US5365340A
Expired / Lapsed
US
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Apparatus and method for measuring the thickness of thin films
Assignee: ADE Corp
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Filing: 1992-12-10
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Granted: 1994-11-15
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Expires: 2012-12-10
Abstract
Abstract A measurement instrument which detects the thickness of the outer layer of a wafer 24, includes a filtered white light source forming an aperture image. The white light source includes a halogen lamp 10, a condensing lens 12, a circular aperture 14, a collimator lens 16, a narrow band filter wheel 18, and a second collimator lens 20. A monochromatic beam generated by this filtered white light source illuminates the entire surface of the wafer 24 with collimated light that has passed through a third collimator lens 22. The light reflected off the wafer 24 returns through the third collimator lens 22 and forms an aperture image upon an optical device which redirects this image to a charge coupled device (CCD) camera 30. The image is converted to a map of measured reflectance data by a digitizing circuit 34 and a computer 36. This map of measured reflectance data is then self-normalized and compared to reference reflectance data to generate a map of the outer layer thickness profile of the wafer 24.
Inventors
- 👤 Anthony M. Ledger
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 06:52
CPC Classifications
H; H10; H10P; H10P74/00; H10P74/20; H10P74/203; G; G01; G01B; G01B11/00; G01B11/02; G01B11/06; G01B11/0616; G01B11/0625; H10P74/27
Claims Analysis
Total Claims: 30
Claim 1
Independent Claim
158 words
An apparatus for measuring the thickness of a layer of material having front and rear surfaces, said material having a property that will transmit radiation, said apparatus comprising: means for irradiating an entire front surface area of said layer with a collimated monochromatic radiation so that reflected radiation from said front and rear surfaces has characteristics corresponding to said thickness of said layer in said surface area and wherein said means for irradiating with monochromatic radiation comprises means for sequentially irradiating said surface area with monochromatic light of differing wavelengths, so that ambiguities arising when said thickness is a multiple of a wavelength are eliminated; means for receiving said reflected radiation and for detecting said characteristics; and means for self-normalizing said detected characteristics and for comparing said self-normalized characteristics of said received radiation with a set of reference characteristics corresponding to known thicknesses and for providing an output corresponding to said thickness of said layer in said area.
Claim 2
Independent Claim
158 words
An apparatus for measuring the thickness of a layer of material having front and rear surfaces, said material having a property that will transmit radiation, said apparatus comprising: means for irradiating an entire front surface area of said layer with a collimated monochromatic radiation so that reflected radiation from said front and rear surfaces has characteristics corresponding to said thickness of said layer in said surface area and wherein said means for irradiating with monochromatic radiation comprises means for sequentially irradiating said surface area with monochromatic light of differing wavelengths, so that ambiguities arising when said thickness is a multiple of a wavelength are eliminated; means for receiving said reflected radiation and for detecting said characteristics; and means for self-normalizing said detected characteristics and for comparing said self-normalized characteristics of said received radiation with a set of reference characteristics corresponding to known thicknesses and for providing an output corresponding to said thickness of said layer in said area.
Claim 3
Dependent Claim
35 words
The apparatus of claim 1, wherein said detected characteristics at all said wavelengths are self-normalized by dividing each detected characteristic at a given wavelength by a sum of all detected characteristics at all said wavelengths.
Claim 4
Dependent Claim
26 words
An apparatus as described in claim 1, wherein said set of reference characteristics is computed based on predetermined thicknesses and assumed optical properties of the material.
Claim 5
Dependent Claim
36 words
An apparatus as described in claim 1, wherein said characteristics corresponding to said thickness of said layer comprise a reflectance of said material and said means for receiving said reflected radiation comprises a charge coupled device.
Claim 6
Dependent Claim
57 words
An apparatus as described in claim 4, wherein said means for self-normalizing and comparing said detected characteristics comprises: digitizing means for digitizing said output signal of said charge coupled device; and computing means for self-normalizing said digitized output signal and for comparing said self-normalized digitized signal with a set of digitized signals corresponding to said reference characteristics.
Claim 7
Dependent Claim
26 words
An apparatus as described in claim 1, wherein said means for self-normalizing is also for self-normalizing said reference characteristics for comparison with said self-normalized detected characteristics.
Claim 8
Dependent Claim
31 words
An apparatus as described in claim 1, wherein said set of reference characteristics used in said means for comparing is computed based on predetermined thicknesses and assumed properties of said material.
