US6020624A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Semiconductor package with bi-substrate die
Assignee: Micron Technology Inc
•
Filing: 1998-04-01
•
Granted: 2000-02-01
•
Expires: 2018-04-01
Abstract
Abstract A method for forming an interconnect for semiconductor devices is provided. The interconnect includes raised contact structures covered with a conductive layer and having penetrating projections for penetrating contacts for the semiconductor devices. In an illustrative embodiment, the interconnect can be used to form a bi-substrate die. An interconnect substrate for the bi-substrate die includes control and logic circuitry and a memory substrate for the bi-substrate die includes a memory array. The interconnect can also be used to establish an electrical connection to microscopic contacts formed on a conventional die. In addition, the interconnect can be formed with three dimensional micro structures for contacting the microscopic contacts. Still further, the interconnect can be formed as wafer interconnect for electrically contacting dice contained on a wafer or for stacking multiple wafers.
Inventors
- 👤 Alan G. Wood
- 👤 Salman Akram
- 👤 Warren M. Farnworth
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 09:18
CPC Classifications
H; H05; H05K; H05K3/00; H05K3/40; H05K3/4007; G; G01; G01R; G01R1/00; G01R1/02; G01R1/04; G01R1/0408; G01R1/0433; G01R1/0441; G01R1/0466; G01R1/0483; H10; H10P; H10P72/00; H10P72/70; H10P72/74; H10P74/00; H10P74/23; H10W; H10W70/00; H10W70/60; H10W70/62; H10W70/65; H10W70/67; H10W70/68; H10W90/00; H10W90/701; H10W99/00; G01R1/06; G01R1/067; G01R1/06711; G01R1/06733; G01R1/06738; G01R1/073; G01R1/07307; G01R1/0735; G01R3/00; G01R31/00; G01R31/28; G01R31/282; G01R31/2831; G01R31/2851; G01R31/2855; G01R31/286; G01R31/2863; H05K2201/00; H05K2201/01; H05K2201/0104; H05K2201/0133; H05K2201/03; H05K2201/0332; H05K2201/0335; H05K2201/0347; H05K2201/0364; H05K2201/0367; H05K2201/0388; H05K2201/0394; H05K2201/09; H05K2201/09209; H05K2201/09372; H05K2201/09481; H05K2201/095; H05K2201/09563; H05K2203/00; H05K2203/03; H05K2203/0307; H05K2203/07; H05K2203/0703; H05K2203/0723; H05K3/0058; H05K3/0067; H05K3/42; H05K3/423; H10W70/654; H10W70/655; H10W70/681; H10W72/00; H10W72/071; H10W72/075; H10W72/07502; H10W72/07504; H10W72/07531; H10W72/07532; H10W72/07533; H10W72/50; H10W72/531; H10W72/536; H10W72/5363; H10W72/551; H10W72/552; H10W72/5522; H10W72/5524; H10W72/851; H10W72/853; H10W72/859; H10W74/00; H10W90/20; H10W90/24; H10W90/721; H10W90/722; H10W90/751; H10W90/756
Claims Analysis
Total Claims: 30
Claim 1
Independent Claim
113 words
A semiconductor package comprising: a first substrate comprising first circuitry and a plurality of raised contact structures in electrical communication with the first circuitry, the contact structures comprising planar surfaces, projections on the planar surfaces, and conductive layers at least partially covering the projections; and a second substrate comprising a plurality of semiconductor devices and a plurality of contacts in electrical communication with the devices; the first substrate bonded to the second substrate with the contact structures and the contacts in electrical contact, and with the projections penetrating the contacts to limited penetration depths while the planar surfaces limit further penetration and provide a separation between the first substrate and the second substrate.
Claim 2
Dependent Claim
113 words
A semiconductor package comprising: a first substrate comprising first circuitry and a plurality of raised contact structures in electrical communication with the first circuitry, the contact structures comprising planar surfaces, projections on the planar surfaces, and conductive layers at least partially covering the projections; and a second substrate comprising a plurality of semiconductor devices and a plurality of contacts in electrical communication with the devices; the first substrate bonded to the second substrate with the contact structures and the contacts in electrical contact, and with the projections penetrating the contacts to limited penetration depths while the planar surfaces limit further penetration and provide a separation between the first substrate and the second substrate.
Claim 3
Dependent Claim
20 words
The package of claim 1 wherein the conductive layers comprise metal layers bonded to the contacts on the second substrate.
