US5601656A
Expired / Lapsed
US
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Methods for cleaning silicon wafers with an aqueous solution of hydrofluoric acid and hydriodic acid
Assignee: Micron Technology Inc
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Filing: 1995-09-20
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Granted: 1997-02-11
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Expires: 2015-09-20
Abstract
Abstract Methods are disclosed for cleaning silicon wafers with an aqueous solution of hydrofluoric acid and hydriodic acid. The methods involve cleaning a silicon wafer in an aqueous solution of hydrofluoric acid and hydriodic acid to prevent the deposition of copper contaminants within the solution from being deposited onto the surfaces of the silicon wafer while minimizing oxidation of the surfaces of the silicon wafer. The aqueous solution of hydrofluoric acid and hydriodic acid preferably has sufficient hydriodic acid to cause no dissociation of the hydrofluoric acid.
Inventors
- 👤 Li Li
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 04:16
CPC Classifications
H; H10; H10P; H10P70/00; H10P70/10; H10P70/15; B; B08; B08B; B08B3/00; B08B3/04; B08B3/08; C; C11; C11D; C11D7/00; C11D7/02; C11D7/04; C11D7/08; C11D2111/00; C11D2111/10; C11D2111/14; C11D2111/22
Claims Analysis
Total Claims: 21
Claim 1
Independent Claim
65 words
A method of cleaning a silicon wafer comprising the steps of: cleaning a silicon surface of the silicon wafer in an aqueous solution of hydrofluoric acid and hydriodic acid in the presence of oxygen and light, wherein the aqueous solution of hydrofluoric acid and hydriodic acid has a concentration of hydrofluoric acid of about 0.1M-10M and has a concentration of hydriodic acid of about 0.001M-1M.
Claim 2
Independent Claim
65 words
A method of cleaning a silicon wafer comprising the steps of: cleaning a silicon surface of the silicon wafer in an aqueous solution of hydrofluoric acid and hydriodic acid in the presence of oxygen and light, wherein the aqueous solution of hydrofluoric acid and hydriodic acid has a concentration of hydrofluoric acid of about 0.1M-10M and has a concentration of hydriodic acid of about 0.001M-1M.
Claim 3
Dependent Claim
70 words
A method of cleaning a silicon wafer as defined in claim 1, wherein the step of cleaning a silicon surface of the silicon wafer in the aqueous solution of hydrofluoric acid and hydriodic acid in the presence of oxygen and light is conducted for a period of time sufficient to substantially prevent the deposition of noble metals onto the silicon surface of the silicon wafer while cleaning said silicon surface.
Claim 4
Dependent Claim
73 words
A method of cleaning a silicon wafer as defined in claim 1, wherein the step of cleaning a silicon surface of the silicon wafer in the aqueous solution of hydrofluoric acid and hydriodic acid in the presence of oxygen and light is conducted for a period of time sufficient to substantially prevent the deposition of noble metals while minimizing oxidation of the silicon surface of the silicon wafer while cleaning said silicon surface.
Claim 5
Dependent Claim
101 words
A method of cleaning a silicon wafer as defined in claim 1, wherein the step of cleaning a silicon surface of the silicon wafer in the aqueous solution of hydrofluoric acid and hydriodic acid in the presence of oxygen and light is conducted for a period of time sufficient to substantially prevent the deposition onto the silicon surface of metals which are metallized from metal ions within the aqueous solution while cleaning said silicon surface by a reaction having an electrochemical potential less than the electrochemical potential for the reaction, I 2 +2e - =2I - , which is 0.54 V.
Claim 6
Dependent Claim
69 words
A method of cleaning a silicon wafer as defined in claim 1, wherein the step of cleaning a silicon surface of the silicon wafer in the aqueous solution of hydrofluoric acid and hydriodic acid in the presence of oxygen and light is conducted for a period of time sufficient to substantially prevent the deposition of copper on the silicon surface of the silicon wafer while cleaning said silicon surface.
Claim 7
Dependent Claim
30 words
A method of cleaning a silicon wafer as defined in claim 1, wherein the aqueous solution of hydrofluoric acid and hydriodic acid has a pH level of less than 3.
Claim 8
Dependent Claim
30 words
A method of cleaning a silicon wafer as defined in claim 1, wherein the aqueous solution of hydrofluoric acid and hydriodic acid has a pH level of less than 1.
Claim 9
Dependent Claim
35 words
A method of cleaning a silicon wafer as defined in claim 1, wherein the aqueous solution of hydrofluoric acid and hydriodic acid has sufficient hydriodic acid to cause substantially no dissociation of the hydrofluoric acid.
