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US6040936A Expired / Lapsed US ⏱️ 0.0 years remaining

Optical transmission control apparatus utilizing metal films perforated with subwavelength-diameter holes

Assignee: NEC Corp
•
Filing: 1998-10-08
•
Granted: 2000-03-21
•
Expires: 2018-10-08
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Abstract

Abstract Generally speaking, in accordance with the invention, an optical transmission modulation apparatus is provided for modulating light transmitted through the apparatus. The apparatus comprises a metal film having a periodic array of subwavelength-diameter holes provided therein, and a supporting layer. At least a portion of the supporting layer has a selectively variable refractive index, the selectively variable refractive index portion being substantially adjacent to the metal film such that the metal film and the supporting layer form a perforated metal film unit. Selective variation of the refractive index of the selectively variable refractive index portion modulates the intensity of the light transmitted through the perforated metal film unit without substantially changing the direction of the light. Flat panel displays, spatial light modulators and tunable optical filters based on the optical transmission control apparatus are also provided.

Inventors

  • 👤 Tae Jin Kim
  • 👤 Tineke Thio
  • 👤 Thomas Wren Ebbesen

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-07 07:44
CPC Classifications
G; G02; G02B; G02B5/00; G02B5/008; G02B26/00; G02B26/02; G02F; G02F1/00; G02F1/01; G02F1/13; G02F1/133; G02F1/1333; G02F1/13338; G02F1/1335; G02F1/133509; G02F1/133514; G02F1/133516; G02F1/1336; G02F1/133614; G02F1/1343; G02F1/134309; G02F1/134318; G02F1/13439

Claims Analysis

Total Claims: 76
Claim 1
Independent Claim 109 words
An optical transmission modulation apparatus for modulating light transmitted through the apparatus, the apparatus comprising: a metal film having a periodic array of subwavelength-diameter holes provided therein; and a supporting layer, at least a portion of the supporting layer having a selectively variable refractive index, the selectively variable refractive index portion being substantially adjacent to the metal film such that the metal film and the supporting layer comprise a perforated metal film unit, and wherein selective variation of the refractive index of the selectively variable refractive index portion modulates the intensity of the light transmitted through the perforated metal film unit without substantially changing the direction of the light.
Claim 2
Dependent Claim 109 words
An optical transmission modulation apparatus for modulating light transmitted through the apparatus, the apparatus comprising: a metal film having a periodic array of subwavelength-diameter holes provided therein; and a supporting layer, at least a portion of the supporting layer having a selectively variable refractive index, the selectively variable refractive index portion being substantially adjacent to the metal film such that the metal film and the supporting layer comprise a perforated metal film unit, and wherein selective variation of the refractive index of the selectively variable refractive index portion modulates the intensity of the light transmitted through the perforated metal film unit without substantially changing the direction of the light.
Claim 3
Dependent Claim 27 words
The optical transmission modulation apparatus of claim 1, wherein the selectively variable refractive index portion of the supporting layer is in direct contact with the metal film.
Claim 4
Dependent Claim 27 words
The optical transmission modulation apparatus of claim 1, wherein the selectively variable refractive index portion of the supporting layer is in close proximity to the metal film.
Claim 5
Dependent Claim 60 words
The optical transmission modulation apparatus of claim 1, wherein the metal film is separated from the selectively variable refractive index portion of the supporting layer by a gap having a length and including a medium, the length of the gap being less than the depth at which surface plasmons of the metal film surface penetrate the medium in the gap.
Claim 6
Dependent Claim 29 words
The optical transmission modulation apparatus of claim 4, wherein the medium in the gap is selected from the group consisting of a vacuum, air, and optically transparent dielectric materials.
Claim 7
Dependent Claim 49 words
The optical transmission modulation apparatus of claim 1, wherein the selectively variable refractive index portion of the supporting layer comprises liquid crystal having an effective refractive index, wherein the effective refractive index of the liquid crystal is selectively variable by selectively applying an electric voltage to the liquid crystal.
