US3272350A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method and apparatus for semiconductor wafer handling
Assignee: Westinghouse Electric Corp
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Filing: 1964-09-25
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Granted: 1966-09-13
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Expires: 1984-09-25
Abstract
No abstract record available.
Inventors
- 👤 Peter E Pflaumer
- 👤 Patrick Theodore
- 👤 John W Philbrick
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 03:49
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/70; H10P72/78; Y; Y10; Y10S; Y10S414/00; Y10S414/135; Y10S414/137; Y10T; Y10T279/00; Y10T279/11
Claims Analysis
Total Claims: 2
Claim 1
Independent Claim
130 words
A WAFER CARRIER FOR RAPIDLY HANDLING A PLURALITY OF SEMICONDUCTOR WAGERS OR THELIKE WITHOUT BREAKAGE OR CONTAMINATION AND COMPRISING: A GENERALLY FLAT RIGID MEMBER HAVING OPPOSED MAJOR SURFACES AND AN EDGE SURFACE; A PLURALITY OF RECESSES IN ONE OF SAID MAJOR SURFACES FOR RECEIVING AND RETAINING A LIKE PLURALITY OF SEMICONDUCTOR WAFERS; A PLURALITY OF SLOTS THROUGH SAID MEMBES EACH EXTENDING FROM SAID EDGE TO AT LEAST ONE OF SAID RECESSES, SAID SLOTS BEING MUTUALLY PARALLEL FOR POSITIONING SAID MEMBER ABOUT A PLURALITY OF VACUUM CHUCKS SO SEMICONDUCTOR WAFERS CAN BE TRANSFERRED BETWEEN THE VACUUM CHUCKS AND THE RECESSES IN SAID MEMBER; SAID RECESSES BEING DISPOSED IN A PLURALITY OF ROWS AND EACH OF SAID SLOTS EXTENDING FROM SAID EDGE TO ONE OF SAID RECESSES IN EACH OF SAID ROWS.
Claim 2
Dependent Claim
130 words
A WAFER CARRIER FOR RAPIDLY HANDLING A PLURALITY OF SEMICONDUCTOR WAGERS OR THELIKE WITHOUT BREAKAGE OR CONTAMINATION AND COMPRISING: A GENERALLY FLAT RIGID MEMBER HAVING OPPOSED MAJOR SURFACES AND AN EDGE SURFACE; A PLURALITY OF RECESSES IN ONE OF SAID MAJOR SURFACES FOR RECEIVING AND RETAINING A LIKE PLURALITY OF SEMICONDUCTOR WAFERS; A PLURALITY OF SLOTS THROUGH SAID MEMBES EACH EXTENDING FROM SAID EDGE TO AT LEAST ONE OF SAID RECESSES, SAID SLOTS BEING MUTUALLY PARALLEL FOR POSITIONING SAID MEMBER ABOUT A PLURALITY OF VACUUM CHUCKS SO SEMICONDUCTOR WAFERS CAN BE TRANSFERRED BETWEEN THE VACUUM CHUCKS AND THE RECESSES IN SAID MEMBER; SAID RECESSES BEING DISPOSED IN A PLURALITY OF ROWS AND EACH OF SAID SLOTS EXTENDING FROM SAID EDGE TO ONE OF SAID RECESSES IN EACH OF SAID ROWS.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1969-09-12 | 1970-03-14 | 1970-09-13 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1973-09-12 | 1974-03-14 | 1974-09-13 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1977-09-12 | 1978-03-14 | 1978-09-13 | $7700.00 | Window Closed / Lapsed |