Patent US6080655A successfully refreshed from Google Patents.
US6080655A
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US
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Method for fabricating conductive components in microelectronic devices and substrate structures thereof
Assignee: Micron Technology Inc
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Filing: 1997-08-21
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Granted: 2000-06-27
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Expires: 2017-08-21
Abstract
Abstract A method and substrate structure for fabricating highly conductive components on microelectronic devices. In one embodiment in accordance with the principles of the present invention, a first dielectric layer is formed over a base layer of a substrate, a second dielectric layer is deposited onto the first dielectric layer, and a third dielectric layer is deposited onto the second dielectric layer. The first, second and third dielectric layers define a dielectric stratum in which the first and second dielectric layers may be selectively etchable from one another so that the second dielectric layer etches at a faster rate than the first layer in the presence of a selective etchant. After the dielectric layers are deposited onto the substrate, a void is etched through the second and third dielectric layers. The void may be etched in a two part process in which a non-selective etchant etches through the third dielectric layer to an intermediate level in the second dielectric layer, and then a selective etchant etches through the remaining portion of the second dielectric layer to the first dielectric layer. The third dielectric layer is subsequently covered with a conductive material, and the void is filled with a portion of the conductive layer. The substrate is then planarized to the third layer to form a conductive component in the void. The third dielectric layer generally has a lower polishing rate than the conductive layer so that the third dielectric layer acts as a polish-stop layer for the planarizing process. Although the method is applicable to forming virtually any type of conductive component on a substrate, it is particularly useful for forming gold components in contact holes and/or trenches.
Inventors
- 👤 John H. Givens
- 👤 Richard H. Lane
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 20:08
CPC Classifications
H; H10; H10W; H10W20/00; H10W20/01; H10W20/071; H10W20/081; H10W20/084; H10W20/031
Claims Analysis
Total Claims: 46
Claim 1
Independent Claim
172 words
A method for forming a conductive component in the fabrication of a microelectronic device, comprising: forming a first dielectric layer over a substrate; depositing a second dielectric layer on the first dielectric layer, the first and second dielectric layers being selectively etchable from one another; depositing a third dielectric layer on the second dielectric layer, the third dielectric layer having a first polishing rate; etching a void through the second and third dielectric layers, wherein a portion of the void in the second dielectric layer is etched with a selective etchant that selectively etches the second dielectric layer faster than the first dielectric layer; covering the third dielectric layer with a conductive material having a second polishing rate greater than the first polishing rate of the third dielectric layer, wherein a portion of the conductive layer is positioned in the void; and planarizing the substrate to the third dielectric layer to form a conductive component in the void composed of the conductive material, the third dielectric layer being a polish stop layer.
Claim 2
Independent Claim
172 words
A method for forming a conductive component in the fabrication of a microelectronic device, comprising: forming a first dielectric layer over a substrate; depositing a second dielectric layer on the first dielectric layer, the first and second dielectric layers being selectively etchable from one another; depositing a third dielectric layer on the second dielectric layer, the third dielectric layer having a first polishing rate; etching a void through the second and third dielectric layers, wherein a portion of the void in the second dielectric layer is etched with a selective etchant that selectively etches the second dielectric layer faster than the first dielectric layer; covering the third dielectric layer with a conductive material having a second polishing rate greater than the first polishing rate of the third dielectric layer, wherein a portion of the conductive layer is positioned in the void; and planarizing the substrate to the third dielectric layer to form a conductive component in the void composed of the conductive material, the third dielectric layer being a polish stop layer.
Claim 3
Dependent Claim
62 words
The method of claim 1 wherein: forming the first dielectric layer comprises depositing a first gold adhesion, diffusion resistant layer on the substrate; depositing the second dielectric layer comprises depositing a silicon oxide layer on the first gold adhesion, diffusion resistant layer; and depositing the third dielectric layer comprises depositing a second gold adhesion, diffusion resistant layer on the silicon oxide layer.
Claim 4
Dependent Claim
56 words
The method of claim 1 wherein: forming the first dielectric layer comprises depositing a first silicon nitride layer on the substrate; depositing the second dielectric layer comprises depositing a silicon oxide layer on the first silicon nitride layer; and depositing the third dielectric layer comprises depositing a second silicon nitride layer on the silicon oxide layer.
