Semiconductor processing method of making electrical contact to a node

Claim 2

A semiconductor processing method of making electrical contact to a node comprising the following steps: forming an insulating layer over a substrate; forming an opening through the insulating layer to the substrate; forming a layer of electrically conductive material comprising carbon within the opening; the electrically conductive material being capable of absorbing oxygen when exposed to an oxygen containing ambient; exposing the conductive material to a plasma to densify at least an outermost exposed portion of the conductive material and reduce a capability of the layer of conductive material to absorb oxygen when exposed to the oxygen containing ambient; and wherein the layer of electrically conductive material is not exposed to the oxygen containing ambient before being exposed to the plasma.

Claim 3

The semiconductor processing method of claim 1 wherein the electrically conductive material predominately comprises TiN.

Claim 4

The semiconductor processing method of claim 1 wherein the electrically conductive material comprises titanium, carbon and nitrogen.

Claim 5

A semiconductor processing method of making electrical contact to a substrate comprising the following steps: forming a layer of electrically conductive material comprising carbon over a substrate; the electrically conductive material being undesirably capable of absorbing oxygen, when exposed to an oxygen containing ambient, effective to render such material less electrically conductive; providing the substrate with the provided layer of electrically conductive material within a reactor, injecting a gas into the reactor and generating a plasma from the gas against the material, and exposing the material to the plasma to densify at least an outermost exposed portion of such material and render the layer of material less capable of absorbing oxygen when exposed to the oxygen containing ambient; and wherein the layer of electrically conductive material is not exposed to the oxygen containing ambient before being exposed to the plasma.

Claim 6

A semiconductor processing method of making electrical contact to a substrate comprising the following steps: forming a layer of electrically conductive material comprising carbon over a substrate; the electrically conductive material being undesirably capable of absorbing oxygen, when exposed to an oxygen containing ambient, effective to render such material less electrically conductive; providing the substrate with the provided layer of electrically conductive material within a reactor, injecting a gas into the reactor and generating a plasma from the gas against the material, and exposing the material to the plasma to densify at least an outermost exposed portion of such material and render the layer of material less capable of absorbing oxygen when exposed to the oxygen containing ambient; and wherein the layer of electrically conductive material is not exposed to the oxygen containing ambient before being exposed to the plasma.

Claim 7

A semiconductor processing method of making electrical contact to a node comprising the following steps: forming an insulating layer relative to a substrate to which electrical connection is to be made; forming a contact opening in the insulating layer to the substrate; forming a layer of electrically conductive material comprising carbon within the contact opening, the electrically conductive material layer being capable of absorbing oxygen to a first degree as formed; exposing the electrically conductive layer to a plasma sufficient to render at least a portion of the layer to a capability of absorbing oxygen to a second degree, the second degree being less than the first degree; and wherein the electrically conductive layer is not exposed to oxygen before being exposed to the plasma.

Claim 8

A semiconductor processing method of making electrical contact to a node comprising the following steps: forming an insulating layer relative to a substrate to which electrical connection is to be made; forming a contact opening in the insulating layer to the substrate; forming a layer of electrically conductive material comprising carbon within the contact opening, the electrically conductive material layer being capable of absorbing oxygen to a first degree as formed; exposing the electrically conductive layer to a plasma sufficient to render at least a portion of the layer to a capability of absorbing oxygen to a second degree, the second degree being less than the first degree; and wherein the electrically conductive layer is not exposed to oxygen before being exposed to the plasma.

Claim 9

A semiconductor processing method of making electrical contact to a node comprising the following steps: forming an insulating layer relative to a substrate to which electrical connection is to be made; forming a contact opening in the insulating layer to the substrate; forming a layer predominately comprising TiN within the contact opening, the TiN layer further comprising carbon and being capable of absorbing oxygen to a first degree as formed; exposing the TiN layer to a plasma sufficient to render at least a portion of the TiN layer capable of absorbing oxygen to a second degree, the second degree being less than the first degree; and wherein the TiN layer is not exposed to oxygen before being exposed to the plasma.

Claim 10

A semiconductor processing method of making electrical contact to a node comprising the following steps: forming an insulating layer relative to a substrate to which electrical connection is to be made; forming a contact opening in the insulating layer to the substrate; forming a layer predominately comprising TiN within the contact opening, the TiN layer further comprising carbon and being capable of absorbing oxygen to a first degree as formed; exposing the TiN layer to a plasma sufficient to render at least a portion of the TiN layer capable of absorbing oxygen to a second degree, the second degree being less than the first degree; and wherein the TiN layer is not exposed to oxygen before being exposed to the plasma.

