US4349583A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Laser enhanced maskless method for plating and simultaneous plating and etching of patterns
Assignee: International Business Machines Corp
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Filing: 1981-07-28
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Granted: 1982-09-14
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Expires: 2001-07-28
Abstract
Abstract A method for high resolution maskless plating with an immersion, exchange or like plating bath is described. Preferential plating results from exposing those regions where plating is sought to an energy beam to increase the plating rate and the resulting plating thickness is several orders of magnitude greater than is possible by standard immersion techniques.
Inventors
- 👤 Larysa H. Kulynych
- 👤 Lubomyr T. Romankiw
- 👤 Robert J. VON Gutfeld
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-25 11:53
CPC Classifications
H; H05; H05K; H05K3/00; H05K3/22; H05K3/225; C; C23; C23C; C23C18/00; C23C18/16; C23C18/1601; C23C18/1603; C23C18/1607; C23C18/1612; C23C18/1633; C23C18/1635; C23C18/1637; C23C18/1655; C23C18/1664; C23C18/1667; C23C18/54
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
60 words
A method for selectively plating onto a surface of a workpiece without application of an electrical potential source comprising the steps of: contacting said surface with a plating solution in the absence of a reducing agent and without application of an electrical potential source, and directing an energy beam onto the workpiece to locally heat the surface to promote plating.
Claim 2
Independent Claim
60 words
A method for selectively plating onto a surface of a workpiece without application of an electrical potential source comprising the steps of: contacting said surface with a plating solution in the absence of a reducing agent and without application of an electrical potential source, and directing an energy beam onto the workpiece to locally heat the surface to promote plating.
Claim 3
Dependent Claim
28 words
The method of claim 1 wherein said beam is laser generated said beam having an intensity between about 10 2 W/cm 2 and 10 6 W/cm 2 .
Claim 4
Dependent Claim
10 words
The method of claim 2 wherein said beam is modulated.
Claim 5
Dependent Claim
30 words
The method of claim 3 wherein said workpiece is a composite structure having a thermally insulating substrate and a film which is strongly absorbent of the energy of said beam.
Claim 6
Dependent Claim
29 words
The method of claim 4 wherein said substrate is transparent to the beam which passes through said substrate and impinges on an interface between said substrate and said film.
Claim 7
Independent Claim
55 words
A method for preferentially plating regions of a surface employing a non-photo decomposable plating solution without a reducing agent, the improvement comprising: directing a light beam onto the region of the surface to heat the surface locally where preferential plating is sought, said beam having an intensity of at least 10 2 W/cm 2 .
Claim 8
Independent Claim
55 words
A method for preferentially plating regions of a surface employing a non-photo decomposable plating solution without a reducing agent, the improvement comprising: directing a light beam onto the region of the surface to heat the surface locally where preferential plating is sought, said beam having an intensity of at least 10 2 W/cm 2 .
Claim 9
Dependent Claim
30 words
A method in accordance with claim 1, 2, 3, 4, 5, or 6, wherein plating into through and via holes, and onto corners, and edges in a workpiece are achieved.
Claim 10
Dependent Claim
38 words
A method in accordance with claim 1, 2, 3, 4, 5, or 6, wherein simultaneous plating onto areas heated by said energy beam and etching along the periphery of said areas heated by said energy beam is provided.
Claim 11
Dependent Claim
45 words
A method in accordance with claim 1, 2, 3, 4, 5, or 6, wherein simultaneous plating onto areas heated by said energy beam and etching along the periphery of said areas heated by said energy beam is provided to produce isolated patterns and electrical circuits.
References Cited (Backward Citations)
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1985-09-13 | 1986-03-15 | 1986-09-14 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1989-09-13 | 1990-03-15 | 1990-09-14 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1993-09-13 | 1994-03-15 | 1994-09-14 | $7700.00 | Window Closed / Lapsed |