Claim 8
Dependent Claim 68 words
The optical transmission modulation apparatus of claim 6, wherein the supporting layer further comprises a transparent conducting layer, and wherein the liquid crystal is provided between the transparent conducting layer and the metal film, such that the metal film comprises one electrode for selectively applying the voltage to the liquid crystal, and the transparent conducting layer comprises another electrode for selectively applying the voltage to the liquid crystal.
Claim 9
Dependent Claim 55 words
The optical transmission modulation apparatus of claim 7, wherein the supporting layer further comprises at least two liquid crystal alignment layers, a first liquid crystal alignment layer being provided between the transparent conducting layer and the liquid crystal, and a second liquid crystal alignment layer being provided between the liquid crystal and the metal film.
Claim 10
Dependent Claim 36 words
The optical transmission modulation apparatus of claim 1, wherein the selectively variable refractive index portion of the supporting layer comprises a material selected from the group consisting of a semiconductor layer and a polymer electro-optic film.
Claim 11
Dependent Claim 89 words
The optical transmission modulation apparatus of claim 1, further comprising an adjuster selectively adjusting the angle of the perforated metal film unit with respect to light incident on the perforated metal film unit, whereby adjusting the angle of the perforated metal film unit selectively controls the angle of incidence of the incident light so that, for a particular angle of incidence of the incident light with respect to the perforated metal film unit, light of only a predetermined range of wavelengths is transmitted through the perforated metal film unit.
Claim 12
Dependent Claim 54 words
The optical transmission modulation apparatus of claim 1, wherein the periodicity and diameter of the array of holes are selected so that, for a particular angle of incidence of the incident light with respect to the perforated metal film unit, light of only a predetermined color is transmitted through the perforated metal film unit.
Claim 13
Dependent Claim 17 words
The optical transmission modulation apparatus of claim 1, wherein the perforated metal film unit is substantially rigid.
Claim 14
Dependent Claim 17 words
The optical transmission modulation apparatus of claim 1, wherein the perforated metal film unit is substantially flexible.
Claim 15
Dependent Claim 120 words
A flat panel display having a plurality of display cells, the flat panel display comprising: a light source; a metal film having a periodic array of subwavelength-diameter holes provided therein; and a supporting layer, at least a portion of the supporting layer having a refractive index which is selectively variable for each display cell, the selectively variable refractive index portion being substantially adjacent to the metal film such that the metal film and the supporting layer comprise a perforated metal film unit, and wherein selective variation of the refractive index of the selectively variable refractive index portion modulates the intensity of light emitted by the light source which is transmitted through the perforated metal film unit for each display cell.
Claim 16
Dependent Claim 120 words
A flat panel display having a plurality of display cells, the flat panel display comprising: a light source; a metal film having a periodic array of subwavelength-diameter holes provided therein; and a supporting layer, at least a portion of the supporting layer having a refractive index which is selectively variable for each display cell, the selectively variable refractive index portion being substantially adjacent to the metal film such that the metal film and the supporting layer comprise a perforated metal film unit, and wherein selective variation of the refractive index of the selectively variable refractive index portion modulates the intensity of light emitted by the light source which is transmitted through the perforated metal film unit for each display cell.
Claim 17
Dependent Claim 26 words
The flat panel display of claim 14, wherein the selectively variable refractive index portion of the supporting layer is in direct contact with the metal film.
Claim 18
Dependent Claim 26 words
The flat panel display of claim 14, wherein the selectively variable refractive index portion of the supporting layer is in close proximity to the metal film.
Claim 19
Dependent Claim 59 words
The flat panel display of claim 14, wherein the metal film is separated from the selectively variable refractive index portion of the supporting layer by a gap having a length and including a medium, the length of the gap being less than the depth at which surface plasmons of the metal film surface penetrate the medium in the gap.
Claim 20
Dependent Claim 28 words
The flat panel display of claim 17, wherein the medium in the gap is selected from the group consisting of a vacuum, air, and optically transparent dielectric materials.
Claim 21
Dependent Claim 57 words
The flat panel display of claim 14, wherein the selectively variable refractive index portion of the supporting layer comprises liquid crystal having an effective refractive index, wherein the effective refractive index of the liquid crystal is selectively variable for each display cell by selectively applying an electric voltage to the liquid crystal corresponding to each display cell.