Claim 9
Independent Claim
251 words
An apparatus for measuring the thickness of a layer of material having front and rear surfaces, said layer being one of a possible plurality of layers each having front and rear surfaces and formed on a front surface of a substrate, said material having properties that will transmit light, said apparatus comprising: means for providing a beam of collimated light; means for inserting in said beam of collimated light a plurality of narrow band filters, each filter passing a single wavelength so that said beam of collimated light becomes monochromatic; means for expanding said beam of collimated light so as to irradiate an entirety of said front surface of said layer, said light being reflected off said front and rear surfaces of said layer and said front and rear surfaces of said possible plurality of other layers and the front surface of the substrate, said reflected light interacting to form a fringe pattern an image of which is reflected; means for directing said image of said reflected fringe pattern onto an active surface of a charge coupled device camera, said camera providing an output corresponding to said fringe pattern; means for digitizing said output of said charge coupled device camera; and means for receiving said digitized output of said charged coupled device camera for self-normalizing said digitized output and for comparing said self-normalized output with a set of stored self-normalized reference characteristics corresponding to known layer thicknesses and for providing an output corresponding to a thickness map of said layer thickness.
Claim 10
Independent Claim
251 words
An apparatus for measuring the thickness of a layer of material having front and rear surfaces, said layer being one of a possible plurality of layers each having front and rear surfaces and formed on a front surface of a substrate, said material having properties that will transmit light, said apparatus comprising: means for providing a beam of collimated light; means for inserting in said beam of collimated light a plurality of narrow band filters, each filter passing a single wavelength so that said beam of collimated light becomes monochromatic; means for expanding said beam of collimated light so as to irradiate an entirety of said front surface of said layer, said light being reflected off said front and rear surfaces of said layer and said front and rear surfaces of said possible plurality of other layers and the front surface of the substrate, said reflected light interacting to form a fringe pattern an image of which is reflected; means for directing said image of said reflected fringe pattern onto an active surface of a charge coupled device camera, said camera providing an output corresponding to said fringe pattern; means for digitizing said output of said charge coupled device camera; and means for receiving said digitized output of said charged coupled device camera for self-normalizing said digitized output and for comparing said self-normalized output with a set of stored self-normalized reference characteristics corresponding to known layer thicknesses and for providing an output corresponding to a thickness map of said layer thickness.
Claim 11
Dependent Claim
31 words
The apparatus of claim 8, wherein said self-normalized digitized output is obtained by dividing each detected characteristic at a given wavelength by a sum of all detected characteristics at all wavelengths.
Claim 12
Independent Claim
173 words
A method for measuring the thickness of a layer of material having front and rear surfaces, said material having properties that will transmit radiation, said method comprising the steps of: sequentially irradiating an entire front surface area of said layer with a collimated monochromatic radiation of differing wavelengths so that reflected radiation from said front and rear surfaces has characteristics corresponding to said thickness of said layer in an area and so that ambiguities, arising when said layer thickness is a multiple of a wavelength, are manifested; receiving said reflected radiation; detecting said characteristics of said received radiation; for each detected characteristic at each wavelength, self-normalizing each of said detected characteristics to scale each of said detected characteristics for comparison with a set of reference characteristics; comparing said self-normalized detected characteristics of said received radiation with said set of reference characteristics corresponding to known thicknesses; and providing an output corresponding to said thickness of said layer in said area based on said comparing of said detected characteristics with said set of reference characteristics.
Claim 13
Independent Claim
173 words
A method for measuring the thickness of a layer of material having front and rear surfaces, said material having properties that will transmit radiation, said method comprising the steps of: sequentially irradiating an entire front surface area of said layer with a collimated monochromatic radiation of differing wavelengths so that reflected radiation from said front and rear surfaces has characteristics corresponding to said thickness of said layer in an area and so that ambiguities, arising when said layer thickness is a multiple of a wavelength, are manifested; receiving said reflected radiation; detecting said characteristics of said received radiation; for each detected characteristic at each wavelength, self-normalizing each of said detected characteristics to scale each of said detected characteristics for comparison with a set of reference characteristics; comparing said self-normalized detected characteristics of said received radiation with said set of reference characteristics corresponding to known thicknesses; and providing an output corresponding to said thickness of said layer in said area based on said comparing of said detected characteristics with said set of reference characteristics.
Claim 14
Dependent Claim
37 words
A method as described in claim 10, additionally comprising the step of computing said set of reference characteristics based on predetermined thicknesses and assumed optical properties of said material; and storing said set of computed reference characteristics.
Claim 15
Dependent Claim
23 words
The method as described in claim 10, additionally comprising the step of self-normalizing said set of reference characteristics prior to said comparing step.
Claim 16
Dependent Claim
72 words
A method as described in claim 10, wherein said step of detecting said characteristics comprises detecting said characteristics using a charge coupled device camera, said camera providing output signals corresponding to said characteristics and said method further comprising the steps of: digitizing said output signals from said charge coupled device camera; and self-normalizing and comparing said digitized signals with a set of digitized reference signals, corresponding to said set of reference characteristics.