Claim 5
Dependent Claim
77 words
The method of claim 3 wherein: depositing the first silicon nitride layer comprises depositing a silicon nitride layer having a thickness of between approximately 50 Å and approximately 1,000 Å; depositing the silicon oxide layer comprises depositing a silicon oxide layer having a thickness of between approximately 2,500 Å and 8,000 Å; and depositing the second silicon nitride layer comprises depositing a silicon nitride layer having a thickness of between approximately 50 Å and approximately 1,000 Å.
Claim 6
Dependent Claim
35 words
The method of claim 3 wherein covering the third dielectric with a conductive material comprises covering the second silicon nitride layer with gold, wherein a portion of the gold layer is positioned in the void.
Claim 7
Dependent Claim
120 words
The method of claim 3 wherein etching the void through the second and third dielectric layers comprises: patterning the second silicon nitride layer with a resist having an opening corresponding to a shape and location of the void; etching the second silicon nitride layer through the opening in the resist to form an aperture in the second silicon nitride layer corresponding to the shape and location of the void; and selectively etching an exposed portion of the silicon oxide layer through the aperture in the second silicon nitride layer with the etchant that selectively etches the silicon oxide layer faster than the first silicon nitride layer until a portion of the first silicon nitride layer under the aperture is exposed.
Claim 8
Dependent Claim
49 words
The method of claim 6 wherein covering the third dielectric layer and filling the void comprises depositing a layer of gold over the second silicon nitride layer and filling the void in the silicon dioxide layer and the second silicon nitride layer with a portion of the gold layer.
Claim 9
Dependent Claim
25 words
The method of claim 6 wherein patterning the resist comprises patterning an elongated opening corresponding to a trench along the substrate for a damascene line.
Claim 10
Dependent Claim
63 words
The method of claim 8 wherein covering the third dielectric layer and filling the void comprises: coating the trench with an adhesion stratum having a palladium layer; depositing a layer of gold over the adhesion stratum and filling the trench with a portion of the gold layer; and annealing the gold and the adhesion stratums to diffuse the adhesion stratum into the gold.
Claim 11
Dependent Claim
63 words
The method of claim 8 wherein covering the third dielectric layer and filling the void comprises: coating the trench with an adhesion stratum having a platinum layer; depositing a layer of gold over the adhesion stratum and filling the trench with a portion of the gold layer; and annealing the gold and the adhesion stratums to diffuse the adhesion stratum into the gold.
Claim 12
Dependent Claim
130 words
The method of claim 3 wherein etching the void through the second and third dielectric layers comprises: patterning the second silicon nitride layer with a resist having an opening corresponding to a trench along the substrate for a damascene line with a width not greater than 0.3 μm; etching the second silicon nitride layer through the opening in the resist to form an aperture in the second silicon nitride layer corresponding to the shape and location of the void; and selectively etching an exposed portion of the silicon oxide layer through the aperture in the second silicon nitride layer with the etchant that selectively etches the silicon oxide layer faster than the first silicon nitride layer until a portion of the first silicon nitride layer under the aperture is exposed.
Claim 13
Dependent Claim
49 words
The method of claim 11 wherein covering the third dielectric layer and filling the trench comprises depositing a layer of gold over the second silicon nitride layer and filling the trench in the silicon dioxide layer and the second silicon nitride layer with a portion of the gold layer.
Claim 14
Dependent Claim
131 words
The method of claim 3 wherein etching the void comprises: patterning the second silicon nitride layer with a resist having an opening corresponding to a hole for a contact via; etching through the second silicon nitride layer, the silicon oxide layer and the first silicon nitride layer to form a contact hole; re-patterning the second silicon nitride layer with another opening corresponding to a trench along the substrate for a damascene line over the contact hole; etching the second silicon nitride layer through the opening in the resist to form an aperture in the second silicon nitride layer corresponding to the shape and location of the trench; and selectively etching an exposed portion of the silicon oxide layer through the aperture in the second silicon nitride layer with the selective etchant.
