US5162875A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Protective layer for electroactive passivation layers
Assignee: Siemens AG
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Filing: 1990-02-01
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Granted: 1992-11-10
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Expires: 2010-02-01
Abstract
Abstract Hard, mechanically and chemically stable protective layers for electroactive passivation layers of semiconductor components, which also act as diffusion barriers against moisture and ions, comprise a thin layer of amorphous, hydrogenated carbon.
Inventors
- 👤 Siegfried Birkle
- 👤 Johann Kammermaier
- 👤 Gerhard Schmidt
- 👤 Rolf-W. Schulte
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 04:52
CPC Classifications
H; H10; H10W; H10W74/00; H10W74/40; C; C23; C23C; C23C16/00; C23C16/22; C23C16/26; H10W74/01; H10W74/481
Claims Analysis
Total Claims: 5
Claim 1
Independent Claim
44 words
A protective layer for an electroactive passivation layer of a semiconductor component comprising a thin layer of amorphous, hydrogenated carbon (a-C:H), wherein said protective layer has a defect concentration ≦10 17 cm -3 eV -1 and a specific electrical resistance ≧10 10 Ω cm.
Claim 2
Dependent Claim
44 words
A protective layer for an electroactive passivation layer of a semiconductor component comprising a thin layer of amorphous, hydrogenated carbon (a-C:H), wherein said protective layer has a defect concentration ≦10 17 cm -3 eV -1 and a specific electrical resistance ≧10 10 Ω cm.
Claim 3
Dependent Claim
20 words
The protective layer according to claim 1, wherein said protective layer has a thickness between approximately 0.05 and 3 μm.
Claim 4
Dependent Claim
16 words
The protective layer according to claim 1, wherein said electroactive passivation layer consists of amorphous silicon.
Claim 5
Dependent Claim
16 words
The protective layer according to claim 2, wherein said electroactive passivation layer consists of amorphous silicon.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1995-11-10 | 1996-05-11 | 1996-11-10 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1999-11-10 | 2000-05-11 | 2000-11-10 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2003-11-10 | 2004-05-11 | 2004-11-10 | $7700.00 | Window Closed / Lapsed |