US5426375A
Expired / Lapsed
US
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Method and apparatus for optimizing high speed performance and hot carrier lifetime in a MOS integrated circuit
Assignee: Renesas Technology America Inc
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Filing: 1993-02-26
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Granted: 1995-06-20
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Expires: 2013-02-26
Abstract
Abstract MOS integrated circuit fabrication processes may be optimized for yield rather than for hot carrier lifetime by compensating for oversize MOS channel lengths with increased V cc power supply voltage, and by compensating for undersized MOS device channel lengths with decreased V cc . Where channel lengths are greater than necessary, V cc is increased to increase switching times, while still operating the integrated circuit in a regime ensuring at least a minimum hot carrier lifetime. A test MOS device is fabricated on the integrated circuit substrate and in a test mode the test device substrate current I bb is measured. The measured I bb is then correlated with known I bb data to ascertain whether the channel length and DC hot carrier lifetime are acceptable, both for the test device and all MOS devices in the integrated circuit. The measured I bb value may be used with a look-up table to manually adjust the V cc power supply to the integrated circuit to compensate for channel length variation. The measured I bb value may be translated into a desired compensating value of V cc , and the integrated circuit so labelled, electrically or by package marking. Alternatively, the measured I bb value may control on an-chip circuit coupled to an off-chip voltage regulator to automatically adjust V cc to a level ensuring at least a minimum hot carrier lifetime for the integrated circuit.
Inventors
- 👤 Richard S. Roy
- 👤 Bruce J. Barbara
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 15:00
CPC Classifications
H; H10; H10P; H10P74/00; H10P74/27; H10P74/277; G; G01; G01R; G01R31/00; G01R31/26; G01R31/2607; G01R31/2621; G01R31/27; G01R31/275
Claims Analysis
Total Claims: 22
Claim 1
Independent Claim
158 words
A method of determining a maximum operating V cc potential for an integrated circuit fabricated on a substrate that includes metal-oxide-silicon ("MOS") devices, the determined operating V cc compensating for variations in effective channel lengths of the MOS devices so as to ensure at least a minimum hot carrier lifetime, the method comprising the following steps: (a) monitoring, in a test mode, substrate current for at least one MOS device in the integrated circuit; (b) comparing the substrate current monitored in step (a) with a reference substrate current based upon data correlating substrate current to effective channel length and to direct current hot carrier lifetime for a MOS device; and (c) determining from step (b) a compensating level of V cc , said compensating level being greater than nominal if the monitored substrate current is less than the reference substrate current, and being less than nominal if the monitored substrate current is greater than the reference substrate current.
Claim 2
Independent Claim
158 words
A method of determining a maximum operating V cc potential for an integrated circuit fabricated on a substrate that includes metal-oxide-silicon ("MOS") devices, the determined operating V cc compensating for variations in effective channel lengths of the MOS devices so as to ensure at least a minimum hot carrier lifetime, the method comprising the following steps: (a) monitoring, in a test mode, substrate current for at least one MOS device in the integrated circuit; (b) comparing the substrate current monitored in step (a) with a reference substrate current based upon data correlating substrate current to effective channel length and to direct current hot carrier lifetime for a MOS device; and (c) determining from step (b) a compensating level of V cc , said compensating level being greater than nominal if the monitored substrate current is less than the reference substrate current, and being less than nominal if the monitored substrate current is greater than the reference substrate current.
Claim 3
Dependent Claim
99 words
The method of claim 1, wherein said monitoring step (a) includes the additional steps of: (i) fabricating on said substrate a test MOS device whose source, drain and gate regions are coupled to source, drain and gate probe pads; (ii) coupling said source, drain and gate probe pads to first, second and third direct current potentials; and (iii) measuring source and drain current flow for said test MOS device and determining by the difference in said current flow the substrate current for said test device, no potential being applied to other devices on said integrated circuit during step (a).
Claim 4
Dependent Claim
37 words
The method of claim 2, wherein step (i) includes fabricating said test MOS device with a minimum channel width such that a width/length ratio for said test MOS device is sufficiently large to facilitate I bb measurement.
