US6156654A
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Pulsed laser salicidation for fabrication of ultra-thin silicides in sub-quarter micron devices
Assignee: National University of Singapore
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Filing: 1998-12-07
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Granted: 2000-12-05
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Expires: 2018-12-07
Abstract
Abstract Methods are disclosed for forming ultra-thin (˜300-Å), uniform and stoichiometric C54-titanium silicide with a Ti film thickness of 200-300 Å using pulsed laser salicidation. The invention achieves this by preferably step-scanning from die to die, across the wafer using laser pulses with an optical fluence (laser energy) ranging from 0.1 to 0.2 J/cm 2 for approximately 23 nanoseconds per pulse. The source of radiation can be a XeCl or KrF excimer laser, or one in which the laser's wavelength is chosen such that the laser energy is absorbed the most by the refractory metal, i.e. titanium (Ti), cobalt (Co) or nickel (Ni). The laser beam size is typically die-size or can be fine tuned to 1 to 100 μm and can be optimized to reduce the intensity variation across the laser spot diameter. At each position between 1 to 100 pulses can be emitted on the wafer. Localized heating is possible with the ability to establish the ambient temperature at or below 200° C.
Inventors
- 👤 Chaw Sing Ho
- 👤 Yuan Ping Lee
- 👤 Chan Lap
- 👤 Yong Feng Lu
- 👤 R. P.G. Karunasiri
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 03:53
CPC Classifications
H; H10; H10D; H10D30/00; H10D30/01; H10D30/021; H10D30/027; H10D30/0275; H10D30/0212; H10D64/00; H10D64/01; H10D64/011; H10D64/0111; H10D64/0112; H10P; H10P34/00; H10P34/40; H10P34/42; H10D64/013; H10D64/01302; H10D64/01304; H10D64/01306; H10D64/01308; H10D64/0131
Claims Analysis
Total Claims: 35
Claim 1
Independent Claim
274 words
A method of pulsed laser salicidation for the fabrication of ultra-thin suicides on a silicon substrate, comprising the steps of: providing metal-oxide semiconductor field-effect structures on a silicon wafer each with a polysilicon gate electrode with tetraethyl orthosilicate (TEOS) glass or silicon nitride as sidewall spacers, source/drain active junctions defined and field oxidation in the form of shallow trench isolation (STI); providing selective epitaxial growth (SEG) of silicon ranging in thickness from 300 to 400 Å on said gate electrode and said source/drain; cleaning said wafer with diluted HF or in-situ back-sputter with argon; sputter depositing a titanium (Ti) layer to a thickness ranging from 200 to 300 Å on top of said wafer; sputter depositing a titanium-nitride (TiN) cap-layer with a thickness ranging from 150 to 200 Å on top of said Ti layer; forming a phase C49 silicide by providing a react anneal of said Ti layer with a pulsed laser, the wavelength of said pulsed laser chosen such that the irradiation will be mostly absorbed by said Ti layer, the optical fluence, or laser energy, of said pulsed laser ranging from 0.09 to 0.15 J/cm 2 and having a pulse duration ranging from 15 to 30 nanoseconds; wet etching said wafer to clean away said TiN cap layer and any unreacted Ti layer from said polysilicon gate electrodes and said silicon source/drain active junctions; and providing a final anneal using a pulsed laser with an optical fluence ranging from 0.1 to 0.2 J/cm 2 to convert said Ti layer from said phase C49 silicide into stoichiometric phase C54 titanium silicide (TiSi 2 ) ranging in thickness from 300 to 400 Å.
Claim 2
Independent Claim
274 words
A method of pulsed laser salicidation for the fabrication of ultra-thin suicides on a silicon substrate, comprising the steps of: providing metal-oxide semiconductor field-effect structures on a silicon wafer each with a polysilicon gate electrode with tetraethyl orthosilicate (TEOS) glass or silicon nitride as sidewall spacers, source/drain active junctions defined and field oxidation in the form of shallow trench isolation (STI); providing selective epitaxial growth (SEG) of silicon ranging in thickness from 300 to 400 Å on said gate electrode and said source/drain; cleaning said wafer with diluted HF or in-situ back-sputter with argon; sputter depositing a titanium (Ti) layer to a thickness ranging from 200 to 300 Å on top of said wafer; sputter depositing a titanium-nitride (TiN) cap-layer with a thickness ranging from 150 to 200 Å on top of said Ti layer; forming a phase C49 silicide by providing a react anneal of said Ti layer with a pulsed laser, the wavelength of said pulsed laser chosen such that the irradiation will be mostly absorbed by said Ti layer, the optical fluence, or laser energy, of said pulsed laser ranging from 0.09 to 0.15 J/cm 2 and having a pulse duration ranging from 15 to 30 nanoseconds; wet etching said wafer to clean away said TiN cap layer and any unreacted Ti layer from said polysilicon gate electrodes and said silicon source/drain active junctions; and providing a final anneal using a pulsed laser with an optical fluence ranging from 0.1 to 0.2 J/cm 2 to convert said Ti layer from said phase C49 silicide into stoichiometric phase C54 titanium silicide (TiSi 2 ) ranging in thickness from 300 to 400 Å.
