US4652134A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Mask alignment system
Assignee: LSI Corp
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Filing: 1984-08-28
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Granted: 1987-03-24
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Expires: 2004-08-28
Abstract
Abstract A system for aligning a semiconductor wafer with a mask bearing a pattern to be formed on the wafer, in which both the wafer and the mask bear an alignment mark, and in which light used for alignment is filtered to transmit only in a selected bandwidth, uses a reflector system to gather light reflected from edges of the alignment mark on the wafer. In order to minimize the effect of erroneous alignment signals from standing waves generated when the alignment signal is reflected from a wafer coated with a layer of photoresist, a second filter is placed in the path of light after it has reflected from the target. This second filter transmits a range of the reflected light which does not produce standing waves.
Inventors
- 👤 Nicholas F. Pasch
- 👤 James L. Hubbard
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 23:42
CPC Classifications
G; G03; G03F; G03F9/00; G03F9/70; G03F9/7088; G03F9/7065
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
165 words
A photolithographic mask alignment system comprising: means for generating an alignment image comprising a light source and an alignment mask bearing the pattern of said alignment image through which passes light from said light source; an alignment target bearing the pattern of said alignment image formed on a semiconductor wafer, where said semiconductor wafer is aligned with said photolithographic mask when said alignment image formed by light passed by said alignment mask is aligned with said alignment target; means for causing light reflected from said alignment target to have higher intensity when said alignment image is aligned with said alignment target than when said alignment image is not aligned; means for filtering said light after reflection from said alignment target thereby removing selected wavelengths of said light which generate standing waves upon reflection from photoresist formed upon said target; and means for receiving said light reflected from said alignment target after said light reflected from said alignment target has passed through said means for filtering.
Claim 2
Dependent Claim
165 words
A photolithographic mask alignment system comprising: means for generating an alignment image comprising a light source and an alignment mask bearing the pattern of said alignment image through which passes light from said light source; an alignment target bearing the pattern of said alignment image formed on a semiconductor wafer, where said semiconductor wafer is aligned with said photolithographic mask when said alignment image formed by light passed by said alignment mask is aligned with said alignment target; means for causing light reflected from said alignment target to have higher intensity when said alignment image is aligned with said alignment target than when said alignment image is not aligned; means for filtering said light after reflection from said alignment target thereby removing selected wavelengths of said light which generate standing waves upon reflection from photoresist formed upon said target; and means for receiving said light reflected from said alignment target after said light reflected from said alignment target has passed through said means for filtering.
Claim 3
Dependent Claim
22 words
A photolithographic alignment system as in claim 1 further comprising: an actinic filter for filtering said light produced by said light source.
Claim 4
Dependent Claim
23 words
A photolithographic alignment system as in claim 1 wherein said alignment target is a raised area on said semiconductor wafer having said pattern.
Claim 5
Dependent Claim
47 words
A photolithographic system as in claim 3 wherein said means for causing comprises a concave mirror having an aperture in its center, wherein only that portion of said light reflected from said alignment target which reflects from an edge of said alignment target passes through said aperture.
Claim 6
Dependent Claim
17 words
A photolithographic alignment system as in claim 1 wherein said means for receiving comprises a photomultiplier tube.
Claim 7
Independent Claim
101 words
A method of aligning photolithographic masks in a projection photolithographic system comprising the steps of: generating an alignment image of a selected pattern; projecting said alignment image on an alignment target formed on a semiconductor wafer, said target having said selected pattern, where said semiconductor wafer is aligned with said photolithographic mask when said alignment image is aligned with said alignment target; filtering light reflected from the edges of said alignment target to allow filtered light having a selected range of wavelengths which do not generate standing waves to pass; generating an electrical signal in proportion to the received filtered light.
Claim 8
Independent Claim
101 words
A method of aligning photolithographic masks in a projection photolithographic system comprising the steps of: generating an alignment image of a selected pattern; projecting said alignment image on an alignment target formed on a semiconductor wafer, said target having said selected pattern, where said semiconductor wafer is aligned with said photolithographic mask when said alignment image is aligned with said alignment target; filtering light reflected from the edges of said alignment target to allow filtered light having a selected range of wavelengths which do not generate standing waves to pass; generating an electrical signal in proportion to the received filtered light.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1990-03-23 | 1990-09-22 | 1991-03-24 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1994-03-23 | 1994-09-22 | 1995-03-24 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1998-03-23 | 1998-09-22 | 1999-03-24 | $7700.00 | Window Closed / Lapsed |