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EP0595071A1 Expired / Lapsed EP ⏱️ 0.0 years remaining

Wafer holding apparatus for holding a wafer

Assignee: Sumitomo Electric Industries Ltd
•
Filing: 1993-10-05
•
Granted: —
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Expires: 2013-10-05
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Abstract

Abstract A wafer holding apparatus for holding a wafer stationary includes a main body (10) and a plate member (11) detachably placed on the main body (10). The main body (10) includes a cavity (14) having an open end at the upper surface of the main body (10) and includes a passageway (15) extending from the cavity (14) to communicate the cavity (14) with a vacuum pump (16). The plate member (11) is placed on the main body (10) to plug the open end of the cavity (14) and supports on its upper surface a wafer (12) to be processed. The plate member (11) has a number of through bores (17) arranged in a predetermined arrangement matched for the arrangement of micromachined sections of the wafer (12) where micromachines (13) or integrated circuits are to be formed. Before processing of the wafer (12), the plate member (11) is selected for the wafer (12) in such a manner that the through bores (17) of the plate member are deviated from the micromachined sections of the wafer (12) where the micromachines (13) are to be formed. This results in the micromachined sections being protected from the suction force caused by the vacuum pump (4), thereby making it possible to enhance the productivity of the wafer (12).

Inventors

  • 👤 Minoru C/O Osaka Works Of Sumitomo Ueda

Bibliographic Details

Application Number —
Jurisdiction EP
Data Source google_patents
Last Synchronized 2026-11-07 13:24
CPC Classifications
B; B25; B25B; B25B11/00; B25B11/005; H; H10; H10P; H10P72/00; H10P72/70; H10P72/78

Claims Analysis

Total Claims: 3
Claim 1
Independent Claim 173 words
A wafer holding apparatus comprising: a main body (10) provided with a cavity (14) having an open end and formed with a passageway (15) held in communication with said cavity(14); a plate member(11) having a plurality of through bores (17) formed therein and detachably engaging with said main body (10) to plug said open end of said cavity (14), thereby forming a closed chamber, said plate member (11) having a first surface to be held in face-to-face contact with a wafer (12) and a second surface facing said cavity (14), and said through bores (17) being so arranged in said plate member (11) as to be closed by the portions of said wafer (12) when said wafer (12) is placed on said first surface of said plate member (11); and a vacuum pump (16) having a discharge port held in communication with said closed chamber through said passageway (15) to vacuumize said closed chamber through said passageway (15), thereby attracting said wafer (12) on said plate member (11) toward said vacuumized closed chamber.
Claim 2
Dependent Claim 37 words
A wafer holding apparatus as set forth in claim 1, wherein each of said through bores (17) of said plate member (11) is deviated from a portion of said wafer (12) processed on said plate member (11).
Claim 3
Dependent Claim 21 words
A wafer holding apparatus as set forth in claim 1, wherein said plate member (11) is constituted by a silicon wafer.

References Cited (Backward Citations)

DE2302897A1 Cited
JPS58168253A Cited
EP0433503A1 Cited

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