Claim 3
Dependent Claim
44 words
The method of claim 1, wherein said react anneal is carried out at an ambient temperature equal to or less than 200° C., in an ambient of nitrogen (N 2 ) or argon (Ar) at a pressure equal to or less than 760 Torr.
Claim 4
Dependent Claim
21 words
The method of claim 1, wherein the wavelength of said pulsed laser is that of an XeCl or KrF excimer laser.
Claim 5
Dependent Claim
17 words
The method of claim 1, wherein said sidewall spacers are comprised of silicon oxide (SiO 2 ).
Claim 6
Dependent Claim
43 words
The method of claim 1, wherein said optical fluence of said pulsed laser of said react anneal impinging on said sidewall spacers does not produce a temperature exceeding 720° C. in said Si 3 N 4 or SiO 2 of said sidewall spacers.
Claim 7
Dependent Claim
25 words
The method of claim 1, wherein said final pulsed laser anneal translates to a temperature of approximately 850° C. at a C49-TiSi 2 /Si interface.
Claim 8
Dependent Claim
17 words
The method of claim 1, wherein said TiSi 2 when formed at 850° C. will not agglomerate.
Claim 9
Dependent Claim
24 words
The method of claim 1, wherein said TiSi 2 layer, after said final anneal, has a contact resistance ranging from 4 to 8 Ω/cont.
Claim 10
Dependent Claim
23 words
The method of claim 1, wherein said source/drain active junctions, after said final anneal, have a thickness ranging from 500 to 1500 Å.
Claim 11
Dependent Claim
22 words
The method of claim 1, wherein the step of providing SEG of silicon on said gate electrode and said source/drain is omitted.
Claim 12
Independent Claim
310 words
A method of pulsed laser salicidation for the fabrication of ultra-thin suicides on a silicon substrate, comprising the steps of: providing metal-oxide semiconductor field-effect structures on a silicon wafer each with a polysilicon gate electrode with tetraethyl orthosilicate (TEOS) glass or silicon nitride sidewall spacers, source/drain active junctions defined and field oxidation in the form of shallow trench isolation (STI); providing selective epitaxial growth (SEG) of silicon ranging in thickness from 300 to 400 Å on said gate electrode and said source/drain active junctions; cleaning said wafer with diluted HF or in-situ back-sputter with argon; sputter depositing a metal layer selected from the group consisting of Co and Ni with a thickness restricted to a range from 120 to 200 Å and 300 to 350 Å, respectively, on top of said wafer; sputter depositing a titanium-nitride (TiN) cap-layer with a thickness ranging from 150 to 200 Å on top of said metal layer; forming a phase C49 silicide by providing a react anneal of said metal layer with a pulsed laser, the wavelength of said pulsed laser chosen such that the irradiation will be mostly absorbed by said metal layer, the optical fluence, or laser energy, of said pulsed laser ranging from 0.09 to 0.15 J/cm 2 and having a pulse duration ranging from 15 to 30 nanoseconds; wet etching said wafer to clean away said TiN cap layer and any unreacted metal layer from said polysilicon gate electrodes and silicon source/drain active junctions; and providing a final anneal using a pulsed laser with an optical fluence ranging from 0.1 to 0.2 J/cm 2 to convert said metal layer selected from the group consisting of Co or Ni from said phase C49 suicide into stoichiometric phase C54 cobalt silicides (CoSi, CoSi 2 ) or a stoichiometric phase C54 nickel silicide (NiSi), respectively, ranging in thickness from 300 to 400 Å.
