US4072768A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method for making patterned gold metallization
Assignee: AT&T Inc
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Filing: 1976-01-23
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Granted: 1978-02-07
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Expires: 1996-01-23
Abstract
Abstract A method is disclosed for making patterned gold films in the manufacture of integrated circuit devices. The method calls for the deposition of a film of a gold compound whose heat of formation is in the range of from -20 to +10 Kcal/mole, selectively reducing the gold compound to elemental gold by irradiation, and chemically removing the unreduced portions of the gold compound.
Inventors
- 👤 David B. Fraser
- 👤 Guenther W. Kammlott
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-24 12:59
CPC Classifications
C; C04; C04B; C04B41/00; C04B41/80; C04B41/81; C04B41/85; C04B41/88; C04B41/009; C04B41/45; C04B41/50; C04B41/51; C04B41/5116; C23; C23C; C23C18/00; C23C18/02; C23C18/08; H; H10; H10W; H10W20/00; H10W20/01; H10W20/031; H10W20/063; H10W20/067; H10W20/068; C23C18/14; C23C18/143; C23C18/145; H05; H05K; H05K3/00; H05K3/10; H05K3/105; Y; Y10; Y10S; Y10S430/00; Y10S430/143; Y10S430/146
Claims Analysis
Total Claims: 13
Claim 1
Independent Claim
82 words
A method for making a gold pattern on a substrate, comprising the steps of (1) depositing on said substrate a layer consisting essentially of gold oxide, said layer having a thickness in the range of from 0.01 to 5.0 micrometers, (2) patterning said layer by selectively reducing portions of said layer to metallic gold by irradiation of said portions with electrons or light, and (3) exposing the entire layer to a chemical agent whereby the unreduced portions of said layer are removed.
Claim 2
Independent Claim
82 words
A method for making a gold pattern on a substrate, comprising the steps of (1) depositing on said substrate a layer consisting essentially of gold oxide, said layer having a thickness in the range of from 0.01 to 5.0 micrometers, (2) patterning said layer by selectively reducing portions of said layer to metallic gold by irradiation of said portions with electrons or light, and (3) exposing the entire layer to a chemical agent whereby the unreduced portions of said layer are removed.
Claim 3
Dependent Claim
12 words
Method of claim 1 in which said layer is deposited by sputtering.
Claim 4
Dependent Claim
13 words
Method of claim 1 in which said layer is deposited by plasma deposition.
Claim 5
Dependent Claim
18 words
Method of claim 1 in which said layer is deposited by evaporation of gold in a reactive ambient.
Claim 6
Dependent Claim
18 words
Method of claim 1 in which said irradiation is carried out by means of a focused electron beam.
Claim 7
Dependent Claim
17 words
Method of claim 1 in which said irradiation is carried out by means of a laser beam.
Claim 8
Dependent Claim
28 words
Method of claim 1 in which said patterning is carried out by depositing a mask on said layer and exposing the resulting assembly to wide aperture electron radiation.
Claim 9
Dependent Claim
28 words
Method of claim 1 in which said patterning is carried out by depositing a mask on said layer and exposing the resulting assembly to wide aperture light radiation.
Claim 10
Dependent Claim
12 words
Method of claim 1 in which said chemical agent is hydrochloric acid.
Claim 11
Dependent Claim
21 words
Method of claim 1 in which said patterning is carried out in the presence of air or of an inert atmosphere.
Claim 12
Dependent Claim
22 words
Method of claim 1 in which said patterning is carried out in the presence of a vacuum or of a reducing atmosphere.
Claim 13
Dependent Claim
11 words
Method of claim 11 in which said reducing atmosphere is hydrogen.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1981-02-06 | 1981-08-08 | 1982-02-07 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1985-02-06 | 1985-08-08 | 1986-02-07 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1989-02-06 | 1989-08-08 | 1990-02-07 | $7700.00 | Window Closed / Lapsed |