Structure for capturing express transient liquid phase during diffusion bonding of planar devices

Abstract

Abstract A miniaturized planar device formed of first and second planar substrates that may be superimposed and diffusion bonded to form a single, planar integrated assembly. Each of the first and second planar substrates include respective component sections having respective first and second interior surfaces. One or more surface features in at least one of the first and second interior surfaces are thereby enclosed during assembly so as to form at least one corresponding internal fluid-handling feature, such as a conduit having a rectilinear, semicircular, or circular cross section. The perimeter of a surface feature is generally defined by a perimeter land which separates the surface feature from an adjacent moat. The superimposition of the first and second component sections establishes an interface between the abutted portions of the first and second interior surfaces; this interface is then subject to diffusion bonding. Diffusion bonding causes a transient liquid phase to be interposed in the interface; a flow of the transient liquid phase can correct the irregularities, asperities, or other undesired structural aspects in the abutted surfaces. Excess flow of the transient liquid phase tends to flow into the moat, wherein the excess flow may be contained, so as to thereby minimize or prevent undesirable flow of the transient liquid phase into an internal fluid-handling feature.

Inventors

• 👤 Stephen R. Craig

Bibliographic Details