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US4239789A Expired / Lapsed US ⏱️ 0.0 years remaining

Maskless method for electroless plating patterns

Assignee: International Business Machines Corp
•
Filing: 1979-05-08
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Granted: 1980-12-16
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Expires: 1999-05-08
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Abstract

Abstract A method for high resolution maskless electroless plating is described. Preferential plating results from exposing those regions where plating is sought to an energy beam to increase the plating rate by a factor of 10 3 to 10 4 . This enhancement is sufficient to make masking unnecessary.

Inventors

  • 👤 Samuel E. Blum
  • 👤 Zlata Kovac
  • 👤 Robert J. VON Gutfeld

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-24 19:58
CPC Classifications
C; C23; C23C; C23C18/00; C23C18/16; C23C18/1601; C23C18/1603; C23C18/1607; C23C18/1612; B; B23; B23K; B23K26/00; B23K26/20; B23K26/32; B23K26/324; B23K26/34; C23C18/161; H; H05; H05K; H05K3/00; H05K3/10; H05K3/18; H05K3/181; H05K3/182; H05K3/185; B23K2103/00; B23K2103/08; B23K2103/30; B23K2103/42; B23K2103/50; B23K2103/54; Y; Y02; Y02T; Y02T50/00; Y02T50/60

Claims Analysis

Total Claims: 9
Claim 1
Independent Claim 43 words
A method for selectively electrolessly plating of a surface of a workpiece comprising the steps of: contacting the surface with a non-photo decomposable electroless plating solution; and directing an energy beam onto the workpiece to locally heat the surface to promote enhanced plating.
Claim 2
Independent Claim 43 words
A method for selectively electrolessly plating of a surface of a workpiece comprising the steps of: contacting the surface with a non-photo decomposable electroless plating solution; and directing an energy beam onto the workpiece to locally heat the surface to promote enhanced plating.
Claim 3
Dependent Claim 28 words
The method of claim 1 wherein said beam is laser generated said beam having an intensity between about 10 2 W/cm 2 and 10 6 W/cm 2 .
Claim 4
Dependent Claim 10 words
The method of claim 2 wherein said beam is modulated.
Claim 5
Dependent Claim 28 words
The method of claim 3 wherein said workpiece is a composite structure having a thermally insulating substrate and a film which is strongly absorbant of the beam's energy.
Claim 6
Dependent Claim 29 words
The method of claim 4 wherein said substrate is transparent to the beam which passes through said substrate and impinges on an interface between said substrate and said film.
Claim 7
Dependent Claim 23 words
The method of claim 4 wherein said film has a thickness no greater than the minimum dimension of the pattern to be plated.
Claim 8
Independent Claim 52 words
A method for preferentially plating regions of a surface employing a non-photo decomposable electroless plating solution, the improvement comprising: directing a light beam onto the region of the surface, to locally heat the surface where preferential plating is sought, said beam having an intensity of at least 10 2 W/cm 2 .
Claim 9
Independent Claim 52 words
A method for preferentially plating regions of a surface employing a non-photo decomposable electroless plating solution, the improvement comprising: directing a light beam onto the region of the surface, to locally heat the surface where preferential plating is sought, said beam having an intensity of at least 10 2 W/cm 2 .

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1983-12-16 1984-06-16 1984-12-16 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1987-12-16 1988-06-16 1988-12-16 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1991-12-16 1992-06-16 1992-12-16 $7700.00 Window Closed / Lapsed

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