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US5963835A
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Method of forming aluminum film
Assignee: Micron Technology Inc
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Filing: 1997-11-25
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Granted: 1999-10-05
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Expires: 2017-11-25
Abstract
Abstract A method for depositing an aluminum film limits the growth of voids and notches in the aluminum film and forms and aluminum film with a reduced amount of voids and notches. The first step of the method is to form an underlying layer upon which is deposited an aluminum film having a first thickness. The surface of the aluminum film is then exposed to a passivation species which coats the aluminum grains and precipitates at the grain boundaries so as to prevent grain movement. The exposure of the aluminum film to the passivation species reduces void formation and coalescence of the voids. An aluminum layer having a second thickness is then deposited over the initially deposited aluminum layer. In a second embodiment of the invention, the passivation species is deposited with MOCVD and to form an electromigration-resistant alloy. A third embodiment involves multiple depositions of aluminum, with exposure to a passivation species conducted after each deposition. Each deposition is also conducted at a successively lower temperature than the prior deposition.
Inventors
- 👤 Gurtej S. Sandhu
- 👤 Ravi Iyer
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 03:58
CPC Classifications
H; H10; H10W; H10W20/00; H10W20/40; H10W20/41; H10W20/425; H10W20/01; H10W20/031; H10W20/032; H10W20/033; H10W20/036
Claims Analysis
Total Claims: 20
Claim 1
Independent Claim
99 words
A method of forming an aluminum film on a substrate assembly, the method comprising: forming a first layer of aluminum on a substrate assembly; exposing the first layer of aluminum to a species to achieve a surface passivation on a top surface of the first layer of aluminum, wherein the species is selected from the group consisting of O 2 , N 2 , TiCl 4 , TDMAT, SiH 4 , and GeH 4 , along with members of the halogen and interhalogen families of gases; and forming a second layer of aluminum over the first layer of aluminum.
Claim 2
Independent Claim
99 words
A method of forming an aluminum film on a substrate assembly, the method comprising: forming a first layer of aluminum on a substrate assembly; exposing the first layer of aluminum to a species to achieve a surface passivation on a top surface of the first layer of aluminum, wherein the species is selected from the group consisting of O 2 , N 2 , TiCl 4 , TDMAT, SiH 4 , and GeH 4 , along with members of the halogen and interhalogen families of gases; and forming a second layer of aluminum over the first layer of aluminum.
Claim 3
Dependent Claim
40 words
A method as recited in claim 1, wherein an underlying layer is formed on the substrate assembly prior to forming the first layer of aluminum on the substrate assembly, the first layer of aluminum being deposited on the underlying layer.
Claim 4
Dependent Claim
29 words
A method as recited in claim 1, wherein forming the first layer of aluminum on the substrate assembly comprises the use of a cold wall chemical vapor deposition process.
Claim 5
Dependent Claim
14 words
A method as recited in claim 2, wherein the underlying layer comprises titanium nitride.
Claim 6
Dependent Claim
51 words
A method as recited in claim 1, wherein exposing the first layer of aluminum to the species uses an MOCVD deposition process that forms an alloy at the top surface of the first layer of aluminum, the alloy having an electromigration resistance greater than that of the first layer of aluminum.
Claim 7
Dependent Claim
46 words
A method as recited in claim 1, wherein forming the second layer of aluminum over the first layer of aluminum comprises multiple aluminum deposition steps, each aluminum deposition step of the multiple aluminum deposition steps comprising a deposition of an aluminum layer having an upper surface.
Claim 8
Dependent Claim
69 words
A method as recited in claim 6, wherein the first aluminum deposition step of the multiple aluminum deposition steps is conducted at a lower temperature than the temperature at which the first layer of aluminum has been formed, and each subsequent aluminum deposition step of the multiple aluminum deposition steps is conducted at a lower temperature than the immediately preceding aluminum deposition step of the multiple aluminum deposition steps.
Claim 9
Dependent Claim
65 words
A method as recited in claim 6, wherein at least one aluminum layer that is deposited during the multiple aluminum deposition steps is exposed to a species in order to achieve surface passivation of the upper surface of the at least one aluminum layer such that a plurality of aluminum grains at the upper surface are immobilized, the species being deposited by an MOCVD process.
Claim 10
Independent Claim
154 words
A method of forming an aluminum film on a substrate assembly, the method comprising: forming an underlying layer over a semiconductor layer situated on a substrate assembly; depositing by a cold wall chemical vapor deposition process a first layer of aluminum over the underlying layer; depositing by an MOCVD process on the first layer of aluminum a species to achieve a surface passivation on a top surface of the first layer of aluminum and to form an alloy on the top surface of the first layer of aluminum, the alloy having an electromigration resistance greater than that of the first layer of aluminum, wherein the species is selected from the group consisting of O 2 , N 2 , TiCl 4 , TDMAT, SiH 4 , and GeH 4 , along with members of the halogen and interhalogen families of gases; and forming a second layer of aluminum over the first layer of aluminum.