Claim 22
Dependent Claim 75 words
The flat panel display of claim 19, wherein the supporting layer further comprises a transparent conducting layer, and wherein the liquid crystal is provided between the transparent conducting layer and the metal film, such that the metal film comprises one electrode for selectively applying the voltage to the liquid crystal for each display cell, and the transparent conducting layer comprises another electrode for selectively applying the voltage to the liquid crystal for each display cell.
Claim 23
Dependent Claim 54 words
The flat panel display of claim 20, wherein the supporting layer further comprises at least two liquid crystal alignment layers, a first liquid crystal alignment layer being provided between the transparent conducting layer and the liquid crystal, and a second liquid crystal alignment layer being provided between the liquid crystal and the metal film.
Claim 24
Dependent Claim 35 words
The flat panel display of claim 14, wherein the selectively variable refractive index portion of the supporting layer comprises a material selected from the group consisting of a semiconductor layer and a polymer electro-optic film.
Claim 25
Dependent Claim 53 words
The flat panel display of claim 14, wherein the periodicity and diameter of the array of holes are selected so that, for a particular angle of incidence of the incident light with respect to the perforated metal film unit, light of only a predetermined range of wavelengths is transmitted through each display cell.
Claim 26
Dependent Claim 55 words
The flat panel display of claim 14, wherein the periodicity and diameter of the array of holes for each display cell are selected so that, for a particular angle of incidence of the incident light with respect to the perforated metal film unit, light of only a predetermined color is transmitted through each display cell.
Claim 27
Dependent Claim 25 words
The flat panel display of claim 24, wherein the predetermined color of light transmitted through each display cell is one of red, green and blue.
Claim 28
Dependent Claim 63 words
The flat panel display of claim 14, wherein the light source is an ultraviolet light source, and wherein the supporting layer further comprises at least one fluorescent dye, one fluorescent dye being provided for each display cell, such that the light transmitted through the metal film excites the fluorescent dye so as to emit light of a predetermined color from each display cell.
Claim 29
Dependent Claim 53 words
The flat panel display of claim 26, wherein the periodicity and diameter of the array of holes are the same for every display cell and are selected such that the light transmitted into the fluorescent dye of each display cell matches the incident ultraviolet wavelength of the fluorescent dye of that display cell.
Claim 30
Dependent Claim 16 words
The flat panel display of claim 14, wherein the perforated metal film unit is substantially rigid.
Claim 31
Dependent Claim 16 words
The flat panel display of claim 14, wherein the perforated metal film unit is substantially flexible.
Claim 32
Dependent Claim 137 words
A spatial light modulator having a plurality of cells and modulating the intensity of incident light as the light is transmitted through each cell of the modulator, the spatial light modulator comprising: a metal film having a periodic array of subwavelength-diameter holes provided therein; and a supporting layer, at least a portion of the supporting layer having a refractive index which is selectively variable for each cell, the selectively variable refractive index portion being substantially adjacent to the metal film such that the metal film and the supporting layer comprise a perforated metal film unit, and wherein selective variation of the refractive index of the selectively variable refractive index portion of the supporting layer modulates the intensity of light transmitted through the perforated metal film unit for each cell without substantially changing the direction of the light.
Claim 33
Dependent Claim 137 words
A spatial light modulator having a plurality of cells and modulating the intensity of incident light as the light is transmitted through each cell of the modulator, the spatial light modulator comprising: a metal film having a periodic array of subwavelength-diameter holes provided therein; and a supporting layer, at least a portion of the supporting layer having a refractive index which is selectively variable for each cell, the selectively variable refractive index portion being substantially adjacent to the metal film such that the metal film and the supporting layer comprise a perforated metal film unit, and wherein selective variation of the refractive index of the selectively variable refractive index portion of the supporting layer modulates the intensity of light transmitted through the perforated metal film unit for each cell without substantially changing the direction of the light.
Claim 34
Dependent Claim 26 words
The spatial light modulator of claim 30, wherein the selectively variable refractive index portion of the supporting layer is in direct contact with the metal film.
Claim 35
Dependent Claim 26 words
The spatial light modulator of claim 30, wherein the selectively variable refractive index portion of the supporting layer is in close proximity to the metal film.
