US4603897A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Vacuum pickup apparatus
Assignee: PROCONICS INTERNATIONAL Inc WOBURN MA A CORP
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Filing: 1983-05-20
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Granted: 1986-08-05
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Expires: 2003-05-20
Abstract
Abstract Apparatus that uses a suction engagement element to transport semiconductor wafers between processing boats and detects when suction engagement has not occurred despite the engagement element having been moved toward a wafer a distance sufficient to enable said engagement, and then adjusts the position of the engagement element relative to the object (e.g., by backing up and trying again or by pivoting the engagement element) to facilitate the suction engagement.
Inventors
- 👤 Richard F. Foulke
- 👤 Kenneth A. Winchell
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-26 12:47
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/30; H10P72/32; H10P72/3206; H10P72/70; H10P72/78; H10W; H10W42/00; Y; Y10; Y10S; Y10S294/00; Y10S294/907; Y10S414/00; Y10S414/135; Y10S414/137; Y10S414/138; Y10S414/141
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
226 words
Apparatus for transporting an object, said apparatus comprising an engagement element with a plurality of openings in a flat surface, a first said opening being on one side of an axis passing through said element, and a second said opening being on another side of said axis, suction means for providing a below-atmospheric pressure at said openings for the purpose of adhering said object to said engagement element, transport means for transporting said engagement element relative to said object to bring said openings close enough to a flat engagement surface of said object to enable suction engagement of said object at said openings, said transport means including means for rotating said engagement element about an axis parallel to said flat surface, position detection means for sensing the relative position of said object and said engagement element, sensing means for sensing suction engagement at said openings, and processing means including engagement-failure-detection means responsive to said sensing and position detection means for detecting when suction engagement has occurred at said first opening but has not occurred at said second opening despite said engagement element having been transported toward said object a distance sufficient to enable said engagement, and control means responsive to said engagementfailure-detection means for providing a control signal to said transport means to rotate said engagement element to bring said second opening closer to said object.
Claim 2
Dependent Claim
226 words
Apparatus for transporting an object, said apparatus comprising an engagement element with a plurality of openings in a flat surface, a first said opening being on one side of an axis passing through said element, and a second said opening being on another side of said axis, suction means for providing a below-atmospheric pressure at said openings for the purpose of adhering said object to said engagement element, transport means for transporting said engagement element relative to said object to bring said openings close enough to a flat engagement surface of said object to enable suction engagement of said object at said openings, said transport means including means for rotating said engagement element about an axis parallel to said flat surface, position detection means for sensing the relative position of said object and said engagement element, sensing means for sensing suction engagement at said openings, and processing means including engagement-failure-detection means responsive to said sensing and position detection means for detecting when suction engagement has occurred at said first opening but has not occurred at said second opening despite said engagement element having been transported toward said object a distance sufficient to enable said engagement, and control means responsive to said engagementfailure-detection means for providing a control signal to said transport means to rotate said engagement element to bring said second opening closer to said object.
Claim 3
Dependent Claim
20 words
The apparatus of claim 1 wherein said transport means includes means for moving said engagement element along an engagement direction.
Claim 4
Dependent Claim
53 words
The apparatus of claim 2 wherein said control means includes means for causing said transport means to separate said element and object along said engagement direction after an initial failed attempt to obtain suction engagement and before rotating said engagement element and to make at least one further attempt to engage said object.
Claim 5
Dependent Claim
26 words
The apparatus of claim 3 wherein said means for causing includes means for making at least two further attempts to engage after said initial failed attempt.
Claim 6
Dependent Claim
148 words
The apparatus of claim 1 wherein said transport means includes means for moving said engagement element along an engagement direction, and said control means includes means for causing said transport means to separate said element and object along said engagement direction and make at least one further attempt to engage said object after an initial failed attempt at an initial orientation of said engagement element relative to said direction without changing the orientation, and, if still unsuccessful at engaging said object, to cause rotation of said engagement element in one direction to a new orientation and cause further attempts at engagement at the new orientation, and, if still unsuccessful in engaging said object, cause rotation of said engagement element in another direction and cause further attempts at engagement at this orientation, and, if still unsuccessful at engaging said object, provide an indication of failure to engage said object.
Claim 7
Dependent Claim
24 words
The apparatus of claim 1 wherein said sensing means comprises pressure sensors connected to vacuum lines connecting said suction opening to said suction means.
Claim 8
Dependent Claim
16 words
The apparatus of claim 1 wherein said transport means comprises a motor driving an object holder.
Claim 9
Dependent Claim
35 words
The apparatus of claim 7 wherein said transport means comprises a clutch operably connected between said motor and said object holder, and said position detection means comprises means detecting the position of said object holder.
Claim 10
Dependent Claim
58 words
The apparatus of claim 8 wherein said engagement-failure-detection means includes means to detect that said element has been transported toward said object a distance sufficient to enable engagement by detecting that said position sensor senses lack of movement of said object holder at the same time that said motor is operating, by detecting that said clutch is slipping.
Claim 11
Dependent Claim
54 words
The apparatus of claim 8 wherein said engagement-failure-detection means includes means to detect that said element has been transported toward said object a distance sufficient to enable engagement by said engagement element when it detects that said object holder has moved a given distance after there has been suction engagement at one said opening.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1989-08-04 | 1990-02-03 | 1990-08-05 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1993-08-04 | 1994-02-03 | 1994-08-05 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1997-08-04 | 1998-02-03 | 1998-08-05 | $7700.00 | Window Closed / Lapsed |