US5236118A
Expired / Lapsed
US
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Aligned wafer bonding
Assignee: University of California
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Filing: 1992-05-12
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Granted: 1993-08-17
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Expires: 2012-05-12
Abstract
Abstract A process for precision alignment and bonding of complementary micromechanical, electrical and optical structures. Surface features of the structures are critically aligned and brought into physical contact within atomic dimensions to form direct bonds without the use of adhesives. The bonds are initially formed at room temperature and then strengthened by a high temperature anneal. Three dimensional structures may be formed in separate prefabricated layers rather than monolithically through the use of this process.
Inventors
- 👤 Robert W. Bower
- 👤 Mohd S. Ismail
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 04:36
CPC Classifications
H; H10; H10P; H10P10/00; H10P10/12; H10P10/128; H10D; H10D84/00; H10D84/01; H10D84/02; H10D84/03; H10D84/038; H10D88/00; H10D88/01; H10P90/00; H10P90/19; H10P90/1904; H10P90/1906; H10P90/1914; H10W; H10W10/00; H10W10/10; H10W10/181; H10W46/00; H10W46/301; H10W46/501
Claims Analysis
Total Claims: 26
Claim 1
Independent Claim
75 words
A process for bonding a surface feature of a semiconductor structure to a surface feature of a semiconductor, optical, or micromechanical structure, comprising the steps of: (a) aligning at least two complementary surface features of a plurality of structures having surface features to be bonded; (b) bringing said surface features into physical contact at room temperature whereby atomic bonds are formed between said surface features; and (c) annealing said structures to strengthen said atomic bonds.
Claim 2
Dependent Claim
75 words
A process for bonding a surface feature of a semiconductor structure to a surface feature of a semiconductor, optical, or micromechanical structure, comprising the steps of: (a) aligning at least two complementary surface features of a plurality of structures having surface features to be bonded; (b) bringing said surface features into physical contact at room temperature whereby atomic bonds are formed between said surface features; and (c) annealing said structures to strengthen said atomic bonds.
Claim 3
Dependent Claim
13 words
The process of claim 1, wherein said alignment is within approximately five micrometers.
Claim 4
Dependent Claim
28 words
The process of claim 1, further comprising the steps of repeating steps (a) through (c) for a plurality of structures to be bonded whereby multilayered structures are formed.
Claim 5
Dependent Claim
16 words
The process of claim 1, further comprising the steps (a) positioning said surfaces in close proximity;
Claim 6
Dependent Claim
47 words
The process of claim 1, wherein said structures are silicon wafers. (b) passing beams of infrared light through said structures and projecting an infrared image of said surfaces to a viewing screen; and (c) viewing said infrared image for rotational and translational alignment of said alignment marks.
Claim 7
Independent Claim
130 words
A method of directly bonding silicon based surface features of electrical, micromechanical and optical structures, comprising the steps of: (a) establishing a plurality of alignment marks on the surfaces of at least two structures having complementary silicon based surface features to be bonded; (b) positioning said surfaces to oppose each other in close proximity while said surface features lie in substantially the same plane; (c) passing beams of infrared light through said structures and projecting an infrared image of said surface features to a viewing screen; (d) viewing said infrared image and superimposing said alignment marks by bringing said alignment marks into rotational and transitional alignment; (e) bringing said surface features into physical contact whereby an atomic bond is formed; and (f) annealing said surface features to strengthen said bond.
Claim 8
Independent Claim
130 words
A method of directly bonding silicon based surface features of electrical, micromechanical and optical structures, comprising the steps of: (a) establishing a plurality of alignment marks on the surfaces of at least two structures having complementary silicon based surface features to be bonded; (b) positioning said surfaces to oppose each other in close proximity while said surface features lie in substantially the same plane; (c) passing beams of infrared light through said structures and projecting an infrared image of said surface features to a viewing screen; (d) viewing said infrared image and superimposing said alignment marks by bringing said alignment marks into rotational and transitional alignment; (e) bringing said surface features into physical contact whereby an atomic bond is formed; and (f) annealing said surface features to strengthen said bond.
