US5523697A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Testing apparatus for engaging electrically conductive test pads on a semiconductor substrate having integrated circuitry for operability testing thereof
Assignee: Micron Technology Inc
•
Filing: 1994-03-04
•
Granted: 1996-06-04
•
Expires: 2014-03-04
Abstract
Abstract A method of engaging electrically conductive test pads on a semiconductor substrate having integrated circuitry for operability testing thereof includes: a) providing an engagement probe having an outer surface comprising a grouping of a plurality of electrically conductive projecting apexes positioned in proximity to one another to engage a single test pad on a semiconductor substrate; b) engaging the grouping of apexes with the single test pad on the semiconductor substrate; and c) sending an electric signal between the grouping of apexes and test pad to evaluate operability of integrated circuitry on the semiconductor substrate. Constructions and methods are disclosed for forming testing apparatus comprising an engagement probe having an outer surface comprising a grouping of a plurality of electrically conductive projecting apexes positioned in proximity to one another to engage a single test pad on a semiconductor substrate.
Inventors
- 👤 Warren M. Farnworth
- 👤 Malcolm Grief
- 👤 Gurtej S. Sandhu
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 12:16
CPC Classifications
G; G01; G01R; G01R1/00; G01R1/02; G01R1/06; G01R1/067; G01R1/073; G01R1/07307; G01R1/07314; H; H05; H05K; H05K1/00; H05K1/02; H05K1/03; H05K1/0306; H05K2201/00; H05K2201/03; H05K2201/0332; H05K2201/0364; H05K2201/0367; H05K2201/0373; H05K2201/09; H05K2201/09009; H05K2201/09045; H05K3/00; H05K3/30; H05K3/32; H05K3/325; Y; Y10; Y10S; Y10S438/00; Y10S438/978; Y10T; Y10T29/00; Y10T29/49; Y10T29/49002; Y10T29/49117; Y10T29/49204
Claims Analysis
Total Claims: 35
Claim 1
Independent Claim
106 words
A testing apparatus for engaging electrically conductive test pads on a semiconductor substrate, the semiconductor substrate having integrated circuitry, the testing apparatus adapted for engaging test pads on the semiconductor substrate for operability testing of the integrated circuitry on the substrate, the apparatus comprising: a test substrate; and an engagement probe projecting from the test substrate to engage a single test pad on a semiconductor substrate having integrated circuitry formed in the semiconductor substrate, the engagement probe having an outer surface comprising a grouping of a plurality of electrically conductive projecting apexes positioned in sufficient proximity to one another to collectively engage the single test pad.
Claim 2
Dependent Claim
106 words
A testing apparatus for engaging electrically conductive test pads on a semiconductor substrate, the semiconductor substrate having integrated circuitry, the testing apparatus adapted for engaging test pads on the semiconductor substrate for operability testing of the integrated circuitry on the substrate, the apparatus comprising: a test substrate; and an engagement probe projecting from the test substrate to engage a single test pad on a semiconductor substrate having integrated circuitry formed in the semiconductor substrate, the engagement probe having an outer surface comprising a grouping of a plurality of electrically conductive projecting apexes positioned in sufficient proximity to one another to collectively engage the single test pad.
Claim 3
Dependent Claim
13 words
The testing apparatus of claim 1 comprising a plurality of such engagement probes.
Claim 4
Dependent Claim
17 words
The testing apparatus of claim 1 wherein the apexes are in the shape of multiple knife-edge lines.
Claim 5
Dependent Claim
29 words
The testing apparatus of claim 1 wherein the apexes are in the shape of multiple knife-edge lines, the multiple knife-edge lines being positioned to form at least one polygon.
Claim 6
Dependent Claim
38 words
The testing apparatus of claim 1 wherein the apexes are in the shape of multiple knife-edge lines, the multiple knife-edge lines being positioned to form at least two polygons one of which is received entirely within the other.
Claim 7
Dependent Claim
18 words
The testing apparatus of claim 1 wherein the engagement probe is formed on a projection from the substrate.
Claim 8
Dependent Claim
33 words
The testing apparatus of claim 1 wherein the apexes have a selected projecting distance, the projecting distance being about one-half the thickness of the test pad which the apparatus is adapted to engage.
Claim 9
Dependent Claim
39 words
The testing apparatus of claim 1 wherein the apexes project from a common plane, the apexes having respective tips and bases, the bases of adjacent projecting apexes being spaced from one another to define a penetration stop plane therebetween.