Claim 5
Dependent Claim
42 words
The method of claim 2, wherein at step (ii) said first direct current potential is ground, said second direct current potential approximates nominal V cc , and said third direct potential does not exceed approximately 50% of said second direct current potential.
Claim 6
Dependent Claim
58 words
The method of claim 1, wherein at step (b), said data is obtained by measuring substrate current for several MOS devices having different effective channel lengths, and by actually measuring in cross-section said channel lengths for said several MOS devices, and by correlating the substrate current measured for said several MOS devices with the measured effective channel lengths.
Claim 7
Dependent Claim
36 words
The method of claim 1, wherein said monitoring step (a) is accomplished with operating potential being coupled to a test MOS device in said integrated circuit and without otherwise coupling operating potential to said integrated circuit.
Claim 8
Dependent Claim
90 words
The method of claim 1, further including at least one additional step selected from the group consisting of: (i) labelling the integrated circuit with the compensating level of V cc so determined; (ii) fabricating on the substrate means for memorializing the compensating level of V cc so determined; and (iii) fabricating on the substrate a circuit responsive to the monitored substrate circuit, said circuit providing as an output a parameter coupleable to an external regulator for regulating a V cc power supply from which the integrated circuit may be operated.
Claim 9
Dependent Claim
30 words
The method of claim 7, wherein said step (ii) includes the step of providing a plurality of fuse elements having a fuse pattern memorializing the magnitude of the substrate current.
Claim 10
Independent Claim
178 words
A method of compensating for variations in effective channel length of metal-oxide-silicon ("MOS") devices in an integrated circuit having a substrate, to ensure at least a minimum hot carrier lifetime, the method comprising the following steps: (a) monitoring, in a test mode, substrate current for at least one MOS device in the integrated circuit; (b) comparing the substrate current monitored in step (a) with a reference substrate current based upon data correlating substrate current to effective channel length and to direct current hot carrier lifetime for a MOS device; (c) operating the integrated circuit at an increased magnitude V cc power supply level if the monitored substrate current is less than the reference substrate current, and operating the integrated circuit at a decreased magnitude V cc power supply level if the monitored substrate current exceeds the reference substrate current; wherein the magnitude of the V cc power supply is adjusted to compensate for variation in effective channel length of MOS devices in the integrated circuit such that at least a minimum direct current hot carrier lifetime is exceeded.
Claim 11
Independent Claim
178 words
A method of compensating for variations in effective channel length of metal-oxide-silicon ("MOS") devices in an integrated circuit having a substrate, to ensure at least a minimum hot carrier lifetime, the method comprising the following steps: (a) monitoring, in a test mode, substrate current for at least one MOS device in the integrated circuit; (b) comparing the substrate current monitored in step (a) with a reference substrate current based upon data correlating substrate current to effective channel length and to direct current hot carrier lifetime for a MOS device; (c) operating the integrated circuit at an increased magnitude V cc power supply level if the monitored substrate current is less than the reference substrate current, and operating the integrated circuit at a decreased magnitude V cc power supply level if the monitored substrate current exceeds the reference substrate current; wherein the magnitude of the V cc power supply is adjusted to compensate for variation in effective channel length of MOS devices in the integrated circuit such that at least a minimum direct current hot carrier lifetime is exceeded.
Claim 12
Dependent Claim
99 words
The method of claim 9, wherein said monitoring step (a) includes the additional steps of: (i) fabricating on said substrate a test MOS device whose source, drain and gate regions are coupled to source, drain and gate probe pads; (ii) coupling said source, drain and gate probe pads to first, second and third direct current potentials; and (iii) measuring source and drain current flow for said test MOS device and determining by the difference in said current flow the substrate current for said test device, no potential being applied to other devices on the integrated circuit during step (a).
Claim 13
Dependent Claim
37 words
The method of claim 10, wherein step (i) includes fabricating said test MOS device with a minimum channel width such that a width/length ratio for said test MOS device is sufficiently large to facilitate I bb measurement.
Claim 14
Dependent Claim
42 words
The method of claim 10, wherein at step (ii) said first direct current potential is ground, said second direct current potential approximates nominal V cc , and said third direct potential does not exceed approximately 50% of said second direct current potential.