Claim 11

A semiconductor processing method of making electrical contact to a node comprising the following steps: forming an insulating layer relative to a substrate to which electrical connection is to be made; forming an opening in the insulating layer to the substrate; forming a layer of electrically conductive material comprising carbon to substantially fill the contact opening; the electrically conductive material being capable of absorbing oxygen when exposed to an oxygen containing ambient; providing the substrate with the provided layer of electrically conductive material within a reactor, injecting a gas into the reactor and generating a plasma from the gas against the material and exposing the material to the plasma to densify at least an outermost exposed portion of such material and render the layer of material less capable of absorbing oxygen when exposed to an oxygen containing ambient; and wherein the layer of electrically conductive material is not exposed to the oxygen containing ambient before being exposed to the plasma.

Claim 12

A semiconductor processing method of making electrical contact to a node comprising the following steps: forming an insulating layer relative to a substrate to which electrical connection is to be made; forming an opening in the insulating layer to the substrate; forming a layer of electrically conductive material comprising carbon to substantially fill the contact opening; the electrically conductive material being capable of absorbing oxygen when exposed to an oxygen containing ambient; providing the substrate with the provided layer of electrically conductive material within a reactor, injecting a gas into the reactor and generating a plasma from the gas against the material and exposing the material to the plasma to densify at least an outermost exposed portion of such material and render the layer of material less capable of absorbing oxygen when exposed to an oxygen containing ambient; and wherein the layer of electrically conductive material is not exposed to the oxygen containing ambient before being exposed to the plasma.

Claim 13

The semiconductor processing method of claim 7 wherein the electrically conductive material predominately comprises TiN.

Claim 14

The semiconductor processing method of claim 7 wherein the electrically conductive material comprises titanium, carbon and nitrogen.

Claim 15

The semiconductor processing method of claim 7 wherein the gas and plasma generated therefrom having a component which is effective when in an activated state to interact with a component of the conductive layer to remove carbon therefrom.

Claim 16

The semiconductor processing method of claim 7 wherein the electrically conductive material layer as-provided comprises hydrocarbon, the gas and plasma generated therefrom having a component which is effective when in an activated state to interact with a component of the conductive layer to remove hydrocarbon therefrom.

Claim 17

The semiconductor processing method of claim 7 wherein, the electrically conductive material predominately comprises TiN; and the gas and plasma generated therefrom having a component which is effective when in an activated state to interact with a component of the conductive layer to remove carbon therefrom.

Claim 18

The semiconductor processing method of claim 7 wherein the plasma exposure densifies only an outer exposed 100 Angstroms to 500 Angstroms of the material.

Claim 19

A semiconductor processing method of making electrical contact to a node comprising the following steps: forming an insulating layer relative to a substrate to which electrical connection is to be made, the substrate comprising silicon having a diffusion region provided therein; forming a contact opening in the insulating layer to the diffusion region; depositing a layer of electrically conductive material to a thickness effective for patterning of a conductive line over the insulating layer and within the contact opening to substantially fill the contact opening; the layer of electrically conductive material being in electrical contact with the diffusion region; the electrically conductive material being undesirably capable of absorbing oxygen, when exposed to an oxygen containing ambient; providing the substrate with the deposited layer of electrically conductive material within a reactor, injecting a gas into the reactor, generating a first plasma from the gas against the material, and exposing the material to the first plasma to densify at least an outermost exposed portion of such material and render the layer of material less capable of absorbing oxygen when exposed to an oxygen containing ambient; patterning the deposited layer into a conductive line which is in electrical connection with the material within the contact opening to expose sidewalls of the electrically conductive material above the insulating layer; and providing the substrate with the conductive line of the electrically conductive material within a reactor, injecting a gas into the reactor, generating a second plasma from the gas against the material of the line and exposing the line sidewall material to the second plasma to densify at least an outermost exposed portion of such sidewall material and render the sidewalls less capable of absorbing oxygen when exposed to an oxygen containing ambient.

