US5993302A — Carrier head with a removable retaining ring for …

Claim 1

Independent Claim 70 words

A carrier heads comprising: a housing having a recess; a substrate-receiving surface; a retaining ring positionable in the recess to surround the substrate-receiving surface; and a seal to engage the retaining ring to form a chamber between the housing and the retaining ring when the retaining ring is positioned in the recess, the retaining ring being releasable and separable from the housing by control of a pressure in the chamber.

Claim 2

Dependent Claim 70 words

A carrier heads comprising: a housing having a recess; a substrate-receiving surface; a retaining ring positionable in the recess to surround the substrate-receiving surface; and a seal to engage the retaining ring to form a chamber between the housing and the retaining ring when the retaining ring is positioned in the recess, the retaining ring being releasable and separable from the housing by control of a pressure in the chamber.

Claim 3

Dependent Claim 24 words

The carrier head of claim 1 wherein the substrate-receiving surface comprises a flexible membrane coupled to the housing to form a second chamber therebetween.

Claim 4

Dependent Claim 14 words

The carrier head of claim 1 wherein the seal comprises at least one O-ring.

Claim 5

Dependent Claim 33 words

The carrier head of claim 1 wherein the seal includes first and second inner O-rings, and first and second outer O-rings, and wherein the first O-rings are less compressible than the second O-rings.

Claim 6

Dependent Claim 52 words

The carrier head of claim 4 wherein the first inner O-ring and the first outer O-ring contact inner and outer surfaces of the retaining ring, respectively, and the second inner O-ring and the second outer O-ring are positioned between the housing and the first inner O-ring and the first outer O-ring, respectively.

Claim 7

Dependent Claim 67 words

The carrier head of claim 5 wherein the housing includes a main body portion and a substantially annular flange surrounding the main body portion to form the recess, and the inner O-rings are substantially positioned in an inner indentation in an outer surface of the main body portion and the outer O-rings are substantially positioned in an annular outer indentation in an inner surface of the flange.

Claim 8

Dependent Claim 27 words

The carrier head of claim 1 wherein the housing includes a main body portion and a substantially annular flange surrounding the main body to form the recess.

Claim 9

Dependent Claim 26 words

The carrier head of claim 7 wherein the main body portion includes an outwardly-projecting annular rim which contacts a portion of the retaining ring during polishing.

Claim 10

Dependent Claim 15 words

The carrier head of claim 1 wherein the retaining ring includes a tapered top surface.

Claim 11

Dependent Claim 19 words

The carrier head of claim 1 wherein the recess is substantially annular and the retaining ring is substantially ring-shaped.

Claim 12

Dependent Claim 18 words

The carrier head of claim 1 wherein the retaining ring is not mechanically secured to the carrier head.

Claim 13

Dependent Claim 74 words

A carrier heads comprising: a housing having a recess; a substrate-receiving surface; a retaining ring releasably positionable in the recess to surround the substrate-receiving surface; and an evacuable chamber formed between the housing and the retaining ring when the retaining ring is positioned in the recess, wherein a pressure within the chamber may be controlled to maintain the retaining ring in the recess or to release and separate the retaining ring from the housing.

Claim 14

Dependent Claim 74 words

A carrier heads comprising: a housing having a recess; a substrate-receiving surface; a retaining ring releasably positionable in the recess to surround the substrate-receiving surface; and an evacuable chamber formed between the housing and the retaining ring when the retaining ring is positioned in the recess, wherein a pressure within the chamber may be controlled to maintain the retaining ring in the recess or to release and separate the retaining ring from the housing.

Claim 15

Independent Claim 95 words

A method of loading a substrate into a carrier head, comprising: positioning a carrier head over a support surface, the carrier head having a releasable retaining ring and a substrate mounting surface; releasing the retaining ring from the carrier head so that the retaining ring is supported on the support surface; moving the carrier head away from the support surface; positioning a substrate into a recess defined by the retaining ring and the support surface; and moving the carrier head to a position such that the substrate mounting surface contacts the substrate within the recess.

Claim 16

Independent Claim 95 words

A method of loading a substrate into a carrier head, comprising: positioning a carrier head over a support surface, the carrier head having a releasable retaining ring and a substrate mounting surface; releasing the retaining ring from the carrier head so that the retaining ring is supported on the support surface; moving the carrier head away from the support surface; positioning a substrate into a recess defined by the retaining ring and the support surface; and moving the carrier head to a position such that the substrate mounting surface contacts the substrate within the recess.

Claim 17

Dependent Claim 13 words

The method of claim 13 wherein the support surface comprises a polishing pad.

Claim 18

Dependent Claim 16 words

The method of claim 14 further comprising loading the substrate against the polishing pad during polishing.

Claim 19

Dependent Claim 17 words

The method of claim 15 further comprising loading the retaining ring against the polishing pad during polishing.

Claim 20

Dependent Claim 15 words

The method of claim 13 wherein the support surface is located in a transfer station.

Claim 21

Dependent Claim 24 words

The method of claim 17 further comprising vacuum chucking the substrate to the carrier head and moving the carrier head to a polishing station.

Claim 22

Dependent Claim 24 words

The method of claim 17 further comprising vacuum-chucking the retaining ring to the carrier head and moving the carrier head to a polishing station.

Claim 23

Dependent Claim 26 words

The method of claim 13 wherein the substrate is centered by a tapered upper surface of the retaining ring as the substrate descends into the recess.

Claim 24

Dependent Claim 34 words

The method of claim 13 wherein moving the carrier head to a position such that the substrate mounting surface contacts the substrate includes positioning the retaining ring into a recess in the carrier head.