Claim 15
Dependent Claim
38 words
The method of claim 13 wherein covering the third dielectric layer comprises depositing a layer of gold over the second silicon nitride layer, a portion of the gold layer being positioned in the trench and the contact hole.
Claim 16
Dependent Claim
138 words
The method of claim 1, further comprising: depositing a fourth dielectric layer over the third dielectric layer after the planarization step, the third and fourth dielectric layers being selectively etchable from one another; depositing a fifth dielectric layer over the fourth dielectric layer; etching a second void through the fourth and fifth dielectric layers, wherein a portion of the second void in the fourth dielectric layer is etched with an etchant that etches the fourth dielectric layer faster then the third dielectric layer; covering the fifth dielectric layer with a second conductive layer having a polishing rate greater than that of the fifth dielectric layer, wherein a portion of the second conductive layer is positioned in the second void; and planarizing the substrate to the fifth dielectric layer to form a second conductive component in the second void.
Claim 17
Dependent Claim
102 words
The method of claim 15 wherein: forming the first dielectric layer comprises depositing a first silicon nitride layer on the substrate; depositing the second dielectric layer comprises depositing a first silicon oxide layer on the first silicon nitride layer; depositing the third dielectric layer comprises depositing a second silicon nitride layer on the first silicon oxide layer; depositing the fourth dielectric layer comprises depositing a second silicon oxide layer over the second silicon nitride layer and the conductive component formed in the void; and depositing the fifth dielectric layer comprises depositing a third silicon nitride layer over the second silicon oxide layer.
Claim 18
Dependent Claim
148 words
The method of claim 16 wherein etching the second void in the fourth and fifth dielectric layers comprises: patterning the third silicon nitride layer with a resist having an opening corresponding to a shape of the second void, the opening in the resist on the third silicon nitride layer being offset with respect to the void in the first silicon oxide layer; etching the third silicon nitride layer through the opening in the resist to from an aperture in the third silicon nitride layer corresponding to the shape and location of the second void; and selectively etching an exposed portion of the second silicon oxide layer through the aperture in the third silicon nitride layer with a selective etchant that selectively etches the second silicon oxide layer faster than the second silicon nitride layer until a portion of the second silicon nitride layer under the aperture is exposed.
Claim 19
Dependent Claim
38 words
The method of the claim 16 wherein covering the third silicon nitride layer comprises depositing a second layer of gold over the third silicon nitride layer and filling the second void with a portion of the gold layer.
Claim 20
Dependent Claim
33 words
The method of claim 16, further comprising; depositing a titanium film over the substrate after etching the second void to line the second void; and depositing a palladium film over the titanium film.
Claim 21
Dependent Claim
142 words
The method of claim 1, further comprising: depositing a fourth dielectric layer over the third dielectric layer after the planarization step; depositing a fifth dielectric layer over the fourth dielectric layer, the fourth and fifth dielectric layers being selectively etchable from one another; depositing a sixth dielectric layer over the fifth dielectric layer; etching a second void through the fifth and sixth dielectric layers, wherein a portion of the second void in the fifth layer is etched with an etchant that etches the fifth layer faster than the fourth layer; covering the sixth layer with a second conductive layer having a polishing rate greater than that of the sixth layer, wherein a portion of the second conductive layer is positioned in the second void; and planarizing the substrate to the sixth layer to form a second conductive component in the second void.
Claim 22
Dependent Claim
61 words
The method of claim 20 wherein: depositing the fourth dielectric layer comprises depositing a third silicon nitride layer on the second silicon nitride layer; depositing the fifth dielectric layer comprises depositing a second silicon oxide layer on the third silicon nitride layer; and depositing the sixth dielectric layer comprises depositing a fourth silicon nitride layer on the second silicon oxide layer.
Claim 23
Dependent Claim
34 words
The method of claim 21 wherein covering the sixth layer comprises depositing a layer of gold over the fourth silicon nitride layer and positioning a portion of the gold layer in the second void.