Claim 13
Independent Claim
310 words
A method of pulsed laser salicidation for the fabrication of ultra-thin suicides on a silicon substrate, comprising the steps of: providing metal-oxide semiconductor field-effect structures on a silicon wafer each with a polysilicon gate electrode with tetraethyl orthosilicate (TEOS) glass or silicon nitride sidewall spacers, source/drain active junctions defined and field oxidation in the form of shallow trench isolation (STI); providing selective epitaxial growth (SEG) of silicon ranging in thickness from 300 to 400 Å on said gate electrode and said source/drain active junctions; cleaning said wafer with diluted HF or in-situ back-sputter with argon; sputter depositing a metal layer selected from the group consisting of Co and Ni with a thickness restricted to a range from 120 to 200 Å and 300 to 350 Å, respectively, on top of said wafer; sputter depositing a titanium-nitride (TiN) cap-layer with a thickness ranging from 150 to 200 Å on top of said metal layer; forming a phase C49 silicide by providing a react anneal of said metal layer with a pulsed laser, the wavelength of said pulsed laser chosen such that the irradiation will be mostly absorbed by said metal layer, the optical fluence, or laser energy, of said pulsed laser ranging from 0.09 to 0.15 J/cm 2 and having a pulse duration ranging from 15 to 30 nanoseconds; wet etching said wafer to clean away said TiN cap layer and any unreacted metal layer from said polysilicon gate electrodes and silicon source/drain active junctions; and providing a final anneal using a pulsed laser with an optical fluence ranging from 0.1 to 0.2 J/cm 2 to convert said metal layer selected from the group consisting of Co or Ni from said phase C49 suicide into stoichiometric phase C54 cobalt silicides (CoSi, CoSi 2 ) or a stoichiometric phase C54 nickel silicide (NiSi), respectively, ranging in thickness from 300 to 400 Å.
Claim 14
Dependent Claim
44 words
The method of claim 11, wherein said react anneal is carried out at an ambient temperature equal to or less than 200° C., in an ambient of nitrogen (N 2 ) or argon (Ar) at a pressure equal to or less than 760 Torr.
Claim 15
Dependent Claim
21 words
The method of claim 11, wherein the wavelength of said pulsed laser is that of an XeCl or KrF excimer laser.
Claim 16
Dependent Claim
27 words
The method of claim 11, wherein said cobalt silicides when formed at approximately 750° C. or nickel suicides when formed at approximately 650° C. will not agglomerate.
Claim 17
Dependent Claim
17 words
The method of claim 11, wherein said sidewall spacers are comprised of silicon oxide (SiO 2 ).
Claim 18
Dependent Claim
43 words
The method of claim 11, wherein said final pulsed laser anneal translates to a temperature of approximately 750° C. for the formation of cobalt silicides or 650° C. for the formation of nickel silicides, at a cobalt silicide/Si interface or nickel silicide/Si interface.
Claim 19
Dependent Claim
43 words
The method of claim 11, wherein said optical fluence of said pulsed laser of said react anneal impinging on said sidewall spacers does not produce a temperature exceeding 720° C. in said Si 3 N 4 or SiO 2 of said sidewall spacers.
Claim 20
Dependent Claim
28 words
The method of claim 11, wherein said cobalt silicide layer or nickel silicide layer, after said final anneal, has a contact resistance ranging from 4 to 8 Ω/cont.
Claim 21
Dependent Claim
23 words
The method of claim 11, wherein said source/drain active junctions, after said final anneal, have a thickness ranging from 500 to 1500 Å.
Claim 22
Dependent Claim
21 words
The method claim 11, wherein the step of providing SEG of silicon on said gate electrode and said source/drain is omitted.
Claim 23
Dependent Claim
24 words
The method of claim 11, wherein said cobalt silicide or nickel silicides offer the advantage of a small lattice mismatch with said silicon substrate.
Claim 24
Dependent Claim
24 words
The method of claim 11, wherein said cobalt silicide or nickel silicides offer the advantage of less dopant segregation compared to TiSi 2 .
Claim 25
Dependent Claim
27 words
The method of claim 11, wherein said cobalt silicide or nickel suicides observe essentially no or little linewidth effect for sheet resistance on doped narrow polysilicon gates.