Claim 25

Dependent Claim 31 words

The method of claim 13 wherein positioning the substrate in the recess includes locating the substrate over the recess using a robot arm and releasing the substrate from the robot arm.

Claim 26

Dependent Claim 33 words

The method of claim 13 wherein releasing the retaining ring includes increasing a pressure in a chamber between the retaining ring and a housing to force the retaining ring from the carrier head.

Claim 27

Dependent Claim 24 words

The method of claim 13 wherein releasing the retaining ring includes discontinuing a vacuum-chucking operation which holds the retaining ring to the carrier head.

Claim 28

Dependent Claim 89 words

A chemical mechanical polishing apparatus, comprising: a movable polishing pad; a carrier head to position a substrate on the polishing pad, the carrier head including a housing, a substrate-receiving surface, a retaining ring positionable to surround the substrate-receiving surface, and a seal to engage the retaining ring to form a chamber between the housing and the retaining ring, the retaining ring being releasable and separable from the housing by control of a pressure in the chamber; and a drive shaft connected to the housing to rotate the carrier head.

Claim 29

Dependent Claim 89 words

A chemical mechanical polishing apparatus, comprising: a movable polishing pad; a carrier head to position a substrate on the polishing pad, the carrier head including a housing, a substrate-receiving surface, a retaining ring positionable to surround the substrate-receiving surface, and a seal to engage the retaining ring to form a chamber between the housing and the retaining ring, the retaining ring being releasable and separable from the housing by control of a pressure in the chamber; and a drive shaft connected to the housing to rotate the carrier head.

Claim 30

Dependent Claim 19 words

The apparatus of claim 25 further comprising a pump fluidly connected to the chamber to control the pressure therein.

Claim 31

Dependent Claim 85 words

A carrier heads comprising: a housing including a main body portion and a substantially annular flange portion surrounding the main body portion to define a recess, the main body portion having an outwardly-projecting annular rim; a substrate-receiving surface; a laterally movable retaining ring positionable in the recess so that the retaining ring surrounds the substrate-receiving surface and an inner surface of the retaining ring contacts the annular rim during polishing; and a seal to form a pressurizable chamber between the housing and the retaining ring.

Claim 32

Dependent Claim 85 words

A carrier heads comprising: a housing including a main body portion and a substantially annular flange portion surrounding the main body portion to define a recess, the main body portion having an outwardly-projecting annular rim; a substrate-receiving surface; a laterally movable retaining ring positionable in the recess so that the retaining ring surrounds the substrate-receiving surface and an inner surface of the retaining ring contacts the annular rim during polishing; and a seal to form a pressurizable chamber between the housing and the retaining ring.

Claim 33

Dependent Claim 17 words

The carrier head of claim 27 wherein the annular rim is adjacent an opening to the recess.

Claim 34

Dependent Claim 28 words

The carrier head of claim 27 wherein, during polishing, the annular rim is located sufficiently close to a polishing surface to reduce torque applied to the retaining ring.

Claim 35

Dependent Claim 64 words

A carrier heads comprising: a housing; a substrate-receiving surface; a retaining ring positionable to surround the substrate-receiving surface and releasably securable to the housing; and a seal to form an evacuable chamber between the housing and the retaining ring when the retaining ring is secured to the housing, the retaining ring being separable from the housing by control of a pressure in the chamber.

Claim 36

Dependent Claim 64 words

A carrier heads comprising: a housing; a substrate-receiving surface; a retaining ring positionable to surround the substrate-receiving surface and releasably securable to the housing; and a seal to form an evacuable chamber between the housing and the retaining ring when the retaining ring is secured to the housing, the retaining ring being separable from the housing by control of a pressure in the chamber.

Claim 37

Dependent Claim 49 words

A retaining ring, comprising: a bottom surface to contact a polishing pad; an inner surface to hold a substrate beneath a carrier head; and a tapered top surface including an inwardly sloped portion to guide the substrate into a recess defined by the inner surface and the polishing pad.

Claim 38

Dependent Claim 49 words

A retaining ring, comprising: a bottom surface to contact a polishing pad; an inner surface to hold a substrate beneath a carrier head; and a tapered top surface including an inwardly sloped portion to guide the substrate into a recess defined by the inner surface and the polishing pad.

Claim 39

Dependent Claim 56 words

A carrier head, comprising: a housing; a substrate-receiving surface; a retaining ring positionable to surround the substrate-receiving surface; and a seal to engage the retaining ring to form a pressurizable chamber between the housing and the retaining ring, the retaining ring being releasable and separable from the housing by control of a pressure in the chamber.

Claim 40

Dependent Claim 56 words

A carrier head, comprising: a housing; a substrate-receiving surface; a retaining ring positionable to surround the substrate-receiving surface; and a seal to engage the retaining ring to form a pressurizable chamber between the housing and the retaining ring, the retaining ring being releasable and separable from the housing by control of a pressure in the chamber.

Annuity Stage	Window Opens	Payment Deadline	Surcharge Period Until	Estimated Fee	Status
3.5 Years (Year 4)	2002-11-29	2003-05-31	2003-11-30	$2000.00	Window Closed / Lapsed
7.5 Years (Year 8)	2006-11-29	2007-05-31	2007-11-30	$3760.00	Window Closed / Lapsed
11.5 Years (Year 12)	2010-11-29	2011-05-31	2011-11-30	$7700.00	Window Closed / Lapsed

Carrier head with a removable retaining ring for a chemical mechanical polishing apparatus

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