Patent US777921A successfully refreshed from Google Patents.
Patent US6060127A successfully refreshed from Google Patents.
US6060127A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Mechanically restricted laser deposition
Assignee: Panasonic Holdings Corp
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Filing: 1998-03-31
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Granted: 2000-05-09
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Expires: 2018-03-31
Abstract
Abstract An apparatus for metal line deposition and a method for metal line deposition using the apparatus. A donor plate has a donor substrate transparent to a focused coherent light beam and a donor surface. The donor surface of the donor plate has a channel formed therein. The channel is coated with a metallic material. A deposition substrate onto which the metal line is to be deposited is disposed adjacent the donor surface of the donor plate. The focused coherent light beam is directed through the donor substrate of the donor plate and onto the metallic coating in the channel. The focused coherent light beam causes the metallic material to ablate from the channel by discharging ions of the metallic material away from the channel and onto the deposition substrate to form the metal line.
Inventors
- 👤 Abdelkrim Tatah
- 👤 Makoto Ishizuka
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 11:36
CPC Classifications
H; H05; H05K; H05K3/00; H05K3/02; H05K3/04; H05K3/046; C; C23; C23C; C23C14/00; C23C14/04; C23C14/048; C23C14/22; C23C14/24; C23C14/28; H05K3/10; H05K3/20; H10; H10P; H10P14/00; H10P14/40; H10P14/412
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
146 words
A method of metal line deposition using a focused coherent light beam comprising the steps of: (a) forming a donor plate having a donor substrate transparent to the focused coherent light beam, a channel in a donor surface of the donor plate, and a metallic material within the channel to the relative exclusion of areas on the donor substrate outside of the channel; (b) disposing the donor plate in spaced relation to a deposition substrate such that the deposition substrate is adjacent the donor surface of the donor plate; (c) directing the focused coherent light beam through the donor substrate of the donor plate and onto the metallic material in the channel to ablate the metallic material from the channel of the donor plate by discharging ions of the metallic material away from the donor plate and onto the deposition substrate to form the metal line.
Claim 2
Independent Claim
146 words
A method of metal line deposition using a focused coherent light beam comprising the steps of: (a) forming a donor plate having a donor substrate transparent to the focused coherent light beam, a channel in a donor surface of the donor plate, and a metallic material within the channel to the relative exclusion of areas on the donor substrate outside of the channel; (b) disposing the donor plate in spaced relation to a deposition substrate such that the deposition substrate is adjacent the donor surface of the donor plate; (c) directing the focused coherent light beam through the donor substrate of the donor plate and onto the metallic material in the channel to ablate the metallic material from the channel of the donor plate by discharging ions of the metallic material away from the donor plate and onto the deposition substrate to form the metal line.
Claim 3
Dependent Claim
48 words
A method of metal line deposition according to claim 1 further comprising the step of applying an electric field across the donor plate and the deposition substrate to drive the ions of the metallic material to the deposition substrate and to electrostatically assist bonding of the ions thereto.
Claim 4
Dependent Claim
26 words
A method of metal line deposition according to claim 1 wherein step (b) comprises the step of visually aligning the donor plate and the deposition substrate.
Claim 5
Dependent Claim
45 words
A method of metal line deposition according to claim 3 wherein each substrate includes a plurality of lines and step (b) comprises the step of visually aligning the donor plate and the deposition substrate by eliminating a moire pattern as viewed through the donor plate.
Claim 6
Dependent Claim
46 words
A method of metal line deposition according to claim 1 wherein step (c) further comprises the steps of: maintaining the focused coherent light beam in a fixed position; mechanically coupling the donor plate to the deposition substrate; and actuating the coupled donor plate and deposition substrate.
Claim 7
Dependent Claim
34 words
A method of metal line deposition according to claim 1 wherein step (c) further comprises: maintaining the donor plate and the deposition substrate in a fixed position; and actuating the focused coherent light beam.
Claim 8
Dependent Claim
43 words
A method of metal line deposition according to claim 1 wherein step (a) comprises the steps of: providing a donor plate having a donor surface; etching a channel into the donor surface of the donor plate; depositing a metallic material in the channel.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2003-05-09 | 2003-11-08 | 2004-05-09 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2007-05-09 | 2007-11-08 | 2008-05-09 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2011-05-09 | 2011-11-08 | 2012-05-09 | $7700.00 | Window Closed / Lapsed |