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US5942328A
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Low dielectric constant amorphous fluorinated carbon and method of preparation
Assignee: GlobalFoundries Inc
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Filing: 1996-02-29
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Granted: 1999-08-24
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Expires: 2016-02-29
Abstract
Abstract An amorphous fluorinated carbon film for use as a dielectric insulating layer in electrical devices is formed from a fluorinated cyclic hydrocarbon precursor. The precursor may be selected from the group consisting of hexafluorobenzene, 1,2-diethynyltetrafluorobenzene and 1,4-bis(trifluoromethyl) benzene. The film is deposited by a radiation or beam assisted deposition technique such as an ion beam assisted deposition method, a laser assisted deposition method, or a plasma assisted chemical vapor deposition method. The film is thermally stable in non-oxidizing environment at temperatures up to 400° C. and has a low dielectric constant of less than 3.0. The film can be suitably used as an insulator for spacing apart conductors in an interconnect structure.
Inventors
- 👤 Alfred Grill
- 👤 Vishnubhai Vitthalbhai Patel
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 23:53
CPC Classifications
H; H10; H10P; H10P14/00; H10P14/60; H10P14/68; H10P14/683; H10P14/687; H10W; H10W20/00; H10W20/01; H10W20/071; H10P14/63; H10P14/6326; H10P14/6328; H10P14/6334; H10P14/6336; H10P14/69; H10P14/6902; H10W20/081; H10W20/084; Y; Y10; Y10T; Y10T428/00; Y10T428/24; Y10T428/24802; Y10T428/30; Y10T428/31504; Y10T428/31678
Claims Analysis
Total Claims: 16
Claim 1
Independent Claim
26 words
An amorphous fluorinated carbon film formed from a fluorinated cyclic hydrocarbon precursor comprising fluorine in a concentration range between about 22 and about 42 atomic percent.
Claim 2
Dependent Claim
26 words
An amorphous fluorinated carbon film formed from a fluorinated cyclic hydrocarbon precursor comprising fluorine in a concentration range between about 22 and about 42 atomic percent.
Claim 3
Dependent Claim
26 words
An amorphous fluorinated carbon film according to claim 1, wherein said fluorinated cyclic hydrocarbon is selected from the group consisting of hexafluorobenzene, 1,2-diethynyltetrafluorobenzene and 1,4-bis(trifluoromethyl) benzene.
Claim 4
Dependent Claim
22 words
An amorphous fluorinated carbon film according to claim 1, wherein said film is formed by a radiation or beam assisted deposition technique.
Claim 5
Dependent Claim
42 words
An amorphous fluorinated carbon film according to claim 1, wherein said film is formed by a technique selected from the group consisting of an ion beam assisted deposition technique, a laser assisted deposition technique and a plasma assisted chemical vapor deposition technique.
Claim 6
Dependent Claim
24 words
An amorphous fluorinated carbon film according to claim 1, wherein said film is thermally stable in non-oxidizing environment at temperatures up to 400° C.
Claim 7
Dependent Claim
20 words
An amorphous fluorinated carbon film according to claim 1, wherein said film has a dielectric constant of less than 3.0.
Claim 8
Dependent Claim
23 words
An amorphous fluorinated carbon film according to claim 1, wherein said film is used as an interconnect dielectric layer in an electronic device.
Claim 9
Dependent Claim
28 words
A cross linked amorphous fluorinated carbon film formed from a fluorinated cyclic hydrocarbon precursor comprising fluorine in a concentration range between about 22 and about 42 atomic percent.
Claim 10
Dependent Claim
28 words
A cross linked amorphous fluorinated carbon film formed from a fluorinated cyclic hydrocarbon precursor comprising fluorine in a concentration range between about 22 and about 42 atomic percent.
Claim 11
Dependent Claim
26 words
An amorphous fluorinated carbon film according to claim 8, wherein said fluorinated cyclic hydrocarbon is selected from the group consisting of hexafluorobenzene, 1,2-diethynyltetrafluorobenzene and 1,4-bis(trifluoromethyl) benzene.
Claim 12
Dependent Claim
22 words
An amorphous fluorinated carbon film according to claim 8, wherein said film is formed by a radiation or beam assisted deposition technique.
Claim 13
Dependent Claim
53 words
An amorphous fluorinated carbon film according to claim 8, wherein said film is formed by a technique selected from the group consisting of an ion beam assisted deposition technique, a laser assisted deposition technique and a plasma assisted chemical vapor deposition technique such as plasma enhanced chemical vapor deposition or high density plasma.
Claim 14
Dependent Claim
24 words
An amorphous fluorinated carbon film according to claim 8, wherein said film is thermally stable in non-oxidizing environment at temperatures up to 400° C.
Claim 15
Dependent Claim
20 words
An amorphous fluorinated carbon film according to claim 8, wherein said film has a dielectric constant of less than 3.0.
Claim 16
Dependent Claim
23 words
An amorphous fluorinated carbon film according to claim 8, wherein said film is used as an interconnect dielectric layer in an electronic device.
References Cited (Backward Citations)
US4634648A
Cited
US4851313A
Cited
US4847653A
Cited
US5000831A
Cited
US4994337A
Cited
US5256483A
Cited
US5162875A
Cited
US4959261A
Cited
US5073785A
Cited
US5198263A
Cited
US5599654A
Cited
US5631087A
Cited
US5525447A
Cited
US5601902A
Cited
US5559367A
Cited
US5512330A
Cited
US5462784A
Cited
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| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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