Claim 20

A semiconductor processing method of making electrical contact to a node comprising the following steps: forming an insulating layer relative to a substrate to which electrical connection is to be made, the substrate comprising silicon having a diffusion region provided therein; forming a contact opening in the insulating layer to the diffusion region; depositing a layer of electrically conductive material to a thickness effective for patterning of a conductive line over the insulating layer and within the contact opening to substantially fill the contact opening; the layer of electrically conductive material being in electrical contact with the diffusion region; the electrically conductive material being undesirably capable of absorbing oxygen, when exposed to an oxygen containing ambient; providing the substrate with the deposited layer of electrically conductive material within a reactor, injecting a gas into the reactor, generating a first plasma from the gas against the material, and exposing the material to the first plasma to densify at least an outermost exposed portion of such material and render the layer of material less capable of absorbing oxygen when exposed to an oxygen containing ambient; patterning the deposited layer into a conductive line which is in electrical connection with the material within the contact opening to expose sidewalls of the electrically conductive material above the insulating layer; and providing the substrate with the conductive line of the electrically conductive material within a reactor, injecting a gas into the reactor, generating a second plasma from the gas against the material of the line and exposing the line sidewall material to the second plasma to densify at least an outermost exposed portion of such sidewall material and render the sidewalls less capable of absorbing oxygen when exposed to an oxygen containing ambient.

Claim 21

A semiconductor processing method of making electrical contact to a node comprising the following steps: forming an insulating layer over a substrate; forming an opening through the insulating layer to the substrate; forming a layer of electrically conductive material within the opening; the electrically conductive material being capable of absorbing oxygen when exposed to an oxygen containing ambient; exposing the conductive material to a plasma to densify at least an outermost exposed portion of the conductive material and reduce a capability of the layer of conductive material to absorb oxygen when exposed to the oxygen containing ambient; wherein the plasma is generated from a gas comprising H 2 , Ar, or a mixture thereof; and wherein the layer of electrically conductive material is not exposed to the oxygen containing ambient before being exposed to the plasma.

Claim 22

A semiconductor processing method of making electrical contact to a node comprising the following steps: forming an insulating layer over a substrate; forming an opening through the insulating layer to the substrate; forming a layer of electrically conductive material within the opening; the electrically conductive material being capable of absorbing oxygen when exposed to an oxygen containing ambient; exposing the conductive material to a plasma to densify at least an outermost exposed portion of the conductive material and reduce a capability of the layer of conductive material to absorb oxygen when exposed to the oxygen containing ambient; wherein the plasma is generated from a gas comprising H 2 , Ar, or a mixture thereof; and wherein the layer of electrically conductive material is not exposed to the oxygen containing ambient before being exposed to the plasma.

Claim 23

The semiconductor processing method of claim 15 wherein the electrically conductive material predominantly comprises TiN.

Claim 24

A semiconductor processing method of making electrical contact to a substrate comprising the following steps: forming a layer of electrically conductive material over a substrate; the electrically conductive material being undesirably capable of absorbing oxygen, when exposed to an oxygen containing ambient, effective to render such material less electrically conductive; providing the substrate with the provided layer of electrically conductive material within a reactor, injecting a gas into the reactor and generating a plasma from the gas against the material, and exposing the material to the plasma to densify at least an outermost exposed portion of such material and render the layer of material less capable of absorbing oxygen when exposed to the oxygen containing ambient; wherein the gas comprises H 2 , Ar, or a mixture thereof; and wherein the layer of electrically conductive material is not exposed to the oxygen containing ambient before being exposed to the plasma.

Claim 25

A semiconductor processing method of making electrical contact to a substrate comprising the following steps: forming a layer of electrically conductive material over a substrate; the electrically conductive material being undesirably capable of absorbing oxygen, when exposed to an oxygen containing ambient, effective to render such material less electrically conductive; providing the substrate with the provided layer of electrically conductive material within a reactor, injecting a gas into the reactor and generating a plasma from the gas against the material, and exposing the material to the plasma to densify at least an outermost exposed portion of such material and render the layer of material less capable of absorbing oxygen when exposed to the oxygen containing ambient; wherein the gas comprises H 2 , Ar, or a mixture thereof; and wherein the layer of electrically conductive material is not exposed to the oxygen containing ambient before being exposed to the plasma.

Claim 26

The semiconductor processing method of claim 17 wherein the electrically conductive material predominantly comprises TiN.

Claim 27

A semiconductor processing method of making electrical contact to a node comprising the following steps: forming an insulating layer relative to a substrate to which electrical connection is to be made; forming a contact opening in the insulating layer to the substrate; forming a layer of electrically conductive material within the contact opening, the electrically conductive layer being capable of absorbing oxygen to a first degree as formed; exposing the electrically conductive layer to a plasma sufficient to render at least a portion of the layer capable of absorbing oxygen to a second degree, the second degree being less than the first degree; wherein the plasma is generated from a gas comprising H 2 , Ar, or a mixture thereof; and wherein the electrically conductive layer is not exposed to oxygen before being exposed to the plasma.