Claim 11
Independent Claim
154 words
A method of forming an aluminum film on a substrate assembly, the method comprising: forming an underlying layer over a semiconductor layer situated on a substrate assembly; depositing by a cold wall chemical vapor deposition process a first layer of aluminum over the underlying layer; depositing by an MOCVD process on the first layer of aluminum a species to achieve a surface passivation on a top surface of the first layer of aluminum and to form an alloy on the top surface of the first layer of aluminum, the alloy having an electromigration resistance greater than that of the first layer of aluminum, wherein the species is selected from the group consisting of O 2 , N 2 , TiCl 4 , TDMAT, SiH 4 , and GeH 4 , along with members of the halogen and interhalogen families of gases; and forming a second layer of aluminum over the first layer of aluminum.
Claim 12
Dependent Claim
14 words
A method as recited in claim 9, wherein the underlying layer comprises titanium nitride.
Claim 13
Dependent Claim
28 words
A method as recited in claim 9, further comprising, prior to forming the underlying layer, forming a contact opening through at least a portion of the semiconductor layer.
Claim 14
Independent Claim
113 words
A method of forming an aluminum film having a first thickness on a substrate assembly, the method comprising: forming a first layer of aluminum on a substrate assembly, the first layer of aluminum having a second thickness in a range from about one third of the first thickness to about one half of the first thickness; exposing the first layer of aluminum to a species selected from the group consisting of O 2 , N 2 , TiCl 4 , TDMAT, SiH 4 , and GeH 4 , along with the members of the halogen and interhalogen families of gases; and forming a second layer of aluminum over the first layer of aluminum.
Claim 15
Independent Claim
113 words
A method of forming an aluminum film having a first thickness on a substrate assembly, the method comprising: forming a first layer of aluminum on a substrate assembly, the first layer of aluminum having a second thickness in a range from about one third of the first thickness to about one half of the first thickness; exposing the first layer of aluminum to a species selected from the group consisting of O 2 , N 2 , TiCl 4 , TDMAT, SiH 4 , and GeH 4 , along with the members of the halogen and interhalogen families of gases; and forming a second layer of aluminum over the first layer of aluminum.
Claim 16
Dependent Claim
42 words
A method as recited in claim 12, wherein forming the second layer of aluminum comprises conducting multiple aluminum deposition steps such that an aluminum layer having an upper surface is deposited in each aluminum deposition step of the multiple aluminum deposition steps.
Claim 17
Independent Claim
136 words
A method of forming an aluminum structure over a substrate assembly, the method comprising: forming a contact opening through a portion of a substrate assembly; forming a first layer of aluminum on the substrate assembly, a portion of the first layer of aluminum extending into the contact opening; exposing the first layer of aluminum to a species to achieve a surface passivation on a top surface of the first layer of aluminum, wherein the species is selected from the group consisting of O 2 , N 2 , TiCl 4 , TDMAT, SiH 4 , and GeH 4 , along with members of the halogen and interhalogen families of gases; and forming a second layer of aluminum over the first layer of aluminum, a portion of the second layer of aluminum extending into the contact opening.
Claim 18
Independent Claim
136 words
A method of forming an aluminum structure over a substrate assembly, the method comprising: forming a contact opening through a portion of a substrate assembly; forming a first layer of aluminum on the substrate assembly, a portion of the first layer of aluminum extending into the contact opening; exposing the first layer of aluminum to a species to achieve a surface passivation on a top surface of the first layer of aluminum, wherein the species is selected from the group consisting of O 2 , N 2 , TiCl 4 , TDMAT, SiH 4 , and GeH 4 , along with members of the halogen and interhalogen families of gases; and forming a second layer of aluminum over the first layer of aluminum, a portion of the second layer of aluminum extending into the contact opening.
Claim 19
Dependent Claim
48 words
A method as recited in claim 14, further comprising, prior to forming the first layer of aluminum, forming an underlying layer on the substrate assembly such that the first layer may be formed on the underlying layer, a portion of the underlying layer extending into the contact opening.
Claim 20
Dependent Claim
14 words
A method as recited in claim 15, wherein the underlying layer comprises titanium nitride.
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| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 2002-10-04 | 2003-04-05 | 2003-10-05 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2006-10-04 | 2007-04-05 | 2007-10-05 | $3760.00 | Window Closed / Lapsed |
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