US5409348A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Substrate transfer method
Assignee: Tokyo Electron Ltd
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Filing: 1993-05-14
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Granted: 1995-04-25
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Expires: 2013-05-14
Abstract
Abstract A method of transferring a substrate with a transfer unit including at least one fork having a substrate support portion, and a sensor arm having a sensor mounted thereon, for transferring the substrate between a substrate holding member and a substrate support member, includes the steps of arranging a position detecting plate on a rest portion of the substrate support member, obtaining position information of the position detecting plate by detecting the position of the position detecting plate with respect to the reference position of the transfer unit by the sensor arm, and transferring the substrate by controlling the position of the transfer unit on the basis of the position information.
Inventors
- 👤 Fujio Suzuki
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-07 12:43
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/06; H10P72/0606; H10P72/0608; Y; Y10; Y10S; Y10S414/00; Y10S414/135; Y10S414/137
Claims Analysis
Total Claims: 16
Claim 1
Independent Claim
147 words
A method of transferring a substrate with a transfer unit comprising at least one fork having a substrate support portion, and a sensor arm having a sensor mounted thereon, for transferring the substrate between a substrate holding member and a substrate support member, comprising the steps of: arranging a position detecting plate on a rest portion of said substrate support member; obtaining position information of said position detecting plate by detecting a position of said position detecting plate with respect to a reference position of said transfer unit by said sensor arm; and transferring the substrate by controlling the position of said transfer unit on the basis of the position information; wherein said sensor arm has first and second sensors mounted thereon, said first sensor detects a circumferential position of said position detecting plate, and said second sensor detects a level position of said position detecting plate.
Claim 2
Independent Claim
147 words
A method of transferring a substrate with a transfer unit comprising at least one fork having a substrate support portion, and a sensor arm having a sensor mounted thereon, for transferring the substrate between a substrate holding member and a substrate support member, comprising the steps of: arranging a position detecting plate on a rest portion of said substrate support member; obtaining position information of said position detecting plate by detecting a position of said position detecting plate with respect to a reference position of said transfer unit by said sensor arm; and transferring the substrate by controlling the position of said transfer unit on the basis of the position information; wherein said sensor arm has first and second sensors mounted thereon, said first sensor detects a circumferential position of said position detecting plate, and said second sensor detects a level position of said position detecting plate.
Claim 3
Dependent Claim
24 words
A method according to claim 1, wherein the position information is obtained on the basis of information detected by said first and second sensors.
Claim 4
Dependent Claim
28 words
A method according to claim 1, wherein the position information includes circumferential position information, forward-movement direction information, forward-movement distance information, and level information of said position detecting plate.
Claim 5
Dependent Claim
37 words
A method according to claim 1, wherein the position of said transfer unit is controlled such that the substrate can be appropriately placed on said rest portion of said substrate support member based on the position information.
Claim 6
Dependent Claim
25 words
A method according to claim 4, wherein the position of said transfer unit is determined by swinging and horizontally and vertically moving said transfer unit.
Claim 7
Dependent Claim
33 words
A method according to claim 1, wherein said substrate support member is a wafer boat, and the substrate is one selected from the group consisting of a semiconductor wafer and an LCD substrate.
Claim 8
Dependent Claim
25 words
A method according to claim 1, wherein the position of said transfer unit is controlled each time said fork of said transfer unit is operated.
Claim 9
Independent Claim
173 words
A method of transferring a substrate with a transfer unit comprising at least one fork having a substrate support portion, and a sensor arm having a sensor mounted thereon, for transferring the substrate between a substrate holding member and a substrate support member, comprising the steps of: arranging at least two position detecting plates on a rest portion of said substrate support member; obtaining position information of said position detecting plates by detecting positions of said position detecting plates with respect to a reference position of said transfer unit by said sensor arm; specifying an installation state of said substrate support member based on the position information of said position detecting plates; and transferring the substrate by controlling the position of said transfer unit on the basis of a specified installation state of said substrate support member; wherein said sensor arm has first and second sensors mounted thereon, said first sensor detects central positions and circumferential positions of said position detecting plates, and said second sensor detects levels of said position detecting plates.
Claim 10
Independent Claim
173 words
A method of transferring a substrate with a transfer unit comprising at least one fork having a substrate support portion, and a sensor arm having a sensor mounted thereon, for transferring the substrate between a substrate holding member and a substrate support member, comprising the steps of: arranging at least two position detecting plates on a rest portion of said substrate support member; obtaining position information of said position detecting plates by detecting positions of said position detecting plates with respect to a reference position of said transfer unit by said sensor arm; specifying an installation state of said substrate support member based on the position information of said position detecting plates; and transferring the substrate by controlling the position of said transfer unit on the basis of a specified installation state of said substrate support member; wherein said sensor arm has first and second sensors mounted thereon, said first sensor detects central positions and circumferential positions of said position detecting plates, and said second sensor detects levels of said position detecting plates.
Claim 11
Dependent Claim
24 words
A method according to claim 8, wherein the position information is obtained on the basis of information detected by said first and second sensors.
Claim 12
Dependent Claim
28 words
A method according to claim 8, wherein the position information includes circumferential position information, forward-movement direction information, forward-movement distance information, and level information of said position detecting plates.
Claim 13
Dependent Claim
37 words
A method according to claim 8, wherein the position of said transfer unit is controlled such that the substrate can be appropriately placed on said rest portion of said substrate support member based on the position information.
Claim 14
Dependent Claim
25 words
A method according to claim 11, wherein the position of said transfer unit is determined by swinging and horizontally and vertically moving said transfer unit.
Claim 15
Dependent Claim
33 words
A method according to claim 8, wherein said substrate support member is a wafer boat, and the substrate is one selected from the group consisting of a semiconductor wafer and an LCD substrate.
Claim 16
Dependent Claim
25 words
A method according to claim 8, wherein the position of said transfer unit is controlled each time said fork of said transfer unit is operated.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1998-04-24 | 1998-10-24 | 1999-04-25 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2002-04-24 | 2002-10-24 | 2003-04-25 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2006-04-24 | 2006-10-24 | 2007-04-25 | $7700.00 | Window Closed / Lapsed |