US5444265A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method and apparatus for detecting defective semiconductor wafers during fabrication thereof
Assignee: LSI Corp
•
Filing: 1993-02-23
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Granted: 1995-08-22
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Expires: 2013-02-23
Abstract
Abstract An apparatus and method for detecting burnt resist or mask on the surface of a semiconductor integrated circuit wafer during fabrication thereof. A light source and light sensor are utilized to identify the flat matte surface finish of burnt resist or mask and shut down the fabrication process before a large number of semiconductor wafers are ruined. The burnt resist or mask is detected by the lack of reflected light from the surface of the wafer compared with the light reflected from the surface of a known good resist coated wafer.
Inventors
- 👤 Jeffrey L. Hamilton
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 11:23
CPC Classifications
G; G01; G01N; G01N21/00; G01N21/84; G01N21/88; G01N21/95; G01N21/9501
Claims Analysis
Total Claims: 18
Claim 1
Independent Claim
87 words
A method for determining when a coating on the surface of a semiconductor integrated circuit wafer is burnt during fabrication thereof, comprising the steps of: detecting the presence of the semiconductor integrated circuit wafer; illuminating the coated surface of the semiconductor integrated circuit wafer with light; measuring the light reflected off the coated semiconductor integrated circuit wafer; determining whether the coating is burnt by the amount of light reflected from the surface of the coated semiconductor integrated circuit wafer; and alarming when burnt coating is so determined.
Claim 2
Independent Claim
87 words
A method for determining when a coating on the surface of a semiconductor integrated circuit wafer is burnt during fabrication thereof, comprising the steps of: detecting the presence of the semiconductor integrated circuit wafer; illuminating the coated surface of the semiconductor integrated circuit wafer with light; measuring the light reflected off the coated semiconductor integrated circuit wafer; determining whether the coating is burnt by the amount of light reflected from the surface of the coated semiconductor integrated circuit wafer; and alarming when burnt coating is so determined.
Claim 3
Dependent Claim
23 words
The method of claim 1, further comprising the step of stopping the semiconductor integrated circuit wafer fabrication process when burnt coating is determined.
Claim 4
Dependent Claim
32 words
The method of claim 1, wherein the step of measuring the light reflected off the surface of the coated semiconductor integrated circuit wafer includes measuring light reflected off of a resist coating.
Claim 5
Dependent Claim
33 words
The method of claim 1, wherein the step of measuring the light reflected off the surface of the coated semiconductor integrated circuit wafer includes measuring light reflected off of a polymer mask coating.
Claim 6
Dependent Claim
33 words
The method of claim 1, wherein the step of measuring the light reflected off the surface of the coated semiconductor integrated circuit wafer includes measuring light reflected off of a polyimide mask coating.
Claim 7
Dependent Claim
33 words
The method of claim 1, wherein the step of measuring the light reflected off the surface of the coated semiconductor integrated circuit wafer includes measuring light reflected off of an epoxy mask coating.
Claim 8
Independent Claim
115 words
An apparatus for determining when a coating on the surface of a semiconductor integrated circuit wafer is burnt during fabrication thereof, comprising: a light source, said light source illuminating the surface of the semiconductor integrated circuit wafer; a light sensor, said light sensor detecting reflected light from the surface of the wafer, wherein burnt coating will substantially prevent reflection of light from the surface of the wafer; means to detect the presence of the wafer; and logic means for alarming when a wafer is present and there is substantially no reflected light from the surface of the wafer, said logic means connected to and receiving signals from said light sensor and wafer presence detection means.
Claim 9
Independent Claim
115 words
An apparatus for determining when a coating on the surface of a semiconductor integrated circuit wafer is burnt during fabrication thereof, comprising: a light source, said light source illuminating the surface of the semiconductor integrated circuit wafer; a light sensor, said light sensor detecting reflected light from the surface of the wafer, wherein burnt coating will substantially prevent reflection of light from the surface of the wafer; means to detect the presence of the wafer; and logic means for alarming when a wafer is present and there is substantially no reflected light from the surface of the wafer, said logic means connected to and receiving signals from said light sensor and wafer presence detection means.
Claim 10
Dependent Claim
24 words
The apparatus of claim 7, wherein said light source is a plurality of light sources sequentially enabled to illuminate selected areas of the wafer.
Claim 11
Dependent Claim
28 words
The apparatus of claim 7, wherein said light sensor is a plurality of light sensors, each light sensor detecting reflected light from a selected area of the wafer.
Claim 12
Dependent Claim
14 words
The apparatus of claim 7, wherein said presence detection means is a proximity switch.
Claim 13
Dependent Claim
15 words
The apparatus of claim 7, wherein said presence detection means is a lever actuated switch.
Claim 14
Dependent Claim
41 words
The apparatus of claim 7, wherein said presence detection means is a light source and light sensor that detects the presence of the wafer when the wafer passes between the light source and the light sensor, and interrupts the light therebetween.
Claim 15
Dependent Claim
108 words
The apparatus of claim 7, wherein said logic means comprises: a selectably adjustable analog relay having a low set point representative of substantially no light reflected from the surface of the wafer, indicating burnt coating, and a high set point representative of light reflected from the surface of the wafer, indicating normal coating, said analog relay having an output logic signal representative of the high set point; and a logic circuit having an output signal when the presence of a wafer is detected and there is no logic signal from said analog relay indicating a high set point, said logic circuit output signal adapted to actuate an alarm.
Claim 16
Dependent Claim
10 words
The apparatus of claim 7, wherein the coating is resist.
Claim 17
Dependent Claim
13 words
The apparatus of claim 7, wherein the coating is an organic material mask.
Claim 18
Dependent Claim
14 words
The apparatus of claim 15, wherein the organic material mask comprises polyimides and epoxies.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1998-08-21 | 1999-02-20 | 1999-08-22 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2002-08-21 | 2003-02-20 | 2003-08-22 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2006-08-21 | 2007-02-20 | 2007-08-22 | $7700.00 | Window Closed / Lapsed |