Claim 36
Dependent Claim 59 words
The spatial light modulator of claim 30, wherein the metal film is separated from the selectively variable refractive index portion of the supporting layer by a gap having a length and including a medium, the length of the gap being less than the depth at which surface plasmons of the metal film surface penetrate the medium in the gap.
Claim 37
Dependent Claim 28 words
The spatial light modulator of claim 33, wherein the medium in the gap is selected from the group consisting of a vacuum, air, and optically transparent dielectric materials.
Claim 38
Dependent Claim 55 words
The spatial light modulator of claim 30, wherein the selectively variable refractive index portion of the supporting layer comprises liquid crystal having an effective refractive index, wherein the effective refractive index of the liquid crystal is selectively variable for each cell by selectively applying an electric voltage to the liquid crystal corresponding to each cell.
Claim 39
Dependent Claim 73 words
The spatial light modulator of claim 35, wherein the supporting layer further comprises a transparent conducting layer, and wherein the liquid crystal is provided between the transparent conducting layer and the metal film, such that the metal film comprises one electrode for selectively applying the voltage to the liquid crystal for each cell, and the transparent conducting layer comprises another electrode for selectively applying the voltage to the liquid crystal for each cell.
Claim 40
Dependent Claim 54 words
The spatial light modulator of claim 36, wherein the supporting layer further comprises at least two liquid crystal alignment layers, a first liquid crystal alignment layer being provided between the transparent conducting layer and the liquid crystal, and a second liquid crystal alignment layer being provided between the liquid crystal and the metal film.
Claim 41
Dependent Claim 35 words
The spatial light modulator of claim 30, wherein the selectively variable refractive index portion of the supporting layer comprises a material selected from the group consisting of a semiconductor layer and a polymer electro-optic film.
Claim 42
Dependent Claim 52 words
The spatial light modulator of claim 30, wherein the periodicity and diameter of the array of holes are selected so that, for a particular angle of incidence of the incident light with respect to the perforated metal film unit, light of only a predetermined range of wavelengths is transmitted through each cell.
Claim 43
Dependent Claim 50 words
The spatial light modulator of claim 30, wherein the periodicity and diameter of the array of holes are selected so that, for a particular angle of incidence of the incident light with respect to the perforated metal film unit, light of only a predetermined color is transmitted through each cell.
Claim 44
Dependent Claim 85 words
The spatial light modulator of claim 30, further comprising an adjuster selectively adjusting the angle of the perforated metal film unit with respect to light incident on the perforated metal film unit, whereby adjusting the angle of the perforated metal film unit selectively controls the angle of incidence of the incident light so that, for a particular angle of incidence of the incident light with respect to the perforated metal film unit, light of only a predetermined range of wavelengths is transmitted through each cell.
Claim 45
Dependent Claim 16 words
The spatial light modulator of claim 30, wherein the perforated metal film unit is substantially rigid.
Claim 46
Dependent Claim 16 words
The spatial light modulator of claim 30, wherein the perforated metal film unit is substantially flexible.
Claim 47
Dependent Claim 123 words
A tunable optical filter for modulating the intensity of incident light as the light is transmitted through the tunable optical filter, the tunable optical filter comprising: a metal film having a periodic array of subwavelength-diameter holes provided therein; and a supporting layer, at least a portion of the supporting layer having a selectively variable refractive index, the selectively variable refractive index portion being substantially adjacent to the metal film such that the metal film and the supporting layer comprise a perforated metal film unit, and wherein selective variation of the refractive index of the selectively variable refractive index portion of the supporting layer modulates the intensity of light transmitted through the perforated metal film unit without substantially changing the direction of the light.
Claim 48
Dependent Claim 123 words
A tunable optical filter for modulating the intensity of incident light as the light is transmitted through the tunable optical filter, the tunable optical filter comprising: a metal film having a periodic array of subwavelength-diameter holes provided therein; and a supporting layer, at least a portion of the supporting layer having a selectively variable refractive index, the selectively variable refractive index portion being substantially adjacent to the metal film such that the metal film and the supporting layer comprise a perforated metal film unit, and wherein selective variation of the refractive index of the selectively variable refractive index portion of the supporting layer modulates the intensity of light transmitted through the perforated metal film unit without substantially changing the direction of the light.