Claim 9
Dependent Claim
18 words
The process of claim 6, wherein said alignment marks comprise a plurality of orthogonal anisotropically etched V-shaped grooves.
Claim 10
Dependent Claim
14 words
The process of claim 7, wherein said alignment marks are etched with potassium hydroxide.
Claim 11
Dependent Claim
15 words
The process of claim 6, further comprising the steps of cleaning and hydrating said surfaces.
Claim 12
Independent Claim
148 words
A method of fabricating a semiconductor device, comprising the steps of (a) establishing at least one alignment mark on the first surface of a first structure having first and second surfaces; (b) establishing at least one alignment mark on the first surface of a second structure having first and second surfaces; (c) positioning said first surfaces of said first and second structures to oppose each other in close proximity while said surfaces lie in substantially the same plane; (d) passing infrared light through said structures and projecting an infrared image of said first surfaces to a viewing screen; (e) viewing said infrared image and superimposing said alignment marks by bringing said alignment marks into rotational and transitional alignment; (e) bringing said first surfaces of said structures into physical contact whereby an atomic bond is formed between said surfaces; and (f) annealing said bonded surfaces to strengthen said bond.
Claim 13
Independent Claim
148 words
A method of fabricating a semiconductor device, comprising the steps of (a) establishing at least one alignment mark on the first surface of a first structure having first and second surfaces; (b) establishing at least one alignment mark on the first surface of a second structure having first and second surfaces; (c) positioning said first surfaces of said first and second structures to oppose each other in close proximity while said surfaces lie in substantially the same plane; (d) passing infrared light through said structures and projecting an infrared image of said first surfaces to a viewing screen; (e) viewing said infrared image and superimposing said alignment marks by bringing said alignment marks into rotational and transitional alignment; (e) bringing said first surfaces of said structures into physical contact whereby an atomic bond is formed between said surfaces; and (f) annealing said bonded surfaces to strengthen said bond.
Claim 14
Dependent Claim
16 words
The process of claim 10, wherein said first structure comprises a n-channel metal oxide semiconductor wafer.
Claim 15
Dependent Claim
16 words
The process of claim 11, wherein said second structure comprises a p-channel metal oxide semiconductor wafer.
Claim 16
Dependent Claim
37 words
The process of claim 10, wherein said first surface of said first structure includes a material selected from the group consisting of Si, SiO 2 , Si 3 N 4 , PtSi, TiSi 2 , and polysilicon.
Claim 17
Dependent Claim
38 words
The process recited in claim 12, wherein said first surface of said second structure includes a material selected from the group consisting of Si, SiO 2 , Si 3 N 4 , PtSi, TiSi 2 , and polysilicon.
Claim 18
Dependent Claim
15 words
The process recited in claim 13, wherein said second structure comprises an electrical insulating material.
Claim 19
Dependent Claim
48 words
The process recited in claim 12, further comprising the steps of: (a) etching an array of alignment marks into the first surface of a bipolar semiconductor structure having first and second surfaces; (b) bonding said bipolar semiconductor structure to at least one of said first and second structures.
Claim 20
Dependent Claim
13 words
The process recited in claim 10, wherein said first structure includes analog circuitry.
Claim 21
Dependent Claim
13 words
The process recited in claim 17, wherein said second structure includes digital circuitry.
Claim 22
Dependent Claim
14 words
The process recited in claim 10, wherein said first structure includes an npn transistor.
Claim 23
Dependent Claim
14 words
The process recited in claim 19, wherein said second structure includes a pnp transistor.
Claim 24
Dependent Claim
16 words
The process recited in claim 10, wherein said first structure is electrically coupled to a microsensor.
Claim 25
Dependent Claim
16 words
The process recited in claim 10, wherein said first structure is electrically coupled to a microactuator.
Claim 26
Dependent Claim
16 words
The process recited in claim 10, wherein said first structure is electrically coupled to a photosensor.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1996-08-16 | 1997-02-15 | 1997-08-17 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-08-16 | 2001-02-15 | 2001-08-17 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-08-16 | 2005-02-15 | 2005-08-17 | $7700.00 | Window Closed / Lapsed |