Claim 28

A semiconductor processing method of making electrical contact to a node comprising the following steps: forming an insulating layer relative to a substrate to which electrical connection is to be made; forming a contact opening in the insulating layer to the substrate; forming a layer of electrically conductive material within the contact opening, the electrically conductive layer being capable of absorbing oxygen to a first degree as formed; exposing the electrically conductive layer to a plasma sufficient to render at least a portion of the layer capable of absorbing oxygen to a second degree, the second degree being less than the first degree; wherein the plasma is generated from a gas comprising H 2 , Ar, or a mixture thereof; and wherein the electrically conductive layer is not exposed to oxygen before being exposed to the plasma.

Claim 29

A semiconductor processing method of making electrical contact to a node comprising the following steps: forming an insulating layer relative to a substrate to which electrical connection is to be made; forming an opening in the insulating layer to the substrate; forming a layer of electrically conductive material to substantially fill the contact opening; the electrically conductive material being capable of absorbing oxygen when exposed to an oxygen containing ambient; providing the substrate with the provided layer of electrically conductive material within a reactor, injecting a gas into the reactor and generating a plasma from the gas against the material and exposing the material to the plasma to densify at least an outermost exposed portion of such material and render the layer of material less capable of absorbing oxygen when exposed to an oxygen containing ambient; wherein the gas comprises H 2 , Ar, or a mixture thereof; and wherein the layer of electrically conductive material is not exposed to the oxygen containing ambient before being exposed to the plasma.

Claim 30

A semiconductor processing method of making electrical contact to a node comprising the following steps: forming an insulating layer relative to a substrate to which electrical connection is to be made; forming an opening in the insulating layer to the substrate; forming a layer of electrically conductive material to substantially fill the contact opening; the electrically conductive material being capable of absorbing oxygen when exposed to an oxygen containing ambient; providing the substrate with the provided layer of electrically conductive material within a reactor, injecting a gas into the reactor and generating a plasma from the gas against the material and exposing the material to the plasma to densify at least an outermost exposed portion of such material and render the layer of material less capable of absorbing oxygen when exposed to an oxygen containing ambient; wherein the gas comprises H 2 , Ar, or a mixture thereof; and wherein the layer of electrically conductive material is not exposed to the oxygen containing ambient before being exposed to the plasma.

Claim 31

The semiconductor processing method of claim 20 wherein the plasma exposure densifies only an outer exposed 100 Angstroms to 500 Angstroms of the material.

Claim 32

A semiconductor processing method of making electrical contact to a node comprising the following steps: forming an insulating layer over a substrate; forming an opening through the insulating layer to the substrate; forming a layer of electrically conductive material within the opening; the electrically conductive layer comprising a metal other than Ti; the electrically conductive material being capable of absorbing oxygen when exposed to an oxygen containing ambient; exposing the conductive material to a plasma to densify at least an outermost exposed portion of the conductive material and reduce a capability of the layer of conductive material to absorb oxygen when exposed to the oxygen containing ambient; and wherein the layer of electrically conductive material is not exposed to the oxygen containing ambient before being exposed to the plasma.

Claim 33

A semiconductor processing method of making electrical contact to a node comprising the following steps: forming an insulating layer over a substrate; forming an opening through the insulating layer to the substrate; forming a layer of electrically conductive material within the opening; the electrically conductive layer comprising a metal other than Ti; the electrically conductive material being capable of absorbing oxygen when exposed to an oxygen containing ambient; exposing the conductive material to a plasma to densify at least an outermost exposed portion of the conductive material and reduce a capability of the layer of conductive material to absorb oxygen when exposed to the oxygen containing ambient; and wherein the layer of electrically conductive material is not exposed to the oxygen containing ambient before being exposed to the plasma.

Claim 34

The semiconductor processing method of claim 22 wherein the metal other than Ti comprises Al, W or Cu.