Claim 4
Dependent Claim
21 words
The package of claim 1 wherein the first circuitry comprises a plurality of semiconductor devices configured as control and logic circuitry.
Claim 5
Dependent Claim
16 words
The package of claim 1 wherein the semiconductor devices on the second substrate comprise memory devices.
Claim 6
Dependent Claim
35 words
The package of claim 1 wherein the first substrate comprises a plurality of pads in electrical communication with the conductive layers and wire bonded to a portion of a leadframe attached to the first substrate.
Claim 7
Dependent Claim
33 words
The package of claim 1 further comprising a portion of a leadframe bonded to the first substrate and an encapsulant at least partially covering the portion, the first substrate and the second substrate.
Claim 8
Dependent Claim
33 words
The package of claim 1 further comprising a plurality of pads on the first substrate in electrical communication with the conductive layers and a plurality of leads in electrical communication with the pads.
Claim 9
Dependent Claim
113 words
A semiconductor package comprising: an interconnect substrate comprising control circuitry, and a plurality of raised contact structures in electrical communication with the control circuitry, the contact structures comprising planar surfaces, projections on the surfaces, and conductive layers at least partially covering the projections; and a memory substrate bonded to the interconnect substrate comprising a plurality of semiconductor devices and a plurality of contacts in electrical communication with the devices; the conductive layers on the contact structures bonded to the contacts on the memory substrate in electrical communication therewith, with the projections penetrating the contacts while the planar surfaces limit further penetration and provide a separation between the interconnect substrate and the memory substrate.
Claim 10
Dependent Claim
113 words
A semiconductor package comprising: an interconnect substrate comprising control circuitry, and a plurality of raised contact structures in electrical communication with the control circuitry, the contact structures comprising planar surfaces, projections on the surfaces, and conductive layers at least partially covering the projections; and a memory substrate bonded to the interconnect substrate comprising a plurality of semiconductor devices and a plurality of contacts in electrical communication with the devices; the conductive layers on the contact structures bonded to the contacts on the memory substrate in electrical communication therewith, with the projections penetrating the contacts while the planar surfaces limit further penetration and provide a separation between the interconnect substrate and the memory substrate.
Claim 11
Dependent Claim
17 words
The package of claim 8 further comprising an encapsulant covering the interconnect substrate and the memory substrate.
Claim 12
Dependent Claim
19 words
The package of claim 8 further comprising a plurality of external leads in electrical communication with the conductive layers.
Claim 13
Dependent Claim
18 words
The package of claim 8 wherein the interconnect substrate, the contact structures and the memory substrate comprise silicon.
Claim 14
Dependent Claim
14 words
The package of claim 8 wherein each contact structure comprises a plurality of projections.
Claim 15
Dependent Claim
19 words
The package of claim 8 wherein the memory substrate comprises a semiconductor wafer comprising a plurality of semiconductor dice.
Claim 16
Dependent Claim
119 words
A semiconductor package comprising: a plurality of external leads; an interconnect substrate comprising control circuitry, a plurality of contact structures in electrical communication with the control circuitry and the external leads, the contact structures comprising planar surfaces, projections on the planar surfaces, and conductive layers at least partially covering the projections; a memory substrate comprising a plurality of contacts and a plurality of semiconductor memory devices in electrical communication with the contacts, the memory substrate bonded to the interconnect substrate with the projections penetrating the contacts while the planar surfaces limit further penetration and maintain a spacing between the memory substrate and the interconnect substrate; and an encapsulant at least partially covering the interconnect substrate and the memory substrate.
Claim 17
Dependent Claim
119 words
A semiconductor package comprising: a plurality of external leads; an interconnect substrate comprising control circuitry, a plurality of contact structures in electrical communication with the control circuitry and the external leads, the contact structures comprising planar surfaces, projections on the planar surfaces, and conductive layers at least partially covering the projections; a memory substrate comprising a plurality of contacts and a plurality of semiconductor memory devices in electrical communication with the contacts, the memory substrate bonded to the interconnect substrate with the projections penetrating the contacts while the planar surfaces limit further penetration and maintain a spacing between the memory substrate and the interconnect substrate; and an encapsulant at least partially covering the interconnect substrate and the memory substrate.
Claim 18
Dependent Claim
16 words
The package of claim 14 wherein the external contacts comprise lead fingers of a lead frame.
Claim 19
Dependent Claim
15 words
The package of claim 14 wherein the control circuitry comprises a plurality of semiconductor devices.
Claim 20
Dependent Claim
17 words
The package of claim 14 wherein the interconnect substrate comprises silicon and the conductive layers comprise metal.