Claim 49
Dependent Claim 26 words
The tunable optical filter of claim 44, wherein the selectively variable refractive index portion of the supporting layer is in direct contact with the metal film.
Claim 50
Dependent Claim 26 words
The tunable optical filter of claim 44, wherein the selectively variable refractive index portion of the supporting layer is in close proximity to the metal film.
Claim 51
Dependent Claim 59 words
The tunable optical filter of claim 44, wherein the metal film is separated from the selectively variable refractive index portion of the supporting layer by a gap having a length and including a medium, the length of the gap being less than the depth at which surface plasmons of the metal film surface penetrate the medium in the gap.
Claim 52
Dependent Claim 28 words
The tunable optical filter of claim 47, wherein the medium in the gap is selected from the group consisting of a vacuum, air, and optically transparent dielectric materials.
Claim 53
Dependent Claim 48 words
The tunable optical filter of claim 44, wherein the selectively variable refractive index portion of the supporting layer comprises liquid crystal having an effective refractive index, wherein the effective refractive index of the liquid crystal is selectively variable by selectively applying an electric voltage to the liquid crystal.
Claim 54
Dependent Claim 67 words
The tunable optical filter of claim 49, wherein the supporting layer further comprises a transparent conducting layer, and wherein the liquid crystal is provided between the transparent conducting layer and the metal film, such that the metal film comprises one electrode for selectively applying the voltage to the liquid crystal, and the transparent conducting layer comprises another electrode for selectively applying the voltage to the liquid crystal.
Claim 55
Dependent Claim 54 words
The tunable optical filter of claim 50, wherein the supporting layer further comprises at least two liquid crystal alignment layers, a first liquid crystal alignment layer being provided between the transparent conducting layer and the liquid crystal, and a second liquid crystal alignment layer being provided between the liquid crystal and the metal film.
Claim 56
Dependent Claim 35 words
The tunable optical filter of claim 44, wherein the selectively variable refractive index portion of the supporting layer comprises a material selected from the group consisting of a semiconductor layer and a polymer electro-optic film.
Claim 57
Dependent Claim 55 words
The tunable optical filter of claim 44, wherein the periodicity and diameter of the array of holes are selected so that, for a particular angle of incidence of the incident light with respect to the perforated metal film unit, light of only a predetermined range of wavelengths is transmitted through the perforated metal film unit.
Claim 58
Dependent Claim 53 words
The tunable optical filter of claim 44, wherein the periodicity and diameter of the array of holes are selected so that, for a particular angle of incidence of the incident light with respect to the perforated metal film unit, light of only a predetermined color is transmitted through the perforated metal film unit.
Claim 59
Dependent Claim 73 words
The tunable optical filter of claim 44, further comprising an adjuster selectively adjusting the angle of the perforated metal film unit with respect to light incident on the perforated metal film unit, whereby adjusting the angle of the perforated metal film unit selectively controls the angle of incidence of the incident light so as to permit only light of a predetermined range of wavelengths to be transmitted through the perforated metal film unit.
Claim 60
Dependent Claim 16 words
The tunable optical filter of claim 44, wherein the perforated metal film unit is substantially rigid.
Claim 61
Dependent Claim 16 words
The tunable optical filter of claim 44, wherein the perforated metal film unit is substantially flexible.
Claim 62
Dependent Claim 139 words
A tunable optical filter having a plurality of cells and modulating the intensity of incident light as the light is transmitted through each cell of the tunable optical filter, the tunable optical filter comprising: a metal film having a periodic array of subwavelength-diarneter holes provided therein; and a supporting layer, at least a portion of the supporting layer having a refractive index which is selectively variable for each cell, the selectively variable refractive index portion being substantially adjacent to the metal film such that the metal film and the supporting layer comprise a perforated metal film unit, and wherein selective variation of the selectively variable refractive index portion of the refractive index of the supporting layer modulates the intensity of light transmitted through the perforated metal film unit for each cell without substantially changing the direction of the light.