Claim 35

A semiconductor processing method of making electrical contact to a substrate comprising the following steps: forming a layer of electrically conductive material over a substrate; the electrically conductive layer comprising a metal other than Ti; the electrically conductive material being undesirably capable of absorbing oxygen, when exposed to an oxygen containing ambient, effective to render such material less electrically conductive; providing the substrate with the provided layer of electrically conductive material within a reactor, injecting a gas into the reactor and generating a plasma from the gas against the material, and exposing the material to the plasma to densify at least an outermost exposed portion of such material and render the layer of material less capable of absorbing oxygen when exposed to the oxygen containing ambient; and wherein the layer of electrically conductive material is not exposed to the oxygen containing ambient before being exposed to the plasma.

Claim 36

A semiconductor processing method of making electrical contact to a substrate comprising the following steps: forming a layer of electrically conductive material over a substrate; the electrically conductive layer comprising a metal other than Ti; the electrically conductive material being undesirably capable of absorbing oxygen, when exposed to an oxygen containing ambient, effective to render such material less electrically conductive; providing the substrate with the provided layer of electrically conductive material within a reactor, injecting a gas into the reactor and generating a plasma from the gas against the material, and exposing the material to the plasma to densify at least an outermost exposed portion of such material and render the layer of material less capable of absorbing oxygen when exposed to the oxygen containing ambient; and wherein the layer of electrically conductive material is not exposed to the oxygen containing ambient before being exposed to the plasma.

Claim 37

The semiconductor processing method of claim 24 wherein the metal other than Ti comprises Al, W, or Cu.

Claim 38

A semiconductor processing method of making electrical contact to a node comprising the following steps: forming an insulating layer relative to a substrate to which electrical connection is to be made; forming a contact opening in the insulating layer to the substrate; forming a layer of electrically conductive material within the contact opening, the electrically conductive layer comprising a metal other than Ti; the electrically conductive material layer being capable of absorbing oxygen to a first degree as formed; exposing the electrically conductive layer to a plasma sufficient to render at least a portion of the layer to a capability of absorbing oxygen to a second degree, the second degree being less than the first degree; and wherein the electrically conductive layer is not exposed to oxygen before being exposed to the plasma.

Claim 39

A semiconductor processing method of making electrical contact to a node comprising the following steps: forming an insulating layer relative to a substrate to which electrical connection is to be made; forming a contact opening in the insulating layer to the substrate; forming a layer of electrically conductive material within the contact opening, the electrically conductive layer comprising a metal other than Ti; the electrically conductive material layer being capable of absorbing oxygen to a first degree as formed; exposing the electrically conductive layer to a plasma sufficient to render at least a portion of the layer to a capability of absorbing oxygen to a second degree, the second degree being less than the first degree; and wherein the electrically conductive layer is not exposed to oxygen before being exposed to the plasma.

Claim 40

The semiconductor processing method of claim 26 wherein the metal other than Ti comprises Al, W or Cu.

Claim 41

A semiconductor processing method of making electrical contact to a node comprising the following steps: forming an insulating layer relative to a substrate to which electrical connection is to be made; forming an opening in the insulating layer to the substrate; forming a layer of electrically conductive material to substantially fill the contact opening; the electrically conductive layer comprising a metal other than Ti; the electrically conductive material being capable of absorbing oxygen when exposed to an oxygen containing ambient; providing the substrate with the provided layer of electrically conductive material within a reactor, injecting a gas into the reactor and generating a plasma from the gas against the material and exposing the material to the plasma to densify at least an outermost exposed portion of such material and render the layer of material less capable of absorbing oxygen when exposed to an oxygen containing ambient; and wherein the layer of electrically conductive material is not exposed to the oxygen containing ambient before being exposed to the plasma.

Claim 42

A semiconductor processing method of making electrical contact to a node comprising the following steps: forming an insulating layer relative to a substrate to which electrical connection is to be made; forming an opening in the insulating layer to the substrate; forming a layer of electrically conductive material to substantially fill the contact opening; the electrically conductive layer comprising a metal other than Ti; the electrically conductive material being capable of absorbing oxygen when exposed to an oxygen containing ambient; providing the substrate with the provided layer of electrically conductive material within a reactor, injecting a gas into the reactor and generating a plasma from the gas against the material and exposing the material to the plasma to densify at least an outermost exposed portion of such material and render the layer of material less capable of absorbing oxygen when exposed to an oxygen containing ambient; and wherein the layer of electrically conductive material is not exposed to the oxygen containing ambient before being exposed to the plasma.

Claim 43

The semiconductor processing method of claim 28 wherein the metal other than Ti comprises Al, W or Cu.

Claim 44

The semiconductor processing method of claim 28 wherein the plasma exposure densifies only an outer exposed 100 Angstroms to 500 Angstroms of the material.