for a wafer process; storing said parameter in said memory; electing a light source by said input means; utilizing information stored in said memory to determine a wavelength and a numerical aperture associated with said selected light source; determining a select minimum device feature size which can be manufactured in the wafer process based on said process parameter and said determined wavelength and numerical aperture; reading a net list stored in said memory for said integrated circuit to determine, for a given device in said circuit, based on the select minimum device feature size, a minimum manufacturable feature size; repeating the previous step for the other devices in said circuit; sizing the individual devices of the integrated circuit in accordance with said minimum manufacturable feature sizes to produce sizing information; and obtaining said sizing information through said output means to complete the design of said integrated circuit.
Claim 2
Independent Claim
188 words
A method for automating the manufacture of an integrated circuit by means of a computer having a processor, a display, input means, output means, and a memory storing information, said method comprising the steps of: measuring at least one process parameter for a wafer process; storing said parameter in said memory; electing a light source by said input means; utilizing information stored in said memory to determine a wavelength and a numerical aperture associated with said selected light source; determining a select minimum device feature size which can be manufactured in the wafer process based on said process parameter and said determined wavelength and numerical aperture; reading a net list stored in said memory for said integrated circuit to determine, for a given device in said circuit, based on the select minimum device feature size, a minimum manufacturable feature size; repeating the previous step for the other devices in said circuit; sizing the individual devices of the integrated circuit in accordance with said minimum manufacturable feature sizes to produce sizing information; and obtaining said sizing information through said output means to complete the design of said integrated circuit.
Claim 3
Dependent Claim
26 words
The method according to claim 1 further comprising the step of manufacturing said integrated circuit having said devices in accordance with said minimum manufacturable feature sizes.
Claim 4
Dependent Claim
28 words
The method according to claim 2 wherein the select minimum device feature size relates to optical parameters of photolithography equipment used in the manufacture of the integrated circuit.
Claim 5
Dependent Claim
50 words
The method according to claim 3 wherein the select minimum device feature size is determined according to the formula: ##EQU5## where R is said select minimum device feature size, λ is a light source wavelength, NA is a numerical aperture value, and k is the value of a Rayleigh constant.
Claim 6
Dependent Claim
17 words
The method according to claim 1 wherein a manufacturing constant is generated from said measured process parameter.
Claim 7
Dependent Claim
21 words
The method according to claim 5 wherein said manufacturing constant is generated by applying weighting functions to the measured process parameter.
Claim 8
Dependent Claim
21 words
The method according to claim 5 wherein said manufacturing constant is a derating value which reflects variations in said process parameter.
Claim 9
Dependent Claim
27 words
The method according to claim 5 wherein the minimum manufacturable device feature size is determined by multiplying the select minimum device feature size by said manufacturing constant.
Claim 10
Dependent Claim
16 words
The method according to claim 1 wherein the measuring of the process parameter is performed automatically.
Claim 11
Dependent Claim
16 words
The method according to claim 1 wherein the measuring of the process parameter is performed continuously.
Claim 12
Dependent Claim
19 words
The method according to claim 3 wherein the optical parameters include aperture and wavelength associated with said photolithography equipment.
Claim 13
Dependent Claim
34 words
The method according to claim 3 wherein an enhanced Hg arc light is used in the photolithography equipment resulting in a minimum manufacturable feature size of no more than a quarter of a micron.
Claim 14
Dependent Claim
33 words
The method according to claim 3 wherein a KrF laser light is used in the photolithography equipment resulting in a minimum manufacturable feature size of no more than an eighth of a micron.
Claim 15
Independent Claim
202 words
A method for automating the manufacture of a semiconductor device having a feature size below approximately 0.3 microns by means of a computer having processor, a display, input means, output means, and a memory storing information, said method comprising the steps of: measuring at least one process parameter for a wafer process; storing said parameter in said memory; selecting a light source by said input means; utilizing information stored in said memory to determine a wavelength and a numerical aperture associated with said selected light source; determining a select minimum device feature size below approximately 0.3 microns which can be manufactured in the wafer process based on said process parameter and said determined wavelength and numerical aperture; reading a net list stored in said memory for said integrated circuit to determine, for a given device in said circuit, based on the select minimum device feature size, a minimum manufacturable feature size below approximately 0.3 microns; repeating the previous step for the other devices in said circuit; sizing individual devices of the integrated circuit in accordance with said minimum manufacturable feature sizes to produce sizing information; and obtaining said sizing information through said output means to complete the design of said integrated circuit.
Claim 16
Independent Claim
202 words
A method for automating the manufacture of a semiconductor device having a feature size below approximately 0.3 microns by means of a computer having processor, a display, input means, output means, and a memory storing information, said method comprising the steps of: measuring at least one process parameter for a wafer process; storing said parameter in said memory; selecting a light source by said input means; utilizing information stored in said memory to determine a wavelength and a numerical aperture associated with said selected light source; determining a select minimum device feature size below approximately 0.3 microns which can be manufactured in the wafer process based on said process parameter and said determined wavelength and numerical aperture; reading a net list stored in said memory for said integrated circuit to determine, for a given device in said circuit, based on the select minimum device feature size, a minimum manufacturable feature size below approximately 0.3 microns; repeating the previous step for the other devices in said circuit; sizing individual devices of the integrated circuit in accordance with said minimum manufacturable feature sizes to produce sizing information; and obtaining said sizing information through said output means to complete the design of said integrated circuit.
Claim 17
Dependent Claim
34 words
The method for automating the manufacture of an integrated circuit according to claim 14, further comprising the step of manufacturing said integrated circuit having said devices in accordance with said minimum manufacturable feature sizes.
Claim 18
Dependent Claim
28 words
The method according to claim 14 wherein the select minimum device feature size relates to optical parameters of photolithography equipment used in the manufacture of the integrated circuit.
Claim 19
Dependent Claim
50 words
The method according to claim 16 wherein the select minimum device feature size is determined according to the formula: ##EQU6## where R is said select minimum device feature size, λ is a light source wavelength, NA is a numerical aperture value, and k is the value of a Rayleigh constant.
Claim 20
Dependent Claim
17 words
The method according to claim 14 wherein a manufacturing constant is generated from said measured process parameter.
Claim 21
Dependent Claim
21 words
The method according to claim 14 wherein said manufacturing constant is generated by applying weighting functions to the measured process parameters.
References Cited (Backward Citations)
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