Patent US6142855A successfully refreshed from Google Patents.
US6142855A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Polishing apparatus and polishing method
Assignee: Canon Inc
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Filing: 1998-10-30
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Granted: 2000-11-07
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Expires: 2018-10-30
Abstract
Abstract In order to measure a thickness of a surface to be polished of a material to be polished for a short time, two-dimensional images are obtained from a light reflected from the surface to be polished of the material to be polished, a location at which a thickness is to be observed is specified by the obtained two-dimensional images, and thickness measurement is carried out.
Inventors
- 👤 Masaru Nyui
- 👤 Mikichi Ban
- 👤 Takehiko Suzuki
- 👤 Yasushi Sugiyama
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 13:15
CPC Classifications
B; B24; B24B; B24B37/00; B24B37/005; B24B37/013; B24B49/00; B24B49/12
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
89 words
A thickness measuring apparatus for measuring a thickness of a surface of a material to be polished, for use in a polishing apparatus, which comprises: a light source for irradiating the surface of the material to be polished with momentary light; an image acquirer, arranged to acquire an image of the surface by the momentary light; and a thickness measurer, arranged to specify a location at which a thickness of the material to be polished is to be polished from the image and measuring the thickness at the location.
Claim 2
Dependent Claim
89 words
A thickness measuring apparatus for measuring a thickness of a surface of a material to be polished, for use in a polishing apparatus, which comprises: a light source for irradiating the surface of the material to be polished with momentary light; an image acquirer, arranged to acquire an image of the surface by the momentary light; and a thickness measurer, arranged to specify a location at which a thickness of the material to be polished is to be polished from the image and measuring the thickness at the location.
Claim 3
Dependent Claim
15 words
A thickness measuring apparatus according to claim 1, wherein the momentary light is white light.
Claim 4
Dependent Claim
19 words
A thickness measuring apparatus according to claim 1, wherein the momentary light is light having a plurality of wavelengths.
Claim 5
Dependent Claim
87 words
A thickness measuring method of measuring a thickness of a surface of a material to be polished which is rotating, which method comprises: an irradiation step of irradiating the surface of the material to be polished with momentary light; an image acquisition step of acquiring an image of the surface by the momentary light; and an optical measurement step of specifying a location at which a thickness of the material to be polished is to be measured from the image and measuring the thickness at the location.
Claim 6
Dependent Claim
87 words
A thickness measuring method of measuring a thickness of a surface of a material to be polished which is rotating, which method comprises: an irradiation step of irradiating the surface of the material to be polished with momentary light; an image acquisition step of acquiring an image of the surface by the momentary light; and an optical measurement step of specifying a location at which a thickness of the material to be polished is to be measured from the image and measuring the thickness at the location.
Claim 7
Dependent Claim
15 words
A thickness measuring apparatus according to claim 4, wherein the momentary light is white light.
Claim 8
Dependent Claim
19 words
A thickness measuring apparatus according to claim 4, wherein the momentary light is light having a plurality of wavelengths.
References Cited (Backward Citations)
US5120966A
Cited
US5191393A
Cited
US5747201A
Cited
US5081796A
Cited
US5747813A
Cited
US5337150A
Cited
US5365340A
Cited
US5543919A
Cited
US5555474A
Cited
US5872633A
Cited
US6004187A
Cited
US5899792A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2003-11-07 | 2004-05-08 | 2004-11-07 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2007-11-07 | 2008-05-08 | 2008-11-07 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2011-11-07 | 2012-05-08 | 2012-11-07 | $7700.00 | Window Closed / Lapsed |