Claim 10
Dependent Claim
65 words
The testing apparatus of claim 1 wherein the apexes project from a common plane, the apexes having respective tips and bases, the bases of adjacent projecting apexes being spaced from one another to define a penetration stop plane therebetween, the tips being a distance from the penetration stop plane of about one-half the thickness of the test pad which the apparatus is adapted to engage.
Claim 11
Dependent Claim
30 words
The testing apparatus of claim 1 wherein the apexes are in the shape of multiple knife-edge lines, the multiple knife-edge lines interconnecting to form at least one fully enclosed polygon.
Claim 12
Dependent Claim
26 words
The testing apparatus of claim 1 wherein the apexes are in the shape of multiple knife-edge lines, and further comprising a plurality of such engagement probes.
Claim 13
Dependent Claim
35 words
The testing apparatus of claim 1 wherein the apexes are in the shape of multiple knife-edge lines which are positioned to form at least one polygon, and further comprising a plurality of such engagement probes.
Claim 14
Dependent Claim
44 words
The testing apparatus of claim 1 wherein the apexes are in the shape of multiple knife-edge lines which are positioned to form at least two polygons one of which is received entirely within the other, and further comprising a plurality of such engagement probes.
Claim 15
Dependent Claim
27 words
The testing apparatus of claim 1 wherein the engagement probe is formed on a projection from the substrate, and further comprising a plurality of such engagement probes.
Claim 16
Dependent Claim
48 words
The testing apparatus of claim 1 wherein the apexes project from a common plane, the apexes having respective tips and bases, the bases of adjacent projecting apexes being spaced from one another to define a penetration stop plane therebetween, and further comprising a plurality of such engagement probes.
Claim 17
Dependent Claim
74 words
The testing apparatus of claim 1 wherein the apexes project from a common plane, the apexes having respective tips and bases, the bases of adjacent projecting apexes being spaced from one another to define a penetration stop plane therebetween, the tips being a distance from the penetration stop plane of about one-half the thickness of the test pad which the apparatus is adapted to engage, and further comprising a plurality of such engagement probes.
Claim 18
Dependent Claim
29 words
The testing apparatus of claim 1 wherein the apexes are in the shape of multiple knife-edge lines, and the engagement probe is formed on a projection from the substrate.
Claim 19
Dependent Claim
50 words
The testing apparatus of claim 1 wherein the apexes are in the shape of multiple knife-edge lines, and the apexes project from a common plane, the apexes having respective tips and bases, the bases of adjacent projecting apexes being spaced from one another to define a penetration stop plane therebetween.
Claim 20
Dependent Claim
69 words
The testing apparatus of claim 1 wherein the apexes are in the shape of multiple knife-edge lines, and the apexes having respective tips and bases, the bases of adjacent projecting apexes being spaced from one another to define a penetration stop plane therebetween, the tips being a distance from the penetration stop plane of about one-half the thickness of the test pad which the apparatus is adapted to engage.
Claim 21
Dependent Claim
37 words
The testing apparatus of claim 1 wherein the apexes are in the shape of multiple knife-edge lines which are positioned to form at least one polygon, the engagement probe is formed on a projection from the substrate.
Claim 22
Dependent Claim
58 words
The testing apparatus of claim 1 wherein the apexes are in the shape of multiple knife-edge lines which are positioned to form at least one polygon, the apexes project from a common plane, the apexes having respective tips and bases, the bases of adjacent projecting apexes being spaced from one another to define a penetration stop plane therebetween.
Claim 23
Dependent Claim
84 words
The testing apparatus of claim 1 wherein the apexes are in the shape of multiple knife-edge lines which are positioned to form at least one polygon, the apexes project from a common plane, the apexes having respective tips and bases, the bases of adjacent projecting apexes being spaced from one another to define a penetration stop plane therebetween, the tips being a distance from the penetration stop plane of about one-half the thickness of the test pad which the apparatus is adapted to engage.
Claim 24
Dependent Claim
46 words
The testing apparatus of claim 1 wherein the apexes are in the shape of multiple knife-edge lines which are positioned to form at least two polygons one of which is received entirely within the other, the engagement probe being formed on a projection from the substrate.