Claim 24
Independent Claim
161 words
A method of fabricating a conductive component in a microelectronic device on a substrate, comprising: forming a dielectric stratum on the substrate over a barrier layer, the dielectric stratum having a first dielectric layer, a second dielectric layer on the first dielectric layer, and a third dielectric layer on the second dielectric layer, the second layer being selectively removable from the first layer; forming a void in the dielectric stratum through the third dielectric layer and the second dielectric layer, wherein at least a portion of the second dielectric layer is selectively removed with respect to the first layer; covering the third dielectric layer with a conductive layer, wherein a portion of the conductive layer is positioned in the void and wherein the conductive layer has a higher polishing rate than the third dielectric layer; and removing an excess portion of the conductive layer from the third dielectric layer to leave a component portion of the conductive layer in the void.
Claim 25
Independent Claim
161 words
A method of fabricating a conductive component in a microelectronic device on a substrate, comprising: forming a dielectric stratum on the substrate over a barrier layer, the dielectric stratum having a first dielectric layer, a second dielectric layer on the first dielectric layer, and a third dielectric layer on the second dielectric layer, the second layer being selectively removable from the first layer; forming a void in the dielectric stratum through the third dielectric layer and the second dielectric layer, wherein at least a portion of the second dielectric layer is selectively removed with respect to the first layer; covering the third dielectric layer with a conductive layer, wherein a portion of the conductive layer is positioned in the void and wherein the conductive layer has a higher polishing rate than the third dielectric layer; and removing an excess portion of the conductive layer from the third dielectric layer to leave a component portion of the conductive layer in the void.
Claim 26
Dependent Claim
43 words
The method of claim 23 wherein forming the dielectric stratum comprises: depositing a first silicon nitride layer on the substrate; depositing a silicon oxide layer on the first silicon nitride layer; and depositing a second silicon nitride layer on the silicon oxide layer.
Claim 27
Dependent Claim
36 words
The method of claim 24 wherein covering the third dielectric layer with a conductive material comprises covering the second silicon nitride layer with gold, wherein a portion of the gold layer is positioned in the void.
Claim 28
Dependent Claim
93 words
The method of claim 24 wherein forming the void through the second and third dielectric layers comprises: patterning the second silicon nitride layer with a resist having an opening corresponding to a shape and location of the void; etching the second silicon nitride layer through the opening in the resist to form an aperture in the second silicon nitride layer corresponding to the shape and location of the void; and selectively etching an exposed portion of the silicon oxide layer through the aperture in the second silicon nitride layer with a selective etchant.
Claim 29
Dependent Claim
29 words
The method of claim 26, wherein removing the conductive material comprises planarizing the substrate, the third dielectric layer being a polish stop layer to endpoint planarization of the substrate.
Claim 30
Dependent Claim
138 words
The method of claim 24, further comprising: depositing a fourth dielectric layer over the third dielectric layer after the planarization step, the third and fourth dielectric layers being selectively etchable from one another; depositing a fifth dielectric layer over the fourth dielectric layer; etching a second void through the fourth and fifth dielectric layers, wherein a portion of the second void in the fourth dielectric layer is etched with an etchant that etches the fourth dielectric layer faster then the third dielectric layer; covering the fifth dielectric layer with a second conductive layer having a polishing rate greater than that of the fifth dielectric layer, wherein a portion of the second conductive layer is positioned in the second void; and planarizing the substrate to the fifth dielectric layer to form a second conductive component in the second void.
Claim 31
Dependent Claim
101 words
The method of claim 28 wherein: forming the first dielectric layer comprises depositing a first silicon nitride layer on the substrate; depositing the second dielectric layer comprises depositing a first silicon oxide layer on the first silicon nitride layer; depositing the third dielectric layer comprises depositing a second silicon nitride layer on the silicon oxide layer; depositing the fourth dielectric layer comprises depositing a second silicon oxide layer over the second silicon nitride layer and the conductive component formed in the void; and depositing the fifth dielectric layer comprises depositing a third silicon nitride layer over the second silicon oxide layer.