Claim 10
Independent Claim
104 words
A method of cleaning a silicon wafer comprising the step of: cleaning a silicon surface of the silicon wafer in an aqueous solution of hydrofluoric acid and hydriodic acid in the presence of oxygen and light, for a period of time sufficient to substantially prevent copper contaminants within the aqueous solution from being deposited onto the silicon surface of the silicon wafer while cleaning said silicon surface, wherein the aqueous solution of hydrofluoric acid and hydriodic acid has a pH level of less than 3, has a concentration of hydrofluoric acid of about 0.1M-10M and has a concentration of hydriodic acid of about 0.001M-1M.
Claim 11
Independent Claim
104 words
A method of cleaning a silicon wafer comprising the step of: cleaning a silicon surface of the silicon wafer in an aqueous solution of hydrofluoric acid and hydriodic acid in the presence of oxygen and light, for a period of time sufficient to substantially prevent copper contaminants within the aqueous solution from being deposited onto the silicon surface of the silicon wafer while cleaning said silicon surface, wherein the aqueous solution of hydrofluoric acid and hydriodic acid has a pH level of less than 3, has a concentration of hydrofluoric acid of about 0.1M-10M and has a concentration of hydriodic acid of about 0.001M-1M.
Claim 12
Dependent Claim
88 words
A method of cleaning a silicon wafer as defined in claim 9, wherein the step of cleaning a silicon surface of the silicon wafer in the aqueous solution of hydrofluoric acid and hydriodic acid in the presence of oxygen and light is conducted for a period of time sufficient to substantially prevent the deposition of copper contaminants within the aqueous solution from being deposited onto the silicon surface of the silicon wafer while minimizing oxidation of the silicon surface of the silicon wafer while cleaning said silicon surface.
Claim 13
Dependent Claim
22 words
A method of cleaning a silicon wafer as defined in claim 9, wherein the silicon wafer is substantially entirely composed of silicon.
Claim 14
Dependent Claim
35 words
A method of cleaning a silicon wafer as defined in claim 9, wherein the aqueous solution of hydrofluoric acid and hydriodic acid has sufficient hydriodic acid to cause substantially no dissociation of the hydrofluoric acid.
Claim 15
Independent Claim
107 words
A method of cleaning a silicon wafer comprising the steps of: cleaning the silicon surface of the silicon wafer in an aqueous solution of hydrofluoric acid and hydriodic acid in the presence of oxygen and light, the aqueous solution having a pH level of less than 1, for a period of time sufficient to substantially prevent copper contaminants within the aqueous solution from being deposited onto the silicon surface of the silicon wafer while cleaning said silicon surface, wherein the aqueous solution of hydrofluoric acid and hydriodic acid has a concentration of hydrofluoric acid of about 0.1M-10M and has a concentration of hydriodic acid of about 0.001M-1M.
Claim 16
Independent Claim
107 words
A method of cleaning a silicon wafer comprising the steps of: cleaning the silicon surface of the silicon wafer in an aqueous solution of hydrofluoric acid and hydriodic acid in the presence of oxygen and light, the aqueous solution having a pH level of less than 1, for a period of time sufficient to substantially prevent copper contaminants within the aqueous solution from being deposited onto the silicon surface of the silicon wafer while cleaning said silicon surface, wherein the aqueous solution of hydrofluoric acid and hydriodic acid has a concentration of hydrofluoric acid of about 0.1M-10M and has a concentration of hydriodic acid of about 0.001M-1M.
Claim 17
Dependent Claim
66 words
A method of cleaning a silicon wafer as defined in claim 13, wherein the step of cleaning the silicon surface of the silicon wafer in the aqueous solution of hydrofluoric acid and hydriodic acid in the presence of oxygen and light is conducted for a period of time for a period of time sufficient to substantially minimize oxidation of the silicon surface of the silicon wafer.
Claim 18
Dependent Claim
35 words
A method of cleaning a silicon wafer as defined in claim 13, wherein the aqueous solution of hydrofluoric acid and hydriodic acid has sufficient hydriodic acid to cause substantially no dissociation of the hydrofluoric acid.
Claim 19
Dependent Claim
23 words
A method of cleaning a silicon wafer as defined in claim 13, wherein the silicon wafer is substantially entirely composed of p-type Si(100).
Claim 20
Dependent Claim
21 words
A method of cleaning a silicon wafer as defined in claim 13, wherein the silicon wafer is substantially composed of silicon.
Claim 21
Dependent Claim
23 words
A method of cleaning a silicon wafer as defined in claim 13, wherein the silicon wafer is substantially composed of p-type monocrystalline silicon.
References Cited (Backward Citations)
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