Claim 25
Dependent Claim
67 words
The testing apparatus of claim 1 wherein the apexes are in the shape of multiple knife-edge lines which are positioned to form at least two polygons one of which is received entirely within the other, the apexes projecting from a common plane, the apexes having respective tips and bases, the bases of adjacent projecting apexes being spaced from one another to define a penetration stop plane therebetween.
Claim 26
Dependent Claim
93 words
The testing apparatus of claim 1 wherein the apexes are in the shape of multiple knife-edge lines which are positioned to form at least two polygons one of which is received entirely within the other, the apexes projecting from a common plane, the apexes having respective tips and bases, the bases of adjacent projecting apexes being spaced from one another to define a penetration stop plane therebetween, the tips being a distance from the penetration stop plane of about one-half the thickness of the test pad which the apparatus is adapted to engage.
Claim 27
Dependent Claim
102 words
A testing apparatus for engaging electrically conductive test pads on a semiconductor substrate, the semiconductor substrate having integrated circuitry, the testing apparatus adapted for engaging test pads on the semiconductor substrate for operability testing of the integrated circuitry on the substrate, the apparatus comprising: a test substrate; and an engagement probe projecting from the test substrate to engage a single test pad on a semiconductor substrate having integrated circuitry formed in the semiconductor substrate, the engagement probe having an outer surface comprising an apex in the form of at least one knife-edge line sized and positioned to engage the single test pad.
Claim 28
Dependent Claim
102 words
A testing apparatus for engaging electrically conductive test pads on a semiconductor substrate, the semiconductor substrate having integrated circuitry, the testing apparatus adapted for engaging test pads on the semiconductor substrate for operability testing of the integrated circuitry on the substrate, the apparatus comprising: a test substrate; and an engagement probe projecting from the test substrate to engage a single test pad on a semiconductor substrate having integrated circuitry formed in the semiconductor substrate, the engagement probe having an outer surface comprising an apex in the form of at least one knife-edge line sized and positioned to engage the single test pad.
Claim 29
Dependent Claim
18 words
The testing apparatus of claim 26 wherein the engagement probe is formed on a projection from the substrate.
Claim 30
Dependent Claim
16 words
The testing apparatus of claim 26 wherein the knife-edge line projects from a penetration stop plane.
Claim 31
Dependent Claim
58 words
The testing apparatus of claim 26 wherein the knife-edge line projects from a penetration stop plane, the knife-edge line having a tip and a having a base at the penetration stop plane, the tip being a distance from the penetration stop plane of about one-half the thickness of the test pad which the apparatus is adapted to engage.
Claim 32
Dependent Claim
30 words
The testing apparatus of claim 26 wherein the engagement probe is formed on a projection from the substrate, the knife-edge line projecting from a penetration stop plane on the projection.
Claim 33
Dependent Claim
72 words
The testing apparatus of claim 26 wherein the engagement probe is formed on a projection from the substrate, the knife-edge line projects from a penetration stop plane on the projection, the knife-edge line having a tip and a having a base at the penetration stop plane, the tip being a distance from the penetration stop plane of about one-half the thickness of the test pad which the apparatus is adapted to engage.
Claim 34
Dependent Claim
50 words
The testing apparatus of claim 1 wherein outermost portions of the electrically conductive apexes constitute a first electrically conductive material, and wherein the test pads for which the testing apparatus is adapted have outermost portions constituting a second electrically conductive material; the first and second electrically conductive materials being different.
Claim 35
Dependent Claim
50 words
The testing apparatus of claim 26 wherein outermost portions of the electrically conductive apexes constitute a first electrically conductive material, and wherein the test pads for which the testing apparatus is adapted have outermost portions constituting a second electrically conductive material; the first and second electrically conductive materials being different.
References Cited (Backward Citations)
US4189825A
Cited
US4312117A
Cited
JPS57143838A
Cited
US4585991A
Cited
US5014161A
Cited
US5262718A
Cited
US5072116A
Cited
EP0329314A1
Cited
US4881118A
Cited
US4929999A
Cited
US4924589A
Cited
US5103557A
Cited
US4952272A
Cited
JPH025540A
Cited
US4937653A
Cited
JPH02232946A
Cited
US4963225A
Cited
JPH0410446A
Cited
US5177438A
Cited
US5177439A
Cited
US5323035A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1999-06-04 | 1999-12-04 | 2000-06-04 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2003-06-04 | 2003-12-04 | 2004-06-04 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2007-06-04 | 2007-12-04 | 2008-06-04 | $7700.00 | Window Closed / Lapsed |