Claim 32
Dependent Claim
146 words
The method of claim 29 wherein etching the second void the fourth and fifth dielectric layers comprises: patterning the third silicon nitride layer with a resist having an opening corresponding to a shape of the second void, the opening in the resist on the third silicon nitride layer being offset with respect to the void in the first silicon oxide layer; etching the third silicon nitride layer through the opening in the resist to from an aperture in the third silicon nitride layer corresponding to the shape and location of the second void; and selectively etching an exposed portion of the second silicon oxide layer through the aperture in the third silicon nitride layer with the etchant that selectively etches the second silicon oxide layer faster than the second silicon nitride layer until a portion of the second silicon nitride layer under the aperture is exposed.
Claim 33
Dependent Claim
142 words
The method of claim 24, further comprising: depositing a fourth dielectric layer over the third dielectric layer after the planarization step; depositing a fifth dielectric layer over the fourth dielectric layer, the fourth and fifth dielectric layers being selectively etchable from one another; depositing a sixth dielectric layer over the fifth dielectric layer; etching a second void through the fifth and sixth dielectric layers, wherein a portion of the second void in the fifth layer is etched with an etchant that etches the fifth layer faster than the fourth layer; covering the sixth layer with a second conductive layer having a polishing rate greater than that of the sixth layer, wherein a portion of the second conductive layer is positioned in the second void; and planarizing the substrate to the sixth layer to form a second conductive component in the second void.
Claim 34
Dependent Claim
61 words
The method of claim 31 wherein: depositing the fourth dielectric layer comprises depositing a third silicon nitride layer on the second silicon nitride layer; depositing the fifth dielectric layer comprises depositing a second silicon oxide layer on the third silicon nitride layer; and depositing the sixth dielectric layer comprises depositing a fourth silicon nitride layer on the second silicon oxide layer.
Claim 35
Dependent Claim
34 words
The method of claim 32 wherein covering the sixth layer comprises depositing a layer of gold over the fourth silicon nitride layer and positioning a portion of the gold layer in the second void.
Claim 36
Independent Claim
194 words
A method for fabricating a damascene line in a microelectronic device on a substrate having a base layer, a component on the base layer, and a barrier layer over the base layer and the component, comprising: forming a dielectric stratum on the substrate over a barrier layer, the dielectric stratum having a first dielectric layer, a second dielectric layer on the first dielectric layer, and a third dielectric layer on the second dielectric layer, the second dielectric layer being selectively removable from the first dielectric layer; forming a trench in the dielectric stratum through the third dielectric layer and the second dielectric layer, wherein at least a portion of the second dielectric layer is selectively removed to the first dielectric layer; covering the third dielectric layer with a conductive layer and filling the trench with at least a portion of the conductive layer, the conductive layer having a higher polishing rate than the third dielectric layer; and planarizing the conductive layer down to the third dielectric layer, the third dielectric layer resisting planarization to endpoint the planarizing of the conductive layer where a remaining portion of the conductive layer is isolated in the trench.
Claim 37
Independent Claim
194 words
A method for fabricating a damascene line in a microelectronic device on a substrate having a base layer, a component on the base layer, and a barrier layer over the base layer and the component, comprising: forming a dielectric stratum on the substrate over a barrier layer, the dielectric stratum having a first dielectric layer, a second dielectric layer on the first dielectric layer, and a third dielectric layer on the second dielectric layer, the second dielectric layer being selectively removable from the first dielectric layer; forming a trench in the dielectric stratum through the third dielectric layer and the second dielectric layer, wherein at least a portion of the second dielectric layer is selectively removed to the first dielectric layer; covering the third dielectric layer with a conductive layer and filling the trench with at least a portion of the conductive layer, the conductive layer having a higher polishing rate than the third dielectric layer; and planarizing the conductive layer down to the third dielectric layer, the third dielectric layer resisting planarization to endpoint the planarizing of the conductive layer where a remaining portion of the conductive layer is isolated in the trench.
Claim 38
Dependent Claim
43 words
The method of claim 34 wherein forming the dielectric stratum comprises: depositing a first silicon nitride layer on the substrate; depositing a silicon oxide layer on the first silicon nitride layer; and depositing a second silicon nitride layer on the silicon oxide layer.