Claim 17
Dependent Claim
47 words
A method as described in claim 13, wherein said characteristic is a reflectance as manifested by said reflected radiation and said charge coupled device camera measures said reflected radiation at a plurality of points to determine said thickness of said layer at said plurality of different points.
Claim 18
Dependent Claim
54 words
A method as described in claim 10, further comprising the steps of: performing a chemical micropolishing process upon said front surface of said layer in accordance with said output corresponding to said thickness of said layer; and repeating said above mentioned steps sequentially until said thickness of said layer corresponds to a predetermined value.
Claim 19
Dependent Claim
24 words
The method of claim 10, wherein said step of self-normalizing comprises the step of dividing each detected characteristic by a sum of detected characteristics.
Claim 20
Dependent Claim
20 words
The method of claim 10, further comprising the step of normalizing said detected characteristics against corresponding pre-measured spectral response characteristics.
Claim 21
Dependent Claim
29 words
The method of claim 12, wherein said step of self-normalizing said set of reference characteristics comprises the step of dividing each reference characteristic by a sum of reference characteristics.
Claim 22
Independent Claim
166 words
A method for use with an instrument for determining actual thickness of an unknown thickness layer among one or more layers of known optical properties and thicknesses by comparing, by means of a merit function, a library of computed reflectances at different wavelengths with corresponding measured reflectances at the different wavelengths, further comprising the steps of: compiling a library of self-normalized computed reflectances based on the library of computed reflectances at each of a plurality of thicknesses at each of the different wavelengths; computing, for each of the measured reflectances for each of a plurality of areas of the unknown thickness layer, a self-normalized measured reflectance for each of the different wavelengths; computing the merit function, for each area, for each of the plurality of thicknesses, for comparing the self-normalized measured reflectances with the library of self-normalized computed reflectances at each of the plurality of thicknesses; and selecting, for each area, a thickness from the plurality of thicknesses based on the magnitude of the merit function.
Claim 23
Independent Claim
166 words
A method for use with an instrument for determining actual thickness of an unknown thickness layer among one or more layers of known optical properties and thicknesses by comparing, by means of a merit function, a library of computed reflectances at different wavelengths with corresponding measured reflectances at the different wavelengths, further comprising the steps of: compiling a library of self-normalized computed reflectances based on the library of computed reflectances at each of a plurality of thicknesses at each of the different wavelengths; computing, for each of the measured reflectances for each of a plurality of areas of the unknown thickness layer, a self-normalized measured reflectance for each of the different wavelengths; computing the merit function, for each area, for each of the plurality of thicknesses, for comparing the self-normalized measured reflectances with the library of self-normalized computed reflectances at each of the plurality of thicknesses; and selecting, for each area, a thickness from the plurality of thicknesses based on the magnitude of the merit function.
Claim 24
Dependent Claim
34 words
The method of claim 15, wherein said step of compiling is carried out by dividing each computed reflectance at each thickness by a sum of computed reflectances for all of the plurality of wavelengths.
Claim 25
Dependent Claim
55 words
The method of claim 19, further comprising the step of measuring, for a selected reflector, a spectral response of the instrument over the different wavelengths and, before computing the self-normalized measured reflectance, normalizing the measured reflectances at each of the different wavelengths with respect to the spectral response of the instrument at the different wavelengths.
Claim 26
Dependent Claim
37 words
The method of claim 21, wherein said normalizing the measured reflectances is carried out by dividing each measured reflectance at each wavelength for a given thickness by the measured spectral response of the instrument for that wavelength.
Claim 27
Dependent Claim
29 words
The method of claim 22, further comprising the step of normalizing the measured spectral response for each wavelength with respect to the measured spectral response for the different wavelengths.
Claim 28
Dependent Claim
41 words
The method of claim 23, wherein the step of normalizing the measured spectral response for each wavelength is carried out by dividing the measured spectral response for each wavelength by the measured spectral response for a selected one of the wavelengths.
Claim 29
Dependent Claim
46 words
The method of claim 19, wherein said step of computing, for each area, a self-normalized measured reflectance for each thickness for each of the different wavelengths is carried out by dividing the measured reflectance for each of the different wavelengths by a sum of measured reflectances.
Claim 30
Dependent Claim
47 words
The method of claim 21, wherein said step of computing, for each area, a self-normalized measured reflectance for each thickness for each of the different wavelengths is carried out by dividing the measured reflectance for each of the different wavelengths by a sum of normalized measured reflectances.
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