Claim 15
Dependent Claim
58 words
The method of claim 9, wherein at step (b), said data is obtained by measuring substrate current for several MOS devices having different effective channel lengths, and by actually measuring in cross-section said channel lengths for said several MOS devices, and by correlating the substrate current measured for said several MOS devices with the measured effective channel lengths.
Claim 16
Dependent Claim
36 words
The method of claim 9, wherein said monitoring step (a) is accomplished with operating potential being coupled to a test MOS device in said integrated circuit and without otherwise coupling operating potential to said integrated circuit.
Claim 17
Dependent Claim
143 words
The method of claim 9, wherein step (c) includes at least one additional step selected from the group consisting of: (i) providing said integrated circuit with a legend stating at what magnitude V cc the integrated circuit should be operated to meet at least a minimum direct current hot carrier lifetime; (ii) encoding within said integrated circuit a means for memorializing at what magnitude V cc the integrated circuit should be operated to meet at least a minimum direct current hot carrier lifetime; (iii) providing said integrated circuit with a circuit responsive to the monitored substrate current, said circuit providing as an output a parameter coupleable to an external regulator for regulating the V cc power supply from which the integrated circuit is operated; and (iv) providing a plurality of fuse elements having a fuse pattern memorializing the magnitude of the substrate current.
Claim 18
Independent Claim
172 words
A method of determining a minimum hot carrier lifetime for an integrated circuit fabricated on a substrate that includes metal-oxide-silicon ("MOS") devices and coupleable in use to a source of operating potential V cc , the method comprising the following steps: (a) monitoring, in a test mode, substrate current for at least one MOS device in the integrated circuit; (b) comparing the substrate current monitored in step (a) with a reference substrate current based upon data correlating substrate current to effective channel length and to direct current hot carrier lifetime for a MOS device; and (c) determining from step (b) a compensating level of V cc , said compensating level being greater than nominal if the monitored substrate current is less than the reference substrate current, and being less than nominal if the monitored substrate current is greater than the reference substrate current; wherein said compensating level of V cc compensates for variations in effective channel lengths of said MOS devices so as to ensure at least a minimum hot carrier lifetime.
Claim 19
Independent Claim
172 words
A method of determining a minimum hot carrier lifetime for an integrated circuit fabricated on a substrate that includes metal-oxide-silicon ("MOS") devices and coupleable in use to a source of operating potential V cc , the method comprising the following steps: (a) monitoring, in a test mode, substrate current for at least one MOS device in the integrated circuit; (b) comparing the substrate current monitored in step (a) with a reference substrate current based upon data correlating substrate current to effective channel length and to direct current hot carrier lifetime for a MOS device; and (c) determining from step (b) a compensating level of V cc , said compensating level being greater than nominal if the monitored substrate current is less than the reference substrate current, and being less than nominal if the monitored substrate current is greater than the reference substrate current; wherein said compensating level of V cc compensates for variations in effective channel lengths of said MOS devices so as to ensure at least a minimum hot carrier lifetime.
Claim 20
Independent Claim
99 words
The method of claims 16, wherein said monitoring step (a) includes the additional steps of: (i) fabricating on said substrate a test MOS device whose source, drain and gate regions are coupled to source, drain and gate probe pads; (ii) coupling said source, drain and gate probe pads to first, second and third direct current potentials; and (iii) measuring source and drain current flow for said test MOS device and determining by the difference in said current flow the substrate current for said test device, no potential being applied to other devices on said integrated circuit during step (a).
Claim 21
Dependent Claim
37 words
The method of claim 17, wherein step (i) includes fabricating said test MOS device with a minimum channel width such that a width/length ratio for said test MOS device is sufficiently large to facilitate I bb measurement.
Claim 22
Dependent Claim
46 words
The method of claim 18, further including fabricating on the substrate means for memorializing compensating V cc level information permitting a user to cause said MOS devices to exhibit a user-selected hot carrier lifetime by operating said integrated circuit at a memorialized said V cc value.
References Cited (Backward Citations)
US5103166A
Cited
US5286656A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1998-06-19 | 1998-12-19 | 1999-06-20 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2002-06-19 | 2002-12-19 | 2003-06-20 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2006-06-19 | 2006-12-19 | 2007-06-20 | $7700.00 | Window Closed / Lapsed |