Claim 39
Dependent Claim
35 words
The method of claim 35 wherein covering the third dielectric with a conductive material comprises covering the second silicon nitride layer with gold, wherein a portion of the gold layer is positioned in the trench.
Claim 40
Dependent Claim
120 words
The method of claim 35 wherein forming the trench through the second and third dielectric layers comprises: patterning the second silicon nitride layer with a resist having an opening corresponding to a shape and location of the trench; etching the second silicon nitride layer through the opening in the resist to form an aperture in the second silicon nitride layer corresponding to the shape and location of the trench; and selectively etching an exposed portion of the silicon oxide layer through the aperture in the second silicon nitride layer with the etchant that selectively etches the silicon oxide layer faster than the first silicon nitride layer until a portion of the first silicon nitride layer under the aperture is exposed.
Claim 41
Dependent Claim
138 words
The method of claim 35, further comprising: depositing a fourth dielectric layer over the third dielectric layer after the planarization step, the third and fourth dielectric layers being selectively etchable from one another; depositing a fifth dielectric layer over the fourth dielectric layer; etching a second trench through the fourth and fifth dielectric layers, wherein a portion of the second trench in the fourth dielectric layer is etched with an etchant that etches the fourth dielectric layer faster then the third dielectric layer; covering the fifth dielectric layer with a second conductive layer having a polishing rate greater than that of the fifth dielectric layer, wherein a portion of the second conductive layer is positioned in the second trench; and planarizing the substrate to the fifth dielectric layer to form a second conductive component in the second trench.
Claim 42
Dependent Claim
102 words
The method of claim 38 wherein: depositing the first dielectric layer comprises depositing a first silicon nitride layer on the substrate; depositing the second dielectric layer comprises depositing a first layer of silicon oxide on the first silicon nitride layer; depositing the third dielectric layer comprises depositing a second silicon nitride layer on the silicon oxide layer; depositing the fourth dielectric layer comprises depositing a second silicon oxide layer over the second silicon nitride layer and the conductive component formed in the void; and depositing the fifth dielectric layer comprises depositing a third silicon nitride layer over the second silicon oxide layer.
Claim 43
Dependent Claim
147 words
The method of claim 39 wherein etching the second trench in the fourth and fifth dielectric layers comprises: patterning the third silicon nitride layer with a resist having an opening corresponding to a shape of the second trench, the opening in the resist on the third silicon nitride layer being offset with respect to the trench in the first silicon oxide layer; etching the third silicon nitride layer through the opening in the resist to from an aperture in the third silicon nitride layer corresponding to the shape and location of the second trench; and selectively etching an exposed portion of the second silicon oxide layer through the aperture in the third silicon nitride layer with the etchant that selectively etches the second silicon oxide layer faster than the second silicon nitride layer until a portion of the second silicon nitride layer under the aperture is exposed.
Claim 44
Dependent Claim
145 words
The method of claim 35, further comprising: depositing a fourth dielectric layer over the third dielectric layer after the planarization step; depositing a fifth dielectric layer over the fourth dielectric layer, the fourth and fifth dielectric layers being selectively etchable from one another; depositing a sixth dielectric layer over the fifth dielectric layer; etching a second trench through the fifth and sixth dielectric layers, wherein a portion of the second trench in the fifth layer is etched with an etchant that etches the fifth layer faster than the fourth layer; covering the sixth dielectric layer with a second conductive layer having a polishing rate greater than that of the sixth dielectric layer, wherein a portion of the second conductive layer is positioned in the second trench; and planarizing the substrate to the sixth dielectric layer to form a second conductive component in the second trench.
Claim 45
Dependent Claim
61 words
The method of claim 41 wherein: depositing the fourth dielectric layer comprises depositing a third silicon nitride layer on the second silicon nitride layer; depositing the fifth dielectric layer comprises depositing a second silicon oxide layer on the third silicon nitride layer; and depositing the sixth dielectric layer comprises depositing a fourth silicon nitride layer on the second silicon oxide layer.
Claim 46
Dependent Claim
34 words
The method of claim 42 wherein covering the sixth layer comprises depositing a layer of gold over the fourth silicon nitride layer and positioning a portion of the gold layer in the second trench.
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