Claim 21
Dependent Claim
19 words
The package of claim 14 wherein the memory substrate comprises a semiconductor wafer comprising a plurality of semiconductor dice.
Claim 22
Dependent Claim
132 words
A semiconductor package comprising: a portion of a lead frame comprising a plurality of external leads; an interconnect substrate attached to the portion of the lead frame, the interconnect substrate comprising control circuitry, and a plurality of contact structures in electrical communication with the control circuitry and with the external leads, the contact structures comprising planar surfaces, projections on the planar surfaces, and conductive layers at least partially covering the planar surfaces; a memory substrate comprising a plurality of semiconductor devices and a plurality of contacts in electrical communication with the devices, the contacts on the memory substrate bonded to the conductive layers on the contact structures with the projections penetrating the contacts and the surfaces limiting penetration; and an encapsulant at least partially covering the interconnect substrate and the memory substrate.
Claim 23
Dependent Claim
132 words
A semiconductor package comprising: a portion of a lead frame comprising a plurality of external leads; an interconnect substrate attached to the portion of the lead frame, the interconnect substrate comprising control circuitry, and a plurality of contact structures in electrical communication with the control circuitry and with the external leads, the contact structures comprising planar surfaces, projections on the planar surfaces, and conductive layers at least partially covering the planar surfaces; a memory substrate comprising a plurality of semiconductor devices and a plurality of contacts in electrical communication with the devices, the contacts on the memory substrate bonded to the conductive layers on the contact structures with the projections penetrating the contacts and the surfaces limiting penetration; and an encapsulant at least partially covering the interconnect substrate and the memory substrate.
Claim 24
Dependent Claim
15 words
The package of claim 19 wherein the interconnect substrate and the contact structures comprise silicon.
Claim 25
Dependent Claim
31 words
The package of claim 20 wherein the interconnect substrate comprises a plurality of pads in electrical communication with the contact structures and wire bonded to the portion of the lead frame.
Claim 26
Dependent Claim
15 words
The package of claim 20 wherein each contact structure comprises a plurality of penetrating projections.
Claim 27
Dependent Claim
18 words
The package of claim 20 wherein each contact structure comprises a plurality of penetrating projections comprising elongated blades.
Claim 28
Dependent Claim
122 words
A semiconductor package comprising: an interconnect substrate comprising first circuitry, a plurality of contact structures in electrical communication with the first circuitry, and a plurality of pads in electrical communication with the contact structures configured for electrical communication with outside circuitry, the contact structures comprising planar surfaces, projections on the planar surfaces, and conductive layers at least partially covering the projections; and a semiconductor wafer comprising a plurality of semiconductor dice, each die comprising a plurality of contacts and semiconductor devices in electrical communication with the contacts, the wafer bonded to the interconnect substrate with the projections on the contact structures penetrating the contacts while the planar surfaces limit further penetration and maintain a spacing between the wafer and the interconnect substrate.
Claim 29
Dependent Claim
122 words
A semiconductor package comprising: an interconnect substrate comprising first circuitry, a plurality of contact structures in electrical communication with the first circuitry, and a plurality of pads in electrical communication with the contact structures configured for electrical communication with outside circuitry, the contact structures comprising planar surfaces, projections on the planar surfaces, and conductive layers at least partially covering the projections; and a semiconductor wafer comprising a plurality of semiconductor dice, each die comprising a plurality of contacts and semiconductor devices in electrical communication with the contacts, the wafer bonded to the interconnect substrate with the projections on the contact structures penetrating the contacts while the planar surfaces limit further penetration and maintain a spacing between the wafer and the interconnect substrate.
Claim 30
Dependent Claim
27 words
The package of claim 24 further comprising a second interconnect substrate and a second wafer bonded to the interconnect substrate and the wafer to form a stack.
References Cited (Backward Citations)
US5332922A
Cited
US5302891A
Cited
US5408190A
Cited
US5716218A
Cited
US5686317A
Cited
US5607818A
Cited
US5585282A
Cited
US5541525A
Cited
US5578526A
Cited
US5440241A
Cited
US5637907A
Cited
US5483174A
Cited
US5523697A
Cited
US5483741A
Cited
US5702984A
Cited
US5719438A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2003-01-31 | 2003-08-02 | 2004-02-01 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2007-01-31 | 2007-08-02 | 2008-02-01 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2011-01-31 | 2011-08-02 | 2012-02-01 | $7700.00 | Window Closed / Lapsed |