Claim 63
Dependent Claim 139 words
A tunable optical filter having a plurality of cells and modulating the intensity of incident light as the light is transmitted through each cell of the tunable optical filter, the tunable optical filter comprising: a metal film having a periodic array of subwavelength-diarneter holes provided therein; and a supporting layer, at least a portion of the supporting layer having a refractive index which is selectively variable for each cell, the selectively variable refractive index portion being substantially adjacent to the metal film such that the metal film and the supporting layer comprise a perforated metal film unit, and wherein selective variation of the selectively variable refractive index portion of the refractive index of the supporting layer modulates the intensity of light transmitted through the perforated metal film unit for each cell without substantially changing the direction of the light.
Claim 64
Dependent Claim 26 words
The tunable optical filter of claim 58, wherein the selectively variable refractive index portion of the supporting layer is in direct contact with the metal film.
Claim 65
Dependent Claim 26 words
The tunable optical filter of claim 58, wherein the selectively variable refractive index portion of the supporting layer is in close proximity to the metal film.
Claim 66
Dependent Claim 59 words
The tunable optical filter of claim 58, wherein the metal film is separated from the selectively variable refractive index portion of the supporting layer by a gap having a length and including a medium, the length of the gap being less than the depth at which surface plasmons of the metal film surface penetrate the medium in the gap.
Claim 67
Dependent Claim 28 words
The tunable optical filter of claim 61, wherein the medium in the gap is selected from the group consisting of a vacuum, air, and optically transparent dielectric materials.
Claim 68
Dependent Claim 55 words
The tunable optical filter of claim 58, wherein the selectively variable refractive index portion of the supporting layer comprises liquid crystal having an effective refractive index, wherein the effective refractive index of the liquid crystal is selectively variable for each cell by selectively applying an electric voltage to the liquid crystal corresponding to each cell.
Claim 69
Dependent Claim 73 words
The tunable optical filter of claim 63, wherein the supporting layer further comprises a transparent conducting layer, and wherein the liquid crystal is provided between the transparent conducting layer and the metal film, such that the metal film comprises one electrode for selectively applying the voltage to the liquid crystal for each cell, and the transparent conducting layer comprises another electrode for selectively applying the voltage to the liquid crystal for each cell.
Claim 70
Dependent Claim 54 words
The tunable optical filter of claim 64, wherein the supporting layer further comprises at least two liquid crystal alignment layers, a first liquid crystal alignment layer being provided between the transparent conducting layer and the liquid crystal, and a second liquid crystal alignment layer being provided between the liquid crystal and the metal film.
Claim 71
Dependent Claim 35 words
The tunable optical filter of claim 58, wherein the selectively variable refractive index portion of the supporting layer comprises a material selected from the group consisting of a semiconductor layer and a polymer electro-optic film.
Claim 72
Dependent Claim 52 words
The tunable optical filter of claim 58, wherein the periodicity and diameter of the array of holes are selected so that, for a particular angle of incidence of the incident light with respect to the perforated metal film unit, light of only a predetermined range of wavelengths is transmitted through each cell.
Claim 73
Dependent Claim 50 words
The tunable optical filter of claim 58, wherein the periodicity and diameter of the array of holes are selected so that, for a particular angle of incidence of the incident light with respect to the perforated metal film unit, light of only a predetermined color is transmitted through each cell.
Claim 74
Dependent Claim 70 words
The tunable optical filter of claim 58, further comprising an adjuster selectively adjusting the angle of the perforated metal film unit with respect to light incident on the perforated metal film unit, whereby adjusting the angle of the perforated metal film unit selectively controls the angle of incidence of the incident light so as to permit only light of a predetermined range of wavelengths to be transmitted through each cell.
Claim 75
Dependent Claim 16 words
The tunable optical filter of claim 58, wherein the perforated metal film unit is substantially rigid.
Claim 76
Dependent Claim 16 words
The tunable optical filter of claim 58, wherein the perforated metal film unit is substantially flexible.

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 2003-03-21 2003-09-20 2004-03-21 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 2007-03-21 2007-09-20 2008-03-21 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2011-03-21 2011-09-20 2012-03-21 $7700.00 Window Closed / Lapsed

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