Claim 26
Independent Claim
321 words
A method of pulsed laser salicidation for the fabrication of ultra-thin suicides on a silicon substrate, comprising the steps of: providing metal-oxide semiconductor field-effect structures on a silicon wafer each with a polysilicon gate electrode with tetraethyl orthosilicate (TEOS) glass or silicon nitride sidewall spacers, source/drain active junctions defined and field oxidation in the form of shallow trench isolation (STI); providing selective epitaxial growth (SEG) of silicon ranging in thickness from 300 to 400 Å on said gate electrode and said source/drain active junctions; cleaning said wafer with diluted HF or in-situ back-sputter with argon; sputter depositing a metal layer selected from the group consisting of Ti, Co and Ni with a thickness ranging from 200 to 300 Å, 120 to 200 Å, and 300 to 350 Å, respectively, on top of said wafer; sputter depositing a titanium-nitride (TiN) cap-layer with a thickness ranging from 150 to 200 Å on top of said metal layer; forming a high resistivity phase C49 silicide by providing a react anneal of said metal layer with a pulsed laser, the wavelength of said pulsed laser chosen such that the irradiation will be mostly absorbed by said metal layer, the optical fluence, or laser energy, of said pulsed laser ranging from 0.09 to 0.15 J/cm 2 and having a pulse duration ranging from 15 to 30 nanoseconds; wet etching said wafer to clean away said TiN cap layer and any unreacted metal layer from said polysilicon gate electrodes and silicon source/drain active junctions; and providing a final anneal for changing said high-resistivity C49 phase silicide to a low-resistivity C54 phase silicide using a pulsed laser with an optical fluence ranging from 0.1 to 0.2 J/cm 2 converting said metal layer selected from the group of Ti, Co or Ni into titanium silicide, the cobalt silicides (CoSi, CoSi 2 ) or the nickel suicides (NiSi, NiSi 2 ), respectively, ranging in thickness from 300 to 400 Å.
Claim 27
Independent Claim
321 words
A method of pulsed laser salicidation for the fabrication of ultra-thin suicides on a silicon substrate, comprising the steps of: providing metal-oxide semiconductor field-effect structures on a silicon wafer each with a polysilicon gate electrode with tetraethyl orthosilicate (TEOS) glass or silicon nitride sidewall spacers, source/drain active junctions defined and field oxidation in the form of shallow trench isolation (STI); providing selective epitaxial growth (SEG) of silicon ranging in thickness from 300 to 400 Å on said gate electrode and said source/drain active junctions; cleaning said wafer with diluted HF or in-situ back-sputter with argon; sputter depositing a metal layer selected from the group consisting of Ti, Co and Ni with a thickness ranging from 200 to 300 Å, 120 to 200 Å, and 300 to 350 Å, respectively, on top of said wafer; sputter depositing a titanium-nitride (TiN) cap-layer with a thickness ranging from 150 to 200 Å on top of said metal layer; forming a high resistivity phase C49 silicide by providing a react anneal of said metal layer with a pulsed laser, the wavelength of said pulsed laser chosen such that the irradiation will be mostly absorbed by said metal layer, the optical fluence, or laser energy, of said pulsed laser ranging from 0.09 to 0.15 J/cm 2 and having a pulse duration ranging from 15 to 30 nanoseconds; wet etching said wafer to clean away said TiN cap layer and any unreacted metal layer from said polysilicon gate electrodes and silicon source/drain active junctions; and providing a final anneal for changing said high-resistivity C49 phase silicide to a low-resistivity C54 phase silicide using a pulsed laser with an optical fluence ranging from 0.1 to 0.2 J/cm 2 converting said metal layer selected from the group of Ti, Co or Ni into titanium silicide, the cobalt silicides (CoSi, CoSi 2 ) or the nickel suicides (NiSi, NiSi 2 ), respectively, ranging in thickness from 300 to 400 Å.
Claim 28
Dependent Claim
44 words
The method of claim 24, wherein said react anneal is carried out at an ambient temperature equal to or less than 200° C. in an ambient of nitrogen (N 2 ) or argon (Ar) at a pressure equal to or less than 760 Torr.
Claim 29
Dependent Claim
38 words
The method of claim 24, wherein the effective optical fluence of said pulsed laser impinging on said sidewall spacers ranges from 0.01 to 0.05 J/cm 2 , translating into an interfacial temperature ranging from 700 to 730° C.
Claim 30
Dependent Claim
24 words
The method of claim 24, wherein a beam of said pulsed laser is either die-size or ranges in size from 1 to 100 μm.
Claim 31
Dependent Claim
26 words
The method of claim 27, wherein said beam of said pulsed laser is optimized to reduce the intensity variation across the diameter of said laser's beam.
Claim 32
Dependent Claim
23 words
The method of claim 24, wherein said pulsed laser is emitting from 1 to 100 pulses at each position of said semiconductor wafer.
Claim 33
Dependent Claim
14 words
The method of claim 24, wherein said wet etch comprises an ammonium-based peroxide mixture.
Claim 34
Dependent Claim
22 words
The method of claim 24, wherein said pulsed laser is step-scanned across said semiconductor wafer from die to die at a time.
Claim 35
Dependent Claim
15 words
The method of claim 24, wherein said pulsed laser is sweep-scanned across said semiconductor wafer.
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